Furnace bottom heat preservation device for producing single crystal through Czochralski method

Abstract

The utility model discloses a furnace bottom heat preservation device for producing single crystals by a czochralski method, and particularly relates to the technical field of single crystal furnace heat preservation equipment, the furnace bottom heat preservation device comprises a lower fixing felt, a plurality of fixing holes are formed in the surface layer of the lower fixing felt, and two sides of the lower fixing felt are movably connected with locking mechanisms; the locking mechanism comprises two rotating stop blocks, rotating shafts are movably connected to the two sides of the lower fixing felt, rotating rings are fixedly connected to the outer sides of the two rotating shafts, arc-shaped clamping plates are fixedly connected to the other ends of the two rotating shafts, rotating handles are fixedly connected to one ends of the two rotating shafts, and clamping blocks are fixedly connected to the outer sides of the two rotating handles. Limiting columns are fixedly connected into the lower fixing felt. The locking mechanism is arranged, the two arc-shaped clamping plates are driven by the rotating handle to enable the lower fixing felt and the upper fixing felt to be rapidly fixed, the two clamping blocks are fixed with the two rotating check blocks after rotation is completed, the upper fixing felt and the multiple layers of soft felt in the middle are fixed more firmly, and the heat preservation efficiency of the furnace bottom heat preservation device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnace insulation equipment, and more specifically, to a furnace bottom insulation device for producing single crystals by a Czochralski method. Background Art

[0002] In the Czochralski method of producing single crystal silicon, the brief process is to first load the raw materials into the quartz crucible in the single crystal furnace, seal the furnace body and introduce argon gas, then use a dry pump to pump the gas in the single crystal furnace to the outside of the single crystal furnace, and use a heater to heat the material block to about 1400°C to melt it. After operations such as seeding, shoulder release, shoulder rotation, equal diameter, and finishing, the crystal growth process is completed, and finally the heater is turned off to stop the furnace and cool down.

[0003] Existing insulation felt and insulation tubes are generally fixed into a whole by bundling, so heat is dissipated through heat transfer, which reduces the thermal insulation of the thermal field, wastes a lot of heat energy, fails to insulate the temperature in the furnace, and increases the temperature gradient in the silicon liquid, affecting the normal growth of single crystal silicon.

[0004] In order to solve the above problems, the utility model patent with publication number CN215856445U discloses a heat preservation device for the production of single crystal silicon by the CZ process. The utility model can effectively keep the temperature in the furnace warm and reduce the temperature gradient in the silicon liquid, thus creating a good growth environment for single crystal growth.

[0005] However, when the above-mentioned insulation device is actually used, the soft felt on the top is close to the heat source, which makes the soft felt easy to oxidize and has a short life. The frequency of replacement increases, and multiple replacements may cause unstable connection, affecting the insulation effect. The solid felt used at the bottom is thick and has poor thermal insulation properties, which leads to increased power consumption of the single crystal furnace. Utility Model Content

[0006] In order to overcome the above defects of the prior art, the utility model provides a furnace bottom insulation device for producing single crystals by the Czochralski method to solve the problems raised in the above background technology.

[0007] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0008] A furnace bottom insulation device for producing single crystals by a Czochralski method, comprising a lower fixed felt, a surface layer of which is provided with a plurality of fixing holes, and two sides of which are movably connected with a locking mechanism;

[0009] The locking mechanism includes two rotating blocks, both sides of the lower solid felt are movably connected with rotating shafts, the outer sides of the two rotating shafts are fixedly connected with rotating rings, the other ends of the two rotating shafts are fixedly connected with arc-shaped clamping plates, one ends of the two rotating shafts are fixedly connected with rotating handles, the outer sides of the two rotating handles are fixedly connected with clamping blocks, the interior of the lower solid felt is fixedly connected with a limiting column, and the outer sides of the limiting column are movably connected with multiple soft felts.

