Rotary cutting liquid separating valve

Abstract

The utility model belongs to the technical field of rotary cutting valves, and particularly relates to a rotary cutting liquid dividing valve which comprises a valve plate assembly, the valve plate assembly comprises a middle valve plate and two outer valve plates, the two outer valve plates are located on the two sides of the middle valve plate respectively, the middle valve plate is arranged on a base, the two outer valve plates can rotate relative to the middle valve plate, and the two outer valve plates can rotate relative to the middle valve plate. Wherein one side, far away from the middle valve plate, of one outer valve plate is provided with a pipeline interface assembly, one side, far away from the middle valve plate, of the other outer valve plate is connected with a quantitative pipe, the quantitative pipe can be communicated with the pipeline interface assembly, and one side of the valve plate assembly is provided with a positioning optocoupler; the two outer valve plates are both provided with optocoupler blocking pieces corresponding to the positioning optocouplers. According to the utility model, the communication between different pipeline interface assemblies and the quantitative pipes with different capacities is realized through the running fit of the three valve plates, so that the matching of multiple functions and multiple capacities of the liquid separation rotary cutting valve is realized, the accurate quantification is realized, the traditional rubber pump is replaced, and the cost is saved.

Description

Technical Field

[0001] The utility model belongs to the technical field of rotary cutting valves, and particularly relates to a rotary cutting liquid separation valve. Background Art

[0002] The microdispenser is one of the key devices for taking micro amounts of photoresist and has functions of high-precision flow control and pressure regulation. It can accurately control the amount of photoresist taken to ensure accuracy in the photolithography process. The core indicators of the microdispenser include liquid separation repeatability, accuracy, stability, flow accuracy, automation level, and applicability, etc. These indicators jointly determine the performance and application range of the device and are of great significance for ensuring the accuracy and reliability of experiments and treatments. Among them, liquid separation repeatability refers to the consistency between the amounts of liquid dispensed each time when the microdispenser dispenses the same volume of liquid multiple times. High repeatability means that the volume of liquid dispensed each time is very close, which is particularly important for experiments or treatment processes that require highly precise control of the liquid volume; accuracy refers to the deviation between the actual volume of liquid dispensed by the microdispenser and the set value. High accuracy means that the actual dispensed amount is very close to the set value with almost no deviation; stability refers to the stability of the output flow of the device during long-term operation. A device with high stability can ensure a consistent liquid dispensing effect over a long time; flow accuracy refers to the minimum flow value that the device can achieve when dispensing liquid and the precision of flow control. A device with high flow accuracy can achieve more refined liquid dispensing; the automation level refers to the degree to which the device can automatically complete liquid dispensing. A highly automated device can reduce manual operations and improve the experimental efficiency and accuracy; applicability refers to the device's ability to be applicable to containers of different specifications and types as well as different kinds of liquids. A device with wide applicability can meet more diverse experimental and treatment needs.

[0003] However, although the microdispenser has certain accuracy guarantees, at extremely small intake amounts, its accuracy may be limited to some extent, affecting the uniformity and consistency of the photoresist; moreover, the microdispenser is relatively expensive and usually requires more meticulous maintenance and servicing, increasing the maintenance cost and usage difficulty of the device. Content of the Utility Model

[0004] In view of the above deficiencies of the prior art, the purpose of the present utility model is to provide a rotary cutting liquid separation valve.

[0005] To achieve the above purpose, the technical solutions adopted are as follows:

[0006] A rotary cutting liquid separation valve includes a valve disc assembly. The valve disc assembly includes a middle valve disc and two outer valve discs. The two outer valve discs are respectively located on both sides of the middle valve disc. The middle valve disc is arranged on a base. The two outer valve discs can rotate relative to the middle valve disc. A pipeline interface assembly is arranged on one side of one outer valve disc away from the middle valve disc. A metering tube is connected to the side of the other outer valve disc away from the middle valve disc. The metering tube can be communicated with the pipeline interface assembly. A positioning optocoupler is arranged on one side of the valve disc assembly. Optocoupler baffle plates corresponding to the positioning optocoupler are arranged on both of the two outer valve discs.

