Three-degree-of-freedom material taking manipulator

Abstract

The utility model relates to the field of wafer processing, in particular to a three-degree-of-freedom material taking manipulator, and aims to solve the technical problem that the wafer adsorption effect of a material taking arm or a manipulator is not ideal in the prior art. The three-degree-of-freedom material taking manipulator comprises a material taking arm mechanism, wherein the material taking arm mechanism comprises a ceramic arm and an O-shaped ring; the ceramic arm is in a plate shape, a first vacuum cavity channel is formed in the ceramic arm, and an adsorption hole communicated with the first vacuum cavity channel is formed in the top wall of the front end of the ceramic arm. The O-shaped ring is fixed on the top wall in a posture of enclosing the adsorption hole and protrudes out of the top wall. According to the three-degree-of-freedom material taking manipulator, the adsorption hole is formed in the front end head of the hollow ceramic arm, and the O-shaped ring is arranged, so that the overall total thickness of the front end head part can be controlled within the range of about 2mm, and therefore, the manipulator can enter a space with small spacing to take materials, and the adaptability is high; materials with large warping degree can be sucked, and the suction success rate is high.

Description

Technical Field

[0001] The utility model relates to the field of wafer processing, in particular to a three-degree-of-freedom material-taking manipulator. Background Art

[0002] At present, there are various specifications of wafer boxes on the market, and the layer spacing of the boxes is not uniform. For boxes with small layer spacing, it is difficult for the material picking arm to enter to pick up the materials and perform vacuum adsorption. In addition, due to the warping and deformation of the wafer itself, the use of thin-walled flat-plate ceramic arms that occupy little space in the height direction is not conducive to vacuum adsorption. If a complete set of Robot manipulators is used, it will be expensive and require a large amount of space. Utility Model Content

[0003] The utility model aims to provide a three-degree-of-freedom material-retrieving robot to alleviate the technical problem in the related art that the material-retrieving arm or robot has an unsatisfactory effect of adsorbing wafers.

[0004] In order to solve the above technical problems, the technical solution provided by the utility model is:

[0005] The three-degree-of-freedom material-retrieving manipulator provided by the utility model comprises a material-retrieving arm mechanism, and the material-retrieving arm mechanism comprises a ceramic arm and an O-ring;

[0006] The ceramic arm is in a plate shape, and a first vacuum cavity is provided inside the ceramic arm. A suction hole communicating with the first vacuum cavity is provided on the top wall of the front end of the ceramic arm.

[0007] The O-ring is fixed to the top wall in a posture of surrounding the adsorption hole and protruding from the top wall.

[0008] Furthermore, the material taking arm mechanism also includes a connecting arm and a pneumatic joint;

[0009] The rear end head of the ceramic arm is fixedly connected to one end of the connecting arm;

[0010] The connecting arm is also plate-shaped, and a second vacuum cavity communicating with the first vacuum cavity is provided inside the connecting arm;

[0011] The pneumatic joint is arranged on the connecting arm and communicated with the second vacuum cavity.

[0012] Further, the connecting arm includes a connecting body and a vacuum cover plate;

[0013] The connection body is provided with a cavity groove, the vacuum cover plate covers the opening of the cavity groove, and is enclosed with the connection body to form the second vacuum cavity channel.

[0014] Furthermore, the rear end head is overlapped with the connecting arm and is bolted together.

[0015] Furthermore, a first through hole and a second through hole are respectively provided on the wall surfaces facing the rear end head and the connecting arm, and the first through hole and the second through hole are respectively connected to the first vacuum cavity and the second vacuum cavity;

[0016] A sealing ring is abutted between the rear end head and the connecting arm, and the sealing ring surrounds the first through hole and the second through hole.

[0017] Furthermore, the three-degree-of-freedom material-grabbing robot also includes a rotating mechanism, which is transmission-connected to the connecting arm of the material-grabbing arm mechanism to drive the material-grabbing arm mechanism to rotate around the rotation center line of the rotating mechanism.

[0018] Furthermore, the three-degree-of-freedom material-retrieving robot also includes an X-axis mechanism, which is transmission-connected to the rotating mechanism to drive the rotating mechanism to move along the X direction on a horizontal plane.