[0010] By adopting the above technical scheme: multiple fixing holes are arranged on the surface of the lower solid felt, two rotating blocks are fixedly connected on both sides of the lower solid felt, two rotating shafts are movably connected on both sides of the lower solid felt, two rotating rings are fixedly connected on the outsides of the two rotating shafts, two arc-shaped clamping plates are fixedly connected at one end of the two rotating shafts, two rotating handles are fixedly connected at one end of the two rotating shafts, two clamping blocks are fixedly connected on the outsides of the two rotating handles, a limiting column is fixedly connected inside the lower solid felt, and multiple soft felts are movably connected on the outsides of the limiting columns.

[0011] As a further description of the above technical solution:

[0012] The top of the lower fixed felt is movably connected to the upper fixed felt, the top of the upper fixed felt is provided with a sliding groove, the interior of the upper fixed felt is movably connected to a plurality of springs, and the bottom ends of the plurality of springs are fixedly connected to protruding latch teeth.

[0013] By adopting the above technical solution: the upper fixed felt is movably connected to the top of the lower fixed felt, the sliding groove is set on the top of the upper fixed felt, multiple springs are movably connected inside the upper fixed felt, and the extended clamping teeth are fixedly connected to the bottom ends of the multiple springs.

[0014] As a further description of the above technical solution:

[0015] Locking blocks are arranged on both sides of the upper solid felt, and the two locking blocks are symmetrically distributed on both sides of the upper solid felt.

[0016] By adopting the above technical solution: locking blocks are arranged on both sides of the upper solid felt, and the two locking blocks are symmetrically distributed on both sides of the upper solid felt.

[0017] As a further description of the above technical solution:

[0018] The top of the upper fixed felt is movably connected with an outer heat insulation baffle, and the bottom of the outer heat insulation baffle is fixedly connected with a sliding ring.

[0019] By adopting the above technical solution: the outer heat insulation baffle is movably connected to the top of the upper fixed felt, and the sliding ring is fixedly connected to the bottom of the outer heat insulation baffle.

[0020] As a further description of the above technical solution:

[0021] Two handles are fixedly connected to the outer side of the outer heat insulation baffle, and the inner heat insulation baffle is movably connected to the inner heat insulation baffle.

[0022] By adopting the above technical solution: the two handles are fixedly connected on the outside of the outer heat insulation baffle, and the inner heat insulation baffle is movably connected inside the outer heat insulation baffle.

[0023] As a further description of the above technical solution:

[0024] The two rotating shafts are symmetrically distributed on both sides of the lower solid felt, and the plurality of soft felts are evenly distributed on the outer side of the limiting column.

[0025] By adopting the above technical solution: the two rotating shafts are symmetrically distributed on both sides of the lower solid felt, and the multiple soft felts are evenly distributed on the outside of the limiting column.

[0026] As a further description of the above technical solution:

[0027] A plurality of the springs are distributed in a circular array inside the upper solid felt, and a plurality of the protruding latch teeth are movably connected at the bottom of the upper solid felt.

[0028] By adopting the above technical solution: a plurality of springs are distributed in a circular array inside the upper solid felt, and a plurality of protruding latch teeth are movably connected at the bottom of the upper solid felt.

[0029] Technical effects and advantages of the utility model:

[0030] 1. By setting a locking mechanism, compared with the prior art, the two arc-shaped clamping plates, driven by the rotating handle, quickly fix the lower fixed felt and the upper fixed felt. After the rotation is completed, the two clamping blocks are fixed with the two rotating blocks, so that the upper fixed felt and the middle multi-layer soft felt are more tightly fixed, thereby improving the insulation efficiency of the furnace bottom insulation device;

[0031] 2. By setting springs, protruding latches, external heat insulation baffles, sliding rings, handles and internal heat insulation baffles, compared with the prior art, multiple protruding latches allow the lower solid felt and the upper solid felt to overlap quickly during assembly, and the external heat insulation baffle and the internal heat insulation baffle can wrap around the bottom of the single crystal furnace to adjust the insulation effect to a certain extent. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0033] Figure 2 It is a schematic diagram of the top structure of the utility model.

[0034] Figure 3 It is a schematic diagram of the structure of the external heat insulation baffle of the utility model.

[0035] Figure 4 It is a schematic diagram of the cross-sectional structure of the upper fixed felt of the utility model.

[0036] Figure 5It is a schematic diagram of the lower fixed felt structure of the utility model.

[0037] Figure 6 It is a schematic diagram of the rotating shaft structure of the utility model.

