Improved gas collecting ring of LED epitaxial furnace

Abstract

The utility model belongs to the technical field of epitaxial furnaces, and particularly relates to an improved gas collecting ring of an LED epitaxial furnace, which comprises a gas collecting ring body, a plurality of first exhaust holes and second exhaust holes are arranged on the gas collecting ring body in a surrounding manner, the first exhaust holes and the second exhaust holes are arranged at equal intervals, and the gas collecting ring body comprises a base layer. The two sides of the base layer are fixedly connected with anti-folding layers, the sides, away from the base layer, of the anti-folding layers are fixedly connected with high-temperature-resistant layers, and the sides, away from the anti-folding layers, of the high-temperature-resistant layers are fixedly connected with wear-resistant layers. Through the arrangement of the first exhaust holes and the second exhaust holes, the gas displacement of the gas collecting ring can be effectively improved, so that the gas collecting ring can exhaust gas timely and quickly, and the using effect of the gas collecting ring is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of epitaxial furnaces, in particular to an improved gas collecting ring of an LED epitaxial furnace. Background Art

[0002] With the rapid development of the LED industry, the precision requirements of chips are getting higher and higher. In the LED production process, the epitaxial furnace is a very critical link. The gas collecting ring is an important component in the epitaxial furnace, with special materials, high processing precision and long processing cycle.

[0003] The gas collecting ring is in a vacuum environment, with a temperature reaching over 1200 degrees. At such a high temperature, special gas is introduced to form a film on the sapphire, and a film will also form on the edge of the cavity. Too much film will affect the quality of the product, so the exhaust volume must be increased, and the uniformity of the gas is very high. The installation position must be very compact.

[0004] However, the existing epitaxial furnace gas collecting ring has a small number of exhaust holes, which makes it impossible to exhaust gas in a timely and rapid manner, thus affecting the use effect of the gas collecting ring. Utility Model Content

[0005] The utility model aims to solve the problem in the background technology that the number of exhaust holes on the gas collecting ring of the epitaxial furnace is small and the exhaust cannot be carried out quickly and timely, and proposes an improved gas collecting ring for an LED epitaxial furnace.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] An improved gas collecting ring for an LED epitaxial furnace comprises a gas collecting ring body, on which a plurality of first exhaust holes and second exhaust holes are arranged in a circle, and the plurality of first exhaust holes and second exhaust holes are arranged equidistantly, the gas collecting ring body comprises a base layer, both sides of the base layer are fixedly connected with an anti-folding layer, a side of the anti-folding layer away from the base layer is fixedly connected with a high-temperature resistant layer, and a side of the high-temperature resistant layer away from the anti-folding layer is fixedly connected with a wear-resistant layer.

[0008] Preferably, a plurality of fixing holes are arranged around the gas collecting ring body.

[0009] Preferably, an annular groove is provided on one side of the gas collecting ring body.

[0010] Preferably, the anti-folding layer is a carbon fiber composite material layer.

[0011] Preferably, the high temperature resistant layer is a sandy coating.

[0012] Preferably, the wear-resistant layer is a tungsten-cobalt alloy layer.

[0013] Compared with the prior art, the utility model has the following beneficial effects:

[0014] 1. In the utility model, the exhaust volume of the gas collecting ring can be effectively increased by setting a plurality of first exhaust holes and second exhaust holes, so that the gas collecting ring can be exhausted promptly and quickly, thereby effectively improving the use effect of the gas collecting ring;

[0015] 2. In the utility model, the anti-bending layer is provided to effectively improve the anti-bending ability of the gas collecting ring. At the same time, the high-temperature resistant layer is provided to improve the high-temperature resistance of the gas collecting ring. The wear-resistant layer is provided to improve the wear resistance of the gas collecting ring. The annular groove can reduce the weight of the gas collecting ring. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the structure of an improved gas collecting ring for an LED epitaxial furnace proposed by the utility model;

[0017] Figure 2 This is a schematic diagram of the upward structure of an improved gas collecting ring of an LED epitaxial furnace proposed by the utility model;

[0018] Figure 3 This is a schematic diagram of the internal structure of an improved gas collecting ring of an LED epitaxial furnace proposed by the utility model.