[0019] Furthermore, the three-degree-of-freedom material-retrieving robot also includes a Y-axis mechanism, which is transmission-connected to the X-axis mechanism to drive the X-axis mechanism to move along the Y direction on a horizontal plane.

[0020] Furthermore, the Y-axis mechanism includes a mounting frame and a transmission assembly, a rotary driver and a slide plate arranged on the mounting frame;

[0021] The transmission assembly includes a main synchronous wheel, a slave synchronous wheel and a synchronous belt connecting the two, wherein both the main synchronous wheel and the slave synchronous wheel are rotatably connected to the mounting frame;

[0022] The rotary driver is drivingly connected to the main synchronous wheel;

[0023] The slide plate is slidably matched with the mounting frame and is fixedly connected with the synchronous belt;

[0024] The X-axis mechanism is fixed to the slide.

[0025] Furthermore, the Y-axis mechanism further comprises a tensioning assembly, and the tensioning assembly comprises a tensioning shaft, a tensioning wheel and a tensioning block;

[0026] The tensioning shaft is passed through the mounting frame, and its axis is parallel to the axis of the main synchronous wheel;

[0027] The tensioning wheel is arranged on the tensioning shaft and is located on the inner side or the outer side of the synchronous belt;

[0028] The tension block is fixed to the mounting frame, and a top screw is threadedly connected thereon. The top screw can drive the tension shaft to move in a direction perpendicular to its own axis under a screwing-in condition, so that the tension wheel abuts against the synchronous belt.

[0029] Based on the above technical solutions, the three-degree-of-freedom material-retrieving manipulator provided by the utility model can achieve the following technical effects:

[0030] In this three-degree-of-freedom material-picking robot, the plate-shaped ceramic arm is fixed with an O-ring, and the total thickness can be controlled to about 2 mm, so that it can be extended into a material box with a small layer spacing to absorb materials; the adsorption hole at the front end of the ceramic arm cooperates with the O-ring to form a vacuum adsorption area, which can adsorb wafers with a large adsorption area and stable adsorption; in addition, since the O-ring can be elastically deformed to an appropriate amount, it can adsorb wafers with a certain degree of deformation, which can greatly reduce the plane processing accuracy requirements of the ceramic arm. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0032] Figure 1 A schematic diagram of the structure of the connection between the material taking arm mechanism and the rotating mechanism provided in the embodiment of the utility model;

[0033] Figure 2 A schematic diagram of the structure of a ceramic arm provided in an embodiment of the utility model;

[0034] Figure 3 A schematic diagram of the structure of the connecting arm provided in an embodiment of the utility model;

[0035] Figure 4 An exploded view of a material taking arm mechanism provided in an embodiment of the utility model;

[0036] Figure 5 A schematic diagram of the structure of a three-degree-of-freedom material-retrieving manipulator provided in an embodiment of the utility model;

[0037] Figure 6 for Figure 5 Schematic diagram of the structure after removing the Y-axis mechanism;

[0038] Figure 7 An exploded view of the Y-axis mechanism provided in an embodiment of the utility model.

[0039] Icons: 1- material picking arm mechanism; 11- ceramic arm; 12- O-ring; 13- connecting arm; 14- pneumatic joint; 15- sealing ring; 111- front end head; 112- rear end head; 131- connecting body; 132- vacuum cover plate;

[0040] 2-Rotation mechanism; 3-X-axis mechanism;

[0041] 4-Y-axis mechanism; 41-mounting frame; 42-transmission assembly; 43-rotation drive; 44-slide; 45-tensioning shaft; 46-tensioning wheel; 47-tensioning block; 48-guide rail slider; 49-bellows cover; 421-main synchronous wheel; 422-slave synchronous wheel; 423-synchronous belt; 431-motor; 432-reducer;

[0042] 5- Wafer. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0044] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0045] In conjunction with the accompanying drawings, some embodiments of the present invention are described in detail below. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0046] At present, there are various specifications of wafer boxes on the market, and the layer spacing of the boxes is not uniform. For boxes with small layer spacing, it is difficult for the material picking arm to enter to pick up the materials and perform vacuum adsorption. In addition, due to the warping and deformation of the wafer itself, the use of thin-walled flat-plate ceramic arms that occupy little space in the height direction is not conducive to vacuum adsorption. If a complete set of Robot manipulators is used, it will be expensive and require a large amount of space.

