Pressure monitoring mechanism and tail gas treatment machine

Abstract

The utility model provides a pressure monitoring mechanism and a tail gas treatment machine, and belongs to the field of semiconductor equipment, the pressure monitoring mechanism is communicated with a cavity of the tail gas treatment machine and a main device through each waste gas pipe, and is communicated with at least two waste gas pipes through detection pipes; the pressure sensor installed on the detection pipe can monitor the pressure of the two waste gas pipelines at the same time, and the installation mode of the pressure sensor of the tail gas treatment machine is greatly improved. Therefore, when two or more main devices are subjected to waste gas treatment by one tail gas treatment machine at the same time, the pressure monitoring mechanism effectively monitors the pressure of the flying pipeline between each main device and the tail gas treatment machine at the same time, so that the pipeline blockage risk of the tail gas treatment machine is reduced; therefore, blocking of a vacuum pump of the tail gas treatment machine, process stopping of a host, equipment downtime and wafer scrapping are avoided.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor equipment, and more specifically, to a pressure monitoring mechanism and an exhaust gas treatment machine. Background Art

[0002] The electric heating water washing type exhaust gas treatment machine is an auxiliary machine of the POLY / NTR / TEOS main equipment. The waste gas in the furnace tube high-temperature equipment (i.e., the main machine platform, also known as the diffusion main equipment) is pumped out by a vacuum pump and enters the electric heating water washing type exhaust gas treatment machine. The electric heating water washing type exhaust gas treatment machine filters impurities such as SiH4, WF6, NH3, and H2 in the waste gas through the electric heating water washing method, and then discharges it through the factory acid exhaust.

[0003] During the operation of the electric heating water washing type exhaust gas treatment machine, since a large amount of waste gas impurities will enter the cavity and pipeline of the electric heating water washing type exhaust gas treatment machine, the cavity and pipeline that are not cleaned for a long time are extremely prone to blockage, resulting in the jamming of the vacuum pump and the process stop of the furnace tube high-temperature equipment, scrapping the wafers. Therefore, a pressure sensor is installed at the front end pipeline of the cavity where the waste gas enters the electric heating water washing type exhaust gas treatment machine to detect the pressure change inside the cavity and the front end pipeline, so as to judge whether the pipeline and the cavity are blocked, and then control the exhaust gas treatment machine to alarm or repair the exhaust gas treatment machine to ensure the normal operation of the main machine platform.

[0004] In the case where two furnace tube high-temperature equipment are simultaneously treated with waste gas by one electric heating water washing type exhaust gas treatment machine, the electric heating water washing type exhaust gas treatment machine requires two pipelines to meet the waste gas treatment of two main machine platforms. However, the current method of installing the pressure sensor in the electric heating water washing type exhaust gas treatment machine has a high risk of pipeline blockage, which is extremely prone to cause the jamming of the vacuum pump, the process stop of the main machine platform, the downtime of the equipment, and the scrapping of the wafers. Summary of the Utility Model

[0005] In view of this, the purpose of the present utility model is to provide a pressure monitoring mechanism and an exhaust gas treatment machine, which improve the current method of installing the pressure sensor, reduce the risk of pipeline blockage of the exhaust gas treatment machine, and avoid the jamming of the vacuum pump of the exhaust gas treatment machine, the process stop of the main machine platform, the downtime of the equipment, and the scrapping of the wafers.

[0006] In order to achieve the above purpose, the technical solution adopted by the present utility model is as follows:

[0007] In a first aspect, the present utility model provides a pressure monitoring mechanism, including a detection pipe and at least two exhaust gas pipes;

[0008] The exhaust gas pipe is used to connect the cavity of the exhaust gas treatment machine and the exhaust gas outlet of a main equipment;

[0009] The exhaust gas pipe further includes a first detection interface, and the detection pipe includes a second detection interface and at least two pipeline interfaces;

[0010] Each of the pipeline interfaces of the detection tube communicates with the first detection interface of one of the exhaust gas pipes, and the second detection interface of the detection tube is used for installing a pressure sensor.

[0011] Optionally, a fixing mechanism is provided on the second detection interface of the detection tube, and the pressure sensor is detachably installed on the detection tube through the fixing mechanism.

[0012] Optionally, the fixing mechanism includes an internal thread provided in the second detection interface of the detection tube.

