Carrying equipment
By designing a handling equipment with rotation and translation drive mechanisms, the problem that existing equipment cannot change the attitude of the silicon wafer is solved, the equipment is adapted in different processes, and the flexibility and efficiency of silicon wafer processing are improved.
Patent Information
- Application Number
- CN202422348677.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-25
- Publication Date
- 2025-08-01
- Estimated Expiration
- 2034-09-25
AI Technical Summary
Existing handling equipment cannot change the attitude of the silicon wafer and it is difficult to adapt to different tooling in different processes.
A conveying device is designed to drive the attitude change of the first conveying body and the second conveying body through the first rotating driving mechanism and the second rotating driving mechanism, and combine the first translation driving mechanism and the second translation driving mechanism to realize the attitude adaptation of the silicon wafer.
It realizes that the handling equipment can adapt to different tooling in different processes, and improves the flexibility and efficiency of silicon wafer processing.
Smart Images
Figure CN223181107U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of solar cell processing equipment, and more specifically, to a transporting device. Background Art
[0002] Silicon wafers, also known as silicon wafers, are the basic materials in semiconductor industry production and are widely used in the manufacture of integrated circuits, solar cells, LEDs and other optoelectronic devices.
[0003] In the prior art, the posture of the transporting body of the transporting equipment used to transport silicon wafers cannot be changed; thus, the transporting equipment is difficult to adapt to different tooling in different processes.
[0004] In view of this, it is necessary to propose a new technical solution to solve the above technical problems. Utility Model Content
[0005] One purpose of this application is to provide a new technical solution for handling equipment.
[0006] According to a first aspect of the present application, a transport device is provided, comprising:
[0007] Support frame;
[0008] a first translation driving mechanism, the first translation driving mechanism being mounted on the support frame and capable of providing a driving force for translational motion along a first direction;
[0009] a first rotation drive mechanism and a second rotation drive mechanism, wherein the first rotation drive mechanism and the second rotation drive mechanism are both connected to the first translation drive mechanism, and the first translation drive mechanism can drive the first rotation drive mechanism and the second rotation drive mechanism to move toward or away from each other along a first direction;
[0010] a first transport body and a second transport body, wherein the first transport body is connected to the first rotation drive mechanism, and the second transport body is connected to the second rotation drive mechanism;
[0011] The first rotation drive mechanism can drive the first transport body to rotate, and the second rotation drive mechanism can drive the second transport body to rotate, so as to switch the postures of the first transport body and the second transport body.
[0012] Optionally, the first translation drive mechanism includes a first motor, a synchronous pulley and a synchronous belt, the first motor is connected to the synchronous pulley, and the synchronous belt is connected to the synchronous pulley;
[0013] One of the first rotation driving mechanism and the second rotation driving mechanism is connected to the upper layer of the synchronous belt, and the other is connected to the lower layer of the synchronous belt.
[0014] Optionally, the first translation driving mechanism further includes a first reduction gear, and the first motor is connected to the synchronous pulley through the first reduction gear.
[0015] Optionally, the first rotation driving mechanism includes a second motor and a second reduction gear. The second motor is connected to the second reduction gear, and the second reduction gear is connected to the first handling body.
[0016] Optionally, the second rotation driving mechanism includes a third motor and a third reduction gear. The third motor is connected to the third reduction gear, and the third reduction gear is connected to the second handling body.
[0017] Optionally, the handling device further includes a second translation driving mechanism. The second translation driving mechanism is installed on the first translation driving mechanism, and the first rotation driving mechanism is connected to the first translation driving mechanism through the second translation driving mechanism. The second translation driving mechanism can drive the first rotation driving mechanism and the first handling body to perform translational movement in the second direction.
[0018] Optionally, the second translation driving mechanism includes a fourth motor and a lead screw assembly. The fourth motor is connected to the lead screw assembly, and the lead screw assembly is connected to the first rotation driving mechanism.
[0019] Optionally, the second translation driving mechanism further includes an adapter plate. The fourth motor is installed on the adapter plate, and the adapter plate is installed on the first translation driving mechanism.
[0020] Optionally, both the first handling body and the second handling body are suction cup mechanisms.
[0021] Optionally, the handling device further includes an ion wind bar. The ion wind bar is installed on the support frame, and the ion wind bar is located on the side of the first handling body away from the second handling body.
