Motion structure and substrate table
By designing a moving structure including a fixed block, a rotating seat and a lifting block, the bearing and mating structure are used to reduce wear and resistance caused by high temperature, the problem of unstable movement of the substrate table under high temperature conditions is solved, and the stability of the equipment and product quality are improved.
Patent Information
- Application Number
- CN202421760041.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-24
- Publication Date
- 2025-05-06
- Estimated Expiration
- 2034-07-24
AI Technical Summary
When the existing substrate table moves under high temperature conditions, the moving resistance increases due to thermal expansion of the components, severe wear, and may even cause jamming, which affects the life of the equipment, production stability and product quality.
A moving structure is designed, including a fixed block, a rotating seat and a lifting block, which reduces wear and rotation resistance through the bearing, and realizes the circumferential positioning of the lifting block and the fixed block through the matching structure of the limiting block and the limiting groove, and separates the movement methods to reduce the movement resistance and component wear caused by high temperature.
It improves the motion smoothness of the substrate table under high temperature conditions, extends the service life of the equipment, and enhances the stability of production and product quality.
Smart Images
Figure CN222834387U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor production, in particular to a motion structure and a substrate table. Background Art
[0002] In the coating process of vacuum coating equipment, the substrate stage is one of the important parts of the equipment. During the coating process, the substrate on which the thin film is deposited is in the substrate stage. The stability of the substrate stage movement affects the coating quality. The substrate usually needs to be heated to a higher temperature (such as 1000°C), and the moving parts of the substrate stage also need to withstand higher temperatures. However, the current substrate stage movement structure will increase the movement resistance due to thermal expansion of the components when subjected to high temperatures. During movement, more wear will occur between adjacent parts, and even jamming may occur, which will seriously affect the life of the equipment, production stability and product quality. Utility Model Content
[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model proposes a motion structure and a substrate stage, which can improve the motion smoothness of the substrate stage at high temperature, and improve the service life, stability and product quality.
[0004] A motion structure according to an embodiment of the first aspect of the utility model includes:
[0005] A fixed block, a rotating seat and a lifting block, the rotating seat is rotatably connected to the fixed block, and a bearing is provided between the fixed block and the rotating seat, the lifting block can move along its axial direction and be slidably connected to the fixed block, the lifting block and the fixed block are matched through a matching structure, the matching structure includes a limit block and a limit groove, the limit groove extends along the axial direction of the fixed block, the limit block can be embedded in the limit groove along the radial direction of the lifting block, so as to realize the circumferential positioning of the lifting block and the fixed block.
[0006] A motion structure according to an embodiment of the first aspect of the utility model has at least the following beneficial effects: this embodiment is provided with a fixed block, a rotating seat and a lifting block, the rotating seat is rotatably connected to the fixed block, and a bearing is provided between the fixed block and the rotating seat, which helps to reduce wear and rotational resistance and improve stability when working at high temperatures; the lifting block can move along its axial direction and be slidably connected to the fixed block, the lifting block and the fixed block are matched with each other through a matching structure, the matching structure includes a limit block and a limit groove, the limit groove extends along the axial direction of the fixed block, the limit block can be embedded in the limit groove along the radial direction of the lifting block, so as to realize the circumferential positioning of the lifting block and the fixed block, and the lifting block and the fixed block are respectively lifted and rotated by separately providing the lifting block and the fixed block, thereby reducing the motion resistance and component wear caused by high temperature.
[0007] According to an embodiment of the first aspect of the utility model, the matching structure includes a first matching structure, and the first matching structure includes a limiting block provided on the fixing block and a limiting groove provided on the lifting block.
[0008] According to the embodiment of the first aspect of the utility model, the fixed block is covered on the radial outer periphery of the lifting block, the limiting groove is located on the radial outer peripheral wall of the lifting block, and the limiting block is located on the radial inner wall of the fixed block.
[0009] According to an embodiment of the first aspect of the utility model, the matching structure includes a second matching structure, and the second matching structure includes a limiting groove provided on the fixing block and a limiting block provided on the lifting block.
[0010] According to the embodiment of the first aspect of the utility model, the fixed block is covered on the radial outer periphery of the lifting block, the limiting block is located on the radial outer periphery of the lifting block and extends outward, and the limiting groove is located on the radial inner wall of the fixed block.
