Workbench leveling device

Abstract

The utility model belongs to the technical field of photoetching machine workbenches, and discloses a workbench leveling device. The workbench leveling device comprises a base, a potentiometer and an optocoupler limiting assembly. The moving part is arranged on the base in a sliding mode and can move between a first limit position and a second limit position. The potentiometer is fixed on the base, and the moving part is in transmission connection with the input end of the potentiometer. The optocoupler limiting assembly comprises an optical path sensing assembly and an optical path blocking assembly. Each light path sensing assembly comprises a transmitting end and a receiving end, the transmitting end can transmit light to the receiving end, and the base is provided with two light path sensing assemblies; the light path blocking assembly is arranged on the moving part, and when the moving part is located at any limit position, the light path blocking assembly can be matched with the corresponding light path sensing assembly and block light between the transmitting end and the receiving end. According to the arrangement, the service life of the optocoupler limiting assembly is longer, the situation that the limiting precision is reduced due to aging abrasion caused by mechanical contact can be avoided, and the defective rate is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of photolithography machine workbench, in particular to a workbench leveling device. Background Art

[0002] As a key process step in the semiconductor chip production process, photolithography is a process that irradiates ultraviolet light through a mask containing the target pattern information to the surface of a wafer coated with photoresist. The photoresist exposed to the ultraviolet light will react, achieving the wafer lithography effect.

[0003] The photolithography machine workbench is a common device used to carry wafers in the photolithography process. Before the photolithography process, the wafers coated with photoresist need to be placed on the workbench, and then the photolithography process is performed using ultraviolet light. During the ultraviolet light processing, the workbench needs to be constantly moved to drive the wafer to move, so that several semiconductor chips can be etched on the entire wafer. However, since the processing of semiconductor chips is very precise, the workbench needs to be kept in a horizontal state at all times, and thus a high-speed, high-precision leveling device is required to level the workbench to ensure the completion of the processing.

[0004] The existing leveling device uses a micro switch to limit the overall tilt range of the workbench. The micro switch with a mechanical structure as the main body and the metal spring that triggers the micro switch have poor durability. They are prone to mechanical fatigue damage after long-term use, which can easily lead to a decrease in limit accuracy and excessive displacement of the leveling device, causing errors in the leveling of the workbench, and ultimately resulting in poor completion of wafer surface lithography processing and a high defective rate. Utility Model Content

[0005] The purpose of the utility model is to provide a workbench leveling device, which can effectively limit the overall tilt range of the workbench for a long time, avoid excessive displacement of the leveling device, extend the service life, improve the completion of wafer surface lithography processing, and reduce the defective rate.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] A workbench leveling device, comprising:

[0008] Base;

[0009] A moving member, which is slidably disposed on the base and can move between two extreme positions;

[0010] A potentiometer, wherein the potentiometer is fixed on the base, and the moving part is transmission-connected to the input end of the potentiometer;

[0011] The optical coupler limit assembly comprises:

[0012] An optical path sensing component, the optical path sensing component comprises a transmitting end and a receiving end, the transmitting end can transmit light to the receiving end, and the base is provided with two optical path sensing components;

[0013] A light path blocking component is arranged on the moving part. When the moving part is located at any of the extreme positions, the light path blocking component can cooperate with the corresponding light path sensing component and block the light between the transmitting end and the receiving end.

[0014] Optionally, the light path blocking component includes a first blocking plate and a second blocking plate, and the first blocking plate and the second blocking plate are both arranged on the movable member, and when the movable member moves to one extreme position, the first blocking plate blocks the light of one light path sensing component, and when the movable member moves to another extreme position, the second blocking plate blocks the light of another light path sensing component.

[0015] Optionally, two ends of the moving member along the sliding direction are respectively a first end and a second end, the first blocking piece is arranged at the first end, and the second blocking piece is arranged at the second end.

[0016] Optionally, the first blocking sheet includes a first fixing portion, a first connecting portion and a first shielding portion, the first fixing portion is connected to one end of the first connecting portion, the other end of the first connecting portion is connected to the first shielding portion, the first fixing portion is fixedly connected to the first end portion, and the first shielding portion can extend between the transmitting end and the receiving end to block light;

[0017] And / or, the second blocking piece includes a second fixed portion, a second connecting portion and a second shielding portion, the second fixed portion is connected to one end of the second connecting portion, the other end of the second connecting portion is connected to the second shielding portion, the second fixed portion is fixedly connected to the second end portion, and the second shielding portion can extend between the transmitting end and the receiving end and block light.