[0007] The beneficial effects of adopting the above technical solution are as follows: Different pipelines are connected to different capacity metering tubes by the rotation and cooperation of the three valve discs. Different media are connected by different pipeline interface assemblies, corresponding to different functions, so as to realize the multi-function and multi-capacity matching of the liquid separation rotary valve and achieve precise metering. The positioning optocoupler has a positioning hole, and realizes the conversion from electrical signal to optical signal and then to electrical signal through the light-emitting diode (LED) and photosensitive element (such as photosensitive triode or photosensitive diode) inside it. When combined with the baffle plates on one outer valve disc and the other outer valve disc, the change in the position of the baffle plate will change the intensity of the optical signal received by the photosensitive element, thereby changing the state of the output electrical signal, and then realizing the positioning function, so as to realize the precise alignment and connection of the pipeline interface assembly and the metering tube.

[0008] On the basis of the above technical solution, the present utility model can also make the following improvements:

[0009] Further, at least one group of pipeline interface assemblies is provided. Each group of pipeline interface assemblies includes a pipeline inlet and a pipeline outlet. At least one metering tube is provided. Each metering tube includes two ports. The valve disc assembly is provided with a through hole that can penetrate. The two ports of the metering tube can be respectively communicated with the pipeline inlet and the pipeline outlet through the through hole of the valve disc assembly.

[0010] Further, the metering tube is U-shaped, and both ends of the metering tube are connected to the other outer valve disc.

[0011] The beneficial effects of adopting the above further technical solution are as follows: The U-shaped structure preferably has a downward inlet and an upward outlet, and can also be coiled into a ring shape, which helps to reduce the liquid residue in the metering tube.

[0012] Still further, four metering tubes are provided, with capacities of 1 microliter, 2 microliters, 5 microliters, 10 microliters respectively, or appropriate multiple capacities, such as 2 microliters, 4 microliters, 1 milliliter, 2 milliliters, 5 milliliters.

[0013] The beneficial effects of adopting the above further technical solutions are as follows: The multiple is determined according to the actual liquid separation volume, so that it is not necessary to perform liquid separation multiple times. Quantitative tubes with various capacities are provided, enabling users to select different liquid separation volumes according to actual needs, increasing the flexibility and applicability of the equipment, improving the accuracy of experiments or production. The combination of these four capacities can meet the capacity requirements of any integer multiple of 1 microliter. For example, if 4 microliters of liquid is needed, it can be measured twice with a 2-microliter quantitative tube.

[0014] Further, three groups of pipeline interface components are provided, namely the inlet and outlet of the liquid to be distributed, the inlet and outlet of the cleaning liquid, and the inlet and outlet of the gas.

[0015] The beneficial effects of adopting the above further technical solutions are as follows: The design of multiple groups of pipeline interface components enables the liquid separation valve to simultaneously meet the input and output requirements of multiple fluids, such as the separate treatment of liquid, cleaning liquid, and gas, improving the integration and usage efficiency of the equipment.

[0016] Further, the pipeline interface components are evenly distributed on the surface of the one outer valve plate. For example, when three groups of pipeline interface components are provided, the interval angle between adjacent groups of pipeline interface components is 120 degrees.

[0017] Further, the quantitative tubes are evenly distributed on the surface of the other outer valve plate. For example, when four quantitative tubes are provided, the interval angle between adjacent two quantitative tubes is 90 degrees.

[0018] The beneficial effects of adopting the above further technical solutions are as follows: The quantitative tubes and the pipeline interface components are both evenly distributed, which is convenient for control and alignment.

[0019] Further, the gas is nitrogen.

[0020] The beneficial effects of adopting the above further technical solutions are as follows: As long as the gas is insoluble in the photoresist, nitrogen is preferably selected because of its high content in the atmosphere and low cost.

[0021] Still further, a pair of penetrating first through-holes are provided on the middle valve plate.

[0022] Further, the one outer valve plate is provided with a second through-hole communicating with the pipeline interface components.

[0023] Further, the other outer valve plate is provided with a third through-hole communicating with both ends of the quantitative tubes.

[0024] The beneficial effects of adopting the above further technical solutions are as follows: The through holes penetrated by the valve plate assembly are in a state where the above-mentioned first through hole, second through hole, and third through hole are connected. This enables a set of pipeline interface components to be connected to a metering tube. The setting of the through holes allows media such as gas and liquid to sequentially pass through the one outer valve plate, middle valve plate, and the other outer valve plate from the pipeline inlet and enter one port of the metering tube. After filling the metering tube, it returns to the pipeline outlet from the other port of the metering tube via the other outer valve plate, middle valve plate, and the one outer valve plate, thereby discharging from the rotary cutting valve.

