An arc ignition mechanism for vacuum coating

Abstract

The utility model belongs to the technical field of vacuum coating arc ignition, and particularly relates to an arc ignition mechanism for vacuum coating, which includes a cylinder, a driving part and an arc ignition part. The driving part includes a connecting plate, a connecting rod, a support rod, an insulating part and a baffle; the arc ignition part includes a drainage rod, an arc ignition rod, an arc ignition needle and a water-cooled power connection block; the connecting rod is fixedly connected with the output end of the cylinder through the connecting plate, the left side of the insulating part is screw-connected with one end of the support rod through the baffle, the other end of the support rod is screw-connected with the left side of the connecting plate, the water-cooled power connection block is fixedly installed on the outer side of the drainage rod, and a limiting piece is fixedly installed on the front side. A through hole is arranged on the left side of the limiting piece, and the support rod is slidably connected in the through hole; the drainage rod penetrates through the baffle and the insulating part, and one end is fixedly connected with the connecting rod. This device solves the problems of poor electrical conductivity and poor cooling effect of the current arc ignition mechanism for vacuum coating.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating arc ignition, and particularly relates to an arc ignition mechanism for vacuum coating. Background Technique

[0002] Vacuum coating technology is generally divided into physical vapor deposition (PVD) technology and chemical vapor deposition (CVD) technology. Among them, physical vapor deposition technology refers to a technology in which, under vacuum conditions, a material source (solid or liquid) is vaporized into gaseous atoms or molecules on the surface, or partially ionized into ions, and a thin film with a certain special function is deposited on the substrate surface through a low-pressure gas (or plasma). Physical vapor deposition technology can utilize phenomena such as sputtering of atoms on the surface of a substance during ion bombardment to achieve a controllable transfer process of atoms on the surface of the source substance to the thin film. In the physical vapor deposition process, an ion source provides a stable high-energy plasma. The arc ignition device is an essential component when the ion source starts to work. However, there will be a large current at the moment when the ion source starts, which is likely to burn out the arc ignition device. The prior art cannot sufficiently and quickly cool the arc ignition mechanism, and the electrical conductivity is poor. This phenomenon has become an urgent problem to be solved by those skilled in the art. Content of the Utility Model

[0003] The purpose of the utility model is to provide an arc ignition mechanism for vacuum coating to solve the problems put forward in the above background technique.

[0004] To solve the above technical problems, the utility model provides the following technical solution: An arc ignition mechanism for vacuum coating, including a cylinder, a driving part, and an arc ignition part. The driving part includes a connecting plate, a connecting rod, a support rod, an insulating part, and a baffle; the arc ignition part includes a current guiding rod, an arc ignition rod, an arc ignition needle, and a water-cooled power connection block; the connecting rod is fixedly connected to the output end of the cylinder through the connecting plate. The left side of the insulating part and one end of the support rod are screw-connected through the baffle, and the other end of the support rod is screw-connected to the left side of the connecting plate.

[0005] The utility model further explains that the water-cooled power connection block is fixedly installed on the outside of the current guiding rod, and a limiting piece is fixedly installed on the front side. A through hole is provided on the left side of the limiting piece, and the support rod is slidably connected in the through hole; the current guiding rod penetrates through the baffle and the insulating part, and one end is fixedly connected to the connecting rod. The arc ignition rod is fixedly installed at the other end of the current guiding rod, and the arc ignition needle is screw-connected to the other end of the arc ignition rod.

[0006] The utility model further explains that an oil seal is provided at the connection between the insulating part and the current guiding rod, and a sealing ring is provided inside the insulating part.

[0007] The present utility model is further described as follows. Water-cooled plugs are provided at both the output end of the cylinder and the right side of the water-cooled power connection block, and the water-cooled power connection block is connected to an external power supply wire.

[0008] The present utility model is further described as follows. An insulating sleeve is sleeved outside the screw connecting the support rod and the connecting plate. The limiting piece is made of insulating material, and the water-cooled power connection block is made of copper.

[0009] Compared with the prior art, the beneficial effects achieved by the present utility model are as follows: By operating the cylinder, the arc ignition needle reciprocates, which can improve the coating efficiency. Compared with the traditional arc ignition mechanism, in this solution, the current is directly introduced into the water-cooled power connection block. Since the water-cooled power connection block is made of copper material, the conductivity is enhanced.

[0010] During the vacuum coating process, the entire arc ignition mechanism can be water-cooled through the water-cooled plugs at the output end of the cylinder and the right side of the water-cooled power connection block, thereby playing a role in quickly cooling down, avoiding damage to the oil seal and the cylinder caused by high temperature, playing a role in protecting the structure, improving the service life, having a relatively simple overall structure, and low manufacturing cost. Description of the Drawings

[0011] The drawings are used to provide a further understanding of the present utility model and constitute a part of the specification. Together with the embodiments of the present utility model, they are used to explain the present utility model and do not constitute a limitation to the present utility model. In the drawings:

[0012] Figure 1 is the overall structural schematic diagram of the present utility model;

[0013] Figure 2 is the planar schematic diagram of the insulating part of the present utility model;

[0014] Figure 3 is the planar schematic diagram of the connection relationship between the water-cooled plug and the water-cooled power connection block of the present utility model;

[0015] In the figure: 1. Cylinder; 2. Connecting plate; 3. Connecting rod; 4. Support rod; 41. Insulating sleeve; 5. Insulating part; 51. Oil seal; 52. Sealing ring; 6. Baffle; 7. Drainage rod; 8. Arc ignition rod; 9. Arc ignition needle; 10. Water-cooled power connection block; 101. Water-cooled plug; 11. Limiting piece. Detailed Embodiment