[0018] Optionally, the workbench leveling device further includes a fixing member, wherein the fixing member is disposed at the second end portion, and the second blocking sheet is fixed on the fixing member.

[0019] Optionally, the fixed member has a first mounting portion, a pushing portion and a second mounting portion, the first mounting portion is fixedly connected to the movable member; the pushing portion abuts against the input end of the potentiometer; the second mounting portion is fixedly connected to the second blocking piece, and when the fixed member moves following the movable member, the input end of the potentiometer moves synchronously with the second blocking piece.

[0020] Optionally, a groove is provided on the optical path sensing component, the transmitting end and the receiving end are respectively provided on opposite sides of the groove, and the light between the transmitting end and the receiving end passes through the groove.

[0021] Optionally, the opening directions of the grooves of the two optical path sensing components are arranged in opposite directions.

[0022] Optionally, the base is provided with two connection bridges at intervals, both of the two connection bridges are provided with through holes, and the moving member is slidably disposed in the two through holes.

[0023] Optionally, a sliding assembly is arranged in the through hole, and the sliding assembly includes an outer ring, a frame and a ball. The frame is fixed in the outer ring, the ball rolls in the frame, the outer ring is arranged inside the through hole, and the ball is rollingly connected to the moving part.

[0024] Beneficial effects of the utility model:

[0025] The workbench leveling device provided by the utility model arranges an optical coupling limit component so that the light path blocking component cooperates with the light path sensing component and blocks the light path between the transmitting end and the receiving end, thereby completing the limiting of the moving part between two extreme positions. In this process, since there is no mechanical contact between the light path blocking component and the light path sensing component, no relative wear will occur, which is beneficial to ensuring the service life while avoiding the decrease of the limit accuracy and causing excessive displacement of the leveling device, thereby improving the completion degree of wafer surface photolithography processing and reducing the defective rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is an axonometric diagram of the workbench leveling device provided by the utility model;

[0027] Figure 2 It is a front view of the workbench leveling device provided by the utility model;

[0028] Figure 3 It is a top view of the workbench leveling device provided by the utility model;

[0029] Figure 4 It is a structural schematic diagram of the base of the workbench leveling device provided by the utility model;

[0030] Figure 5 The utility model is a schematic diagram of the structure of the fixing parts of the workbench leveling device.

[0031] In the figure:

[0032] 1. Base; 11. Mounting hole; 12. Connecting bridge;

[0033] 2. Moving member; 21. Transmission member; 22. Fixed member; 221. First mounting portion; 222. Pushing portion; 223. Second mounting portion;

[0034] 3. Transmission screw;

[0035] 4. Protective cover;

[0036] 5. Potentiometer; 51. Input terminal;

[0037] 6. Optocoupler limit assembly; 61. Light path sensing assembly; 62. Light path blocking assembly; 621. First blocking piece; 622. Second blocking piece. DETAILED DESCRIPTION

[0038] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0039] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0041] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0042] like Figures 1 to 3 As shown, the utility model provides a workbench leveling device, which is installed on a photolithography machine to avoid aging and wear caused by mechanical contact of the limit assembly, ensure the service life of the limit assembly, avoid a decrease in limit accuracy, ensure the accuracy of the tilt range of the wafer photolithography workbench, avoid excessive displacement of the leveling device, improve the completion of wafer surface photolithography processing, and reduce the defective rate.

[0043] In this embodiment, the workbench leveling device includes a base 1, a moving part 2, a potentiometer 5 and an optical coupling limit assembly 6. The moving part 2 is slidably arranged on the base 1 and can move between a first limit position and a second limit position; the potentiometer 5 is also fixed on the base 1, and the moving part 2 and the input end 51 of the potentiometer 5 are transmission-connected. The optical coupling limit assembly 6 includes an optical path sensing assembly 61 and an optical path blocking assembly 62. The optical path sensing assembly 61 includes a transmitting end and a receiving end, and the transmitting end can emit light to the receiving end. The base 1 is provided with two optical path sensing assemblies 61, and the optical path blocking assembly 62 is arranged on the moving part 2. When the moving part 2 is located at the first limit position or the second limit position, the optical path blocking assembly 62 can cooperate with the corresponding optical path sensing assembly 61 and block the light between the transmitting end and the receiving end, preventing the moving part 2 from continuing to move, thereby realizing the limit of the tilt range of the workbench. The optical path blocking assembly 62 cooperates with the optical path sensing assembly 61, and no mechanical contact is generated, so that no relative wear occurs. In other words, when the moving member 2 is located at the first limit position, the light path blocking component 62 cooperates with one of the light path sensing components 61 , and when the moving member 2 is located at the second limit position, the light path blocking component 62 cooperates with the other light path sensing component 61 .

