Clamp for silicon rod cutting
By designing a silicon rod cutting fixture that includes a limiting assembly and a cylinder-driven silicon rod cutting fixture, the problem that existing fixtures cannot adapt to different sizes of silicon rods is solved, and an efficient and stable cutting process is achieved.
Patent Information
- Application Number
- CN202421975382.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-15
- Publication Date
- 2025-06-24
- Estimated Expiration
- 2034-08-15
AI Technical Summary
The existing cutting fixtures cannot adjust the clamps and cannot adapt to silicon rods of different sizes, resulting in low cutting efficiency and reduced practicality.
A clamp including a base plate, body, limiting assembly, side box, cylinder, slide plate, support rod, slide rod and clamp are designed. The slide plate is driven down through the cylinder to drive the support rod to rotate. The slide rod drives the clamp to clamp to the center to adapt to silicon rods of different sizes.
The stable clamping of silicon rods of different sizes is achieved, preventing deviation during cutting, and improving the cutting efficiency and practicality of the fixture.
Smart Images
Figure CN223013602U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of wafer manufacturing, in particular to a fixture for cutting silicon rods. Background Art
[0002] Wafer manufacturing technology involves processing semiconductor materials such as silicon into precision wafers suitable for use in electronic devices. The key clamping step involves stably fixing the silicon rod or wafer to facilitate precise cutting and polishing, ensuring no damage and high flatness, providing a basis for the manufacture of integrated circuits.
[0003] In the prior art, some cutting fixtures cannot adjust the clamping plates, which makes them unable to adapt to more different sizes of silicon rods. When cutting silicon rods of different sizes, the machine needs to be switched, wasting time and reducing the practicality of this device. Therefore, a fixture for cutting silicon rods is proposed to solve the above problems. Summary of the Utility Model
[0004] To make up for the above deficiencies, the utility model provides a fixture for cutting silicon rods, aiming to improve the problem that some cutting fixtures in the prior art cannot adjust the clamping plates, which makes them unable to adapt to more different sizes of silicon rods and reduces the practicality of this device.
[0005] To achieve the above object, the utility model adopts the following technical scheme:
[0006] A fixture for cutting silicon rods includes a bottom plate. The top end of the bottom plate is fixedly connected with a body. The top end of the body is fixedly connected with a limiting component for restricting the movement of the silicon rod. Both sides of the top end of the bottom plate are fixedly connected with side boxes. The inner wall of the side box is fixedly connected with a cylinder. The driving end of the cylinder is fixedly connected with a sliding plate. The front and rear sides of the inner wall of the side box are both slidably connected with limiting columns. The top end of the sliding plate is rotatably connected with two rotating columns. The outer part of the rotating column is fixedly connected with a support rod. The other end of the support rod is rotatably connected with a sliding rod. The inner side walls of the two sliding rods are both fixedly connected with clamping plates. An inlet is opened at the front end of the body. The top end of the bottom plate is fixedly connected with a blanking frame. A groove is opened in the inner wall of the bottom plate. The inner wall of the groove is slidably connected with a buffer component for reducing the impact force when the silicon wafer drops.
[0007] As a further description of the above technical solution:
[0008] The limiting component includes a plurality of top columns. The bottom ends of the plurality of top columns are respectively fixedly connected to the four corners of the top end of the body. The top ends of the plurality of top columns are fixedly connected with a feeding plate.
[0009] As a further description of the above technical solution:
[0010] The buffer assembly includes a rubber pad, the outer part of the rubber pad is slidably connected to the inner wall of the groove, the bottom end of the rubber pad is fixedly connected with a limiting plate, and a spring is arranged inside the groove;
[0011] As a further description of the above technical solution:
[0012] The left and right sides of the machine body are respectively fixedly connected to the adjacent sides of the two side boxes, and the top end of the limiting column is fixedly connected to the bottom end of the sliding plate;
[0013] As a further description of the above technical solution:
[0014] The bottom end of the sliding plate is in contact with the top end of the side box, and one end of the support rod is slidably connected to the inner wall of the sliding plate;
[0015] As a further description of the above technical solution:
[0016] The outer part of the sliding rod is slidably connected to the inner wall of the machine body, and both ends of the clamping plate are slidably connected to the inner wall of the machine body;
[0017] As a further description of the above technical solution:
[0018] The outer top end of the rubber pad is slidably connected to the inner wall of the blanking frame, and the outer part of the limiting plate is slidably connected to the inner wall of the groove;
[0019] As a further description of the above technical solution:
[0020] One end of the spring is fixedly connected to one side of the inner wall of the groove, and the other end of the spring is fixedly connected to one side of the limiting plate.
[0021] The utility model has the following beneficial effects:
[0022] 1. In the utility model, starting the air cylinder drives the sliding plate to descend, thereby driving the support rod to rotate, so that the sliding rod drives the clamping plate to clamp towards the center, and various silicon rods with different sizes can be firmly fixed, preventing deviation during cutting and improving the practicability of this device.