[0022] The handling device provided by the embodiment of the present application can achieve the following technical effects:
[0023] In the handling device provided by the embodiment of the present application, through the driving actions of the first rotation driving mechanism and the second rotation driving mechanism, the postures of the first handling body and the second handling body can be changed, so as to better adapt to different jigs in different processes.
[0024] Through the following detailed description of the exemplary embodiments of the present application with reference to the drawings, other features and advantages of the present application will become clear. BRIEF DESCRIPTION OF THE DRAWINGS
[0025] The drawings incorporated in and forming a part of this specification illustrate embodiments of the present application and, together with the description thereof, serve to explain the principles of the present application.
[0026] Figure 1 The structural schematic diagram of a handling device according to the present application is shown. Figure 1 ;
[0027] Figure 2 The structural schematic diagram of a handling device according to the present application is shown. Figure 2 ;
[0028] Figure 3 The structural schematic diagram of a handling device according to the present application is shown. Figure 3 ;
[0029] Figure 4a The arrangement posture schematic diagram of the first handling main body and the second handling main body in a handling device according to the present application is shown. Figure 1 ;
[0030] Figure 4b The arrangement posture schematic diagram of the first handling main body and the second handling main body in a handling device according to the present application is shown. Figure 2 .
[0031] Description of the reference numerals:
[0032] 1. Handling device; 10. Support frame; 11. First translation driving mechanism; 111. First motor; 112. Synchronous belt pulley; 113. Synchronous belt; 114. First reduction gear; 12. First rotation driving mechanism; 121. Second motor; 122. Second reduction gear; 13. Second rotation driving mechanism; 131. Third motor; 132. Third reduction gear; 14. First handling main body; 140. First mounting seat; 141. First adsorption sheet; 15. Second handling main body; 150. Second mounting seat; 151. Second adsorption sheet; 16. Second translation driving mechanism; 161. Fourth motor; 162. Lead screw assembly; 163. Adapter plate; 17. Ion air bar. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0033] Various exemplary embodiments of the present application will now be described in detail with reference to the drawings. It should be noted that: unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions and values set forth in these embodiments do not limit the scope of the present application.
[0034] The following description of at least one exemplary embodiment is merely illustrative in nature and in no way serves as a limitation on the present application or its application or use.
[0035] Techniques, methods, and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques, methods, and equipment should be regarded as part of the specification.
[0036] In all examples shown and discussed herein, any specific values should be construed as merely exemplary and not as a limitation. Thus, other examples of the exemplary embodiments may have different values.
[0037] It should be noted that like reference numerals and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof in subsequent figures is not necessary.
[0038] Referring to Figures 1 - 4b As shown, according to an embodiment of the present application, a handling device 1 is provided. The handling device 1 includes a support frame 10 and a first translation driving mechanism 11. The first translation driving mechanism 11 is installed on the support frame 10, and the first translation driving mechanism 11 can provide a driving force for translational movement in a first direction.
[0039] It further includes a first rotation driving mechanism 12 and a second rotation driving mechanism 13. Both the first rotation driving mechanism 12 and the second rotation driving mechanism 13 are connected to the first translation driving mechanism 11. The first translation driving mechanism 11 can drive the first rotation driving mechanism 12 and the second rotation driving mechanism 13 to move in the first direction to approach each other or move away from each other.
[0040] It further includes a first handling main body 14 and a second handling main body 15. The first handling main body 14 is connected to the first rotation driving mechanism 12, and the second handling main body 15 is connected to the second rotation driving mechanism 13.
[0041] The first rotation driving mechanism 12 can drive the first handling main body 14 to rotate, and the second rotation driving mechanism 13 can drive the second handling main body 15 to rotate to switch the postures of the first handling main body 14 and the second handling main body 15.
[0042] The handling device provided by an embodiment of the present application can be used to handle silicon wafers, for example. Among them, the first handling body 14 is used to handle the first group of silicon wafers, and the second handling body 15 is used to handle the second group of silicon wafers; in some processes of silicon wafer processing, such as the coating process, it is necessary to stick two silicon wafers together for processing; therefore, the first translation driving mechanism 11 can be relied on to drive the first rotation driving mechanism 12 and the second rotation driving mechanism 13 to move along the first direction to approach each other. At the same time, the first handling body 14 and the second handling body 15 move along the first direction and approach each other, so as to plug and fit the first group of silicon wafers handled by the first handling body 14 and the second group of silicon wafers handled by the second handling body 15 to carry out the coating operation.
