Silicon wafer bearing flower basket

Abstract

The utility model relates to the technical field of bearing flower baskets, and discloses a silicon wafer bearing flower basket which comprises a bearing plate, a first supporting plate is fixedly connected to the upper side of one end of the bearing plate, and when the bearing flower basket is used for placing and transferring silicon wafers, an adjusting assembly is used for adjusting the distance between the first supporting plate and a second supporting plate according to the types of the silicon wafers; after adjustment, the tension assembly is pulled, the tension assembly drives the elastic assembly to move through the transmission assembly after being pulled, the elastic assembly synchronously drives the clamping assembly to move after moving, then the silicon wafers are inserted into the clamping grooves one by one, and the tension assembly is loosened after insertion is finished; the clamping assembly is pushed to return by means of the elastic potential energy of the elastic assembly to clamp and fix the inserted silicon wafer, so that the limiting effect on the silicon wafer can be improved when the silicon wafer is stored and transferred by the bearing basket, the stability is enhanced, the silicon wafer is prevented from colliding with the first supporting plate, the second supporting plate and the clamping groove in the transferring process, and the transferring efficiency is improved. Therefore, the abrasion of the silicon wafer is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of bearing flower baskets, and specifically to a silicon wafer bearing flower basket. Background Art

[0002] Silicon wafers are a type of semiconductor with high purity and good electrical and thermal conductivity. They are often used in integrated circuit manufacturing, solar cells, and semiconductor devices. During the production and processing of silicon wafers, a carrying basket is required as a carrier to store the silicon wafers. The silicon wafer carrying basket is generally made of corrosion-resistant materials and has specific slots or slots for placing silicon wafers.

[0003] After searching, Chinese application number CN202221767493.8 proposes a silicon wafer carrying flower basket, including a carrying plate, the top of the carrying plate is fixedly connected to two support plates, the top of the carrying plate is provided with two limit plates, the two limit plates are slidably connected to the support plate on the back, the support plate on the front is provided with a through slot, the front of the two limit plates are fixedly connected to a synchronous plate, the front of the synchronous plate passes through the through slot and extends to the front of the support plate, the support plate on the front is rotatably connected to an adjusting rod, and the two synchronous plates are threadedly connected to the adjusting rod. In the above-mentioned prior art, a threaded adjustment device is mainly provided on one side of the carrying flower basket, and the threaded adjustment device is used to adjust the distance between the support plates on both sides. At the same time, a guide groove is provided at the bottom of the carrying plate for guiding the liquid medicine carried on the silicon wafer, which improves the applicability of the carrying flower basket and also protects the silicon wafer.

[0004] In the above-mentioned prior art, the spacing between the support plates on the carrier plate is mainly adjusted by an adjustment device, and the guide groove is used to guide the liquid medicine carried on the silicon wafer to avoid the liquid medicine affecting the silicon wafer during subsequent processing. However, after the carrier flower basket is manufactured, the spacing between the slots in the support plates on both sides is fixed. In order to facilitate the insertion and placement of the silicon wafer, the hole groove in the slot is usually set to be larger than the thickness of the silicon wafer. However, after the silicon wafer is inserted into the slot and restricted by the slot and the support plate, when the carrier flower basket is used to transport the silicon wafer, the silicon wafer is prone to shaking during transportation due to the large gap in the slot, thereby causing the silicon wafer to frequently collide with the slot and the support plate. The frequent collisions are likely to cause wear on the silicon wafer and the carrier flower basket, thereby affecting the subsequent processing of the silicon wafer and reducing the service life of the carrier flower basket. Utility Model Content

[0005] The purpose of the utility model is to provide a silicon wafer carrying basket to solve the problem in the prior art that when silicon wafers are inserted into the carrying basket for transportation, the gap between the silicon wafers and the carrying basket slots causes the silicon wafers to frequently collide with each other, resulting in friction damage between the silicon wafers and the carrying basket, thereby affecting subsequent processing.