[0044] See also Figure 4The base 1 is the base structure of the workbench leveling device. The base 1 is provided with a mounting hole 11 and a plurality of threaded holes. The moving part 2, the transmission screw 3, the protective cover 4, the potentiometer 5 and the optical coupling limit assembly 6 are all arranged on the base 1. Specifically, the power part is fixed relative to the base 1, the transmission screw 3 is rotatably arranged on the base 1, and the output end of the power part is connected to one end of the transmission screw 3. Among them, one end of the transmission screw 3 is arranged in the protective cover 4, and the other end of the transmission screw 3 is arranged in the mounting hole 11 of the base 1. Furthermore, a coupling is provided at the connecting end of the power part and the transmission screw 3 to ensure efficient connection between the power part and the transmission screw 3, reduce the coaxiality requirements between the output end of the power part and the transmission screw 3, and reduce the processing cost. Furthermore, the protective cover 4 is arranged on the base 1, and the cover is arranged on the outer periphery of the coupling to protect the coupling, avoid the influence of dust and other impurities, and ensure smooth power transmission.

[0045] Specifically, a truncated cone connecting piece is provided in the middle part of the movable part 2, and the truncated cone connecting piece is connected to the workbench; one end of the transmission part 21 is connected to the movable part 2, and the other end of the transmission part 21 is provided with a threaded hole, and the threaded hole is threadedly matched with the transmission screw 3; through the forward or reverse rotation of the power part, the transmission screw 3 is rotated forward or reversed, and the transmission part 21 is driven to move in both directions, thereby realizing the bidirectional movement of the movable part 2, and finally realizing the bidirectional movement of the truncated cone connecting piece, and completing the inclination adjustment of the workbench.

[0046] In this embodiment, see Figures 1 to 3 The light path blocking component 62 includes a first blocking piece 621 and a second blocking piece 622; the two ends of the moving member 2 along the sliding direction are respectively a first end and a second end, the first blocking piece 621 is arranged at the first end, and the second blocking piece 622 is arranged at the second end; when the moving member 2 moves to the first extreme position, the first blocking piece 621 blocks the light of one light path sensing component 61, and when the moving member 2 moves to the second extreme position, the second blocking piece 622 blocks the light of another light path sensing component 61.

[0047] Specifically, the workbench leveling device is provided with a controller, which is communicatively connected to the optical path sensor assembly 61, and the controller is communicatively connected to the power component; the optical path sensor assembly 61 works continuously, and the light emitted by the transmitting end is always received by the receiving end, and the optical path sensor assembly 61 generates a light path signal which is transmitted to the controller, and the controller controls the power component to continuously output power; when the movable part 2 moves to the extreme position, the first blocking piece 621 or the second blocking piece 622 blocks the light emitted by the transmitting end, and when the receiving end cannot receive the light, the light blocking signal generated by the optical path sensor assembly 61 is transmitted to the controller, and the controller prevents the power component from outputting power.

[0048] Furthermore, the first blocking piece 621 includes a first fixed portion, a first connecting portion and a first shielding portion. The first fixed portion is fixed on the transmission member 21. The first fixed portion is vertically connected to one end of the first connecting portion. The other end of the first connecting portion is connected to the first shielding portion. The first shielding portion can extend between the transmitting end and the receiving end and block the light, so that the optical path sensor component 61 generates a light blocking signal, the power member stops power output, and the moving member 2 is prevented from continuing to move, so as to limit the overall tilt range of the workbench. There is no mechanical contact in this process, so as to avoid aging and wear of the first blocking piece 621. Among them, the first fixed portion, the first connecting portion and the first shielding portion are perpendicular to each other. The above-mentioned arrangement facilitates the connection between the first fixed portion and the transmission member 21, and the cooperation between the first shielding portion and the optical path sensor component 61, so as to adapt to the existing base 1 structure.