[0013] Optionally, the pressure monitoring mechanism further includes a fixing member, and the fixing member connects the pipeline interface of the detection tube and the first detection interface of the exhaust gas pipe.

[0014] Optionally, the fixing member includes a clamp.

[0015] Optionally, the pressure monitoring mechanism further includes a sealing member, and the sealing member is arranged at the connection between the pipeline interface of the detection tube and the first detection interface of the exhaust gas pipe.

[0016] Optionally, the sealing member includes a rubber ring.

[0017] Optionally, the detection tube and at least two of the exhaust gas pipes are integrally formed.

[0018] In a second aspect, the present invention provides a pressure monitoring mechanism, including a pressure sensor, a detection tube, a first exhaust gas pipe, and a second exhaust gas pipe;

[0019] Both the first exhaust gas pipe and the second exhaust gas pipe include three interfaces, and the detection tube includes two pipeline interfaces and one detection interface;

[0020] The first interface of the first exhaust gas pipe is used to communicate with the exhaust gas outlet of the first main device, the first interface of the second exhaust gas pipe is used to connect with the exhaust gas outlet of the second main device, and the second interfaces of the first exhaust gas pipe and the second exhaust gas pipe are both used to communicate with the cavity of the tail gas treatment machine;

[0021] One of the pipeline interfaces of the detection tube communicates with the third interface of the first exhaust gas pipe, the other pipeline interface of the detection tube communicates with the third interface of the second exhaust gas pipe, and the pressure sensor is arranged on the detection interface of the detection tube.

[0022] In a third aspect, the present invention provides a tail gas treatment machine, including a cavity, a treatment device, and the pressure monitoring mechanism as described in the first aspect or the second aspect;

[0023] The processing device is communicatively connected to the pressure sensor of the pressure monitoring mechanism;

[0024] The processing device is configured to control the operating state of the tail gas processor in response to the pressure value transmitted by the pressure sensor.

[0025] A pressure monitoring mechanism and a tail gas processor provided by the present utility model. The pressure monitoring mechanism connects the cavity of the tail gas processor and a main device through each exhaust pipe, and connects at least two exhaust pipes through a detection pipe, so that the pressure sensor installed on the detection pipe can simultaneously monitor the pressures of two exhaust pipe lines, greatly improving the installation method of the pressure sensor of the tail gas processor. Thus, when two or more main devices are simultaneously subjected to waste gas treatment by one tail gas processor, the pressures of the waste gas pipelines between each main device and the tail gas processor can be effectively monitored simultaneously through the pressure monitoring mechanism, thereby reducing the risk of pipeline blockage of the tail gas processor to avoid the jamming of the vacuum pump of the tail gas processor, the stoppage of the process of the main machine platform, the downtime of the equipment, and the scrapping of wafers.

[0026] In order to make the above objects, features, and advantages of the present utility model more obvious and understandable, the following specifically enumerates preferred embodiments and, in conjunction with the accompanying drawings, makes a detailed description as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the drawings required to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present utility model and should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.

[0028] Figure 1 FIG. 1 shows one of the structural schematic diagrams of the pressure monitoring mechanism provided by the embodiment of the present utility model.

[0029] Figure 2 FIG. 2 shows the structural schematic diagram of the exhaust pipe provided by the embodiment of the present utility model.

[0030] Figure 3 FIG. 3 shows the structural schematic diagram of the detection pipe provided by the embodiment of the present utility model.

[0031] Figure 4 FIG. 4 shows another structural schematic diagram of the pressure monitoring mechanism provided by the embodiment of the present utility model.

[0032] DESCRIPTION OF REFERENCE NUMERALS: 1000 - pressure monitoring mechanism; 10 - detection pipe; 110 - second detection interface; 120 - pipeline interface; 20 - exhaust pipe; 210 - first detection interface; 220 - first exhaust pipe; 230 - second exhaust pipe; 30 - pressure sensor. Detailed Implementation Modes

[0033] Next, in combination with the attached drawings in the embodiments of the present utility model, the technical solutions in the embodiments of the present utility model will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Usually, the components of the embodiments of the present utility model described and shown in the attached drawings here can be arranged and designed in various different configurations.

[0034] Therefore, the following detailed description of the embodiments of the present utility model provided in the attached drawings is not intended to limit the scope of the present utility model to be protected, but only represents the selected embodiments of the present utility model. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present utility model.