[0025] Further, mounting shafts are provided on both sides of the middle valve plate, and shaft holes adapted to the mounting shafts are respectively provided on the two outer valve plates. The two outer valve plates can rotate around the mounting shafts as the axis.

[0026] Further, motors are respectively connected to both ends of the valve plate assembly.

[0027] Further, both ends of the valve plate assembly are connected to the motors through couplings, and shaft sleeves are also provided at both ends of the valve plate assembly. The shaft sleeves are connected to the couplings.

[0028] Still further, the motors are stepper motors and are installed on the base through motor brackets.

[0029] The beneficial effects of adopting the above further technical solutions are as follows: The use of stepper motors makes the rotation and positioning of the valve plates more accurate and is easy to control through programs, improving the automation degree of the equipment and the accuracy of liquid separation. For example, the speed, acceleration, rotation angle, and zero position of the stepper motors can be set through programs. Among them, the zero position takes the middle value of the angle turned from the moment when the optical coupler baffle completely blocks the light of the positioning optical coupler to the moment when it completely blocks the light of the positioning optical coupler again as the positioning zero point. Then, by adjusting the rotation angles of the stepper motors at both ends, the one outer valve plate and the other outer valve plate are respectively driven to rotate corresponding angles to achieve the connection of different pipeline interface components and the positioning tube; the fixed installation of the motor brackets enhances the stability of the motors and reduces the influence of vibration on the performance of the equipment.

[0030] Further, a corrugated gasket is provided between the coupling and the shaft sleeve.

[0031] The beneficial effects of adopting the above further technical solutions are as follows: The corrugated gasket is low in cost and continuously exerts a pre-tightening force in the direction of the outer valve plate. This design effectively prevents liquid leakage between the outer valve plate and the middle valve plate, improves the sealing performance of the equipment, and ensures the safety and reliability of the liquid separation process.

[0032] Further, the positioning optical coupler is installed on the base through an optical coupler bracket.

[0033] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0034] Significant cost reduction: There is no need for an expensive glue pump. Instead, a more economical and efficient alternative is adopted. For example, the rotary cutting liquid separation valve of the present utility model can be combined with a peristaltic pump, etc., achieving a significant reduction in cost. This not only reduces the initial investment in equipment but also reduces the maintenance cost during long-term operation.

[0035] Remarkable improvement in liquid separation accuracy: The present utility model has achieved a qualitative leap in liquid separation accuracy. By optimizing the design of the valve plate assembly, the liquid separation repeatability, accuracy, stability, and flow accuracy are relatively high. The liquid separation volume can be arbitrarily customized according to actual needs and is no longer limited to the fixed specifications provided by the supplier. This high degree of flexibility ensures precise control during the experiment or production process and improves product quality and consistency.

[0036] Strong expandability and customizability: The present utility model has good expansion potential and customizability. Users can easily add new pipeline interface components or functional modules according to actual needs, with strong applicability. For example, adding another cleaning agent or simultaneously separating two different photoresists, etc. This flexibility not only reduces the modification cost but also speeds up the product iteration speed, meeting the rapidly changing market demands.

[0037] Simplified maintenance and upgrade: Due to the modular design and easily replaceable components, the present utility model is easy to maintain and upgrade. Once a component fails or needs to be upgraded, users can quickly perform replacement or upgrade operations without large-scale modification of the entire system. This reduces the maintenance difficulty and cost and improves the overall service life of the equipment. Description of the Drawings

[0038] Figure 1 It is a three-dimensional structural schematic diagram of the rotary cutting liquid separation valve of the present utility model;

[0039] Figure 2 It is a top view of the rotary cutting liquid separation valve of the present utility model;

[0040] Figure 3 It is an axonometric view of the rotary cutting liquid separation valve of the present utility model;

[0041] Figure 4 It is an exploded view of the rotary cutting liquid separation valve of the present utility model with the positioning optocoupler and optocoupler bracket hidden;

[0042] Figure 5 It is another perspective exploded view of the rotary cutting liquid separation valve of the present utility model with the positioning optocoupler and optocoupler bracket hidden.

[0043] The reference numerals are as follows: 1, an outer valve plate; 2, a middle valve plate; 3, another outer valve plate; 4, a base; 5, a metering tube; 6, a positioning optocoupler; 7, an optocoupler baffle; 8, a pipeline interface assembly; 801, a pipeline inlet; 802, a pipeline outlet; 9, a first through hole; 10, a mounting shaft; 11, a coupling; 12, a motor; 13, a bushing; 14, a motor bracket; 15, a wave washer; 16, an optocoupler bracket. Detailed implementation manners

[0044] The present utility model will be described below in conjunction with examples. The examples given are only for explaining the present utility model and are not intended to limit the scope of the present utility model.