[0038] The accompanying drawings are marked as follows: 1. lower fixed felt; 2. fixing hole; 3. rotating block; 4. rotating shaft; 5. rotating ring; 6. arc-shaped clamping plate; 7. rotating handle; 8. clamping block; 9. limiting column; 10. soft felt; 11. upper fixed felt; 12. sliding groove; 13. spring; 14. extending clamping tooth; 15. locking block; 16. outer insulation baffle; 17. sliding ring; 18. handle; 19. inner insulation baffle. DETAILED DESCRIPTION

[0039] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0040] The embodiment of the present application discloses a furnace bottom insulation device for producing single crystals by a Czochralski method, specifically comprising a lower fixing felt 1, a surface layer of the lower fixing felt 1 is provided with a plurality of fixing holes 2, and locking mechanisms are movably connected on both sides of the lower fixing felt 1;

[0041] The locking mechanism includes two rotating blocks 3, rotating shafts 4 are movably connected on both sides of the lower solid felt 1, rotating rings 5 ​​are fixedly connected to the outer sides of the two rotating shafts 4, arc-shaped clamping plates 6 are fixedly connected to the other ends of the two rotating shafts 4, rotating handles 7 are fixedly connected to one end of the two rotating shafts 4, clamping blocks 8 are fixedly connected to the outer sides of the two rotating handles 7, limiting columns 9 are fixedly connected inside the lower solid felt 1, and multiple soft felts 10 are movably connected to the outer sides of the limiting columns 9. When the rotating handle 7 is rotated, the two arc-shaped clamping plates 6 fix the locking blocks 15 inside the arc-shaped clamping plates 6.

[0042] Reference Figure 3 As shown, specifically, the top of the upper solid felt 11 is movably connected to an outer insulation baffle 16, the bottom of the outer insulation baffle 16 is fixedly connected to a sliding ring 17, the outer side of the outer insulation baffle 16 is fixedly connected to two handles 18, the inner side of the outer insulation baffle 16 is movably connected to an inner insulation baffle 19, and the opening between the inner insulation baffle and the outer insulation baffle can be adjusted to adjust the insulation effect of the single crystal furnace.

[0043] Reference Figure 4As shown, specifically, the top of the lower fixed felt 1 is movably connected to the upper fixed felt 11, the top of the upper fixed felt 11 is provided with a sliding groove 12, the upper fixed felt 11 is movably connected with multiple springs 13 inside, the bottom ends of the multiple springs 13 are fixedly connected with protruding teeth 14, and locking blocks 15 are provided on both sides of the upper fixed felt 11. The two locking blocks 15 are symmetrically distributed on both sides of the upper fixed felt 11, so that the upper fixed felt 11 can be quickly aligned with the lower fixed felt 1 for easy fixation.

[0044] Reference Figure 5 As shown, specifically, the surface of the lower solid felt 1 is provided with a plurality of fixing holes 2, the interior of the lower solid felt 1 is fixedly connected with a limiting column 9, and the outer side of the limiting column 9 is movably connected with a plurality of soft felts 10, so as to improve the heat preservation effect on the bottom of the single crystal furnace.

[0045] Reference Figure 6 As shown, specifically, both sides of the lower solid felt 1 are movably connected with rotating shafts 4, the outer sides of the two rotating shafts 4 are fixedly connected with rotating rings 5, the other ends of the two rotating shafts 4 are fixedly connected with arc-shaped clamping plates 6, one ends of the two rotating shafts 4 are fixedly connected with rotating handles 7, and the outer sides of the two rotating handles 7 are fixedly connected with clamping blocks 8, which can quickly fix the lower solid felt 1 and the upper solid felt 11, so that the soft felt 10 can be kept tightly fitted inside the lower solid felt 1 and the upper solid felt 11.