[0035] It should be noted that relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprising", "including" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "including a..." does not exclude the existence of additional identical elements in the process, method, article or device including the element.

[0036] Referring to Figure 1 , the present utility model provides a pressure monitoring mechanism 1000, including a detection pipe 10 and at least two exhaust pipes 20.

[0037] The exhaust pipe 20 is used to connect the cavity of the tail gas treatment machine and the exhaust gas outlet of a main device.

[0038] The exhaust pipe 20 further includes a first detection interface 210, and the detection pipe 10 includes a second detection interface 110 and at least two pipeline interfaces 120.

[0039] Each pipeline interface 120 of the detection pipe 10 is connected to the first detection interface 210 of an exhaust pipe 20, and the second detection interface 110 of the detection pipe 10 is used to install a pressure sensor 30.

[0040] Here, the exhaust pipe 20 has three interfaces, that is, it is a tee pipe.

[0041] For the detection tube 10, the number of its interfaces is related to the number of exhaust pipes 20 (or the main equipment connected to the tail gas treatment machine), and the number of pipeline interfaces 120 is the same as the number of exhaust pipes 20 (or the main equipment connected to the tail gas treatment machine).

[0042] For example, when there are two exhaust pipes 20 (i.e., the main equipment connected to the tail gas treatment machine), the detection tube 10 has three interfaces (the second detection interface 110 and two pipeline interfaces 120). When there are three exhaust pipes 20 (i.e., the main equipment connected to the tail gas treatment machine), the detection tube 10 has four interfaces (the second detection interface 110 and three pipeline interfaces 120).

[0043] It should be noted that the main equipment can be, but is not limited to: a furnace tube high-temperature equipment or any diffusion main equipment that implements a manufacturing process (such as semiconductor processes like POLY / NTR / TEOS processes, etc.) and has tail gas to be treated. The tail gas treatment machine can be an electric heating water-washing type tail gas treatment machine or any other type of tail gas treatment machine. In addition, during actual use, a vacuum pump is usually provided between the exhaust pipe 20 and the main equipment.

[0044] Currently, usually two furnace tube high-temperature equipment (i.e., the main machine platforms, also known as diffusion main equipment) are respectively connected to an electric heating water-washing type tail gas treatment machine through a pipeline, so that the waste gas can be treated by one electric heating water-washing type tail gas treatment machine at the same time. However, the NSHW600scrubber model of the electric heating water-washing type tail gas treatment machine can only install one pressure sensor 30 during design. Therefore, the electric heating water-washing type tail gas treatment machine cannot obtain the real-time negative pressure change of one of the pipelines, resulting in a risk of pipeline blockage, which is extremely likely to cause the vacuum pump on the pipeline to get stuck, the process of the main machine platform to stop, the furnace tube high-temperature equipment to crash, and the wafers to be scrapped.

[0045] Through the above-mentioned pressure monitoring mechanism 1000 provided by this embodiment, the pressure monitoring mechanism 1000 connects the cavity of the tail gas treatment machine and a main equipment through each exhaust pipe 20, and connects at least two exhaust pipes 20 through the detection tube 10, so that the pressure sensor 30 installed on the detection tube 10 can monitor the pressures of two exhaust pipelines at the same time, greatly improving the installation method of the pressure sensor 30 of the tail gas treatment machine.

[0046] Thus, when two or more main equipments are simultaneously treated with waste gas by one tail gas treatment machine, the pressure monitoring mechanism 1000 effectively monitors the pressure of the exhaust pipelines between each main equipment and the tail gas treatment machine at the same time, thereby reducing the risk of pipeline blockage of the tail gas treatment machine, so as to avoid the vacuum pump of the tail gas treatment machine from getting stuck, the process of the main machine platform from stopping, the equipment from crashing, and the wafers from being scrapped.

[0047] In the above pressure monitoring mechanism 1000, the installation method between the pressure sensor 30 and the detection pipe 10 can be flexibly selected. For example, it can be welded to the second detection interface 110 of the detection pipe 10, or the pressure sensor 30 and the detection pipe 10 can be detachably connected.

[0048] In order to fix the pressure sensor 30 on the detection pipe 10 while facilitating disassembly and replacement, a fixing mechanism is provided on the second detection interface 110 of the detection pipe 10, and the pressure sensor 30 is detachably installed on the detection pipe 10 through the fixing mechanism.

