Disassembling and assembling structure for auxiliary heating lamp tube suitable for tubular PECVD

Abstract

The utility model discloses a dismounting and mounting structure for an auxiliary heating lamp tube suitable for tubular PECVD, which comprises a flange and an auxiliary mounting mechanism fixedly connected with the flange and used for mounting the auxiliary heating lamp tube, the auxiliary mounting mechanism comprises a mounting seat connected with the flange, a supporting metal plate and an auxiliary mounting rod, the supporting metal plate is provided with a bottom surface and two side flanges, and the auxiliary mounting rod is arranged on the mounting seat. The mounting base is connected with the flanges on the two sides, a gap is reserved between the mounting base and the bottom face of the supporting metal plate, the auxiliary mounting rod is provided with a handle part and a supporting rod part, the handle part and the supporting rod part are integrally formed, and the supporting rod part penetrates through the gap, extends out of the supporting metal plate and is used for bearing the auxiliary heating lamp tube. And the auxiliary heating device and the inner thermocouple device can be conveniently and quickly assembled and disassembled without a complicated processing structure.

Description

Technical Field

[0001] The utility model relates to the technical field of tubular PECVD equipment, in particular to a disassembly and assembly structure of an auxiliary heating lamp tube suitable for tubular PECVD. Background Art

[0002] The thin film deposited by PECVD has excellent electrical properties, good substrate adhesion and excellent step coverage, which makes it widely used in the fields of ultra-large-scale integrated circuits, optoelectronic devices, MEMS, etc. The middle boat blade is evenly heated by extending the constant temperature time, but the extended heating time will greatly reduce the equipment's coating capacity. Therefore, in order to reduce the process time and improve the coating uniformity, an auxiliary heating mechanism will be added to the reaction chamber to perform auxiliary heating on the top and bottom of the graphite boat separately, so that the temperature uniformity of the graphite boat and the silicon wafers inside it is better to meet the process temperature requirements. The auxiliary heating device can shorten the process time, thereby improving the equipment's capacity and performance.

[0003] The auxiliary heating device must ensure good sealing while maintaining high temperature. The preferred material that meets this condition and is reasonably priced is quartz. However, quartz is easily damaged and can easily break during auxiliary heating installation, damaging the graphite boat and quartz tube. Therefore, it is necessary to design a tooling structure for disassembling and assembling the auxiliary heating lamp. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a disassembly and assembly structure for an auxiliary heating lamp tube suitable for tubular PECVD. The tooling is simple to manufacture and does not require complicated processing structures. The auxiliary heating lamp tube and the internal thermal couple device can be disassembled and assembled conveniently and quickly, bringing great convenience to production and use.

[0005] In order to solve the above technical problems, the technical solution adopted by the utility model is a disassembly and assembly structure for auxiliary heating lamp tubes suitable for tubular PECVD, including: a flange and an auxiliary mounting mechanism fixedly connected to the flange for installing the auxiliary heating lamp tube, the auxiliary mounting mechanism including a mounting seat connected to the flange, a supporting sheet metal and an auxiliary mounting rod, the supporting sheet metal having a bottom surface and two side ribs, the mounting seat is connected to the two side ribs and a gap is retained with the bottom surface of the supporting sheet metal, the auxiliary mounting rod has a handle portion and a support rod portion integrally formed with the handle portion, the support rod portion passes through the gap and extends to the outside of the supporting sheet metal for supporting the auxiliary heating lamp tube.

[0006] In a preferred embodiment of the present invention, a plurality of groups of partition plates are arranged parallel to each other on the supporting sheet metal, and an installation channel for placing the auxiliary heating lamp tube is formed between two adjacent groups of partition plates.

[0007] In a preferred embodiment of the present invention, the support rod portion of the auxiliary mounting rod can be selected to pass through any channel and extend out of the supporting sheet metal.

[0008] In a preferred embodiment of the present invention, the support rod has an inner groove matching the shape of the auxiliary heating lamp tube.

[0009] In a preferred embodiment of the present invention, two groups of reinforcing ribs are provided between the mounting seat and the supporting sheet metal.

[0010] In a preferred embodiment of the present invention, the mounting seat is fixedly connected to the supporting sheet metal via two sets of connecting plates, and a gap is retained with the bottom surface of the supporting sheet metal.

[0011] In a preferred embodiment of the present invention, the mounting base is screwed and fastened to the flange.

[0012] The beneficial effect of the utility model is that the disassembly and assembly structure of the auxiliary heating lamp tube suitable for tubular PECVD is simple in tooling and manufacturing, does not require complicated processing structures, and can conveniently and quickly disassemble and assemble the auxiliary heating lamp tube and the internal thermal couple device, bringing great convenience to production and use. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative work, among which:

[0014] Figure 1 It is a schematic diagram of the disassembly and assembly structure of the auxiliary heating lamp tube of the utility model;

[0015] Figure 2 It is a side view of the disassembly and assembly structure of the auxiliary heating lamp tube of the utility model;

[0016] Figure 3 It is a schematic diagram of the disassembly and assembly structure of the utility model during the installation of the auxiliary heating lamp tube;