[0046] Working principle of the utility model: when the bottom of the single crystal furnace is insulated during use, a plurality of soft felts 10 are first placed on the limiting columns 9 on the top of the lower solid felt 1 in sequence, so that the plurality of soft felts 10 can be kept flat inside the lower solid felt 1, and then the upper solid felt 11 is placed on the top of the lower solid felt 1, and the plurality of protruding teeth 14 at the bottom of the upper solid felt 11 are aligned with the plurality of fixing holes 2 at the top of the lower solid felt 1, so that the plurality of protruding teeth 14 are pushed by the corresponding springs 13, so that the plurality of protruding teeth 14 and the fixing holes 2 are plugged, and then the two rotating handles 7 on both sides of the lower solid felt 1 are rotated, and the two rotating handles 7 drive the two rotating shafts 4 and the rotating ring 5 rotate inside the lower solid felt 1, and the two arc-shaped clamping plates 6 are overlapped with the two locking blocks 15 on both sides of the upper solid felt 11 under the drive of the rotating handle 7, so that the lower solid felt 1 and the upper solid felt 11 are fixed and fitted, so that the lower solid felt 1, multiple soft felts 10 and the upper solid felt 11 can be tightly fixed, and the insulation effect of the single crystal furnace is improved. Then, the two handles 18 are rotated to drive the outer insulation baffle 16 and the sliding ring 17 at the bottom to rotate inside the sliding groove 12 at the top of the upper solid felt 11, so that the openings of the outer insulation baffle 16 and the inner insulation baffle 19 are overlapped, so that the insulation device can effectively control the insulation effect of the single crystal furnace.

[0047] The contents not described in detail in the specification belong to the prior art known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited and can be determined using conventional equipment. In this technical solution, the electrical control components not mentioned are not shown in the figure because they belong to the prior art and will not be described here.

[0048] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A furnace bottom insulation device for producing single crystals by Czochralski method, comprising a lower solid felt (1), characterized in that: The surface layer of the lower fixing felt (1) is provided with a plurality of fixing holes (2), and locking mechanisms are movably connected on both sides of the lower fixing felt (1); The locking mechanism comprises two rotating blocks (3), both sides of the lower fixed felt (1) are movably connected with rotating shafts (4), the outer sides of the two rotating shafts (4) are fixedly connected with rotating rings (5), the other ends of the two rotating shafts (4) are fixedly connected with arc-shaped clamping plates (6), one ends of the two rotating shafts (4) are fixedly connected with rotating handles (7), the outer sides of the two rotating handles (7) are fixedly connected with clamping blocks (8), the interior of the lower fixed felt (1) is fixedly connected with a limiting column (9), and the outer sides of the limiting column (9) are movably connected with a plurality of soft felts (10).

2. The furnace bottom insulation device for producing single crystals by the Czochralski method according to claim 1, characterized in that: The top of the lower fixed felt (1) is movably connected to the upper fixed felt (11), the top of the upper fixed felt (11) is provided with a sliding groove (12), the interior of the upper fixed felt (11) is movably connected to a plurality of springs (13), and the bottom ends of the plurality of springs (13) are all fixedly connected to protruding latch teeth (14).

3. The furnace bottom insulation device for producing single crystals by the Czochralski method according to claim 2 is characterized in that: Locking blocks (15) are provided on both sides of the upper fixed felt (11), and the two locking blocks (15) are symmetrically distributed on both sides of the upper fixed felt (11).

4. The furnace bottom insulation device for producing single crystals by Czochralski method according to claim 2, characterized in that: The top of the upper fixed felt (11) is movably connected to an outer heat insulation baffle (16), and the bottom of the outer heat insulation baffle (16) is fixedly connected to a sliding ring (17).

5. The furnace bottom insulation device for producing single crystals by Czochralski method according to claim 4, characterized in that: Two handles (18) are fixedly connected to the outside of the outer heat insulation baffle (16), and an inner heat insulation baffle (19) is movably connected to the inside of the outer heat insulation baffle (16).

6. The furnace bottom insulation device for producing single crystals by Czochralski method according to claim 1, characterized in that: The two rotating shafts (4) are symmetrically distributed on both sides of the lower solid felt (1), and the plurality of soft felts (10) are evenly distributed outside the limiting column (9).

7. The furnace bottom insulation device for producing single crystals by Czochralski method according to claim 2, characterized in that: The plurality of springs (13) are distributed in a circular array inside the upper fixed felt (11), and the plurality of protruding latch teeth (14) are movably connected at the bottom of the upper fixed felt (11).

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