[0019] In the figure: 1 gas collecting ring body, 101 base layer, 102 anti-bending layer, 103 high temperature resistant layer, 104 wear-resistant layer, 2 first exhaust hole, 3 second exhaust hole, 4 fixing hole, 5 annular groove. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0021] Reference Figure 1-2 An improved gas collecting ring for an LED epitaxial furnace comprises a gas collecting ring body 1, a plurality of fixing holes 4 are arranged around the gas collecting ring body 1, and a ring groove 5 is arranged on one side of the gas collecting ring body 1, so as to reduce the weight of the gas collecting ring body 1;

[0022] In this embodiment, a plurality of first exhaust holes 2 and second exhaust holes 3 are arranged around the gas collecting ring body 1, and the plurality of first exhaust holes 2 and second exhaust holes 3 are arranged at equal distances to increase the exhaust volume of the gas collecting ring;

[0023] In this embodiment, the gas collecting ring body 1 includes a base layer 101, and both sides of the base layer 101 are fixedly connected with an anti-folding layer 102, the anti-folding layer 102 is a carbon fiber composite material layer, which improves the anti-folding ability of the gas collecting ring, and the side of the anti-folding layer 102 away from the base layer 101 is fixedly connected with a high-temperature resistant layer 103, the high-temperature resistant layer 103 is a sandy coating, which improves the high-temperature resistance of the gas collecting ring;

[0024] In this embodiment, a wear-resistant layer 104 is fixedly connected to one side of the high temperature resistant layer 103 away from the anti-bending layer 102 . The wear-resistant layer 104 is a tungsten-cobalt alloy layer, which improves the wear resistance of the gas collecting ring.

[0025] In this embodiment, by providing a plurality of first exhaust holes 2 and second exhaust holes 3, the exhaust volume of the air collecting ring can be effectively increased, so that the air collecting ring can be exhausted promptly and quickly, thereby effectively improving the use effect of the air collecting ring.

[0026] In this embodiment, the anti-bending layer 102 is provided to effectively improve the anti-bending ability of the gas collecting ring. Meanwhile, the high temperature resistant layer 103 is provided to improve the high temperature resistance of the gas collecting ring. The wear resistant layer 104 is provided to improve the wear resistance of the gas collecting ring. The annular groove 5 can reduce the weight of the gas collecting ring.

[0027] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. An improved gas collecting ring for an LED epitaxial furnace, comprising a gas collecting ring body (1), characterized in that: The gas collecting ring body (1) is surrounded by a plurality of first exhaust holes (2) and second exhaust holes (3), and the plurality of first exhaust holes (2) and second exhaust holes (3) are arranged at equal distances. The gas collecting ring body (1) comprises a base layer (101), both sides of the base layer (101) are fixedly connected with an anti-folding layer (102), a side of the anti-folding layer (102) away from the base layer (101) is fixedly connected with a high-temperature resistant layer (103), and a side of the high-temperature resistant layer (103) away from the anti-folding layer (102) is fixedly connected with a wear-resistant layer (104).

2. The improved gas collecting ring of LED epitaxial furnace according to claim 1, characterized in that: The gas collecting ring body (1) is surrounded by a plurality of fixing holes (4).

3. The improved gas collecting ring of LED epitaxial furnace according to claim 1, characterized in that: An annular groove (5) is provided on one side of the gas collecting ring body (1).

4. The improved gas collecting ring of LED epitaxial furnace according to claim 1, characterized in that: The anti-folding layer (102) is a carbon fiber composite material layer.

5. The improved gas collecting ring of LED epitaxial furnace according to claim 1, characterized in that: The high temperature resistant layer (103) is a sandy coating.

6. The improved gas collecting ring of LED epitaxial furnace according to claim 1, characterized in that: The wear-resistant layer (104) is a tungsten-cobalt alloy layer.

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