Wafer bracket

Abstract

The utility model discloses a wafer bracket, which comprises a fixed base, a lifting assembly, a support frame, a device shell, a clamping assembly and a wafer, the lifting assembly is located at the top end of the fixed base, the supporting frame is located at the top end of the lifting assembly, the device shell is rotationally connected to the inner side of the supporting frame, the device shell rotates in the supporting frame and has a damping sense, the clamping assembly is located on the inner side of the device shell, and the wafer is located on the inner side of the clamping assembly. Compared with the prior art, the wafer clamping device has the advantages that the fixed height can be adjusted, wafers of different sizes can be clamped, the wafers can be protected during clamping, and the wafers are prevented from being damaged due to the fact that the clamping force is too large.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to a wafer bracket. Background Art

[0002] A wafer holder is a device used to support and position wafers (the basic material for semiconductor chip manufacturing). In the semiconductor manufacturing process, the wafer holder plays a vital role. It not only needs to ensure the flatness and stability of the wafer, but also adapt to high-precision processing requirements.

[0003] However, the patents under the existing technology have the following disadvantages:

[0004] (1) The existing utility model wafer holder cannot adjust the clamping height according to the height of the processing tool and the height of the operator, and lacks adjustability.

[0005] (2) The existing utility model wafer holder can only clamp wafers of fixed sizes, but cannot clamp wafers of different sizes. Moreover, during clamping, the clamping force of the chuck cannot be buffered, which can easily cause clamping damage to the wafer. Utility Model Content

[0006] The technical problem to be solved by the utility model is to overcome the above technical defects and provide a wafer holder which can adjust the fixed height, can clamp wafers of different sizes, can protect the wafers when clamping, and prevent the wafers from being damaged by excessive holding force.

[0007] In order to solve the above problems, the technical solution of the utility model is: a wafer holder, comprising: a fixed base, a lifting assembly, a support frame, a device housing, a clamping assembly and a wafer; the lifting assembly is located at the top of the fixed base, the support frame is located at the top of the lifting assembly, the device housing is rotatably connected to the inner side of the support frame, the device housing rotates in the support frame with a damping feeling, the clamping assembly is located on the inner side of the device housing, and the wafer is located on the inner side of the clamping assembly.

[0008] Furthermore, a fixing tube is provided at the top of the fixed base, a limiting groove is provided on the inner side of the fixing tube, a limiting block with a sliding connection is provided on the inner side of the limiting groove, a fixedly connected threaded shaft is provided on the top of the limiting block, a rotating groove is provided on the top of the fixing tube, an adjusting ring is provided on the inner side of the rotating groove, and the adjusting ring is threadedly connected to the threaded shaft.

[0009] Furthermore, a slide groove is provided on the inner side of the device housing, a sliding block slidably connected is provided on the inner side of the slide groove, a limiting groove 2 is provided on the inner side of the sliding block, a spring is provided on the inner side of the limiting groove 2, a sliding anti-slip chuck is provided on the inner side of the limiting groove 2, and a fixed shaft is provided on one side of the sliding block.

[0010] Furthermore, a limiting groove three is provided on the inner side of the device shell, the fixed shaft is slidably connected to the limiting groove three, a rotatably connected gear one is provided on the inner side of the device shell, the gear one is provided with a limiting groove four, the fixed shaft is slidably connected to the limiting groove four, a gear two is provided on the inner side of the device shell, the gear two is meshed with the gear one, and a motor is provided on one side of the gear two.

[0011] The advantages of the utility model compared with the existing technology are:

[0012] (1) The utility model provides a wafer holder with a lifting assembly, which can adjust the clamping and fixing height according to the height of the processing tool and the height of the operator, thereby improving the adjustment capability.

[0013] (2) The clamping assembly provided on a wafer holder of the utility model can clamp wafers of different sizes at multiple points in a ring shape, and when clamping the wafer, it can buffer the clamping force to prevent the wafer from being damaged. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 The utility model is a three-dimensional diagram of a wafer bracket.

[0015] Figure 2 This is a cross-sectional view of a wafer bracket of the utility model. Figure 1 .

[0016] Figure 3 It is an enlarged view of A of a wafer bracket of the present invention.

[0017] Figure 4 This is a cross-sectional view of a wafer bracket of the utility model. Figure 2 .

[0018] Figure 5 This is a cross-sectional view of a wafer bracket of the utility model. Figure 3 .

[0019] Figure 6 This is a cross-sectional view of a wafer bracket of the utility model. Figure 4 .

[0020] Figure 7 This is a cross-sectional view of a wafer bracket of the utility model. Figure 5 .

[0021] As shown in the figure: 1. Fixed base; 2. Lifting assembly; 3. Support frame; 4. Device housing; 5. Clamping assembly; 6. Wafer; 7. Fixed tube; 8. Limit slot one; 9. Limit block; 10. Threaded shaft; 11. Rotating slot; 12. Adjusting ring; 13. Slide slot; 14. Slider; 15. Limit slot two; 16. Spring; 17. Anti-slip chuck; 18. Fixed shaft; 19. Limit slot three; 20. Gear one; 21. Limit slot four; 22. Gear two; 23. Motor. DETAILED DESCRIPTION

[0022] Exemplary embodiments will be described in detail herein, examples of which are shown in the accompanying drawings. When the following description refers to the drawings, the same numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present disclosure. Instead, they are merely examples of devices consistent with some aspects of the present disclosure as detailed in the appended claims.