[0006] The utility model provides the following technical solution: a silicon wafer carrying flower basket, comprising a carrying plate, a first supporting plate fixedly connected to the upper side of one end of the carrying plate, and a second supporting plate provided on the upper side of the end of the carrying plate away from the first supporting plate, multiple groups of card slots fixedly connected to the opposite sides of the first supporting plate and the second supporting plate, and a tension component fixedly connected to the outer side of one end of the first supporting plate, a transmission component fixedly connected to the inner side of one end of the tension component, and elastic components fixedly connected to the outer sides of both ends of the transmission component, a clamping component fixedly connected to the outer side of the middle end of the elastic component, and an adjustment component fixedly connected to the ends of the first supporting plate and the second supporting plate away from the tension component.

[0007] As a preferred embodiment of the above technical solution, the tension assembly includes a shell fixedly connected to the outer side of one end of the first support plate, and a pull ring is provided on the outer side of the middle end of the shell, a transmission rod is fixedly connected to the end of the pull ring close to the shell, and the end of the transmission rod away from the pull ring is inserted into the shell.

[0008] As a preferred embodiment of the above technical solution, the transmission assembly includes a first fixed plate fixedly connected to one end of the transmission rod away from the pull ring, and a connecting plate fixedly connected to the outer side of one end of the first fixed plate, and a telescopic rod fixedly connected to one end of the first fixed plate away from the connecting plate.

[0009] As a preferred embodiment of the above technical solution, the elastic component includes a sleeve fixedly connected to the connecting plate and the telescopic rod at one end away from the first fixed plate, and the end of the sleeve away from the connecting plate and the telescopic rod is respectively inserted into the first support plate and the second support plate, a positioning rod is inserted inside the end of the sleeve away from the connecting plate and the telescopic rod, and the end of the positioning rod away from the sleeve is fixedly connected to the first support plate and the second support plate, a spring is sleeved on the outside of the positioning rod, and the end of the spring close to the sleeve is fixedly connected to the sleeve, and the end of the spring away from the sleeve is fixedly connected to the first support plate and the second support plate.

[0010] As a preferred embodiment of the above technical solution, the clamping assembly includes a slide fixedly connected to the outer side of the middle end of the sleeve, and the end of the slide away from the sleeve passes through the first support plate and the second support plate and is fixedly connected to a clamping plate.

[0011] As a preferred embodiment of the above technical solution, the adjustment assembly includes a second fixed plate fixedly connected to the outer side of one end of the first support plate away from the outer shell, and a tooth plate is provided on the outer side of the middle end of the second fixed plate, a threaded barrel is fixedly connected to the middle end of the tooth plate close to the second fixed plate, and the end of the threaded barrel close to the tooth plate is rotatably connected to the second fixed plate, a threaded rod is engaged with the inside of the end of the threaded barrel away from the tooth plate, and the end of the threaded rod away from the threaded barrel is fixedly connected to the third fixed plate, and the end of the third fixed plate close to the second support plate is fixedly connected to the second support plate.

[0012] Compared with the prior art, the beneficial effects of the present invention are:

[0013] The present invention relates to a silicon wafer carrying basket. When the silicon wafers are placed and transported using the carrying basket, the spacing between the first support plate and the second support plate is first adjusted using an adjustment component according to the model of the silicon wafers. After the adjustment, the tension component is pulled. After being pulled, the tension component drives the elastic component to move through the transmission component. After the elastic component moves, it simultaneously drives the clamping component to move. Then, the silicon wafers are inserted into the card slots one by one. After the insertion is completed, the tension component is released. The elastic potential energy of the elastic component is used to push the clamping component back to clamp and fix the inserted silicon wafers. When the silicon wafers are stored and transported by the carrying basket, the restriction effect on the silicon wafers can be improved, thereby enhancing stability, avoiding collision between the silicon wafers and the first support plate, the second support plate and the card slot during transportation, and reducing wear on the silicon wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of a silicon wafer supporting flower basket structure;

[0015] Figure 2 This is a schematic diagram of the cross-sectional structure of a silicon wafer supporting flower basket;

[0016] Figure 3 for Figure 2 A magnified schematic diagram of the structure in the middle.

