Tool for pot support vapor deposition

Abstract

The utility model provides a tool for pot support vapor deposition, which relates to the technical field of vapor deposition accessories and particularly comprises a bearing part and a limiting component. The bearing piece has a bearing surface; the number of the limiting assemblies is multiple, the multiple limiting assemblies are arranged on the bearing surface in the circumferential direction of the bearing part, multiple storage spaces are defined by the multiple limiting assemblies and the bearing surface, the multiple storage spaces are distributed in the circumferential direction of the bearing part, and the storage spaces are used for vertically placing pot supports; wherein a plurality of air holes are formed in the bearing part, the multiple air holes are located in the bottoms of the multiple storage spaces respectively, and the air holes penetrate through the bearing part in the vertical direction. The pot supports are vertically placed in the storage spaces, the space utilization rate is higher, the air holes are formed in the bottom of each storage space so that gas can enter the storage spaces from the air holes, the gas can make contact with the pot supports in the storage spaces, the gas can make direct contact with the pot supports in the storage spaces through the air holes, and the deposition effect is more excellent.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical vapor deposition accessories, and particularly to a tooling for chemical vapor deposition of a crucible support. Background Art

[0002] The crucible support is mainly applied to silicon single crystal pulling furnaces in the photovoltaic industry. With the rapid development of the photovoltaic industry, traditional graphite crucible supports can no longer meet the requirements of modern production due to problems such as high brittleness, low strength, easy cracking, and low corrosion resistance. In contrast, carbon-carbon composite crucible supports have gradually become an ideal choice to replace graphite crucible supports because of their advantages such as high strength, low density, small coefficient of thermal expansion, and good thermal shock resistance, showing excellent performance in high-temperature environments and having a long service life.

[0003] The preparation method of the carbon-carbon crucible support mainly includes obtaining a crucible support preform by flat needle punching using a carbon fiber mesh blank and carbon fiber cloth, then soaking the preform in resin and performing hot pressing treatment to form a low-density crucible support. This process also includes chemical vapor deposition, impregnation, and carbonization treatment until the density of the crucible support reaches a preset density, and finally high-temperature purification to obtain the final carbon-carbon crucible support.

[0004] In the existing chemical vapor deposition method, the crucible supports are placed in a stacked manner, and three pads are placed on the edge so that methane gas and carrier gas can flow through the surface of the crucible support through the gaps. The gas is introduced into the deposition furnace from below the center of the lowermost crucible support, which easily leads to a better deposition effect of the lowermost crucible support than that of the upper crucible supports. The upper crucible supports cannot be effectively densified, and the stacked placement method occupies a large space and has poor space utilization. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a tooling for chemical vapor deposition of a crucible support to alleviate the technical problems that the stacked placement method of crucible supports in the prior art has poor space utilization and the deposition effect of the lower crucible support is better than that of the upper crucible supports.

[0006] The utility model provides a tooling for chemical vapor deposition of a crucible support, including: a bearing member and a limiting component; the bearing member has a bearing surface; there are multiple limiting components, and the multiple limiting components are arranged on the bearing surface along the circumferential direction of the bearing member. The multiple limiting components and the bearing surface enclose multiple placement spaces, and the multiple placement spaces are distributed along the circumferential direction of the bearing member. The placement spaces are used for standing the crucible supports; wherein, multiple air holes are arranged on the bearing member, and the multiple air holes are respectively located at the bottoms of the multiple placement spaces, and the air holes penetrate through the bearing member in the vertical direction.

[0007] Furthermore, multiple installation parts are arranged on the bearing surface; the limiting component is detachably connected to the installation part, and the multiple limiting components and the multiple installation parts are arranged in one-to-one correspondence.

[0008] Further, the limiting component includes a plurality of limiting rods; the installation part is an installation hole, and a plurality of the installation holes are arranged at intervals in the circumferential direction on the bearing surface; a plurality of the limiting rods are respectively inserted into a plurality of the installation holes in a one-to-one correspondence.

[0009] Further, the installation hole includes an inner round hole and an outer round hole; the inner round hole is located at one end of the storage space close to the center of the bearing surface; the outer round hole is located at one end of the storage space far from the center of the bearing surface; wherein, one inner round hole and two outer round holes are correspondingly arranged for each storage space, and the two outer round holes are respectively arranged on both sides of the storage space.