[0047] In view of this, the utility model provides a three-degree-of-freedom material picking robot, including a material picking arm mechanism 1, the material picking arm mechanism 1 includes a ceramic arm 11 and an O-ring 12; the ceramic arm 11 is plate-shaped, and a first vacuum cavity is provided inside it, and an adsorption hole connected to the first vacuum cavity is provided on the top wall of its front end head 111; the O-ring 12 is fixed to the top wall in a posture of enclosing the adsorption hole, and protrudes from the top wall.

[0048] In the three-degree-of-freedom material-picking robot, the plate-shaped ceramic arm 11 is fixed with the O-ring 12, and the total thickness can be controlled to about 2 mm, so that it can be inserted into a small-interlayer-spacing material box to absorb materials; the adsorption hole 111 at the front end of the ceramic arm 11 cooperates with the O-ring 12 to form a vacuum adsorption area, which can adsorb the wafer 5, and the adsorption area is large and the adsorption is stable; in addition, since the O-ring can be elastically deformed to an appropriate amount, it can adsorb wafers 5 with a certain deformation, so that the plane processing accuracy requirements of the ceramic arm 11 can be greatly reduced.

[0049] The following combination Figures 1 to 7 The structure and shape of the three-degree-of-freedom material-retrieving manipulator provided in this embodiment are described in detail:

[0050] Regarding the material taking arm mechanism 1, specifically:

[0051] refer to Figures 1 to 4 The material picking arm mechanism 1 also includes a connecting arm 13 and a pneumatic joint 14; the connecting arm 13 is also plate-shaped, and is composed of a connecting body 131 and a vacuum cover plate 132. The connecting body 131 is provided with a cavity groove, and the vacuum cover plate 132 is covered on the opening of the cavity groove and fixed to the connecting body 131 by a sealant, and the two are enclosed to form a second vacuum cavity channel connected to the first vacuum cavity channel. This design can make the thickness of the connecting arm 13 thinner; the pneumatic joint 14 is installed at the upper end of the connecting body 131 and is connected to the second vacuum cavity channel.

[0052] In accordance with the above, the ceramic arm 11 can be made of ceramic or stainless steel as a base, and then bonded together with a sealing plate and an O-ring. The total thickness can be controlled to about 2 mm, and it can be inserted into a small layer spacing material box to absorb materials; the rear end head 112 of the ceramic arm 11 overlaps the connecting arm 13, and the two are connected by bolts. A sealing ring 15 is provided at the junction of the two, and the sealing ring 15 is used to prevent vacuum leakage at the connection between the first vacuum cavity and the second vacuum cavity.

[0053] When in use, the vacuum is transmitted from the pneumatic joint 14 along the second vacuum cavity inside the connecting arm 13 and the first vacuum cavity inside the ceramic arm 11 to the central adsorption hole of the front end head 111 of the ceramic arm 11. The adsorption hole and the O-ring 12 form a vacuum adsorption area for adsorbing the wafer 5, and the adsorption area is large and the adsorption is stable. Since the O-ring can be elastically deformed to a certain extent, it can adsorb wafers 5 with a certain deformation, and can also greatly reduce the plane processing accuracy requirements of the ceramic arm 11.

[0054] refer to Figures 5 to 7The three-degree-of-freedom material-retrieving manipulator also includes a rotating mechanism 2, an X-axis mechanism 3, and a Y-axis mechanism 4; wherein, the rotating mechanism 2 can be a rotating cylinder, a rotating electric cylinder, etc., which can be selected specifically according to the required accuracy, and the output end of the rotating mechanism 2 is fixedly connected to the connecting arm 13, and drives the material-retrieving arm mechanism 1 to rotate around the rotation center line of the connecting arm 13 under the starting condition; the X-axis mechanism 3 can be driven by a standard screw module, and its output part is fixedly connected to the rotating mechanism 2, which is used to drive the rotating mechanism 2 to move in the X direction of the horizontal plane; the output part of the Y-axis mechanism 4 is fixedly connected to the X-axis mechanism 3 to drive the X-axis mechanism 3 to move in the Y direction of the horizontal plane. Here, the rotating mechanism 2, the X-axis mechanism 3, and the Y-axis mechanism 4 cooperate to realize the position adjustment of the material-retrieving arm mechanism 1 in the three-degree-of-freedom direction, so that the wafers 5 at different positions can be sucked.

