Jig assembly

Abstract

The utility model provides a jig assembly which comprises a first jig and a second jig, the first jig comprises a first main body, the first main body is provided with a first opening penetrating through the first main body, the first opening is matched with the connecting end of a sheet fork, the sheet fork can penetrate through the first opening, and the connecting end is located in the first opening; the second jig comprises a second main body, the second main body is provided with a second opening penetrating through the second main body, and the sheet fork can penetrate through the second opening; and an alignment line is arranged on the first surface of the second main body and is used for determining the extending position of the sheet fork extending into the second opening. According to the jig assembly provided by the invention, the accuracy of taking and placing the wafer can be improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a fixture assembly. Background Art

[0002] During the wafer processing process, wafers are transferred between wafer boxes and wafer processing equipment through a transfer system (Load Lock).

[0003] refer to Figure 1 and 2 The transmission system includes a robot arm 10 and a fork 20 connected to the first end of the robot arm 10, the connecting end 21 of the fork is connected to the first end of the robot arm, and the supporting end 22 of the fork is used to support the wafer. After the fork 20 extends into the wafer box to take the wafer, the robot arm 10 moves under the drive of the motor, thereby driving the fork 20 to move, so that the fork 20 extends into the transmission slit (Slit) of the wafer processing equipment to transfer the wafer to the inside of the wafer processing equipment.

[0004] During the wafer transmission process, the following problems may occur:

[0005] When taking a wafer from a wafer box, the fork 20 is first inserted into the position between two wafers, and then the wafer located above the fork 20 is taken. During the process, the position where the fork 20 is inserted is determined by the human eye. The material of the fork 20 is usually transparent quartz, and the surface of the wafer has a reflective property. This makes it easy for the human eye to deviate when determining the position where the fork 20 is inserted, resulting in the wafer being scratched by the fork 20.

[0006] In addition, the second end of the robot arm 10 is connected to the motor via a screw 30. When the screw 30 is over-tightened or loosened, the fork 20 located at the first end of the robot arm 10 will cause a clockwise or counterclockwise rotational deviation, thereby causing the fork 20 to be unable to maintain relative levelness with the transfer slit, affecting the accuracy of the position of the wafer after it is transferred to the wafer processing equipment.

[0007] Therefore, it is necessary to develop a fixture to improve the accuracy of wafer picking and placement. Utility Model Content

[0008] The purpose of this application is to provide a fixture assembly for improving the accuracy of wafer picking and placement.

[0009] An embodiment of the present application provides a jig assembly, comprising: a first jig, the first jig comprising a first body, the first body being provided with a first opening penetrating the first body, the first opening matching the connecting end of a fork, the fork being able to pass through the first opening and having the connecting end located within the first opening; and a second jig, the second jig comprising a second body, the second body being provided with a second opening penetrating the second body, the fork being able to pass through the second opening; and an alignment line being provided on a first surface of the second body for determining the insertion position of the fork into the second opening.

[0010] In some embodiments, the first body is further connected to a disassembly portion, and the disassembly portion protrudes from a surface of the first body.

[0011] In some embodiments, the disassembly portion is provided with a through hole penetrating the disassembly portion.

[0012] In some embodiments, there are multiple disassembly parts, and the multiple disassembly parts are respectively located on both sides of the first opening.

[0013] In some embodiments, the disassembly portion is integrally connected to the first body.

[0014] In some embodiments, the first body is provided with a first marking notch; or a first mark is provided on the surface of the first body for distinguishing the top surface and the bottom surface of the first body.

[0015] In some embodiments, the second fixture is adapted to a wafer box, and the alignment line includes: a first alignment line, the first alignment line is used to align the first wafer; a second alignment line, the second alignment line is used to align the second wafer; and a third alignment line, the third alignment line is located between the first alignment line and the second alignment line, and is used to determine the insertion position.

[0016] In some embodiments, the third alignment line has a different color than the first alignment line and the second alignment line.

[0017] In some embodiments, a snap-in groove is disposed on the second surface of the second body, and the snap-in groove is adapted to a column of the wafer box for snap-fitting the second body to the column.

[0018] In some embodiments, the second body is provided with a second marking notch; or a second mark is provided on the surface of the second body for distinguishing the top surface and the bottom surface of the second body.