[0045] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "vertical", "upper", "lower", "horizontal", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0046] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and defined, the terms "set", "installed", "connected", "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0047] Refer to Figures 1 to 5 , a rotary cutting liquid separation valve, including a valve plate assembly. The valve plate assembly includes a middle valve plate 2 and two outer valve plates. The two outer valve plates are respectively located on both sides of the middle valve plate 2. The middle valve plate 2 is arranged on the base 4. The two outer valve plates can rotate relative to the middle valve plate 2. A pipeline interface assembly 8 is provided on one side of one outer valve plate 1 away from the middle valve plate 2. A metering tube 5 is connected to the side of the other outer valve plate 3 away from the middle valve plate 2. The metering tube 5 can be communicated with the pipeline interface assembly 8. A positioning optocoupler 6 is provided on one side of the valve plate assembly. Optocoupler baffles 7 corresponding to the positioning optocoupler 6 are provided on both of the two outer valve plates.

[0048] As a preferred embodiment, at least one set of the pipeline interface assemblies 8 is provided. Each set of the pipeline interface assemblies 8 includes a pipeline inlet 801 and a pipeline outlet 802. At least one metering tube 5 is provided. Each metering tube 5 has two ports. The valve plate assembly is provided with a through hole. The two ports of the metering tube 5 can be respectively communicated with the pipeline inlet 801 and the pipeline outlet 802 through the through hole of the valve plate assembly.

[0049] In an alternative embodiment, the metering tube 5 is U-shaped, and both ends of the metering tube 5 are connected to the other outer valve plate 3.

[0050] In an alternative embodiment, four metering tubes 5 are provided, with capacities of 1 microliter, 2 microliters, 5 microliters, and 10 microliters respectively, or appropriate multiple capacities thereof, such as 2 microliters, 4 microliters, 1 milliliter, 2 milliliters, and 5 milliliters.

[0051] In an alternative embodiment, three sets of the pipeline interface assemblies 8 are provided, namely the inlet and outlet of the liquid to be dispensed, the inlet and outlet of the cleaning liquid, and the inlet and outlet of the gas.

[0052] In this embodiment, the pipeline interface assemblies 8 are evenly distributed on the surface of the one outer valve plate 1. For example, when three pipeline interface assemblies 8 are provided, the interval angle between adjacent sets of pipeline interface assemblies 8 is 120 degrees.

[0053] In this embodiment, the metering tubes 5 are evenly distributed on the surface of the other outer valve plate 3. For example, when four metering tubes 5 are provided, the interval angle between adjacent two metering tubes 5 is 90 degrees.

[0054] In this embodiment, the gas is nitrogen.

[0055] As a preferred embodiment, two through first through holes 9 are provided on the middle valve plate 2.

[0056] In an alternative embodiment, the one outer valve plate 1 is provided with a second through hole communicating with the pipeline interface assembly 8.

[0057] In an alternative embodiment, the other outer valve plate 3 is provided with a third through hole communicating with both ends of the metering tube 5.

[0058] In this embodiment, mounting shafts 10 are provided on both sides of the middle valve plate 2. Shaft holes adapted to the mounting shafts 10 are respectively provided on the two outer valve plates. The two outer valve plates can rotate around the mounting shafts 10 as the axis.

[0059] In an alternative embodiment, both ends of the valve plate assembly are respectively connected to the motor 12.

[0060] In this embodiment, both ends of the valve plate assembly are connected to the motor 12 through the coupling 11. Sleeve 13 is provided at both ends of the valve plate assembly, and the sleeve 13 is connected to the coupling 11.

[0061] In an alternative embodiment, the motor 12 is a stepper motor and is mounted on the base 4 through the motor bracket 14.

[0062] As a preferred embodiment, a corrugated gasket 15 is provided between the coupling 11 and the sleeve 13.

[0063] As a preferred embodiment, the positioning optocoupler 6 is mounted on the base 4 through the optocoupler bracket 16.