[0017] In the figure: 1. Loading plate; 11. First support plate; 12. Second support plate; 13. Slot; 2. Housing; 21. Pull ring; 22. Transmission rod; 3. First fixing plate; 31. Connecting plate; 32. Telescopic rod; 4. Sleeve; 41. Positioning rod; 42. Spring; 5. Slide plate; 51. Clamp; 6. Second fixing plate; 61. Tooth plate; 62. Threaded barrel; 63. Threaded rod; 64. Third fixing plate. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present invention.

[0019] like Figure 1 - Figure 3As shown, the utility model provides a technical solution: a silicon wafer carrying basket, comprising a carrying plate 1, a first supporting plate 11 is fixedly connected to the upper side of one end of the carrying plate 1, and a second supporting plate 12 is provided on the upper side of the end of the carrying plate 1 away from the first supporting plate 11, a plurality of groups of card slots 13 are fixedly connected to the opposite sides of the first supporting plate 11 and the second supporting plate 12, and a tension component is fixedly connected to the outer side of one end of the first supporting plate 11, a transmission component is fixedly connected to the inner side of one end of the tension component, and elastic components are fixedly connected to the outer sides of both ends of the transmission component, a clamping component is fixedly connected to the outer side of the middle end of the elastic component, and the first supporting plate 11 and the second supporting plate 12 are fixedly connected to the ends away from the tension component. The carrying basket is used to place silicon wafers When transporting, first use the adjustment component to adjust the distance between the first support plate 11 and the second support plate 12 according to the model of the silicon wafer. After the adjustment, pull the tension component. After the tension component is pulled, the elastic component is driven to move through the transmission component. After the elastic component moves, it simultaneously drives the clamping component to move, and then the silicon wafers are inserted into the card slot 13 one by one. After the insertion is completed, release the tension component, and use the elastic potential energy of the elastic component to push the clamping component back to clamp and fix the inserted silicon wafer, so that when the carrying basket is used to store and transport the silicon wafers, the restriction effect of the silicon wafers can be improved, thereby enhancing stability and avoiding collision between the silicon wafers and the first support plate 11, the second support plate 12 and the card slot 13 during transportation, thereby reducing the wear on the silicon wafers.

[0020] like Figure 2 As shown, the tension assembly includes a shell 2 fixedly connected to the outer side of one end of the first support plate 11, and a pull ring 21 is provided on the outer side of the middle end of the shell 2. The end of the pull ring 21 close to the shell 2 is fixedly connected to the transmission rod 22, and the end of the transmission rod 22 away from the pull ring 21 is inserted into the shell 2. The pull ring 21 is pulled under the protection of the shell 2 so that the pull ring 21 can drive the transmission assembly to operate through the transmission rod 22.

[0021] like Figure 2 As shown, the transmission assembly includes a first fixed plate 3 fixedly connected to one end of the transmission rod 22 away from the pull ring 21, and a connecting plate 31 is fixedly connected to the outer side of one end of the first fixed plate 3, and a telescopic rod 32 is fixedly connected to the end of the first fixed plate 3 away from the connecting plate 31. The movement of the first fixed plate 3 synchronously drives the connecting plate 31 and the telescopic rod 32 to move, thereby utilizing the connecting plate 31 and the telescopic rod 32 to drive the two groups of elastic components to operate.