[0049] Among them, the setting of the fixing mechanism can be flexibly selected. For example, it can be a flange, that is, the pressure sensor 30 is fixed to the second detection interface 110 of the detection pipe 10 through a flange, or it can be a screw, that is, the pressure sensor 30 is fixed to the second detection interface 110 of the detection pipe 10 through a screw. And the above two methods are only examples, and its implementation method is not limited.

[0050] In order to facilitate disassembly and installation, and at the same time reduce the complexity of the pressure monitoring mechanism 1000, the fixing mechanism can be an internal thread provided in the second detection interface 110 of the detection pipe 10. At this time, an external thread is provided on the installation part of the pressure sensor 30, so as to realize the detachable installation between the pressure sensor 30 and the detection pipe 10 through the cooperation of the internal thread and the external thread.

[0051] Similarly to the above connection method between the pressure sensor 30 and the detection pipe 10, the connection between the detection pipe 10 and the exhaust pipe 20 can be a fixed connection or a detachable connection.

[0052] In order to realize the detachable connection between the detection pipe 10 and the exhaust pipe 20, the pressure monitoring mechanism 1000 further includes a fixing member, and the fixing member connects the pipeline interface 120 of the detection pipe 10 and the first detection interface 210 of the exhaust pipe 20.

[0053] Among them, the setting method of the fixing member can be flexibly selected.

[0054] For example, the fixing member can include an internal thread provided on the pipeline interface 120 of the detection pipe 10 and an external thread provided in the first detection interface 210 of the exhaust pipe 20, and the internal thread and the external thread are matched to realize the detachable connection between the exhaust pipe 20 and the detection pipe 10.

[0055] The fixing member can also be a screw, and the exhaust pipe 20 and the detection pipe 10 are detachably connected through the screw.

[0056] It should be noted that the above two methods are only examples, and the implementation method of the detachable connection between the detection pipe 10 and the exhaust pipe 20 is not limited.

[0057] In order to facilitate quick disassembly or connection while achieving a detachable connection, the fixing member can be a clamp.

[0058] Thus, due to the easy operation performance of the clamp, it is convenient to quickly fix or disassemble the exhaust pipe 20 and the detection pipe 10. At the same time, with the high reliability performance of the clamp, the connection between the exhaust pipe 20 and the detection pipe 10 is made more stable, reducing the probability of detachment.

[0059] On the above basis, in order to improve the airtightness at the connection between the exhaust pipe 20 and the detection pipe 10 and avoid exhaust gas leakage, the pressure monitoring mechanism 1000 further includes a sealing member, which is arranged at the connection between the pipeline interface 120 of the detection pipe 10 and the first detection interface 210 of the exhaust pipe 20.

[0060] The sealing member is annular.

[0061] Among them, the sealing member can be arranged inside the detection pipe 10 or the exhaust pipe 20. For example, when the pipeline interface 120 of the detection pipe 10 is sleeved inside the first detection interface 210 of the exhaust pipe 20, the sealing member is arranged inside the exhaust pipe 20 and is located between the exhaust pipe 20 and the detection pipe 10. Similarly, when the first detection interface 210 of the exhaust pipe 20 is sleeved inside the pipeline interface 120 of the detection pipe 10, the sealing member is arranged inside the detection pipe 10 and is located between the exhaust pipe 20 and the detection pipe 10.

[0062] The sealing member can also be arranged outside the connection of the detection pipe 10 inside the detection pipe 10 and the exhaust pipe 20, and is located between the connection and the clamp.

[0063] In addition, the material of the sealing member can be flexibly selected. For example, the sealing member can be a rubber ring made of any one of fluororubber, ethylene propylene rubber, silicone rubber, etc., or a sealing ring made of polytetrafluoroethylene. And the above materials of the sealing member are only examples, and the selected materials are not limited.

[0064] Through the above detachable connection method, it is convenient to replace, repair, and install the detection pipe 10 and the repair pipe. At the same time, when there is pipeline damage, only the damaged pipeline needs to be replaced, greatly reducing the maintenance cost.

[0065] In order to prevent exhaust gas leakage between the detection pipe 10 and the exhaust pipe 20, in the pressure monitoring mechanism 1000, the detection pipe 10 and all exhaust pipes 20 (i.e., at least two exhaust pipes 20) are integrally formed. In this way, there are no gaps between the detection pipe 10 and the exhaust pipe 20, thus ensuring good airtightness between the detection pipe 10 and the exhaust pipe 20.

