High-precision cutting device

Abstract

The utility model discloses a high-precision cutting device, which relates to the technical field of semiconductor processing and comprises a workbench, an electric sliding rail is arranged on the upper surface of the workbench, an electric sliding block is arranged on the inner wall of the electric sliding rail in a sliding manner, a connecting plate is arranged at the top end of the electric sliding block, a first cylinder is arranged on the side wall of the connecting plate, and a second cylinder is arranged on the side wall of the first cylinder. A connecting frame is arranged at the end of a piston rod of the first air cylinder, and a second air cylinder is arranged at the top end of the connecting frame. When the scribing knife rotates, if the scribing knife shakes, the stabilizing ring shakes to push the movable block to slide along the inner wall of the notch, the elastic metal strip is compressed, after the movable block moves, the switching block can be pushed to be arranged on the side wall of the connecting base in a pressing mode, and a power source can supply power to the alarm through the switching block for alarming. Therefore, workers can find timely, adjustment and processing are facilitated, cutting is stopped timely, and the cutting quality during semiconductor processing is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, and particularly relates to a high-precision cutting device. Background Art

[0002] Semiconductor processing is an important step in manufacturing semiconductor devices, involving multiple complex processes and technologies. Each step requires strict control and precise techniques to ensure the performance and reliability of the final product. With the development of technology, semiconductor processing is also continuously evolving towards smaller sizes and higher integration levels.

[0003] In the prior art, during the semiconductor processing, a circular dicing blade is required to cut the overall silicon wafer into multiple block-shaped sheets. If the transmission rod shakes under the influence of external force during the cutting process, or there is chipping vibration during cutting, it will affect the cutting accuracy of the circular dicing blade and the cutting quality of the silicon wafer. Therefore, the present application designs a high-precision cutting device. Summary of the Utility Model

[0004] In view of the above problems existing in the prior semiconductor processing, the present utility model is proposed.

[0005] Therefore, the purpose of the present utility model is to provide a high-precision cutting device, which solves the problem that during the semiconductor processing, a circular dicing blade is required to cut the overall silicon wafer into multiple block-shaped sheets, and if the transmission rod shakes under the influence of external force during the cutting process, or there is chipping vibration during cutting, it will affect the cutting accuracy of the circular dicing blade and the cutting quality of the silicon wafer.

[0006] To achieve the above purpose, the present utility model provides the following technical solutions:

[0007] A high-precision cutting device includes a workbench. An electric slide rail is provided on the upper surface of the workbench. An electric slider is slidably provided on the inner wall of the electric slide rail. A connecting plate is provided at the top end of the electric slider. A first cylinder is provided on the side wall of the connecting plate. The end of the piston rod of the first cylinder is provided with a connecting frame. A second cylinder is provided at the top end of the connecting frame. The end of the piston rod of the second cylinder is provided with a motor. A rotating rod is provided on the output shaft of the motor. A dicing blade is provided at the end of the rotating rod away from the motor. A protective sleeve is sleeved outside the rotating rod. A stabilizing ring is fixedly sleeved on the rod wall of the rotating rod. The inner wall of the protective sleeve is provided with a notch. A movable block is slidably provided on the inner wall of the protective sleeve at the notch. A connecting seat is provided on the barrel wall of the protective sleeve. A power supply and an alarm are provided on the side wall of the connecting seat. A transfer block is fixedly connected to the side wall of the movable block.

[0008] Preferably, a placement disk is fixedly connected to the upper surface of the workbench, and the connecting frame is provided as an L-shaped plate.

[0009] Preferably, a guide rod is fixedly connected to the side wall of the connecting frame, and the rod wall of the guide rod is slidably arranged on the inner wall of the connecting plate.

[0010] Preferably, a fixing seat is fixedly connected to the top end of the protective sleeve, and the side wall of the fixing seat is fixedly connected to the end of the motor.

[0011] Preferably, a plurality of first magnetic tiles are arranged around the inner wall of the protective sleeve, and a plurality of second magnetic tiles are arranged around the rod wall of the rotating rod.

[0012] Preferably, an elastic metal strip is fixedly connected to the inner wall of the protective sleeve at the notch, and the side wall of the elastic metal strip is fixedly connected to the movable block.