[0022] like Figure 2 and Figure 3As shown, the elastic component includes a sleeve 4 fixedly connected to the connecting plate 31 and the telescopic rod 32 at one end away from the first fixed plate 3, and the end of the sleeve 4 away from the connecting plate 31 and the telescopic rod 32 is respectively inserted into the first support plate 11 and the second support plate 12, and a positioning rod 41 is inserted into the end of the sleeve 4 away from the connecting plate 31 and the telescopic rod 32, and the end of the positioning rod 41 away from the sleeve 4 is fixedly connected to the first support plate 11 and the second support plate 12, a spring 42 is sleeved on the outside of the positioning rod 41, and the end of the spring 42 close to the sleeve 4 is fixedly connected to the sleeve 4, and the end of the spring 42 away from the sleeve 4 is fixedly connected to the first support plate 11 and the second support plate 12, the sleeve 4 moves under the restriction of the positioning rod 41, thereby stretching the spring 42, so as to utilize the movement of the sleeve 4 to drive the movement of multiple groups of clamping components.

[0023] Such as Figure 3 As shown, the clamping assembly includes a slide plate 5 fixedly connected to the outer side of the middle end of the sleeve 4, and the end of the slide plate 5 away from the sleeve 4 passes through the first support plate 11 and the second support plate 12 and is fixedly connected with a clamping plate 51. The sleeve 4 is used to drive the slide plate 5 and the clamping plate 51 to move, so as to facilitate the subsequent squeezing and limiting of the silicon wafer through the clamping plate 51 and the slot 13.

[0024] like Figure 1 、 Figure 2 and Figure 3 As shown, the adjustment assembly includes a second fixing plate 6 fixedly connected to the outer side of one end of the first support plate 11 away from the housing 2, and a toothed plate 61 is provided on the outer side of the middle end of the second fixing plate 6, and the middle end of the toothed plate 61 close to the second fixing plate 6 is fixedly connected to a threaded cylinder 62, and the end of the threaded cylinder 62 close to the toothed plate 61 passes through and is rotatably connected to the second fixing plate 6, and the end of the threaded cylinder 62 away from the toothed plate 61 is meshed with a threaded rod 63, and the end of the threaded rod 63 away from the threaded cylinder 62 is fixedly connected to the third fixing plate 64, and the end of the third fixing plate 64 close to the second support plate 12 is fixedly connected to the second support plate 12. Under the support of the second fixing plate 6, the toothed plate 61 is twisted, and the toothed plate 61 is screwed to drive the threaded cylinder 62 to rotate. After the threaded cylinder 62 rotates, the threaded rod 63 drives the third fixing plate 64 to move through the threaded engagement with the threaded rod 63. After the third fixing plate 64 moves, it drives the second support plate 12 to move and adjust with the assistance of the telescopic rod 32, so that the carrying flower basket can clamp and place silicon wafers of different models.

[0025] Working principle: When the flower basket is used to store and transport silicon wafers, the spacing between the first support plate 11 and the second support plate 12 is first adjusted according to the model of the silicon wafers. During the adjustment, the tooth plate 61 is screwed under the support of the second fixed plate 6. After the tooth plate 61 is screwed, the threaded cylinder 62 is rotated. After the threaded cylinder 62 rotates, the threaded rod 63 is engaged with the thread of the threaded rod 63 to drive the third fixed plate 64 to move. After the third fixed plate 64 moves, it drives the second support plate 12 to move and adjust with the assistance of the telescopic rod 32. When the second support plate 12 moves to the appropriate position, stop screwing the tooth plate 61, and then pull the pull ring 21 with the assistance of the shell 2. The pull ring When 21 is pulled, the transmission rod 22 and the first fixed plate 3 are driven to move. When the first fixed plate 3 moves, the sleeve 4 is pulled synchronously by the connecting plate 31 and the telescopic rod 32 to move. After the sleeve 4 is pulled under the restriction of the positioning rod 41, the spring 42 is stretched. At the same time, the movement of the sleeve 4 will drive multiple groups of slides 5 and splints 51 to move, and then the silicon wafers are inserted one by one between the splint 51 and the card slot 13. After the insertion is completed, the pull ring 21 is released. At this time, the elastic potential energy of the spring 42 is used to pull the sleeve 4 and the first fixed plate 3 back to their original positions. After the sleeve 4 returns to its original position, it drives the slide 5 and the splint 51 to return to their original positions, and the splint 51 and the card slot 13 are used to clamp and limit the inserted silicon wafers.