[0066] In addition, the shapes of the detection pipe 10 and the exhaust pipe 20 can be flexibly set.

[0067] When the exhaust pipe 20 has a total of three interfaces, the shape of the exhaust pipe 20 can be Y-shaped, or can be T-shaped as shown in Figure 2 , or can be any other shape.

[0068] When the detection pipe 10 includes a first detection interface 210 and two pipeline interfaces 120, the shape of the detection pipe 10 can also be C-shaped as shown in Figure 3 , or can be Y-shaped, T-shaped or any other shape.

[0069] When the pressure monitoring mechanism 1000 provided above is applied to the tail gas treatment machine, the pressure sensor 30 installed on the detection pipe 10 is communicatively connected to the tail gas treatment machine or the controller of the tail gas treatment machine. Each main device is connected to the cavity of the tail gas treatment machine through the exhaust pipe 20, and the exhaust pipes 20 are connected through the detection pipe 10.

[0070] Thus, on this basis, when the pressure sensor 30 on the detection pipe 10 monitors the negative pressure of each exhaust pipe 20 at the same time and transmits the negative pressure to the tail gas treatment machine or the controller of the tail gas treatment machine in real time. In the case of overpressure of the negative pressure in any one or several exhaust pipes 20, the tail gas treatment machine or the controller of the tail gas treatment machine will determine that the negative pressure is too large, and then give an alarm to remind to check the cause of the alarm in advance.

[0071] In this way, the situation that the vacuum pump is stuck due to pipeline blockage is improved, and the probability of the main equipment process stop, equipment downtime, and wafer scrapping is greatly reduced.

[0072] Based on the same concept as the above pressure monitoring mechanism 1000, referring to Figure 4 , an embodiment of the present invention further provides a pressure monitoring mechanism 1000, including a pressure sensor 30, a detection pipe 10, a first exhaust pipe 220, and a second exhaust pipe 230.

[0073] Both the first exhaust pipe 220 and the second exhaust pipe 230 include three interfaces, and the detection pipe 10 includes two pipeline interfaces 120 and one detection interface.

[0074] The first interface of the first exhaust pipe 220 is used to communicate with the exhaust gas outlet of the first main device, the first interface of the second exhaust pipe 230 is used to connect to the exhaust gas outlet of the second main device, and the second interfaces of the first exhaust pipe 220 and the second exhaust pipe 230 are both used to communicate with the cavity of the tail gas treatment machine.

[0075] One pipeline interface 120 of the detection pipe 10 is communicated with the third interface of the first exhaust pipe 220, the other pipeline interface 120 of the detection pipe 10 is communicated with the third interface of the second exhaust pipe 230, and the pressure sensor 30 is arranged on the detection interface of the detection pipe 10.

[0076] Through the above-mentioned pressure monitoring mechanism 1000, the pressure monitoring mechanism 1000 connects the first main device and the second main device to the cavity of the tail gas treatment machine through the first waste gas pipe 220 and the second waste gas pipe 230 respectively, and the detection pipe 10 is simultaneously connected to the first waste gas pipe 220 and the second waste gas pipe 230, so that the pressure sensor 30 on the detection pipe 10 can simultaneously monitor the pressures of the two waste gas pipelines, greatly improving the installation method of the pressure sensor 30 of the tail gas treatment machine. Thus, when the first main device and the second main device are simultaneously treated with waste gas by one tail gas treatment machine, the pressure monitoring mechanism 1000 effectively monitors the pressure of the waste gas pipelines between each main device and the tail gas treatment machine at the same time, thereby reducing the risk of pipeline blockage of the tail gas treatment machine to avoid the tail gas treatment machine vacuum pump from jamming, the main machine process from stopping, the equipment from crashing, and the wafers from being scrapped.

[0077] For the specific implementation and effects of the pressure monitoring mechanism 1000 and the detection pipe 10, the first waste gas pipe 220 and the second waste gas pipe 230 therein, reference can be made to the implementation described above, and details will not be repeated here.

[0078] The present utility model also provides a tail gas treatment machine, which includes a cavity, a treatment device, and the pressure monitoring mechanism 1000 provided above.