[0013] In the above technical solution, the technical effects and advantages provided by the present utility model are as follows:

[0014] 1. In the present utility model, when the slicing knife shakes during rotation, the stabilizing ring will shake and push the movable block to slide along the inner wall of the notch, compressing the elastic metal strip. After the movable block moves, it can push the adapter block to press against the side wall of the connecting seat, so that the power supply can supply power to the alarm through the adapter block for alarm processing, enabling the staff to discover in time, facilitating adjustment and processing, and stopping cutting in time to ensure the cutting quality during semiconductor processing.

[0015] 2. In the present utility model, the magnetic poles on the side of the inner wall of the first magnetic tile corresponding to the second magnetic tile are the same and repel each other. The repulsive force caused by the magnetic pole repulsion can make the rotating rod rotate stably inside the protective sleeve, enabling stable transmission processing of the rotating rod during operation.

[0016] 3. In the present utility model, the placement plate can stably place the silicon wafer, the guide rod can improve the stability of the connecting frame, and the fixing seat can improve the stability of the protective sleeve at the end of the motor. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments recorded in the present utility model. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings.

[0018] Figure 1 Is the southwest isometric view of the present utility model;

[0019] Figure 2 Is the southeast isometric view of the present utility model;

[0020] Figure 3 Is of the present utility modelFigure 2 Stereoscopic view of the structure of the middle protective sleeve;

[0021] Figure 4 For the present utility model Figure 2 Cross-sectional view of the structure of the middle protective sleeve.

[0022] Explanation of reference numerals:

[0023] 1. Workbench; 2. Electric slide rail; 3. Electric slider; 4. Connecting plate; 5. First cylinder; 6. Connecting frame; 7. Second cylinder; 8. Motor; 9. Rotating rod; 10. Slicing knife; 11. Prevention disc; 12. Guide rod; 13. Protective sleeve; 14. Fixed seat; 15. First magnetic tile; 16. Second magnetic tile; 17. Stabilizing ring; 18. Movable block; 19. Elastic metal strip; 20. Connecting seat; 21. Power supply; 22. Alarm; 23. Adapter block. Specific implementation manners

[0024] In order to enable those skilled in the art to better understand the technical solution of the present utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0025] An embodiment of the present utility model discloses a high-precision cutting device.

[0026] The present utility model provides a high-precision cutting device as shown in Figures 1-4 which includes a workbench 1. An electric slide rail 2 is provided on the upper surface of the workbench 1. An electric slider 3 is slidably provided on the inner wall of the electric slide rail 2. A connecting plate 4 is provided at the top end of the electric slider 3. A first cylinder 5 is provided on the side wall of the connecting plate 4. The end of the piston rod of the first cylinder 5 is provided with a connecting frame 6. A second cylinder 7 is provided at the top end of the connecting frame 6. The end of the piston rod of the second cylinder 7 is provided with a motor 8. A rotating rod 9 is provided on the output shaft of the motor 8. A slicing knife 10 is provided at the end of the rotating rod 9 away from the motor 8. A protective sleeve 13 is sleeved outside the rotating rod 9. A stabilizing ring 17 is fixedly sleeved on the rod wall of the rotating rod 9. A notch is formed on the inner wall of the protective sleeve 13. A movable block 18 is slidably provided on the inner wall of the protective sleeve 13 at the notch. A connecting seat 20 is provided on the barrel wall of the protective sleeve 13. A power supply 21 and an alarm 22 are provided on the side wall of the connecting seat 20. An adapter block 23 is fixedly connected to the side wall of the movable block 18. An elastic metal strip 19 is fixedly connected to the inner wall of the protective sleeve 13 at the notch. The side wall of the elastic metal strip 19 is fixedly connected to the movable block 18.

[0027] In use, the electric slide rail 2 can drive the electric slider 3 and the connecting plate 4 to move. The first cylinder 5 can control the connecting frame 6 and the second cylinder 7 for position adjustment, and the second cylinder 7 can drive the motor 8 for position adjustment. The rotation of the output shaft of the motor 8 can drive the rotating rod 9 and the slicing knife 10 to rotate, enabling the slicing knife 10 to perform cutting operations. When the slicing knife 10 rotates and shakes, the stabilizing ring 17 will shake and push the movable block 18 to slide along the inner wall of the notch, compressing the elastic metal strip 19. After the movable block 18 moves, it can push the adapter block 23 to press tightly against the side wall of the connecting seat 20, enabling the power supply 21 to supply power to the alarm 22 through the adapter block 23 for alarm processing, allowing the staff to discover in time, facilitating adjustment and processing, and promptly stopping the cutting to ensure the cutting quality during semiconductor processing.