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] like Figures 1 to 7 As shown, a wafer holder includes: a fixed base 1, a lifting assembly 2, a support frame 3, a device housing 4, a clamping assembly 5 and a wafer 6; the lifting assembly 2 is located at the top of the fixed base 1, the support frame 3 is located at the top of the lifting assembly 2, the device housing 4 is rotatably connected to the inner side of the support frame 3, the device housing 4 rotates in the support frame 3 with a damping feeling, the clamping assembly 5 is located on the inner side of the device housing 4, and the wafer 6 is located on the inner side of the clamping assembly 5.

[0025] A slide groove 13 is provided on the inner side of the device housing 4, a sliding block 14 is slidably connected on the inner side of the slide groove 13, a limiting groove 2 15 is provided on the inner side of the sliding block 14, a spring 16 is provided on the inner side of the limiting groove 2 15, a sliding anti-slip chuck 17 is slidably connected on the inner side of the limiting groove 2 15, a fixed shaft 18 is provided on one side of the sliding block 14, a limiting groove 3 19 is provided on the inner side of the device housing 4, the fixed shaft 18 is slidably connected to the limiting groove 3 19, a rotating gear 1 20 is provided on the inner side of the device housing 4, the gear 1 20 has a limiting groove 4 21, the fixed shaft 18 is slidably connected to the limiting groove 4 21, a gear 2 22 is provided on the inner side of the device housing 4, the gear 2 22 is meshed with the gear 1 20, and a motor 23 is provided on one side of the gear 2 22.

[0026] A fixed tube 7 is provided at the top of the fixed base 1, a limiting groove 8 is provided on the inner side of the fixed tube 7, a limiting block 9 is provided on the inner side of the limiting groove 8 for sliding connection, a fixedly connected threaded shaft 10 is provided at the top of the limiting block 9, a rotating groove 11 is provided at the top of the fixed tube 7, an adjusting ring 12 is provided on the inner side of the rotating groove 11, and the adjusting ring 12 is threadedly connected to the threaded shaft 10.

[0027] In specific use, the wafer 6 is placed in the device housing 4, and the motor 23 is started to rotate the gear 22, and the gear 22 drives the gear 1 20 to rotate. The rotating gear 1 20 causes the limit slot 4 21 to operate, and the limit slot 4 21 pushes the fixed shaft 18 to slide along the limit slot 3 19, so that the slider 14 slides in the slide slot 13, so that the anti-slip chuck 17 clamps the wafer 6 from multiple points on the outside of the wafer 6, and the anti-slip chuck 17 slides in the limit slot 2 15 to squeeze the spring 16 to buffer the clamping force.

[0028] The rotating adjustment ring 12 drives the threaded shaft 10. Since the limit block 9 at the bottom end of the threaded shaft 10 is limited by the limit groove 8, the threaded shaft 10 pushes the support frame to be raised and lowered, so that the height of the wafer 6 is suitable for the processing height.

[0029] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A wafer holder, characterized in that: include: A fixed base (1), a lifting assembly (2), a support frame (3), a device housing (4), a clamping assembly (5) and a wafer (6); The lifting assembly (2) is located at the top of the fixed base (1), the support frame (3) is located at the top of the lifting assembly (2), the device housing (4) is rotatably connected to the inner side of the support frame (3), the device housing (4) rotates in the support frame (3) with a damping feeling, the clamping assembly (5) is located on the inner side of the device housing (4), and the wafer (6) is located on the inner side of the clamping assembly (5).

2. A wafer holder according to claim 1, characterized in that: A fixing tube (7) is provided at the top of the fixing base (1), a limiting groove (8) is provided on the inner side of the fixing tube (7), a limiting block (9) which is slidably connected is provided on the inner side of the limiting groove (8), a fixedly connected threaded shaft (10) is provided on the top of the limiting block (9), a rotating groove (11) is provided at the top of the fixing tube (7), an adjusting ring (12) is provided on the inner side of the rotating groove (11), and the adjusting ring (12) is threadedly connected to the threaded shaft (10).

3. The wafer holder according to claim 1, characterized in that: A slide groove (13) is provided on the inner side of the device housing (4), a sliding block (14) is provided on the inner side of the slide groove (13), a second limiting groove (15) is provided on the inner side of the sliding block (14), a spring (16) is provided on the inner side of the second limiting groove (15), a sliding anti-slip chuck (17) is provided on the inner side of the second limiting groove (15), and a fixed shaft (18) is provided on one side of the sliding block (14).

4. A wafer holder according to claim 3, characterized in that: A limiting groove three (19) is provided on the inner side of the device housing (4), the fixed shaft (18) is slidably connected to the limiting groove three (19), a rotatably connected gear one (20) is provided on the inner side of the device housing (4), the gear one (20) is provided with a limiting groove four (21), the fixed shaft (18) is slidably connected to the limiting groove four (21), a gear two (22) is provided on the inner side of the device housing (4), the gear two (22) is meshed with the gear one (20), and a motor (23) is provided on one side of the gear two (22).

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