[0079] The treatment device is communicatively connected to the pressure sensor 30 of the pressure monitoring mechanism 1000.

[0080] The treatment device is configured to control the working state of the tail gas treatment machine in response to the pressure value transmitted by the pressure sensor 30.

[0081] With the above structure, the tail gas treatment machine monitors the pressure of the waste gas pipelines between its own cavity and two or more main devices through the pressure monitoring mechanism 1000, so as to take countermeasures such as shutdown alarm when the negative pressure of any one or any several waste gas pipelines is too large. Thus, the risk of pipeline blockage of the tail gas treatment machine can be reduced to avoid the tail gas treatment machine vacuum pump from jamming, the main machine process from stopping, the equipment from crashing, and the wafers from being scrapped.

[0082] For the specific implementation and effects of the pressure monitoring mechanism 1000, reference can be made to the implementation described above, and details will not be repeated here.

[0083] In summary, the pressure monitoring mechanism and the tail gas treatment machine provided by the present utility model have at least the following beneficial effects:

[0084] (1) One pressure sensor can simultaneously detect the negative pressure of two or more waste gas pipelines of the tail gas treatment machine;

[0085] (2) The tail gas treatment machine can take corresponding measures when the negative pressure of any waste gas pipeline is too high, so as to avoid the risk of downtime, reduce manpower, and lower the maintenance and repair costs.

[0086] The above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. For those skilled in the art, the present utility model can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A pressure monitoring mechanism, characterized in that, It includes a detection tube and at least two exhaust gas pipes; The exhaust gas pipes are used to connect the cavity of the tail gas treatment machine and the exhaust gas outlet of a main device; The exhaust gas pipes further include a first detection interface, and the detection tube includes a second detection interface and at least two pipeline interfaces; Each of the pipeline interfaces of the detection tube is communicated with the first detection interface of one of the exhaust gas pipes, and the second detection interface of the detection tube is used for installing a pressure sensor.

2. The pressure monitoring mechanism according to claim 1, wherein, A fixing mechanism is arranged on the second detection interface of the detection tube, and the pressure sensor is detachably installed on the detection tube through the fixing mechanism.

3. The pressure monitoring mechanism according to claim 2, wherein The fixing mechanism includes an internal thread arranged in the second detection interface of the detection tube.

4. The pressure monitoring mechanism according to claim 1, characterized in that, The pressure monitoring mechanism further includes a fixing member, and the fixing member connects the pipeline interface of the detection tube and the first detection interface of the exhaust gas pipe.

5. The pressure monitoring mechanism according to claim 4, characterized in that The fixing member includes a clamp.

6. The pressure monitoring mechanism according to any one of claims 1 to 5, characterized in that, The pressure monitoring mechanism further includes a sealing member, and the sealing member is arranged at the communication position between the pipeline interface of the detection tube and the first detection interface of the exhaust gas pipe.

7. The pressure monitoring mechanism according to claim 6, wherein The sealing member includes a rubber ring.

8. The pressure monitoring mechanism according to any one of claims 1 to 3, characterized in that, The detection tube and at least two of the exhaust gas pipes are integrally formed.

9. A pressure monitoring mechanism, characterized in that, It includes a pressure sensor, a detection tube, a first exhaust gas pipe and a second exhaust gas pipe; Both the first exhaust gas pipe and the second exhaust gas pipe include three interfaces, and the detection tube includes two pipeline interfaces and a detection interface; The first interface of the first exhaust gas pipe is used to communicate with the exhaust gas outlet of the first main device, the first interface of the second exhaust gas pipe is used to connect with the exhaust gas outlet of the second main device, and the second interfaces of the first exhaust gas pipe and the second exhaust gas pipe are both used to communicate with the cavity of the tail gas treatment machine; One of the pipeline interfaces of the detection tube is communicated with the third interface of the first exhaust gas pipe, the other pipeline interface of the detection tube is communicated with the third interface of the second exhaust gas pipe, and the pressure sensor is arranged on the detection interface of the detection tube.

10. An exhaust gas treatment machine, characterized in that, It includes a cavity, a processing device, and the pressure monitoring mechanism according to any one of claims 1 to 9; The processing device is communicatively connected to the pressure sensor of the pressure monitoring mechanism; The processing device is configured to control the working state of the tail gas treatment machine in response to the pressure value transmitted by the pressure sensor.

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