[0017] Figure 4 This is a schematic diagram of the disassembly and assembly structure of the utility model after the auxiliary heating lamp tube is installed. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0019] See also Figure 1-2 The utility model discloses a disassembly and assembly structure for auxiliary heating lamp tubes suitable for tubular PECVD, comprising: a flange 1 and an auxiliary mounting mechanism 2 fixedly connected to the flange for mounting the auxiliary heating lamp tube. Specifically, the auxiliary mounting mechanism comprises a mounting seat 21 fastened to the flange by screws, a supporting sheet metal 22 and an auxiliary mounting rod 23. The supporting sheet metal has a bottom surface 221 and side ribs 222. The mounting seat is connected to the side ribs and a gap 24 is reserved with the bottom surface of the supporting sheet metal. The auxiliary mounting rod has a handle portion 231 and a supporting rod portion 232 integrally formed with the handle portion. The supporting rod portion passes through the gap and extends to the outside of the supporting sheet metal to support the auxiliary heating lamp tube. When working, please refer to Figure 3-4 , the operator will remove the auxiliary heating lamp 3 from Figure 3 The right end of the auxiliary heating lamp is inserted inward and pushed inward. As the auxiliary heating lamp tube is pushed inward, the hand-held part of the staff becomes shorter and shorter, and the front end of the auxiliary heating lamp tube can be connected with the supporting rod part of the auxiliary installation rod at this time. The supporting rod part has an inner groove 233 that matches the shape of the auxiliary heating lamp tube, and the supporting rod part supports the auxiliary heating lamp tube. With the support force of the support rod part on the auxiliary heating lamp tube, the staff can easily push the auxiliary heating lamp tube into the installation channel on the supporting sheet metal, and can complete the installation of the auxiliary heating lamp tube conveniently and quickly. The tooling structure is simple and does not require a complicated processing structure. It should be noted that the practical disassembly and assembly structure of the present invention can also be used to install the internal pair device.

[0020] Specifically, a plurality of groups of partition plates 25 are arranged parallel to each other on the support sheet metal, and an installation channel 26 for placing the auxiliary heating lamp tube is formed between two adjacent groups of partition plates, wherein the support rod portion of the auxiliary installation rod can be selected to pass through any channel and extend out of the support sheet metal, so as to facilitate the docking and insertion of the installed auxiliary heating lamp tube. Three groups of auxiliary heating lamp tubes can be placed on the support sheet metal of the utility model.

[0021] Specifically, two groups of reinforcing ribs 4 are provided between the mounting seat and the supporting sheet metal, and the reinforcing ribs are triangular structures, which improve the firmness and stability of the structure.

[0022] Specifically, the mounting base is fixedly connected to the supporting sheet metal through two sets of connecting plates 5, and disassembly and assembly are quick and convenient. A gap is reserved between the mounting base and the bottom surface of the supporting sheet metal to facilitate the staff to hold the auxiliary mounting rod and insert it into the supporting sheet metal to support one end of the auxiliary heating lamp tube.

[0023] The beneficial effects of the utility model are: the tooling is simple to manufacture, no complicated processing structure is required, the auxiliary heating lamp tube and the internal thermal couple device can be conveniently and quickly disassembled and assembled, and great convenience is brought to production and use.

[0024] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention specification, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A disassembly and assembly structure for auxiliary heating lamp tubes suitable for tubular PECVD, characterized in that: include: A flange and an auxiliary mounting mechanism fixedly connected to the flange for mounting an auxiliary heating lamp tube, the auxiliary mounting mechanism comprising a mounting seat connected to the flange, a supporting sheet metal and an auxiliary mounting rod, the supporting sheet metal having a bottom surface and two side ribs, the mounting seat being connected to the two side ribs and retaining a gap with the bottom surface of the supporting sheet metal, the auxiliary mounting rod having a handle portion and a supporting rod portion integrally formed with the handle portion, the support rod portion passing through the gap and extending outside the supporting sheet metal for supporting the auxiliary heating lamp tube.

2. The disassembly and assembly structure of the auxiliary heating lamp tube for tubular PECVD according to claim 1, characterized in that: A plurality of groups of partition plates are arranged parallel to each other on the supporting sheet metal, and an installation channel for placing the auxiliary heating lamp tube is formed between two adjacent groups of partition plates.

3. The disassembly and assembly structure of the auxiliary heating lamp tube for tubular PECVD according to claim 2, characterized in that: The supporting rod portion of the auxiliary mounting rod can be selected to pass through any channel and extend out of the supporting sheet metal.

4. The disassembly and assembly structure of the auxiliary heating lamp tube for tubular PECVD according to claim 1, characterized in that: The support rod portion has an inner groove matching the shape of the auxiliary heating lamp tube.

5. The disassembly and assembly structure of the auxiliary heating lamp tube for tubular PECVD according to claim 1, characterized in that: Two groups of reinforcing ribs are arranged between the mounting seat and the supporting sheet metal.

6. The disassembly and assembly structure of the auxiliary heating lamp tube for tubular PECVD according to claim 1, characterized in that: The mounting seat is fixedly connected to the supporting sheet metal through two groups of connecting plates, and a gap is reserved between the mounting seat and the bottom surface of the supporting sheet metal.

7. The disassembly and assembly structure of the auxiliary heating lamp tube for tubular PECVD according to claim 1, characterized in that: The mounting seat is screwed and fastened to the flange.

Images