[0043] Moreover, in the handling device provided by an embodiment of the present application, the first handling body 14 can be driven to rotate by the first rotation driving mechanism 12, and the second handling body 15 can be driven to rotate by the second rotation driving mechanism 13; in this way, the postures of the first handling body 14 and the second handling body 15 can be changed.
[0044] For example, both the first handling body 14 and the second handling body 15 are suction cup mechanisms. The first handling body 14 includes a first mounting seat 140 and a plurality of first suction sheets 141; the second handling body 15 includes a second mounting seat 150 and a plurality of second suction sheets 151.
[0045] Referring to Figure 4a As shown, both the first mounting seat 140 and the second mounting seat 150 are approximately rectangular in cross-section. Through the driving action of the first rotation driving mechanism 12 and the second rotation driving mechanism 13, the first handling body 14 and the second handling body 15 can present the Figure 4a shown linear arrangement posture, that is, the central axis along the length direction of the first mounting seat 140 and the central axis along the length direction of the second mounting seat 150 are located on the same straight line; in this linear arrangement posture, the first handling body 14 and the second handling body 15 can be suitable for taking silicon wafers from the transfer and storage tooling. In addition, through the driving action of the first rotation driving mechanism 12 and the second rotation driving mechanism 13, the first handling body 14 and the second handling body 15 can also present the Figure 4b shown relative arrangement posture, that is, the central axis along the length direction of the first mounting seat 140 and the central axis along the length direction of the second mounting seat 150 are arranged relatively; in this relative arrangement posture, the first handling body 14 and the second handling body 15 can be suitable for feeding materials into the processing equipment.
[0046] In summary, in the handling device provided in the embodiment of the present application, through the driving actions of the first rotation driving mechanism 12 and the second rotation driving mechanism 13, the postures of the first handling main body 14 and the second handling main body 15 can be changed, so as to better adapt to different toolings in different processes.
[0047] Referring to Figures 1 - 3 As shown, in one embodiment, the first translation driving mechanism 11 includes a first motor 111, a synchronous pulley 112, and a synchronous belt 113. The first motor 111 is connected to the synchronous pulley 112, and the synchronous belt 113 is connected to the synchronous pulley 112.
[0048] One of the first rotation driving mechanism 12 and the second rotation driving mechanism 13 is connected to the upper layer of the synchronous belt 113, and the other is connected to the lower layer of the synchronous belt 113.
[0049] In this specific example, the first translation driving mechanism 11 mainly includes a first motor 111, a synchronous pulley 112, and a synchronous belt 113. Among them, the first motor 111 drives the synchronous pulley 112 to rotate, and the synchronous pulley 112 drives the synchronous belt 113 to perform a translational movement along the first direction. The first direction is the extending direction of the synchronous belt 113, that is, Figure 1 the a direction in
[0050] It can be understood that two synchronous pulleys 112 are oppositely arranged along the first direction, and the synchronous belt 113 is sleeved on the two synchronous pulleys 112. In order to improve the stability of the first translation driving mechanism 11 driving the first handling main body 14 and the second handling main body 15 to perform a translational movement along the first direction, two first motors 111 are also provided, and each synchronous pulley 112 is connected to a first motor 111.
[0051] Referring to Figures 1 - 3 As shown, in one embodiment, the first translation driving mechanism 11 further includes a first speed reducer 114, and the first motor 111 is connected to the synchronous pulley 112 through the first speed reducer 114.
[0052] In this specific example, the first motor 111 is connected to the first speed reducer 114, and the first speed reducer 114 is then connected to the synchronous pulley 112. Arranging the first speed reducer 114 between the first motor 111 and the synchronous pulley 112 can enable the synchronous pulley 112 to operate at a suitable speed, avoid the excessive speed that may occur when the first motor 111 directly drives the synchronous pulley 112, and ensure the stability and reliability of the first translation driving mechanism 11.
[0053] Referring to Figures 1 - 3As shown, in one embodiment, the first rotation drive mechanism 12 includes a second motor 121 and a second speed reducer 122. The second motor 121 is connected to the second speed reducer 122, and the second speed reducer 122 is connected to the first handling body 14.