[0049] Furthermore, the workbench leveling device also includes a fixing member 22, which is arranged at the second end of the moving member 2, and a second blocking piece 622 is fixed on the fixing member 22. Specifically, the second blocking piece 622 includes a second fixing portion, a second connecting portion, and a second shielding portion, the second fixing portion is fixedly connected to the second end of the moving member 2, the second fixing portion is vertically connected to one end of the second connecting portion, and the other end of the second connecting portion is connected to the second shielding portion, the second shielding portion can extend between the transmitting end and the receiving end and block the light, so that the optical path sensor component 61 generates a light blocking signal, the power member stops power output, and the moving member 2 is prevented from continuing to move, so as to limit the overall tilt range of the workbench. There is no mechanical contact in this process, so as to avoid aging and wear of the second blocking piece 622.

[0050] Specifically, see Figure 5 The fixed member 22 has a first mounting portion 221, a pushing portion 222 and a second mounting portion 223. The first mounting portion 221 is fixedly connected to the movable member 2; the pushing portion 222 is provided with a limiting groove, and the input end 51 of the potentiometer 5 abuts against the bottom of the limiting groove; the second mounting portion 223 is fixedly connected to the second blocking piece 622. When the fixed member 22 moves following the movable member 2, the input end 51 of the potentiometer 5 moves synchronously with the second blocking piece 622. When the workbench needs to be leveled, the horizontality of the workbench needs to be adjusted through the external control panel. The signal generated by the external control panel is a voltage data signal. The workbench leveling device connects the second blocking piece 622 and the input end 51 of the potentiometer 5 at the same time through the fixing part 22 fixed to the moving part 2. When the moving part 2 moves, the position of the input end 51 of the potentiometer 5 is adjusted, so that the value of the potentiometer 5 can accurately feedback the moving position of the moving part 2; at the same time, the second blocking piece 622 can accurately limit the extreme position of the moving part 2; furthermore, the setting of the limit groove can also prevent the input end 51 of the potentiometer 5 from being misplaced, thereby improving the reliability of the connection; finally, the setting of the fixing part 22 simplifies the intermediate structure and reduces the production cost.

[0051] In this embodiment, see Figures 1 to 4 The optical path sensing component 61 includes a transmitting end and a receiving end. A groove is provided on the optical path sensing component 61. The transmitting end and the receiving end are respectively provided on opposite sides of the groove. The light between the transmitting end and the receiving end passes through the groove. Specifically, the opening directions of the grooves of the two optical path sensing components 61 are arranged opposite to each other, respectively opposite to the moving direction of the corresponding first blocking sheet 621 or the second blocking sheet 622, so as to ensure that the first blocking sheet 621 or the second blocking sheet 622 can adapt to the structure in which the two blocking sheets are located at the ends.

[0052] Furthermore, the optical path sensing component 61 can be configured as a transmitting end block and a receiving end block, the transmitting end block and the receiving end block are split structures and are arranged at intervals, the transmitting end is arranged on the transmitting end block, and the receiving end is arranged on the receiving end block, and the first blocking plate 621 or the second blocking plate 622 can enter between the transmitting end block and the receiving end block to block the light, thereby triggering the optical path sensing component 61 so that the optical path sensing component 61 generates a light blocking signal, preventing the moving part 2 from continuing to move, thereby limiting the overall tilt range of the workbench, and avoiding aging and wear of the leveling limit device caused by mechanical contact.

[0053] In this embodiment, see Figures 1 to 4 , along the moving direction of the moving member 2, the base 1 is also spaced apart with two connecting bridges 12, both of which are provided with through holes, and the moving member 2 is slidably arranged in the two through holes. Specifically, a sliding assembly is provided between the inner wall of the through hole and the moving member 2. Exemplarily, the sliding assembly can be a sliding bearing. The transmission accuracy of the sliding bearing is higher, which is conducive to ensuring the leveling accuracy of the workbench. The sliding assembly includes an outer ring, a frame and a ball, the frame is fixed in the outer ring, the ball is rollingly arranged in the frame, the outer ring is arranged inside the through hole, and the ball is rollingly connected with the moving member 2. The above arrangement improves the transmission accuracy of the moving member 2, and avoids the problem that the moving accuracy of the moving member 2 is reduced or even the moving member 2 falls off due to long-term wear of the moving member 2 or the connecting bridge 12.