[0064] During operation, the state where the optocoupler stoppers 7 of one outer valve plate 1 and another outer valve plate 3 completely block the light of the positioning optocoupler 6 is taken as the positioning zero point. At this time, it is preferably the state where the pipeline interface assembly 8 is connected to the metering tube 5. For example, at this time, the liquid inlet to be dispensed and the liquid outlet to be dispensed are connected to both ends of the 1-μL metering tube 5, which is the positioning zero point state. First, the liquid to be dispensed passes through the external pipeline from the liquid inlet to be dispensed, through the one outer valve plate 1 and the middle valve plate 2, and enters the metering tube 5 from one port of the metering tube 5 of the other outer valve plate 3. When the metering tube 5 is filled with the dispensed liquid, liquid can be seen flowing out from the liquid outlet to be dispensed. At this time, the one outer valve plate 1 is driven to rotate by the stepper motor. At this time, the nitrogen inlet and outlet are connected to both ends of the above-mentioned 1-μL metering tube 5. Nitrogen enters the metering tube 5 from the nitrogen inlet through the one outer valve plate 1 and the middle valve plate 2, and blows out the 1-μL liquid to be dispensed taken in from the nitrogen outlet and into the liquid collection device. The one outer valve plate 1 is driven to rotate by the stepper motor. At this time, the cleaning liquid inlet and outlet are connected to both ends of the above-mentioned 1-μL metering tube 5. The cleaning liquid enters the metering tube 5 through the same path as above through the cleaning liquid inlet under the power action of the cleaning pump and is discharged through the cleaning liquid outlet. It can be cleaned repeatedly for multiple times until it is clean. When it is necessary to continue to take other volumes of the liquid to be dispensed, rotate the other outer valve plate 3 so that the liquid inlet to be dispensed and the outlet are connected to both ends of the metering tube 5 with other volumes, and repeat the above operations. It should be noted that the 1-μL metering tube is not strictly 1 μL, and the total volume of the liquid to be dispensed plus the middle valve plate 2 is 1 μL. The other metering tubes 5 are also set in the same way.

[0065] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A rotary cutting liquid separation valve, characterized in that It includes a valve disc assembly. The valve disc assembly includes a middle valve disc and two outer valve discs. The two outer valve discs are respectively located on both sides of the middle valve disc. The middle valve disc is arranged on a base. The two outer valve discs can rotate relative to the middle valve disc. A pipeline interface assembly is provided on one side of one outer valve disc away from the middle valve disc. A metering tube is connected to the side of the other outer valve disc away from the middle valve disc. The metering tube can be connected and communicated with the pipeline interface assembly. A positioning optocoupler is provided on one side of the valve disc assembly. Optocoupler stoppers corresponding to the positioning optocoupler are provided on both of the two outer valve discs.

2. The rotary cutting liquid separation valve according to claim 1, wherein At least one set of the pipeline interface assemblies is provided. Each set of pipeline interface assemblies includes a pipeline inlet and a pipeline outlet. At least one metering tube is provided. Each metering tube includes two ports. The valve disc assembly is provided with a through hole. The two ports of the metering tube can be respectively connected and communicated with the pipeline inlet and the pipeline outlet through the through hole of the valve disc assembly.

3. The rotary cutting liquid separation valve according to claim 1, characterized in that, The metering tube is U-shaped. Both ends of the metering tube are connected to the other outer valve disc.

4. The rotary cutting liquid separation valve according to claim 1, characterized in that, Four metering tubes are provided, with capacities of 1 microliter, 2 microliters, 5 microliters, and 10 microliters respectively.

5. The rotary cutting liquid separation valve according to claim 1, wherein, Three sets of pipeline interface assemblies are provided, namely the inlet and outlet of the liquid to be dispensed, the inlet and outlet of the cleaning liquid, and the inlet and outlet of the gas.

6. The rotary cutting liquid separation valve according to claim 1, wherein, A pair of through first through holes are provided on the middle valve disc.

7. The rotary cutting liquid separation valve according to claim 1, wherein Mounting shafts are provided on both sides of the middle valve disc. Shaft holes adapted to the mounting shafts are respectively provided on the two outer valve discs. The two outer valve discs can rotate around the mounting shafts as the axis.

8. The rotary cutting liquid separation valve according to claim 1, characterized in that, Motors are respectively connected to both ends of the valve disc assembly.

9. The rotary cutting liquid separation valve according to claim 8, wherein Both ends of the valve disc assembly are connected to the motors through couplings. Sleeve bushes are also provided at both ends of the valve disc assembly. The sleeve bushes are connected to the couplings.

10. The rotary cutting liquid separation valve according to claim 8, characterized in that, The motor is a stepper motor and is mounted on the base through a motor bracket.

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