[0010] Further, a plurality of air holes are arranged in the storage space; the plurality of air holes are arranged at intervals along the extending direction of the storage space.

[0011] Further, the limiting rod is a cylindrical rod body; the cylindrical rod body is perpendicular to the bearing surface.

[0012] Further, a plurality of positioning parts are arranged on the bearing surface; the positioning parts are located in the storage space, and the plurality of positioning parts are arranged in a one-to-one correspondence with the plurality of storage spaces.

[0013] Further, the positioning part is a positioning groove; the extending direction of the positioning groove is the same as the extending direction of the storage space, and the groove width of the positioning groove is the same as the thickness of the pot support.

[0014] Further, the positioning groove is a structure that gradually becomes shallower from the middle to both ends.

[0015] Further, the bearing member is a circular plate-like structure; the top surface of the circular plate-like structure is the bearing surface.

[0016] Beneficial effects:

[0017] The tooling for vapor deposition of the pot support provided by the present utility model includes a bearing member and a limiting component; the bearing member has a bearing surface; there are a plurality of limiting components, and the plurality of limiting components are arranged on the bearing surface along the circumferential direction of the bearing member. The plurality of limiting components and the bearing surface enclose a plurality of storage spaces, and the plurality of storage spaces are distributed along the circumferential direction of the bearing member. The storage spaces are used for standing the pot support; wherein, a plurality of air holes are arranged on the bearing member, and the plurality of air holes are respectively located at the bottoms of the plurality of storage spaces, and the air holes penetrate through the bearing member in the vertical direction.

[0018] In the tooling for vapor deposition of the pot support provided by the present utility model, the pot support is supported by a bearing member, and a plurality of limiting components form a plurality of placement spaces with the bearing surface on the bearing surface. The pot support can be placed upright in the placement spaces. Under the structure where the plurality of placement spaces are distributed along the circumferential direction of the bearing member, the plurality of pot supports are also distributed along the circumferential direction of the bearing member. The upright placement method can place more pot supports in the same space, with higher space utilization rate. Moreover, air holes are provided at the bottom of each placement space so that gas can enter the placement space from the air holes, thereby coming into contact with the pot support in the placement space. The gas can directly contact the pot support in each placement space through the air holes, and the deposition effect is more excellent. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the specific embodiments of the present utility model or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0020] Figure 1 It is a schematic structural diagram of the tooling for vapor deposition of the pot support provided by the embodiment of the present utility model.

[0021] ICON:

[0022] 100 - bearing member; 110 - air hole; 120 - positioning groove; 130 - inner round hole; 140 - outer round hole;

[0023] 200 - limiting component;

[0024] 300 - pot support. SPECIFIC EMBODIMENTS

[0025] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. Usually, the components of the embodiments of the present utility model described and illustrated in the drawings here can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present utility model provided in the drawings is not intended to limit the scope of the present utility model to be protected, but merely represents the selected embodiments of the present utility model. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present utility model.

[0027] It should be noted that like reference numerals and letters denote like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined or explained in subsequent figures.

[0028] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is habitually placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used for distinguishing descriptions and should not be construed as indicating or implying relative importance.

[0029] In addition, terms such as "horizontal" and "vertical" do not mean that the components are required to be absolutely horizontal or suspended, but may be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but may be slightly inclined.

[0030] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "installed", "connected", "connected" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0031] The present utility model will be further described in detail below through specific embodiments in conjunction with the drawings.

[0032] Refer to Figure 1 , the tooling for gas phase deposition of the pot support provided in this embodiment includes a carrier 100 and a limiting component 200.

[0033] Among them, the carrier 100 has a bearing surface. There are multiple limiting components 200, and the multiple limiting components 200 are arranged on the bearing surface along the circumferential direction of the carrier 100. The multiple limiting components 200 and the bearing surface enclose multiple storage spaces, and the multiple storage spaces are distributed along the circumferential direction of the carrier 100. The storage spaces are used for standing the pot support 300 upright. Among them, a plurality of air holes 110 are provided on the carrier 100, and the plurality of air holes 110 are respectively located at the bottoms of the plurality of storage spaces, and the air holes 110 penetrate the carrier 100 in the vertical direction.