[0054] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. A workbench leveling device, characterized in that: include: Base (1); A moving member (2), the moving member (2) being slidably disposed on the base (1) and being capable of moving between two extreme positions; A potentiometer (5), wherein the potentiometer (5) is fixed on the base (1), and the moving part (2) is drivingly connected to an input end (51) of the potentiometer (5); An optical coupling limiter assembly (6), the optical coupling limiter assembly (6) comprising: An optical path sensing component (61), the optical path sensing component (61) comprising a transmitting end and a receiving end, the transmitting end being capable of transmitting light to the receiving end, and the base (1) being provided with two optical path sensing components (61); A light path blocking component (62), wherein the light path blocking component (62) is arranged on the moving part (2), and when the moving part (2) is located at any of the extreme positions, the light path blocking component (62) can cooperate with the corresponding light path sensing component (61) and block the light between the transmitting end and the receiving end.

2. The workbench leveling device according to claim 1, characterized in that: The light path blocking component (62) comprises a first blocking plate (621) and a second blocking plate (622), wherein the first blocking plate (621) and the second blocking plate (622) are both arranged on the moving member (2), and when the moving member (2) moves to one of the extreme positions, the first blocking plate (621) blocks the light of one of the light path sensing components (61), and when the moving member (2) moves to another of the extreme positions, the second blocking plate (622) blocks the light of another of the light path sensing components (61).

3. The workbench leveling device according to claim 2, characterized in that: The two ends of the moving member (2) along the sliding direction are respectively a first end and a second end; the first blocking piece (621) is arranged at the first end; and the second blocking piece (622) is arranged at the second end.

4. The workbench leveling device according to claim 3, characterized in that: The first blocking sheet (621) comprises a first fixing portion, a first connecting portion and a first shielding portion, wherein the first fixing portion is connected to one end of the first connecting portion, the other end of the first connecting portion is connected to the first shielding portion, the first fixing portion is fixedly connected to the first end portion, and the first shielding portion can extend between the transmitting end and the receiving end to block light; And / or, the second blocking piece (622) includes a second fixing portion, a second connecting portion and a second shielding portion, the second fixing portion is connected to one end of the second connecting portion, the other end of the second connecting portion is connected to the second shielding portion, the second fixing portion is fixedly connected to the second end portion, and the second shielding portion can extend between the transmitting end and the receiving end and block light.

5. The workbench leveling device according to claim 3, characterized in that: The workbench leveling device also includes a fixing member (22), wherein the fixing member (22) is arranged at the second end portion, and the second blocking sheet (622) is fixed on the fixing member (22).

6. The workbench leveling device according to claim 5, characterized in that: The fixed member (22) comprises a first mounting portion (221), a pushing portion (222) and a second mounting portion (223); the first mounting portion (221) is fixedly connected to the moving member (2); the pushing portion (222) abuts against an input end (51) of the potentiometer (5); and the second mounting portion (223) is fixedly connected to the second blocking piece (622); when the fixed member (22) moves following the moving member (2), the input end (51) of the potentiometer (5) and the second blocking piece (622) move synchronously.

7. The workbench leveling device according to claim 2, characterized in that: The optical path sensing component (61) is provided with a groove, the transmitting end and the receiving end are respectively arranged on two opposite sides of the groove, and the light between the transmitting end and the receiving end passes through the groove.

8. The workbench leveling device according to claim 7, characterized in that: The opening directions of the grooves of the two optical path sensing components (61) are arranged in opposite directions.

9. The workbench leveling device according to any one of claims 1 to 8, characterized in that: The base (1) is provided with two connecting bridges (12) at intervals, and the two connecting bridges (12) are both provided with through holes, and the moving member (2) is slidably arranged in the two through holes.

10. The workbench leveling device according to claim 9, characterized in that: A sliding assembly is arranged in the through hole, and the sliding assembly comprises an outer ring, a frame and a ball bearing. The frame is fixed in the outer ring, the ball bearing is rollingly arranged in the frame, the outer ring is arranged inside the through hole, and the ball bearing is rollingly connected to the moving part (2).

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