[0011] According to the embodiment of the first aspect of the utility model, the bearing is matched with the radial outer peripheral wall of the fixed block, and the rotating seat is covered on the radial outer periphery of the fixed block.
[0012] According to the embodiment of the first aspect of the utility model, bearings are provided at both ends of the fixed block, a reference block is provided on the fixed block, the reference block is located between the two bearings, the reference block extends radially of the fixed block, and the side walls at both ends of the reference block are respectively abutted against the side walls of the two bearings.
[0013] According to the embodiment of the first aspect of the utility model, both ends of the fixed block are provided with clamping grooves, and springs are buckled on the clamping grooves, and the axial positioning of the fixed block and the rotating seat can be achieved through the springs.
[0014] According to the embodiment of the first aspect of the utility model, the two ends of the lifting block are respectively provided with a first connecting end and a second connecting end extending outward along the axial direction thereof, and the first connecting end is located at the top of the lifting block.
[0015] According to an embodiment of the second aspect of the utility model, there is provided a substrate stage, comprising the above-mentioned motion structure, including:
[0016] A mounting seat, a rotating seat is rotatably connected to the mounting seat, and a driving rod connected to the lifting block is provided on the mounting seat;
[0017] The heating component is fixedly connected to the end of the lifting block away from the mounting seat.
[0018] A substrate stage according to the second aspect of the present invention has at least the following beneficial effects:
[0019] Compared with the prior art, a motion structure and a substrate stage are provided with a rotating seat, the rotating seat is provided with a fixed block and a lifting block, and bearings connected to the rotating seat are provided at both ends of the fixed block, which helps to reduce wear and rotational resistance and improve stability when working at high temperatures; the lifting block can move along its axial direction and be slidably connected to the fixed block, the lifting block and the fixed block are matched with each other through a matching structure, the matching structure includes a limit block and a limit groove, the limit block can be embedded in the limit groove along the radial direction of the lifting block to achieve circumferential positioning of the lifting block and the fixed block, and the lifting block and the fixed block are separately provided to perform lifting and rotating movements, thereby reducing motion resistance and component wear caused by high temperature, thereby helping to improve the motion stability of the substrate stage and benefiting to improving product quality.
[0020] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:
[0022] Figure 1 A cross-sectional view of a motion structure and a substrate stage in an embodiment of the second aspect of the utility model;
[0023] Figure 2 A cross-sectional view of a motion structure in an embodiment of the first aspect of the utility model;
[0024] Figure 3 A schematic diagram of a second matching structure in an embodiment of the first aspect of the utility model;
[0025] Figure 4 for Figure 1 A magnified view of center.
[0026] Reference numerals:
[0027] Mounting seat 100; driving rod 101; heating assembly 102; reed 103; positioning edge 104;
[0028] Rotating seat 110; fixing block 111; lifting block 112; bearing 113; limiting block 114; limiting groove 115; reference block 116; clamping groove 117; first connecting end 118; second connecting end 119. DETAILED DESCRIPTION
[0029] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.
[0030] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0031] In the description of the present utility model, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.
[0032] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.
[0033] Reference Figure 2 A motion structure in an embodiment of the first aspect of the utility model includes a fixed block 111, a rotating seat 110 and a lifting block 112. The fixed block 111 is rotatably connected to the rotating seat 110, and a bearing 113 is provided between the fixed block 111 and the rotating seat 110, which helps to reduce wear and rotation resistance and improve stability when working at high temperatures; the lifting block 112 can move along its axial direction and be slidably connected to the fixed block 111. The lifting block 112 and the fixed block 111 are matched with each other through a matching structure. The matching structure includes a limit block 114 and a limit groove 115. The limit groove 115 extends along the axial direction of the fixed block 111. The limit block 114 can be embedded in the limit groove 115 along the radial direction of the lifting block 112 to realize the circumferential positioning of the lifting block 112 and the fixed block 111. The lifting block 112 and the fixed block 111 are separately provided to perform lifting and rotating movements respectively, thereby reducing the motion resistance and component wear caused by high temperature.