[0034] When performing vapor deposition, a plurality of pot supports 300 are placed one by one in a plurality of storage spaces on the carrier 100. The pot supports 300 are placed upright in the storage spaces. Under the structure where the plurality of storage spaces are distributed along the circumferential direction of the carrier 100, the plurality of pot supports 300 are also distributed along the circumferential direction of the carrier 100. The upright placement method can place more pot supports 300 in the same space, and the space utilization rate is higher.

[0035] Moreover, air holes 110 are provided at the bottom of each storage space so that gas can enter the storage space from the air holes 110, thereby coming into contact with the pot supports 300 placed in the storage space. The gas can directly contact the pot supports 300 in each storage space through the air holes 110 in each storage space, and the deposition effect is more excellent.

[0036] In this embodiment, a plurality of mounting parts are provided on the bearing surface. The limiting component 200 is detachably connected to the mounting part, and the plurality of limiting components 200 are arranged in one-to-one correspondence with the plurality of mounting parts.

[0037] The limiting component 200 is connected to the mounting part by a detachable connection method, and the limiting component 200 can be disassembled when not in use, which is more convenient for storage.

[0038] Among them, the limiting component 200 can be connected to the carrier 100 by means of thread fitting. In this structure, the mounting part adopts a screw hole structure, and the limiting component 200 can be tightened to the carrier 100.

[0039] In this embodiment, the limiting component 200 includes a plurality of limiting rods.

[0040] Moreover, the mounting part is a mounting hole, and the plurality of mounting holes are arranged at intervals along the circumferential direction on the bearing surface. The plurality of limiting rods are inserted into the plurality of mounting holes in one-to-one correspondence.

[0041] Specifically, the limiting rods in this embodiment are inserted into the mounting holes by a plugging method, which is very convenient for disassembly and assembly. Moreover, the force exerted by the upright pot supports 300 on the limiting rods is a horizontal thrust, and the limiting rods are not easily disengaged from the mounting holes.

[0042] In this embodiment, the mounting hole includes an inner round hole 130 and an outer round hole 140.

[0043] Among them, the inner round hole 130 is located at one end of the storage space close to the center of the bearing surface. The outer round hole 140 is located at one end of the storage space far from the center of the bearing surface. Each storage space corresponds to one inner round hole 130 and two outer round holes 140, and the two outer round holes 140 are respectively arranged on both sides of the storage space.

[0044] Specifically, an inner circular hole 130, two outer circular holes 140 and the bearing surface enclose a storage space. The pot support 300 stands upright in the storage space. One side of the end of the pot support 300 close to the center of the bearing surface abuts against the side wall of the limiting rod installed at the inner circular hole 130, and one end of the pot support 300 far from the center of the bearing surface is located between the limiting rods installed at the two outer circular holes 140, so as to realize the limitation of the pot support 300 and enable the pot support 300 to stand upright in the storage space.

[0045] In this embodiment, a plurality of air holes 110 are provided in the storage space. The plurality of air holes 110 are arranged at intervals along the extending direction of the storage space.

[0046] After the plurality of air holes 110 are arranged at intervals along the extending direction of the storage space, gas can enter the storage space from multiple angles through the plurality of air holes 110 to have all-round contact with the pot support 300, thereby improving the deposition efficiency.

[0047] In this embodiment, the limiting rod is a cylindrical rod body. The cylindrical rod body is perpendicular to the bearing surface.

[0048] The side wall of the cylindrical rod body is a curved surface, which can avoid scratching and abrasion of the surface of the pot support 300, and is convenient for holding by hand during disassembly and assembly, and can be easily inserted into the installation hole.

[0049] In this embodiment, a plurality of positioning parts are arranged on the bearing surface. The positioning parts are located in the storage space, and the plurality of positioning parts are arranged in one-to-one correspondence with the plurality of storage spaces.

[0050] Specifically, the positioning parts can assist the plurality of limiting rods to limit the pot support 300, further improve the stability of the pot support 300 placed in the storage space, and prevent the pot support 300 from rolling out of the storage space.

[0051] Among them, the positioning part can be a limiting block, and the limiting block is arranged at both ends of the storage space to block the pot support 300 and prevent the pot support 300 from rotating and rolling out of the storage space.

[0052] In this embodiment, the positioning part is a positioning groove 120.

[0053] Moreover, the extending direction of the positioning groove 120 in this embodiment is the same as the extending direction of the storage space, and the groove width of the positioning groove 120 is the same as the thickness of the pot support 300.