[0016] The following further describes the technical solution of the present utility model in detail and non-restrictively in conjunction with the preferred embodiments and their drawings. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0017] Please refer to Figures 1 - 3 , the present utility model provides a technical solution: an arc ignition mechanism for vacuum coating, including a cylinder 1, a driving part and an arc ignition part. The driving part includes a connecting plate 2, a connecting rod 3, a support rod 4, an insulating part 5 and a baffle 6; the arc ignition part includes a drainage rod 7, an arc ignition rod 8, an arc ignition needle 9 and a water-cooled power connection block 10;

[0018] The connecting rod 3 is fixedly connected to the output end of the cylinder 1 through the connecting plate 2. The left side of the insulating part 5 and one end of the support rod 4 are screwed together through the baffle 6, and the other end of the support rod 4 is screwed to the left side of the connecting plate 2.

[0019] The water-cooled power connection block 10 is fixedly installed on the outside of the drainage rod 7, and a limiting piece 11 is fixedly installed on the front side. There is a through hole on the left side of the limiting piece 11, and the support rod 4 is slidably connected in the through hole; the drainage rod 7 penetrates through the inside of the baffle 6 and the insulating part 5, and one end is fixedly connected to the connecting rod 3. The arc ignition rod 8 is fixedly installed at the other end of the drainage rod 7, and the arc ignition needle 9 is screwed to the other end of the arc ignition rod 8.

[0020] An oil seal 51 is provided at the connection between the insulating part 5 and the drainage rod 7, and a sealing ring 52 is provided inside the insulating part 5.

[0021] Water-cooled plugs 101 are provided on the output end of the cylinder 1 and the right side of the water-cooled power connection block 10, and the water-cooled power connection block 10 is connected to an external power supply through a wire.

[0022] An insulating sleeve 41 is sleeved outside the screw connecting the support rod 4 and the connecting plate 2. The limiting piece 11 is made of insulating material, and the water-cooled power connection block 10 is made of copper;

[0023] The external power supply passes current into the water-cooled power connection block 10 through a wire. Then the current enters the arc ignition rod 8 through the drainage rod 7 and is finally released through the arc ignition needle 9. At the same time, the cylinder 1 operates, drives the drainage rod 7 to move through the connecting rod 3, and the drainage rod 7 drives the arc ignition needle 9 to move through the arc ignition rod 8 and contacts the target material, so as to carry out vacuum coating work; by operating the cylinder 1, the arc ignition needle 9 reciprocates, which can improve the coating efficiency. Compared with the traditional arc ignition mechanism, in this solution, the current is directly introduced into the water-cooled power connection block 10, and because the water-cooled power connection block 10 is made of copper material, the conductivity is enhanced;

[0024] During the vacuum coating process, the entire arc ignition mechanism can also be water-cooled through the water-cooled plugs 101 on the output end of the cylinder 1 and the right side of the water-cooled power connection block 10, so as to play a role in quickly cooling down, avoid high temperature from damaging the oil seal 51 and the cylinder 1, play a role in protecting the structure, improve the service life, the overall structure is relatively simple, and the manufacturing cost is low.

[0025] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.

[0026] Finally, it should be pointed out that the above embodiments are only used to illustrate the technical solutions of the present utility model, rather than limiting them. Although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. These modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims

1. An arc ignition mechanism for vacuum coating, comprising a cylinder (1), a driving part and an arc ignition part, characterized in that: The driving part includes a connecting plate (2), a connecting rod (3), a support rod (4), an insulating part (5), and a baffle (6); the arc ignition part includes a drainage rod (7), an arc ignition rod (8), an arc ignition needle (9), and a water-cooled power connection block (10). The connecting rod (3) is fixedly connected to the output end of the cylinder (1) through the connecting plate (2). The left side of the insulating part (5) and one end of the support rod (4) are screw-connected through the baffle (6), and the other end of the support rod (4) is screw-connected to the left side of the connecting plate (2).

2. The arc starting mechanism for vacuum coating according to claim 1, characterized in that: The water-cooled power connection block (10) is fixedly installed on the outer side of the drainage rod (7), and a limiting piece (11) is fixedly installed on the front side. A through hole is provided on the left side of the limiting piece (11), and the support rod (4) is slidably connected in the through hole; the drainage rod (7) penetrates through the baffle (6) and the inside of the insulating part (5), and one end is fixedly connected to the connecting rod (3). The arc ignition rod (8) is fixedly installed at the other end of the drainage rod (7), and the arc ignition needle (9) is screw-connected to the other end of the arc ignition rod (8).

3. The arc ignition mechanism for vacuum coating according to claim 2, wherein: An oil seal (51) is provided at the connection between the insulating part (5) and the drainage rod (7), and a sealing ring (52) is provided inside the insulating part (5).

4. The arc starting mechanism for vacuum coating according to claim 3, characterized in that: Water-cooled plugs (101) are provided at the output end of the cylinder (1) and on the right side of the water-cooled power connection block (10), and the water-cooled power connection block (10) is connected to an external power supply by a wire.

5. The arc ignition mechanism for vacuum coating according to claim 4, characterized in that: An insulating sleeve (41) is sleeved outside the screw connecting the support rod (4) and the connecting plate (2). The limiting piece (11) is made of insulating material, and the water-cooled power connection block (10) is made of copper.

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