[0034] Specifically, refer to Figure 2The bearing 113 is matched with the radial outer peripheral wall of the fixed block 111, and the rotating seat 110 is covered on the radial outer periphery of the fixed block 111. Furthermore, bearings 113 are provided at both ends of the fixed block 111, which helps to improve the connection stability between the fixed block 111 and the rotating seat 110. It can be understood that in this embodiment, the bearing 113 uses a deep groove ball bearing, which can simultaneously bear the axial load and radial load between the fixed block 111 and the rotating seat 110. Further, a reference block 116 is provided on the fixed block 111, and the reference block 116 is located between the two bearings 113. The reference block 116 extends radially from the fixed block 111, and the side walls at both ends of the reference block 116 are respectively abutted against the side walls of the two bearings 113, so that the relative positions of the bearing 113 and the fixed block 111 can be conveniently located during installation, thereby achieving rapid installation. Furthermore, a positioning edge 104 is provided at one end of the mounting seat 100, and the positioning edge 104 extends toward the fixed block 111. Along the rotation axis direction of the fixed block 111, the outer side wall of the bearing 113 away from the reference block 116 abuts against the side wall of the positioning edge 104, so that the bearing 113 is positioned in the mounting seat 100, thereby realizing the axial positioning of the fixed block 111 in the mounting seat 100. Further, referring to Figure 4 A slot 117 is provided at both ends of the fixed block 111, and a spring 103 is buckled on the slot 117. The side wall of the spring 103 abuts against the side wall of the bearing 113 away from the reference block 116, so that the axial positioning of the fixed block 111 and the rotating seat 110 is achieved through the spring 103.
[0035] Reference Figure 2 , the matching structure includes a first matching structure, and the first matching structure includes a limit block 114 provided on the fixed block 111 and a limit groove 115 provided on the lifting block 112. It can be understood that the fixed block 111 has an inner cavity, and the fixed block 111 is covered on the radial outer periphery of the lifting block 112, that is, the radial inner wall of the fixed block 111 is matched with the radial outer wall of the lifting block 112. At this time, when the lifting block 112 and the fixed block 111 are connected through the first matching structure, the limit groove 115 is located on the radial outer peripheral wall of the lifting block 112 and is recessed inward along the radial direction of the lifting block 112. The limit block 114 is located on the radial inner wall of the fixed block 111, and the limit block 114 extends toward the lifting block 112 along the radial direction of the fixed block 111 and is embedded in the limit groove 115, so as to realize the circumferential positioning of the lifting block 112 and the fixed block 111, and prevent the lifting block 112 and the fixed block 111 from rotating relative to each other. Furthermore, along the circumference of the fixing block 111 , at least one group of the limiting grooves 115 and the limiting blocks 114 are provided for cooperation. In the embodiment of the present application, two groups are provided, which helps to improve the cooperation stability.
[0036] Reference Figure 3In some embodiments, the matching structure includes a second matching structure, and the second matching structure includes a limiting groove 115 provided on the fixed block 111 and a limiting block 114 provided on the lifting block 112. It can be understood that the fixed block 111 has an inner cavity, and the lifting block 112 can slide in the inner cavity. The fixed block 111 is covered on the radial outer periphery of the lifting block 112. When the lifting block 112 and the fixed block 111 are connected through the second matching structure, the limiting block 114 is located on the radial outer periphery of the lifting block 112 and extends outward, and the limiting groove 115 is located on the radial inner wall of the fixed block 111. When the limiting block 114 is inserted into the limiting groove 115, the circumferential positioning of the lifting block 112 and the fixed block 111 can also be achieved to prevent the lifting block 112 and the fixed block 111 from rotating relative to each other.
[0037] In other embodiments, the lifting block 112 may be provided with an inner cavity, and the fixed block 111 is slidably connected to the inner cavity of the lifting block 112, that is, the lifting block 112 is covered on the radial outer periphery of the fixed block 111, and the lifting block 112 and the fixed block 111 may be connected through a first matching structure or a second matching structure. It can be understood that when the lifting block 112 and the fixed block 111 are connected through the first matching structure, the limiting groove 115 is located on the radial inner circumferential wall of the lifting block 112, the limiting block 114 is located on the radial outer wall of the fixed block 111, and the limiting block 114 extends toward the lifting block 112 along the radial direction of the fixed block 111 and is embedded in the limiting groove 115; when the lifting block 112 and the fixed block 111 are connected through the second matching structure, the limiting groove 115 is located on the radial outer wall of the fixed block 111, and the limiting block 114 is located on the radial inner wall of the lifting block 112 and extends toward the fixed block 111 to be inserted into the limiting groove 115.
