Light detection device for glass passivation layer

Abstract

The utility model relates to a light detection device for a glass passivation layer, which belongs to the technical field of chip detection and comprises a base and a light detection mechanism, a conveying belt is arranged on the base, a detection box is arranged above the conveying belt in a crossing manner, a display screen is arranged on the detection box, the light detection mechanism is arranged in the detection box, and the display screen is arranged on the light detection mechanism. The light detection mechanism comprises a light source module and a light detector module, the light detector module is in communication connection with the display screen, the light source module and the light detector module are arranged on the two sides of the detection box respectively, an electric sliding table is transversely arranged in the detection box, and the light source module is fixed to the movable end of the electric sliding table. The light detection mechanism is arranged in the chip glass passivation layer detection device, the chip glass passivation layer is scanned and imaged to judge whether the surface of the glass passivation layer is scratched or stained, and the chip glass passivation layer detection device is high in detection accuracy, high in detection efficiency and high in practicability.

Description

Technical Field

[0001] The utility model belongs to the technical field of chip detection, and specifically relates to a light detection device for a glass passivation layer. Background Art

[0002] During the wafer production process, wafer fabs will eventually cover non-bumping packaged products with a passivation layer made of silicon dioxide. The passivation layer can effectively isolate moisture and provide physical protection for the chip. If the passivation layer has defects, it will not provide effective protection and provide a potential channel for moisture to enter the chip. Currently, the color of the passivation layer is mainly observed by manual visual inspection to see if there are abnormal scratches, stains, or foreign particles. This method is inefficient and has low detection accuracy. To this end, we propose a light detection device for the glass passivation layer. Utility Model Content

[0003] In order to solve the above problems, the technical solution adopted by the utility model is:

[0004] A light detection device for a glass passivation layer comprises a base and a light detection mechanism, wherein a conveyor belt is arranged on the base, a detection box is arranged across the conveyor belt, a display screen is arranged on the detection box, and the light detection mechanism is arranged in the detection box. The light detection mechanism comprises a light source module and a light detector module, the light detector module is communicatively connected with the display screen, the light source module and the light detector module are respectively arranged on both sides of the detection box, an electric slide is arranged horizontally in the detection box, and the light source module is fixed on the movable end of the electric slide.

[0005] According to the above technical solution, it is further preferred that a flat groove is provided on the conveyor belt, and a light-isolating layer is coated on the bottom of the flat groove.

[0006] Preferably, the light-isolating layer is a coating of an aluminum oxide ceramic material.

[0007] Preferably, the conveyor belt is a plastic conveyor belt, and the two ends of the conveyor belt are respectively mounted on rotating shafts rotatably arranged at the two ends of the base. A driving motor is fixedly arranged on the front side panel at the left end of the base, and the motor shaft of the driving motor is connected to the rotating shaft coupling at the left end of the base.

[0008] Preferably, the drive motor is a servo motor.

[0009] Preferably, the light source module is a nano laser generator.

[0010] Preferably, a control panel is provided on one side of the base, and the control panel is electrically connected to the display screen, the light source module and the electric slide respectively.

[0011] Preferably, the detection box body is made of aluminum alloy.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] The utility model provides a light detection device for a glass passivation layer. The utility model is provided with a light detection mechanism, which is used to judge whether there are scratches or stains on the surface of the glass passivation layer by scanning and imaging the chip glass passivation layer. The utility model has high detection accuracy, high detection efficiency and strong practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the structure of the utility model device;

[0015] Figure 2 This is a schematic diagram of the internal structure of the detection box of the utility model device;

[0016] Figure 3 It is a schematic diagram of the conveyor belt structure of the utility model device.

[0017] In the figure: 1. base, 2. light detection mechanism, 3. conveyor belt, 4. detection box, 5. display screen, 6. light source module, 7. light detector module, 8. electric slide, 9. flat groove, 10. light isolation layer, 11. drive motor, 12. control panel. DETAILED DESCRIPTION

[0018] The utility model is further described in detail below in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments. All other embodiments obtained by ordinary technicians in this field without making creative work are within the protection scope of the utility model.

[0019] like Figure 1 to Figure 3As shown, the utility model provides an embodiment of a light detection device for a glass passivation layer, including a base 1 and a light detection mechanism 2. A conveyor belt 3 is provided on the base 1. The conveyor belt 3 is used to convey the produced chips. The produced chips pass through the light detection mechanism 2 to detect whether the glass passivation layer on the surface of the chip has defects such as cracks, scratches, and oil stains. A detection box 4 is arranged across the conveyor belt 3. A display screen 5 is arranged on the detection box 4. The light detection mechanism 2 is arranged in the detection box 4. The light detection mechanism 2 includes a light source module 6 and a light detector module 7. The light source module 6 is a nano laser generator. The light source module 6 is used to emit a nano laser beam. The laser beam irradiates the passivation glass layer on the surface of the chip. The passivation glass layer reflects the laser beam to the light detector module 7. The light detector module 7 converts the received laser beam photon signal into an electrical signal. After the electrical signal is filtered and amplified, it is input to the image processing module. The image processing module generates an image according to the received photoelectric signal, and then displays the generated image on the display screen 5. If there are defects such as cracks or scratches on the surface of the chip glass passivation layer, the image generated after detection by the light detection mechanism is a discontinuous regular pattern, which can be judged as a crack or scratch defect. The utility model has high detection accuracy, high detection efficiency, and strong practicality.