[0026] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same.

Claims

1. A silicon wafer carrying basket, comprising a carrying plate (1), characterized in that: The upper side of one end of the carrier plate (1) is fixedly connected to a first support plate (11), and a second support plate (12) is provided on the upper side of one end of the carrier plate (1) away from the first support plate (11), a plurality of groups of card slots (13) are fixedly connected to the opposite side of the first support plate (11) and the second support plate (12), and a tension component is fixedly connected to the outer side of one end of the first support plate (11), a transmission component is fixedly connected to the inner side of one end of the tension component, and elastic components are fixedly connected to the outer sides of both ends of the transmission component, a clamping component is fixedly connected to the outer side of the middle end of the elastic component, and an adjustment component is fixedly connected to the ends of the first support plate (11) and the second support plate (12) away from the tension component.

2. The silicon wafer carrying basket according to claim 1, characterized in that: The tension assembly comprises a housing (2) fixedly connected to the outside of one end of a first support plate (11), and a pull ring (21) is provided on the outside of the middle end of the housing (2); an end of the pull ring (21) close to the housing (2) is fixedly connected to a transmission rod (22), and an end of the transmission rod (22) away from the pull ring (21) is inserted into the housing (2).

3. The silicon wafer carrying basket according to claim 2, characterized in that: The transmission assembly comprises a first fixed plate (3) fixedly connected to one end of a transmission rod (22) away from the pull ring (21), a connecting plate (31) fixedly connected to the outer side of one end of the first fixed plate (3), and a telescopic rod (32) fixedly connected to one end of the first fixed plate (3) away from the connecting plate (31).

4. The silicon wafer carrying basket according to claim 3, characterized in that: The elastic component comprises a sleeve (4) fixedly connected to one end of the connecting plate (31) and the telescopic rod (32) away from the first fixed plate (3), and one end of the sleeve (4) away from the connecting plate (31) and the telescopic rod (32) is respectively inserted into the first support plate (11) and the second support plate (12), a positioning rod (41) is inserted into the end of the sleeve (4) away from the connecting plate (31) and the telescopic rod (32), and the end of the positioning rod (41) away from the sleeve (4) is fixedly connected to the first support plate (11) and the second support plate (12), a spring (42) is sleeved on the outside of the positioning rod (41), and the end of the spring (42) close to the sleeve (4) is fixedly connected to the sleeve (4), and the end of the spring (42) away from the sleeve (4) is fixedly connected to the first support plate (11) and the second support plate (12).

5. The silicon wafer carrying basket according to claim 4, characterized in that: The clamping assembly comprises a slide plate (5) fixedly connected to the outer side of the middle end of the sleeve (4), and an end of the slide plate (5) away from the sleeve (4) passes through the first support plate (11) and the second support plate (12) and is fixedly connected to a clamping plate (51).

6. The silicon wafer carrying basket according to claim 2, characterized in that: The adjustment assembly comprises a second fixing plate (6) fixedly connected to the outer side of one end of the first support plate (11) away from the housing (2), and a tooth plate (61) is provided on the outer side of the middle end of the second fixing plate (6), a threaded barrel (62) is fixedly connected to the middle end of the tooth plate (61) on the side close to the second fixing plate (6), and the end of the threaded barrel (62) close to the tooth plate (61) is rotatably connected to the inside of the second fixing plate (6), a threaded rod (63) is meshed inside the end of the threaded barrel (62) away from the tooth plate (61), and the end of the threaded rod (63) away from the threaded barrel (62) is fixedly connected to the third fixing plate (64), and the end of the third fixing plate (64) close to the second support plate (12) is fixedly connected to the second support plate (12).

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