[0054] In this specific example, the second motor 121 is connected to the first handling body 14 through the second speed reducer 122. While reducing the speed, the second speed reducer 122 will correspondingly increase the output torque, thereby making the rotational movement of the second motor 121 driving the first handling body 14 more stable, ensuring that the first handling body 14 rotates at an appropriate speed, avoiding the excessive speed that may occur when the second motor 121 directly drives, and meeting the torque requirements for the first handling body 14 and the silicon wafer it carries during rotation.
[0055] Refer to Figures 1 - 3 As shown, in one embodiment, the second rotation drive mechanism 13 includes a third motor 131 and a third speed reducer 132. The third motor 131 is connected to the third speed reducer 132, and the third speed reducer 132 is connected to the second handling body 15.
[0056] In this specific example, the third motor 131 is connected to the second handling body 15 through the third speed reducer 132. While reducing the speed, the third speed reducer 132 will correspondingly increase the output torque, thereby making the rotational movement of the third motor 131 driving the second handling body 15 more stable, ensuring that the second handling body 15 rotates at an appropriate speed, avoiding the excessive speed that may occur when the third motor 131 directly drives, and meeting the torque requirements for the second handling body 15 and the silicon wafer it carries during rotation.
[0057] Refer to Figures 1 - 3 As shown, in one embodiment, the handling device further includes a second translation drive mechanism 16. The second translation drive mechanism 16 is installed on the first translation drive mechanism 11, and the first rotation drive mechanism 12 is connected to the first translation drive mechanism 11 through the second translation drive mechanism 16. The second translation drive mechanism 16 is used to drive the first rotation drive mechanism 12 and the first handling body 14 to perform translational movement in the second direction.
[0058] In this specific example, by setting the second translation driving mechanism 16, the first handling body 14 together with the silicon wafers it handles can perform a translation movement along the second direction, so that the first group of silicon wafers handled by the first handling body 14 and the second group of silicon wafers handled by the second handling body 15 are arranged in a staggered manner in the second direction. Then, under the driving action of the first translation driving mechanism 11, the first group of silicon wafers handled by the first handling body 14 and the second group of silicon wafers handled by the second handling body 15 approach each other along the first direction and are inserted and fitted together.
[0059] Refer to Figure 1 As shown, the second direction is Figure 1 the b direction shown in Figure 1 , and the first direction and the second direction are perpendicular to each other.
[0060] Refer to Figures 1 - 3 As shown, in one embodiment, the second translation driving mechanism 16 includes a fourth motor 161 and a lead screw assembly 162. The fourth motor 161 is connected to the lead screw assembly 162, and the lead screw assembly 162 is connected to the first rotation driving mechanism 12.
[0061] In this specific example, the lead screw assembly 162 converts the rotational movement of the fourth motor 161 into a linear translation movement, thereby driving the first rotation driving mechanism 12 and the first handling body 14 to perform a translation movement along the second direction. It can be understood that the axial direction of the lead screw in the lead screw assembly 162 is the second direction.
[0062] Refer to Figures 1 - 3 As shown, in one embodiment, the second translation driving mechanism 16 further includes an adapter plate 163. The fourth motor 161 is installed on the adapter plate 163, and the adapter plate 163 is installed on the first translation driving mechanism 11.
[0063] In this specific example, by setting the adapter plate 163, the second translation driving mechanism 16 can be more conveniently installed on the first translation driving mechanism 11.
[0064] Refer to Figures 1 - 3 As shown, in one embodiment, both the first handling body 14 and the second handling body 15 are suction cup mechanisms.
[0065] In this specific example, both the first handling body 14 and the second handling body 15 are suction cup mechanisms. The suction cup mechanism can stably and reliably adsorb the silicon wafers without causing damage to the silicon wafers. Specifically, the first handling body 14 includes a first mounting base 140 and a plurality of first suction sheets 141. The first mounting base 140 is used for the installation of the first handling body 14. For example, the second motor 121 is connected to the first mounting base 140, and the lead screw assembly 162 is also connected to the first mounting base 140; the first suction sheets 141 are used for adsorbing the first group of silicon wafers. The second handling body 15 includes a second mounting base 150 and a plurality of second suction sheets 151. The second mounting base 150 is used for the installation of the second handling body 15. For example, the third motor 131 is connected to the second mounting base 150; the second suction sheets 151 are used for adsorbing the second group of silicon wafers.