[0023] 2. In the utility model, the cut silicon wafers will fall onto the top of the rubber pad. At this time, the rubber pad is pressed downward, so that the limiting plate presses the spring to generate a reaction force, thereby offsetting this force and further ensuring the integrity of the silicon wafers and improving the product quality. Description of the Drawings
[0024] Figure 1 It is a three-dimensional schematic diagram of a fixture for cutting silicon rods proposed by the utility model;
[0025] Figure 2Schematic structural diagram of a side box of a fixture for slicing silicon rods proposed by the present utility model;
[0026] Figure 3 Schematic structural diagram of a clamping plate of a fixture for slicing silicon rods proposed by the present utility model;
[0027] Figure 4 Schematic structural diagram of a limiting plate of a fixture for slicing silicon rods proposed by the present utility model.
[0028] Legend description:
[0029] 1. Bottom plate; 2. Machine body; 3. Top column; 4. Feeding plate; 5. Side box; 6. Cylinder; 7. Slide plate; 8. Limiting column; 9. Rotating column; 10. Support rod; 11. Slide rod; 12. Clamping plate; 13. Inlet; 14. Blanking frame; 15. Groove; 16. Rubber pad; 17. Limiting plate; 18. Spring. Detailed implementation manners
[0030] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.
[0031] Referring to Figures 1 - 3 , an embodiment provided by the present utility model: A fixture for slicing silicon rods includes a bottom plate 1. The top end of the bottom plate 1 is fixedly connected with a machine body 2. Here, the bottom plate 1 plays a role of supporting and fixing the machine body 2, so that it remains stable during operation. The top end of the machine body 2 is fixedly connected with a limiting component for restricting the movement of the silicon rod. The limiting component includes a plurality of top columns 3. The bottom ends of the plurality of top columns 3 are respectively fixedly connected to the four corners of the top end of the machine body 2. Here, the machine body 2 plays a role of supporting the top columns 3. The top ends of the plurality of top columns 3 are fixedly connected with a feeding plate 4. Here, the silicon rod to be sliced can pass through the holes of the feeding plate 4. Both sides of the top end of the bottom plate 1 are fixedly connected with side boxes 5. The left and right sides of the machine body 2 are respectively fixedly connected to the adjacent sides of the two side boxes 5. The inner wall of the side box 5 is fixedly connected with a cylinder 6. Here, the side box 5 provides stable support for the cylinder 6, so that it operates stably after being started;
[0032] The driving end of the cylinder 6 is fixedly connected with a slide plate 7, and the cylinder 6 here can drive the slide plate 7 to move up and down. The front and rear sides of the inner wall of the side box 5 are slidably connected with the limit columns 8, and the top of the limit columns 8 is fixedly connected to the bottom end of the slide plate 7. The limit columns 8 here are used to ensure the stability and accuracy of the slide plate 7 during movement to prevent deviation. The bottom end of the slide plate 7 is in contact with the top of the side box 5, and the maximum distance that the slide plate 7 descends here is in close contact with the top of the side box 5. The top of the slide plate 7 is rotatably connected to two rotating columns 9, and the outside of the rotating column 9 is fixedly connected with a support rod 10. The slide plate 7 here can make the support rod 10 rotate around the rotating column 9 when lifting, and one end of the support rod 10 is slidably connected to the inner wall of the slide plate 7.
[0033] Reference Figures 3 - 4 The other end of the support rod 10 is rotatably connected to a slide rod 11. When the support rod 10 rotates, the slide rod 11 can be driven to slide toward the center. The outside of the slide rod 11 is slidably connected to the inner wall of the body 2. The inner walls of the two slide rods 11 are fixedly connected to a clamping plate 12. Both ends of the clamping plate 12 are slidably connected to the inner wall of the body 2. When the slide rod 11 slides toward the center, the clamping plate 12 can be driven to slide toward the center together, thereby firmly clamping silicon rods of various sizes. A knife inlet 13 is provided at the front end of the body 2. The knife inlet 13 here The opening 13 is for the entry and exit of the cutting knife, so as to cut the silicon rod. The top of the bottom plate 1 is fixedly connected with a blanking frame 14, and the silicon wafer cut here will fall from the blanking frame 14 here. The inner wall of the bottom plate 1 is provided with a groove 15, and the inner wall of the groove 15 is slidably connected with a buffer component for reducing the impact force when the silicon wafer falls. The buffer component includes a rubber pad 16. The rubber pad 16 here can ensure that the impact force on the silicon wafer itself is reduced after it falls thereon, thereby ensuring that the product is not damaged, thereby improving the quality of the product;
[0034] The outer top of the rubber pad 16 is slidably connected to the inner wall of the blanking frame 14, and the outer part of the rubber pad 16 is slidably connected to the inner wall of the groove 15. The bottom end of the rubber pad 16 is fixedly connected to the limiting plate 17. The limiting plate 17 here can ensure that the rubber pad 16 will not deviate from the sliding range of the groove 15. The outer part of the limiting plate 17 is slidably connected to the inner wall of the groove 15. A spring 18 is arranged inside the groove 15. The spring 18 here is used to provide a reaction force. When the silicon wafer falls on the rubber pad 16, it is given an extrusion force, so that a reaction force is generated after it contracts, which offsets the positive force to achieve the purpose of protecting the silicon wafer. One end of the spring 18 is fixedly connected to one side of the inner wall of the groove 15, and the other end of the spring 18 is fixedly connected to one side of the limiting plate 17. The groove 15 and the limiting plate 17 here support and fix the spring 18, so that it remains stable during expansion and contraction.