[0019] The beneficial effects of the fixture assembly provided by the present application include but are not limited to the following:

[0020] The first fixture provided in the present application is adapted to the wafer processing equipment, and the connecting end of the fork is confined within the first opening. The connecting end of the fork refers to the end at which the fork is connected to the robotic arm. When the robotic arm is over-tightened or loosened due to screws, causing the fork located at the first end of the robotic arm to rotate clockwise or counterclockwise, the connecting end of the fork is confined within the first opening, which limits the rotational deviation of the fork, thereby ensuring that the wafer is still transferred horizontally to the wafer processing equipment.

[0021] The second fixture provided in the present application is adapted to the wafer box. By setting an alignment line on the first surface of the second main body, the insertion position of the fork into the second opening is determined to reduce problems such as wafer scratches caused by improper insertion of the fork.

[0022] In addition, since the second opening only exposes two wafers, the visual interference of other wafers to the operator can be effectively avoided. At the same time, the wafers are aligned and the insertion position of the fork is determined through different alignment lines, so that different operators can use the fork to take wafers from the wafer box with a unified standard, avoiding mistakes such as scratches on the wafer due to individual judgment differences. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The following figures describe in detail the exemplary embodiments disclosed in this application. The same reference numerals represent similar structures in several views of the drawings. Those skilled in the art will understand that these embodiments are non-limiting, exemplary embodiments, and the drawings are only for the purpose of illustration and description, and are not intended to limit the scope of this application. Other embodiments may also accomplish the inventive intent in this application. It should be understood that the drawings are not drawn to scale.

[0024] in:

[0025] Figure 1 It is a schematic diagram of the structure of the robot arm and the fork without deflection;

[0026] Figure 2 It is a schematic diagram of the structure in which the robot arm and the fork are deflected;

[0027] Figure 3 is a schematic structural diagram of a first fixture according to some embodiments of the present application;

[0028] Figure 4 for Figure 3 A front view of the first fixture shown;

[0029] Figure 5 is a schematic structural diagram of a second fixture according to some embodiments of the present application; and

[0030] Figure 6 for Figure 5 A front view of the second fixture is shown. DETAILED DESCRIPTION

[0031] The following description provides specific application scenarios and requirements of the present application, with the purpose of enabling those skilled in the art to make and use the content in the present application. It will be apparent to those skilled in the art that various local modifications to the disclosed embodiments are apparent, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the present application. Therefore, the present application is not limited to the embodiments shown, but to the widest scope consistent with the claims.

[0032] The present application provides a jig assembly, comprising: a first jig, the first jig comprising a first body, the first body being provided with a first opening penetrating the first body, the first opening matching the connecting end of a fork, the fork being able to pass through the first opening and having the connecting end located within the first opening; and a second jig, the second jig comprising a second body, the second body being provided with a second opening penetrating the second body, the fork being able to pass through the second opening; and an alignment line being provided on a first surface of the second body for determining the insertion position of the fork into the second opening.

[0033] The fixture assembly provided in the present application is respectively adapted to wafer processing equipment and wafer boxes.

[0034] The first fixture provided in the present application is adapted to the wafer processing equipment, and the connecting end of the fork is confined within the first opening. The connecting end of the fork refers to the end at which the fork is connected to the robotic arm. When the robotic arm is over-tightened or loosened due to screws, causing the fork located at the first end of the robotic arm to rotate clockwise or counterclockwise, the connecting end of the fork is confined within the first opening, which limits the rotational deviation of the fork, thereby ensuring that the wafer is still transferred horizontally to the wafer processing equipment.

[0035] The second fixture provided in the present application is adapted to the wafer box. By setting an alignment line on the first surface of the second main body, the insertion position of the fork into the second opening is determined to reduce problems such as wafer scratches caused by improper insertion of the fork.

[0036] The fixture assembly provided in the present application will be described in detail below in conjunction with specific embodiments and drawings.

[0037] refer to Figure 3 and 4 The present application provides a fixture assembly, including a first fixture 100 and a second fixture 200 .

[0038] The first fixture 100 provided in the present application includes a first body 101, and the first body 101 is provided with a first opening 102 that penetrates the first body 101, and the first opening 102 matches the connecting end of the fork. The fork can pass through the first opening 102 and make the connecting end located in the first opening 102.