[0055] Regarding the Y-axis mechanism 4, specifically:

[0056] Combination Figure 5 and Figure 7 As shown, the Y-axis mechanism 4 includes a mounting frame 41 and a transmission assembly 42, a rotation driver 43 and a slide plate 44 arranged on the mounting frame 41; wherein the mounting frame 41 is composed of a bottom plate, a front side plate, a rear side plate, a left side plate and a right side plate, a guide rail slider 48 is arranged on the bottom plate, and the front side plate, the rear side plate, the left side plate and the right side plate are surrounded by the bottom plate and fixedly connected to form an integral structure; the transmission assembly 42 includes a main synchronous wheel 421, a slave synchronous wheel 422 and a synchronous belt 423 connecting the two, the main synchronous wheel 421 is connected to the slave synchronous wheel 422, and the slave synchronous wheel 422 is connected to the slave synchronous wheel 422. Both the synchronous wheel 421 and the slave synchronous wheel 422 are rotatably connected to the mounting frame 41; the rotary driver 43 includes a motor 431 and a reducer 432, the reducer 432 is fixed to the right side plate, and its output end is connected to the main synchronous wheel 421, and the motor 431 is fixed to the reducer 432; the X-axis mechanism 3 is installed on the slide 44, the slide 44 is slidably matched with the bottom plate through the guide rail slider 48, and is also connected to the synchronous belt 423 through the synchronous belt mounting piece; accordion covers 49 are installed on both sides of the slide 44 to block dust.

[0057] In the above design, the Y-axis mechanism 4 adopts the transmission mode of motor 431 + synchronous wheel + synchronous belt 423 + linear guide slider 48. The motor 431 and the reducer 432 are connected to the middle of the right side plate. Compared with the linear screw module, the structure is more compact in the length direction, which can save the required installation space.

[0058] For further reference, Figure 7The Y-axis mechanism 4 also includes a tensioning assembly, which includes a tensioning shaft 45, a tensioning wheel 46 and a tensioning block 47; the tensioning shaft 45 is penetrated by the left plate and the right plate, and has a movable stroke on the left plate and the right plate, and its axis is parallel to the axis of the main synchronous wheel 421; the tensioning wheel 46 is arranged on the tensioning shaft 45, and is located on the inner side or the outer side of the synchronous belt 423; the tensioning block 47 is provided with two pieces, which are respectively fixed to the left plate and the right plate, and the tensioning block 47 is threadedly connected with a top screw, which can drive the tensioning shaft 45 to move in a direction perpendicular to its own axis under the screwing condition, so that the tensioning wheel 46 abuts against the synchronous belt 423.

[0059] In the above design, when the top screw is screwed in, the tensioning wheel 46 abuts against the synchronous belt 423, so that the synchronous belt 423 is in a tensioned state. The tensioning force can be adjusted by adjusting the screw-in amount of the top screw, thereby ensuring the smoothness of the synchronous belt 423 driving the slide 44 to reciprocate.

[0060] The beneficial effects of the three-degree-of-freedom material-retrieving manipulator provided in this embodiment are as follows:

[0061] 1. Both the connecting arm 13 and the ceramic arm 11 use an internal vacuum cavity to guide the vacuum. The total thickness of the ceramic arm 11 and the bonding O-ring can be controlled within a range of about 2 mm, and can enter a space with a small spacing to take materials, with strong adaptability;

[0062] 2. The front end 111 of the ceramic arm 11 is designed with an O-ring groove and bonded with an O-ring 12, which can absorb materials with large warpage, with a high absorption success rate and strong adaptability;

[0063] 3. The Y-axis mechanism 4 adopts a transmission mode of a motor 431 + synchronous wheel + synchronous belt 423 + linear guide slider 48, and has a compact structure in the length direction, saves equipment space, and has strong practicality and low cost.