[0028] In order to perform stable transmission processing on the rotating rod 9 during operation, as Figures 1-4 shown, a placement plate 11 is fixedly connected to the upper surface of the workbench 1. The connecting frame 6 is arranged as an L-shaped plate. A guide rod 12 is fixedly connected to the side wall of the connecting frame 6. The rod wall of the guide rod 12 is slidably arranged inside the connecting plate 4. The top end of the protective sleeve 13 is fixedly connected to a fixing seat 14. The side wall of the fixing seat 14 is fixedly connected to the end of the motor 8. A plurality of first magnetic tiles 15 are arranged in a ring shape on the inner wall of the protective sleeve 13. A plurality of second magnetic tiles 16 are arranged in a ring shape on the rod wall of the rotating rod 9.

[0029] The placement plate 11 can stably place the silicon wafer. The guide rod 12 can improve the stability of the connecting frame 6. The fixing seat 14 can improve the stability of the protective sleeve 13 at the end of the motor 8. The magnetic poles on the side of the inner wall of the first magnetic tile 15 corresponding to the second magnetic tile 16 are the same and repel each other. The repulsive force generated by the magnetic pole repulsion can enable the rotating rod 9 to rotate stably inside the protective sleeve 13, enabling stable transmission processing of the rotating rod 9 during operation.

[0030] Only some exemplary embodiments of the present invention have been described by way of illustration above. Undoubtedly, for those of ordinary skill in the art, without departing from the spirit and scope of the present invention, the described embodiments can be modified in various different ways. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A high-precision cutting device, comprising a workbench (1), characterized in that: The upper surface of the workbench (1) is provided with an electric slide rail (2), the inner wall of the electric slide rail (2) is slidably provided with an electric slider (3), the top end of the electric slider (3) is provided with a connecting plate (4), the side wall of the connecting plate (4) is provided with a first cylinder (5), the piston rod end of the first cylinder (5) is provided with a connecting frame (6), the top end of the connecting frame (6) is provided with a second cylinder (7), the piston rod end of the second cylinder (7) is provided with a motor (8), the output shaft of the motor (8) is provided with a rotating rod (9), and the end of the rotating rod (9) facing away from the motor (8) is provided with a rotating rod (9). A slicing knife (10) is provided, the outer side of the rotating rod (9) is sleeved with a protective sleeve (13), the rod wall of the rotating rod (9) is fixedly sleeved with a stabilizing ring (17), the inner wall of the stabilizing ring (17) and the protective sleeve (13) is provided with a recess, the protective sleeve (13) is located on the inner wall of the recess and is provided with a movable block (18) for sliding, the barrel wall of the protective sleeve (13) is provided with a connecting seat (20), the side wall of the connecting seat (20) is provided with a power supply (21) and an alarm (22), and the side wall of the movable block (18) is fixedly connected with a transfer block (23).

2. The high-precision cutting device according to claim 1, characterized in that: A placement plate (11) is fixedly connected to the upper surface of the workbench (1), and the connecting frame (6) is configured as an L-shaped plate.

3. The high-precision cutting device according to claim 1, characterized in that: A guide rod (12) is fixedly connected to the side wall of the connecting frame (6), and the rod wall of the guide rod (12) is slidably arranged on the inner wall of the connecting plate (4).

4. The high-precision cutting device according to claim 1, characterized in that: The top end of the protective sleeve (13) is fixedly connected to a fixing seat (14), and the side wall of the fixing seat (14) is fixedly connected to the end of the motor (8).

5. The high-precision cutting device according to claim 1, characterized in that: A plurality of first magnetic tiles (15) are arranged around the inner wall of the protective sleeve (13), and a plurality of second magnetic tiles (16) are arranged around the rod wall of the rotating rod (9).

6. The high-precision cutting device according to claim 1, characterized in that: The inner wall of the protective sleeve (13) located at the notch is fixedly connected to an elastic metal strip (19), and the side wall of the elastic metal strip (19) is fixedly connected to the movable block (18).

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