[0039] In some embodiments, the first fixture 100 is adapted to a slot of a wafer processing device for transferring wafers. Specifically, the first fixture 100 can be snapped into the slot.

[0040] In some embodiments, the length of the first body 101 is 20 to 23 cm, such as 20 cm, 21 cm or 23 cm; the width of the first body 101 is 1.6 to 2.0 cm, such as 1.6 cm, 1.8 cm or 2.0 cm, so as to fit into the slit of common wafer processing equipment. Figure 4 In the X direction, the width direction of the first body 101 is Figure 4 In addition, the thickness of the first body 101 is not limited and can be adjusted as needed.

[0041] In some embodiments, the first body 101 is provided with a chamfer to reduce damage to the first body 101 during use and also to make it easier for the first body 101 to be inserted into the slit.

[0042] In some embodiments, the first opening 102 is rectangular or quasi-rectangular (e.g., a rectangle with rounded corners), and the length of the first opening 102 is 9.6-9.8 cm, such as 9.6 cm, 9.7 cm, or 9.8 cm; the width of the first opening 102 is 1.2-1.4 cm, such as 1.2 cm, 1.3 cm, or 1.4 cm, so as to be compatible with common forks. It should be noted that the length direction of the first opening 102 is Figure 4 In the X direction, the width direction of the first opening 102 is Figure 4 Y direction shown.

[0043] In some embodiments, the symmetry axis of the first opening 102 parallel to the width direction coincides with the symmetry axis of the first body 101 parallel to the width direction. The distance between the first long side of the first opening 102 and the first long side of the first body 101 is smaller than the distance between the second long side of the first opening 102 and the second long side of the first body 101. For example, the distance between the first long side of the first opening 102 and the first long side of the first body 101 is 0.2 cm; the distance between the second long side of the first opening 102 and the second long side of the first body 101 is 0.3 cm. During the use of the first fixture 100, the first long side of the first opening 102 is the side close to the top surface of the first fixture 100, and the second long side of the first opening 102 is the side close to the bottom surface of the first fixture 100.

[0044] In some embodiments, the first body 101 is further connected to a disassembly portion 103, and the disassembly portion 103 protrudes from the surface of the first body 101. An operator grabs the disassembly portion 103 to take the first body 101 out of the slit.

[0045] In some embodiments, the disassembly portion 103 is provided with a through hole 103a penetrating the disassembly portion 103. An operator can insert a finger into the through hole 103a to more conveniently remove the first body 101 from the slit.

[0046] In some embodiments, there are multiple disassembly portions 103 , for example, 2, 3 or 4. Preferably, there are 2 disassembly portions 103 . The multiple disassembly portions 103 are respectively located on both sides of the first opening 102 .

[0047] In some embodiments, the disassembly portion 103 is integrally connected to the first body 101 .

[0048] In some embodiments, the first body 101 is provided with a first marking notch 104 ; or a first mark, such as TOP or the like, is provided on the surface of the first body 101 to distinguish the top surface and the bottom surface of the first body 101 .

[0049] In some embodiments, the material of the first fixture 100 includes at least one of a metal material or a polymer material. In some embodiments, the material of the first fixture 100 is stainless steel. In other embodiments, the material of the first fixture 100 is polytetrafluoroethylene.

[0050] The second fixture 200 provided in the present application includes a second body 201 , and the second body 201 is provided with a second opening 202 penetrating the second body 201 , and the fork can pass through the second opening 202 .

[0051] In some embodiments, the second fixture 200 is adapted to a wafer box, and the fork can pass through the second opening 202 to take a wafer from the wafer box.

[0052] In some embodiments, the length of the second body 201 is 17-18 cm, such as 17 cm, 17.2 cm, 17.6 cm or 18 cm; the width of the second body 201 is 3.8-4.2 cm, such as 3.8 cm, 4.0 cm or 4.2 cm, so as to be compatible with common wafer boxes. It should be noted that the length direction of the second body 201 is Figure 6 In the X direction, the width direction of the second body 201 is Figure 6 In addition, the thickness of the second body 201 is not limited and can be adjusted as needed.