[0020] The light detector module 7 is in communication connection with the display screen 5 , the light source module 6 and the light detector module 7 are respectively arranged on both sides of the detection box 4 , an electric slide 8 is transversely arranged in the detection box 4 , and the light source module 6 is fixed on the movable end of the electric slide 8 .

[0021] The conveyor belt 3 is provided with a flat groove 9, and the bottom of the flat groove 9 is coated with a light-isolating layer 10. In the embodiment of the utility model, the conveyor belt 3 is provided with a flat groove 9, and the flat groove 9 is used to position and limit the conveyed chip. The chip is placed in the flat groove 9 during the conveying process. In the embodiment of the utility model, the flat groove 9 is a square flat groove, and a light-isolating layer 10 is coated on the bottom of the flat groove to reduce light transmittance, so that the light detection mechanism can reduce light transmittance when irradiating the chip glass passivation layer, and reflect the light beam generated by the light detection mechanism to the light detector module.

[0022] The light-isolating layer 10 is a coating of alumina ceramic material. Alumina ceramic has a good blocking effect on lasers, so alumina ceramic is used as the light-isolating material at the bottom of the conveyor belt 3 .

[0023] The conveyor belt 3 is a plastic conveyor belt, and both ends of the conveyor belt 3 are respectively sleeved on the rotating shafts rotatably arranged at both ends of the base 1. A driving motor 11 is fixedly arranged on the front side panel at the left end of the base 1, and the motor shaft of the driving motor 11 is connected to the rotating shaft coupling at the left end of the base 1.

[0024] The driving motor 11 is a servo motor.

[0025] A control panel 12 is disposed on one side of the base 1 , and the control panel 12 is electrically connected to the display screen 5 , the light source module 6 , and the electric slide 8 , respectively.

[0026] The body of the detection box 4 is made of aluminum alloy, which has a very strong structural strength. The shell of the aluminum alloy has a good light-isolating effect on lasers.

[0027] The working principle of this embodiment: The conveyor belt driven by the driving motor on the base can realize the transmission of the chip to be detected. When the chip wafer is transmitted from right to left, it passes through the detection box in turn. The light detection mechanism in the detection box starts the detection. The light source module emits a laser beam, which irradiates the glass passivation layer on the surface of the chip, and reflects the structured beam to the light detector module. The light detector module performs photoelectric conversion on the optical signal. The converted electrical signal passes through the image processing system and displays the passivation layer image on the display module. The light detection mechanism in the detection box is set on an electric slide, which can move horizontally to detect the passivation layer on the chip surface from multiple angles.

[0028] Of course, the above embodiments are not intended to limit the present invention, and the present invention is not limited to the above examples. Any changes, modifications, additions or substitutions made by technicians in this technical field within the essential scope of the present invention should also fall within the protection scope of the present invention.

Claims

1. A light detection device for a glass passivation layer, comprising a base (1) and a light detection mechanism (2), characterized in that: A conveyor belt (3) is arranged on the base (1), a detection box (4) is arranged across the conveyor belt (3), a display screen (5) is arranged on the detection box (4), the light detection mechanism (2) is arranged in the detection box (4), the light detection mechanism (2) comprises a light source module (6) and a light detector module (7), the light detector module (7) is communicatively connected with the display screen (5), the light source module (6) and the light detector module (7) are respectively arranged on two sides of the detection box (4), an electric slide (8) is arranged horizontally in the detection box (4), and the light source module (6) is fixed on the movable end of the electric slide (8).

2. The optical detection device of a glass passivation layer according to claim 1, characterized in that: A flat groove (9) is provided on the conveyor belt (3), and a light-isolating layer (10) is coated on the bottom of the flat groove (9).

3. The optical detection device of a glass passivation layer according to claim 2, characterized in that: The light-isolating layer (10) is a coating of an aluminum oxide ceramic material.

4. The optical detection device of a glass passivation layer according to claim 1, characterized in that: The conveyor belt (3) is a plastic conveyor belt. The two ends of the conveyor belt (3) are respectively sleeved on the rotating shafts rotatably arranged at the two ends of the base (1). A driving motor (11) is fixedly arranged on the front side panel at the left end of the base (1). The motor shaft of the driving motor (11) is connected to the rotating shaft coupling at the left end of the base (1).

5. The optical detection device of a glass passivation layer according to claim 4, characterized in that: The driving motor (11) is a servo motor.

6. The optical detection device of a glass passivation layer according to claim 1, characterized in that: The light source module (6) is a nano laser generator.

7. The optical detection device of a glass passivation layer according to claim 1, characterized in that: A control panel (12) is provided on one side of the base (1), and the control panel (12) is electrically connected to the display screen (5), the light source module (6), and the electric slide (8) respectively.

8. The optical detection device of a glass passivation layer according to claim 1, characterized in that: The body material of the detection box (4) is aluminum alloy.

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