[0038] Reference Figure 1 A substrate stage in an embodiment of the second aspect of the utility model includes the above-mentioned motion structure, which also includes a mounting seat 100 and a heating component 102. The rotating seat 110 is rotatably connected to the mounting seat 100. The mounting seat 100 is provided with a driving rod 101 connected to a lifting block 112. Correspondingly, the two ends of the lifting block 112 are respectively provided with a first connecting end 118 and a second connecting end 119 extending outward along its axial direction. The first connecting end 118 is located at the top of the lifting block 112. The driving rod 101 is connected to the first connecting end 118 and controls the lifting and lowering movement of the lifting block 112. At the same time, the heating component 102 is fixedly connected to the second connecting end 119 of the lifting block 112 away from the mounting seat 100. Since the lifting block 112 and the fixed block 111 are buckled through the limit block 114, the driving rod 101 can drive the lifting block 112 to move up and down while allowing the mounting seat 100 to rotate around the fixed block 111.
[0039] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.
Claims
1. A motion structure, characterized in that: include: A fixed block, a rotating seat and a lifting block, the rotating seat is rotatably connected to the fixed block, and a bearing is provided between the fixed block and the rotating seat, the lifting block can move along its axial direction and is slidably connected to the fixed block, the lifting block and the fixed block are matched through a matching structure, the matching structure includes a limit block and a limit groove, the limit groove extends along the axial direction of the fixed block, the limit block can be embedded in the limit groove along the radial direction of the lifting block, so as to realize the circumferential positioning of the lifting block and the fixed block.
2. A motion structure according to claim 1, characterized in that: The matching structure includes a first matching structure, and the first matching structure includes the limiting block provided on the fixing block and the limiting groove provided on the lifting block.
3. A motion structure according to claim 2, characterized in that: The fixing block is covered on the radial outer periphery of the lifting block, the limiting groove is located on the radial outer peripheral wall of the lifting block, and the limiting block is located on the radial inner wall of the fixing block.
4. A motion structure according to claim 1, characterized in that: The matching structure includes a second matching structure, and the second matching structure includes the limiting groove provided on the fixing block and the limiting block provided on the lifting block.
5. A motion structure according to claim 4, characterized in that: The fixing block is covered on the radial outer periphery of the lifting block, the limiting block is located on the radial outer periphery of the lifting block and extends outward, and the limiting groove is located on the radial inner wall of the fixing block.
6. A motion structure according to claim 1, characterized in that: The bearing is matched with the radial outer peripheral wall of the fixing block, and the rotating seat is covered on the radial outer periphery of the fixing block.
7. A motion structure according to claim 1, characterized in that: The bearings are disposed at both ends of the fixed block, a reference block is disposed on the fixed block, the reference block is located between the two bearings, the reference block extends radially from the fixed block, and the side walls at both ends of the reference block abut against the side walls of the two bearings respectively.
8. A motion structure according to claim 7, characterized in that: Both ends of the fixing block are provided with clamping grooves, and springs are buckled on the clamping grooves, and the axial positioning of the fixing block and the rotating seat can be achieved through the springs.
9. A motion structure according to claim 1, characterized in that: The two ends of the lifting block are respectively provided with a first connecting end and a second connecting end extending outwardly along the axial direction thereof, and the first connecting end is located at the top of the lifting block.
10. A substrate stage, characterized in that: A motion structure according to any one of claims 1 to 9, comprising a rotating seat, wherein a fixed block and a lifting block are arranged in the rotating seat, wherein: A mounting seat, the rotating seat is rotatably connected to the mounting seat, and the mounting seat is provided with a driving rod connected to the lifting block; The heating component is fixedly connected to the end of the lifting block away from the mounting seat.