[0053] In some embodiments, the second opening 202 is rectangular or quasi-rectangular (e.g., a rectangle with rounded corners), the width of the second opening 202 is 1.0 to 1.2 cm, such as 1.0 cm, 1.1 cm, or 1.2 cm, and the length of the second opening 202 is not limited, as long as the wafer fork can be allowed to take the wafer. It should be noted that the length direction of the second opening 202 is Figure 6 In the X direction, the width direction of the second opening 202 is Figure 6 Y direction shown.

[0054] In some embodiments, the symmetry axis of the second opening 202 parallel to the width direction coincides with the symmetry axis of the second body 201 parallel to the width direction; and the symmetry axis of the second opening 202 parallel to the length direction coincides with the symmetry axis of the second body 201 parallel to the length direction.

[0055] The first surface of the second body 201 provided in the present application is provided with an alignment line 203 for determining the insertion position of the fork into the second opening 202. The first surface is the side of the second body 201 facing the operator during operation.

[0056] In some embodiments, the alignment line 203 includes: a first alignment line 203a, the first alignment line 203a is used to align the first wafer; a second alignment line 203b, the second alignment line 203b is used to align the second wafer; and a third alignment line 203c, the third alignment line 203c is located between the first alignment line 203a and the second alignment line 203b, and is used to determine the extension position.

[0057] When it is necessary to take the wafer from the wafer box, the second fixture 200 is moved so that the human eye can observe two wafers through the second opening 202, that is, the first wafer and the second wafer, the first wafer is located above the second wafer, the first alignment line 203a and the second alignment line 203b are aligned with the first wafer and the second wafer respectively, and the fork is extended into the second opening 202 along the third alignment line 203c to grab the first wafer.

[0058] In some embodiments, the first alignment line 203a is disposed close to the top surface of the second fixture 200; the second alignment line 203b is disposed close to the bottom surface of the second fixture 200. In some embodiments, the vertical distance between the first alignment line 203a and the first long side of the second opening 202 along the Y direction is 2.1-2.2 mm, for example, 2.1 mm, 2.15 mm or 2.2 mm, and the first long side of the second opening 202 is the side of the second opening 202 close to the top surface of the second fixture 200.

[0059] In some embodiments, the distance between the first alignment line 203a and the second alignment line 203b is 5.6-6.0 mm, for example, 5.6 mm, 5.8 mm or 6.0 mm.

[0060] In some embodiments, the distance between the third alignment line 203c and the second alignment line 203b is greater than the distance between the third alignment line 203c and the first alignment line 203a, so as to prevent the fork from touching the second wafer when taking the first wafer. In some embodiments, the distance between the third alignment line 203c and the second alignment line 203b is 4.4-4.5 mm, for example, 4.4 mm, 4.45 mm or 4.5 mm.

[0061] In some embodiments, the color of the third alignment line 203c is different from the color of the first alignment line 203a and the second alignment line 203b, so that the operator can better align the fork with the third alignment line 203c. In some embodiments, the third alignment line 203c is red, and the first alignment line 203a and the second alignment line 203b are black.

[0062] In some embodiments, a snap-in groove 204 is provided on the second surface of the second body 201, and the snap-in groove 204 is adapted to the column of the wafer box for snapping the second body 201 to the column, and the second body 201 can slide along the column to adjust the position of the alignment line.

[0063] In some embodiments, the second body 201 is provided with a second marking notch 205 ; or the surface of the second body 201 is provided with a second mark, for example, words such as TOP are used to distinguish the top surface and the bottom surface of the second body 201 .

[0064] In some embodiments, the material of the second fixture 200 includes at least one of a metal material or a polymer material. In some embodiments, the material of the second fixture 200 is stainless steel. In other embodiments, the material of the second fixture 200 is polytetrafluoroethylene.

[0065] The beneficial effects of the fixture assembly provided by the present application include but are not limited to the following:

[0066] The first fixture provided in the present application is adapted to the wafer processing equipment, and the connecting end of the fork is confined within the first opening. The connecting end of the fork refers to the end at which the fork is connected to the robotic arm. When the robotic arm is over-tightened or loosened due to screws, causing the fork located at the first end of the robotic arm to rotate clockwise or counterclockwise, the connecting end of the fork is confined within the first opening, which limits the rotational deviation of the fork, thereby ensuring that the wafer is still transferred horizontally to the wafer processing equipment.