[0066] Referring to Figures 1 - 2 As shown, in one embodiment, the handling device further includes an ion blower bar 17. The ion blower bar 17 is installed on the support frame 10, and the ion blower bar 17 is located on the side of the first handling body 14 away from the second handling body 15.
[0067] In this specific example, the setting of the ion blower bar 17 can remove static electricity from the suction cups and the silicon wafers. When it is necessary to separate the silicon wafers that are adhered together, by eliminating the static electricity adsorption effect, when the first handling body 14 and the second handling body 15 move away from each other under the driving force of the first translation driving mechanism 11 to separate the first group of silicon wafers and the second group of silicon wafers, the situation of silicon wafer breakage will not occur.
[0068] Although some specific embodiments of the present application have been described in detail by way of examples, those skilled in the art should understand that the above examples are only for illustration and not for limiting the scope of the present application. Those skilled in the art should understand that the above embodiments can be modified without departing from the scope and spirit of the present application. The scope of the present application is defined by the appended claims.
Claims
1. A handling device, characterized in that, The handling device includes: a support frame (10); a first translation drive mechanism (11) which is installed on the support frame (10) and can provide a driving force for translational movement in a first direction; a first rotation drive mechanism (12) and a second rotation drive mechanism (13), both the first rotation drive mechanism (12) and the second rotation drive mechanism (13) are connected to the first translation drive mechanism (11), and the first translation drive mechanism (11) can drive the first rotation drive mechanism (12) and the second rotation drive mechanism (13) to move in the first direction to approach each other or move away from each other; a first handling main body (14) and a second handling main body (15), the first handling main body (14) is connected to the first rotation drive mechanism (12), and the second handling main body (15) is connected to the second rotation drive mechanism (13); the first rotation drive mechanism (12) can drive the first handling main body (14) to rotate, and the second rotation drive mechanism (13) can drive the second handling main body (15) to rotate, so as to switch the postures of the first handling main body (14) and the second handling main body (15).
2. The handling device according to claim 1, characterized in that, The first translation drive mechanism (11) includes a first motor (111), a synchronous pulley (112) and a synchronous belt (113), the first motor (111) is connected to the synchronous pulley (112), and the synchronous belt (113) is connected to the synchronous pulley (112); One of the first rotation drive mechanism (12) and the second rotation drive mechanism (13) is connected to the upper layer of the synchronous belt (113), and the other is connected to the lower layer of the synchronous belt (113).
3. The handling device according to claim 2, characterized in that, The first translation drive mechanism (11) further includes a first speed reducer (114), and the first motor (111) is connected to the synchronous pulley (112) through the first speed reducer (114).
4. The handling device according to claim 1, characterized in that, The first rotation drive mechanism (12) includes a second motor (121) and a second speed reducer (122), the second motor (121) is connected to the second speed reducer (122), and the second speed reducer (122) is connected to the first handling main body (14).
5. The handling device according to claim 1, characterized in that The second rotation drive mechanism (13) includes a third motor (131) and a third speed reducer (132), the third motor (131) is connected to the third speed reducer (132), and the third speed reducer (132) is connected to the second handling main body (15).
6. The handling device according to claim 1, characterized in that, The handling device further includes a second translation drive mechanism (16), the second translation drive mechanism (16) is installed on the first translation drive mechanism (11), and the first rotation drive mechanism (12) is connected to the first translation drive mechanism (11) through the second translation drive mechanism (16), and the second translation drive mechanism (16) can drive the first rotation drive mechanism (12) and the first handling main body (14) to perform translational movement in a second direction.
7. The handling device according to claim 6, characterized in that, The second translation driving mechanism (16) includes a fourth motor (161) and a lead screw assembly (162). The fourth motor (161) is connected to the lead screw assembly (162), and the lead screw assembly (162) is connected to the first rotation driving mechanism (12).
8. The handling device according to claim 7, characterized in that, The second translation driving mechanism (16) further includes an adapter plate (163). The fourth motor (161) is mounted on the adapter plate (163), and the adapter plate (163) is mounted on the first translation driving mechanism (11).
9. The handling device according to any one of claims 1-8, characterized in that, Both the first handling body (14) and the second handling body (15) are suction cup mechanisms.
10. The handling device according to any one of claims 1-8, characterized in that, The handling device further includes an ion blower bar (17). The ion blower bar (17) is mounted on the support frame (10), and the ion blower bar (17) is located on the side of the first handling body (14) away from the second handling body (15).