[0035] Working principle: First, place the silicon rod to be cut into the interior of the machine body 2 through the hole of the feeding plate 4. At this time, the air cylinder 6 on the inner wall of the side box 5 can be started to drive the sliding plate 7 to move downward. The limiting column 8 here ensures that the sliding plate 7 does not shift when descending. When the sliding plate 7 moves here, it can drive the support rod 10 to rotate around the rotating column 9, thereby driving the sliding rod 11 and the clamping plate 12 to clamp towards the center, stably clamping the silicon rod. At this time, the cutter can be controlled to extend into the interior of the machine body 2 from the inlet 13, thereby performing a cutting operation on the silicon rod.
[0036] The cut silicon wafers will fall onto the top of the rubber pad 16 along the blanking frame 14. At this time, the rubber pad 16 is stressed and transmits this force to the limiting plate 17, causing it to cooperate with the groove 15 to squeeze the spring 18, thereby causing it to contract and generate a reaction force. The reaction force here will cancel out the positive force, thereby reducing the impact force of the silicon wafers falling onto the surface of the rubber pad 16, protecting the silicon wafers from damage, and further improving the product quality.
[0037] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.
Claims
1. A silicon rod cutting fixture, comprising a bottom plate (1), characterized in that: The top of the bottom plate (1) is fixedly connected to the body (2), the top of the body (2) is fixedly connected to a limit assembly for limiting the movement of the silicon rod, the top of the bottom plate (1) is fixedly connected to side boxes (5) on both sides, the inner wall of the side box (5) is fixedly connected to a cylinder (6), the driving end of the cylinder (6) is fixedly connected to a slide plate (7), the inner wall of the side box (5) is slidably connected to limit posts (8), the top of the slide plate (7) is rotatably connected to two rotating posts (9), The outside of the rotating column (9) is fixedly connected to a support rod (10), the other end of the support rod (10) is rotatably connected to a sliding rod (11), the inner side walls of the two sliding rods (11) are fixedly connected to a clamping plate (12), the front end of the body (2) is provided with a cutting edge (13), the top end of the bottom plate (1) is fixedly connected to a blanking frame (14), the inner wall of the bottom plate (1) is provided with a groove (15), and the inner wall of the groove (15) is slidably connected to a buffer component for reducing the impact force when the silicon wafer falls.
2. A silicon rod cutting fixture according to claim 1, characterized in that: The limiting assembly comprises a plurality of top columns (3), the bottom ends of the plurality of top columns (3) are respectively fixedly connected to the four corners of the top end of the machine body (2), and the top ends of the plurality of top columns (3) are fixedly connected to a feed plate (4).
3. The silicon rod cutting fixture according to claim 1, characterized in that: The buffer assembly comprises a rubber pad (16), the outside of the rubber pad (16) is slidably connected to the inner wall of the groove (15), the bottom end of the rubber pad (16) is fixedly connected to a limiting plate (17), and a spring (18) is arranged inside the groove (15).
4. The silicon rod cutting fixture according to claim 1, characterized in that: The left and right sides of the machine body (2) are respectively fixedly connected to the adjacent sides of the two side boxes (5), and the top end of the limiting column (8) is fixedly connected to the bottom end of the slide plate (7).
5. The silicon rod cutting fixture according to claim 1, characterized in that: The bottom end of the slide plate (7) contacts the top end of the side box (5), and one end of the support rod (10) is slidably connected to the inner wall of the slide plate (7).
6. The silicon rod cutting fixture according to claim 1, characterized in that: The outside of the sliding rod (11) is slidably connected to the inner wall of the machine body (2), and both ends of the clamping plate (12) are slidably connected to the inner wall of the machine body (2).
7. The silicon rod cutting fixture according to claim 3, characterized in that: The outer top end of the rubber pad (16) is slidably connected to the inner wall of the blanking frame (14), and the outer part of the limiting plate (17) is slidably connected to the inner wall of the groove (15).
8. The silicon rod cutting fixture according to claim 3, characterized in that: One end of the spring (18) is fixedly connected to one side of the inner wall of the groove (15), and the other end of the spring (18) is fixedly connected to one side of the limiting plate (17).