[0067] The second fixture provided in the present application is adapted to the wafer box. By setting an alignment line on the first surface of the second main body, the insertion position of the fork into the second opening is determined to reduce problems such as wafer scratches caused by improper insertion of the fork.

[0068] In addition, since the second opening only exposes two wafers, the visual interference of other wafers to the operator can be effectively avoided. At the same time, the wafers are aligned and the insertion position of the fork is determined through different alignment lines, so that different operators can use the fork to take wafers from the wafer box with a unified standard, avoiding mistakes such as scratches on the wafer due to individual judgment differences.

[0069] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other beneficial effects that may be obtained.

[0070] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this application. Such modifications, improvements and corrections are suggested in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this application.

[0071] It should be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", and "fix" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a rotating connection or a sliding connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood in combination with specific circumstances.

[0072] In addition, when terms such as "first", "second", and "third" are used in the specification of this application to describe various features, these terms are only used to distinguish these features and cannot be understood as indicating or implying the relationship between the features, the relative importance, or implicitly indicating the number of features indicated.

[0073] In addition, the present specification describes exemplary embodiments by reference to idealized exemplary cross-sectional views and / or plan views and / or stereograms. Therefore, differences from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be interpreted as being limited to the shapes of the regions shown herein, but should include deviations in shapes caused by, for example, manufacturing. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the actual shapes of the regions of the device nor to limit the scope of the exemplary embodiments.

[0074] At the same time, the present application uses specific words to describe the embodiments of this specification. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in the present application does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0075] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus help understand one or more embodiments of the invention, in the above description of the embodiments of this application, multiple features are sometimes combined into one embodiment, figure or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims. In fact, the features of the embodiments are less than all the features of the single embodiment disclosed above.

[0076] Finally, it should be understood that the embodiments described in this application are only used to illustrate the principles of the embodiments of the present application. Other variations may also fall within the scope of the present application. Therefore, as an example and not a limitation, the alternative configurations of the embodiments of the present application may be considered to be consistent with the teachings of the present application. Accordingly, the embodiments of the present application are not limited to the embodiments explicitly introduced and described in the present application.

Claims

1. A fixture assembly, characterized in that: include: A first fixture, the first fixture comprising a first body, the first body being provided with a first opening penetrating the first body, the first opening being matched with the connecting end of the fork, the fork being able to pass through the first opening, and the connecting end being located in the first opening; as well as A second jig, the second jig comprising a second body, the second body being provided with a second opening penetrating the second body, the fork being able to pass through the second opening; and An alignment line is provided on the first surface of the second body for determining the insertion position of the fork into the second opening.

2. The fixture assembly according to claim 1, characterized in that: The first body is also connected with a disassembly portion, and the disassembly portion protrudes from the surface of the first body.

3. The fixture assembly according to claim 2, characterized in that: The disassembly portion is provided with a through hole penetrating the disassembly portion.

4. The fixture assembly according to claim 2, characterized in that: There are multiple disassembly parts, and the multiple disassembly parts are respectively located on both sides of the first opening.

5. The fixture assembly according to claim 2, characterized in that: The disassembly portion is integrally connected to the first body.

6. The fixture assembly according to claim 1, characterized in that: The first body is provided with a first marking notch; or the surface of the first body is provided with a first mark for distinguishing the top surface and the bottom surface of the first body.

7. The fixture assembly according to claim 1, characterized in that: The second fixture is adapted to the wafer box, and the alignment line includes: a first alignment line, the first alignment line being used to align a first wafer; a second alignment line for aligning a second wafer; and A third alignment line is located between the first alignment line and the second alignment line and is used to determine the insertion position.

8. The fixture assembly according to claim 7, characterized in that: The third alignment line has a color different from the first alignment line and the second alignment line.

9. The fixture assembly according to claim 8, characterized in that: A clamping groove is provided on the second surface of the second body, and the clamping groove is adapted to the column of the wafer box and is used for clamping the second body with the column.

10. The fixture assembly according to claim 1, characterized in that: The second body is provided with a second marking notch; or the surface of the second body is provided with a second mark for distinguishing the top surface and the bottom surface of the second body.

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