[0064] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A three-degree-of-freedom material-retrieving manipulator, characterized in that: include: A material taking arm mechanism, wherein the material taking arm mechanism comprises a ceramic arm and an O-ring; The ceramic arm is in a plate shape, and a first vacuum cavity is provided inside the ceramic arm. A suction hole communicating with the first vacuum cavity is provided on the top wall of the front end of the ceramic arm. The O-ring is fixed to the top wall in a posture of surrounding the adsorption hole and protruding from the top wall.

2. The three-degree-of-freedom material-retrieving manipulator according to claim 1, characterized in that: The material taking arm mechanism also includes a connecting arm and a pneumatic joint; The rear end head of the ceramic arm is fixedly connected to one end of the connecting arm; The connecting arm is also plate-shaped, and a second vacuum cavity communicating with the first vacuum cavity is provided inside the connecting arm; The pneumatic joint is arranged on the connecting arm and communicated with the second vacuum cavity.

3. The three-degree-of-freedom material-retrieving manipulator according to claim 2, characterized in that: The connecting arm comprises a connecting body and a vacuum cover plate; The connection body is provided with a cavity groove, the vacuum cover plate covers the opening of the cavity groove, and is enclosed with the connection body to form the second vacuum cavity channel.

4. The three-degree-of-freedom material-retrieving manipulator according to claim 2, characterized in that: The rear end head is overlapped with the connecting arm and is bolted together.

5. The three-degree-of-freedom material-retrieving manipulator according to claim 4, characterized in that: A first through hole and a second through hole are respectively provided on the wall surfaces facing the rear end head and the connecting arm, and the first through hole and the second through hole are respectively connected to the first vacuum cavity and the second vacuum cavity; A sealing ring is abutted between the rear end head and the connecting arm, and the sealing ring surrounds the first through hole and the second through hole.

6. The three-degree-of-freedom material reclaiming manipulator according to any one of claims 1 to 5, characterized in that: The three-degree-of-freedom material-grabbing manipulator further comprises a rotating mechanism, which is transmission-connected to the connecting arm of the material-grabbing arm mechanism so as to drive the material-grabbing arm mechanism to rotate around the rotation center line of the rotating mechanism.

7. The three-degree-of-freedom material-retrieving manipulator according to claim 6, characterized in that: The three-degree-of-freedom material-retrieving manipulator further comprises an X-axis mechanism, which is transmission-connected to the rotating mechanism to drive the rotating mechanism to move along the X direction on a horizontal plane.

8. The three-degree-of-freedom material-retrieving manipulator according to claim 7, characterized in that: The three-degree-of-freedom material-retrieving manipulator further comprises a Y-axis mechanism, which is transmission-connected to the X-axis mechanism to drive the X-axis mechanism to move along the Y direction on a horizontal plane.

9. The three-degree-of-freedom material-retrieving manipulator according to claim 8, characterized in that: The Y-axis mechanism includes a mounting frame and a transmission assembly, a rotary driver and a slide plate arranged on the mounting frame; The transmission assembly includes a main synchronous wheel, a slave synchronous wheel and a synchronous belt connecting the two, wherein both the main synchronous wheel and the slave synchronous wheel are rotatably connected to the mounting frame; The rotary driver is drivingly connected to the main synchronous wheel; The slide plate is slidably matched with the mounting frame and is fixedly connected with the synchronous belt; The X-axis mechanism is fixed to the slide.

10. The three-degree-of-freedom material-retrieving manipulator according to claim 9, characterized in that: The Y-axis mechanism also includes a tensioning assembly, which includes a tensioning shaft, a tensioning wheel and a tensioning block; The tensioning shaft is passed through the mounting frame, and its axis is parallel to the axis of the main synchronous wheel; The tensioning wheel is arranged on the tensioning shaft and is located on the inner side or the outer side of the synchronous belt; The tension block is fixed to the mounting frame, and a top screw is threadedly connected thereon. The top screw can drive the tension shaft to move in a direction perpendicular to its own axis under a screwing-in condition, so that the tension wheel abuts against the synchronous belt.

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