[0054] Specifically, the extending direction of the positioning groove 120 in this embodiment is the same as the extending direction of the storage space. When the pot support 300 stands upright in the storage space, the bottom end of the pot support 300 is placed in the positioning groove 120, and both ends of the positioning groove 120 can block the pot support 300, so that the pot support 300 can be blocked by the groove wall when rotating, and prevent the pot support 300 from rotating and rolling out of the storage space.

[0055] In this embodiment, the positioning groove 120 has a structure that gradually shallows from the middle to both ends.

[0056] Specifically, the bottom of the positioning groove 120 in this embodiment has an arc-shaped structure, and the diameter of the arc is the same as the diameter of the pot support 300. The bottom end of the pot support 300 can be fitted with the bottom of the positioning groove 120 so that the pot support 300 can be stably placed in the positioning groove 120.

[0057] In this embodiment, the carrier 100 has a circular plate-like structure. The top surface of the circular plate-like structure is the bearing surface.

[0058] The carrier 100 with a circular plate-like structure occupies less space, and when multiple pot supports 300 are placed along the circumference of the carrier 100, the space utilization rate is higher, further saving the occupied space.

[0059] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A tooling for vapor deposition of a pot support, characterized in that, Including: A carrier (100) and a limiting component (200); The carrier (100) has a bearing surface; There are multiple limiting components (200), and the multiple limiting components (200) are arranged along the circumferential direction of the carrier (100) on the bearing surface. The multiple limiting components (200) and the bearing surface enclose multiple storage spaces. The multiple storage spaces are distributed along the circumferential direction of the carrier (100), and the storage spaces are used for standing the pot holders upright; Wherein, multiple air holes (110) are provided on the carrier (100), and the multiple air holes (110) are respectively located at the bottoms of the multiple storage spaces. The air holes (110) penetrate through the carrier (100) in the vertical direction.

2. The tooling for vapor deposition of the pot support according to claim 1, characterized in that, Multiple mounting parts are provided on the bearing surface; The limiting component (200) is detachably connected to the mounting part, and the multiple limiting components (200) and the multiple mounting parts are arranged in one-to-one correspondence.

3. The tooling for pot support vapor deposition according to claim 2, characterized in that, The limiting component (200) includes multiple limiting rods; The mounting part is a mounting hole, and the multiple mounting holes are arranged at intervals along the circumferential direction on the bearing surface; The multiple limiting rods are respectively inserted into the multiple mounting holes in one-to-one correspondence.

4. The tooling for gas-phase deposition of the pot support according to claim 3, characterized in that, The mounting hole includes an inner round hole (130) and an outer round hole (140); The inner round hole (130) is located at one end of the storage space close to the center of the bearing surface; The outer round hole (140) is located at one end of the storage space far from the center of the bearing surface; Wherein, one inner round hole (130) and two outer round holes (140) are correspondingly arranged for each storage space, and the two outer round holes (140) are respectively arranged on both sides of the storage space.

5. The tooling for vapor deposition of the pot support according to claim 4, characterized in that, Multiple air holes (110) are provided in the storage space; The multiple air holes (110) are arranged at intervals along the extending direction of the storage space.

6. The tooling for gas-phase deposition of the pot support according to claim 3, characterized in that, The limiting rod is a cylindrical rod; The cylindrical rod is perpendicular to the bearing surface.

7. The tooling for gas-phase deposition of the pot support according to claim 1, characterized in that, Multiple positioning parts are provided on the bearing surface; The positioning parts are located in the storage spaces, and the multiple positioning parts and the multiple storage spaces are arranged in one-to-one correspondence.

8. The tooling for vapor deposition of the pot support according to claim 7, characterized in that, The positioning part is a positioning groove (120); The extending direction of the positioning groove (120) is the same as the extending direction of the storage space, and the groove width of the positioning groove (120) is the same as the thickness of the pot holder.

9. The tooling for gas-phase deposition of the pot support according to claim 8, characterized in that, The positioning groove (120) has a structure that gradually becomes shallower from the middle to both ends.

10. The tooling for vapor deposition of the pot support according to any one of claims 1-8, characterized in that, The carrier (100) is of a circular plate-like structure; The top surface of the circular plate-like structure is the bearing surface.

Images