Silicon wafer bearing flower basket
By designing the partition device of the silicon wafer carrier basket and the magnetically connected spacer, the problem of silicon wafer adhesion in the drying tank is solved, and the yield of silicon wafer processing and equipment cleanliness are improved.
Patent Information
- Application Number
- CN202422257553.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-14
- Publication Date
- 2025-08-05
- Estimated Expiration
- 2034-09-14
AI Technical Summary
When the thickness of the silicon wafer is reduced to below 150μm, traditional tooling fixtures cannot prevent the silicon wafer from sticking in the drying tank, resulting in poor liquid residue and drying effect, affecting the process yield and contaminating the equipment.
A silicon wafer carrying basket is designed, including a first partition device and a second partition device. The first partition device cooperates with the edge side of the silicon wafer. The spacer of the second partition device extends vertically and is arranged horizontally, passes through the gap between adjacent silicon wafers, and fixes the spacer through the adsorption plate connected by magnetic parts to prevent the silicon wafer from being adhered.
Effectively prevent adjacent silicon wafers from sticking when lifted, improve process yield, reduce equipment pollution, and improve production efficiency.
Smart Images
Figure CN223193778U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon wafer carrying, in particular to a silicon wafer carrying flower basket. Background Art
[0002] Improving efficiency and reducing costs are long-standing themes in the photovoltaic manufacturing industry. The cost of incoming silicon wafers still accounts for a significant portion of current silicon-based solar cell manufacturing costs. Using thinner silicon wafers clearly reduces costs and improves competitiveness. However, thinner silicon wafers offer greater flexibility and bendability. When the thickness of monocrystalline silicon wafers decreases below 150μm, the traditional fixtures used in texturing machines are no longer sufficient to ensure sufficient spacing between the wafers to prevent sticking before entering the drying tank. When silicon wafers are lifted from the liquid, the adsorption force of water between adjacent wafers causes them to stick together. This adhesion not only results in residual chemical solution on the wafers but also leads to poor drying performance, leaving water marks on the surface, impacting process yield and hindering subsequent production steps. Furthermore, the diffusion of water vapor can contaminate equipment, impacting production yield. Therefore, with the trend toward further reductions in silicon wafer thickness, it is imperative to find a simple and effective method to improve wafer adhesion. Utility Model Content
[0003] The technical problem to be solved by the utility model is to provide a silicon wafer carrying flower basket.
[0004] The utility model is realized through the following technical solutions.
[0005] A silicon wafer carrying basket includes a basket frame body, wherein the basket frame body is used to load a plurality of silicon wafers. A first separator and a second separator are provided on the basket frame body. The first separator is used to support the edge sides of each silicon wafer. The second separator includes at least one set of isolating members provided on the basket frame body. The isolating members extend along a first direction and are arranged along a second direction so as to pass through the gap between two adjacent silicon wafers.
[0006] As a further improvement of the present invention, at least one mounting piece is provided on the main body of the flower basket frame, and the isolating piece is detachably provided on the mounting piece.
[0007] As a further improvement of the present invention, the mounting member includes two oppositely arranged adsorption plates, each of which is provided with at least one magnetic member, and the magnetic members provided on the two adsorption plates are arranged opposite to each other so that the two adsorption plates attract each other and connect one end of the isolation member.
[0008] As a further improvement of the present invention, a plurality of card slots are provided on the adsorption plate. When the two adsorption plates attract each other, the card slots respectively located on the two adsorption plates correspond to each other and cooperate to form an accommodating channel for accommodating one end of the isolation member.
[0009] As a further improvement of the present invention, counterweight ends are provided at both ends of the isolation member.
[0010] As a further improvement of the present invention, the isolation member is an isolation line, an isolation strip, or an isolation plate.
[0011] As a further improvement of the present invention, the first separating device includes a plurality of groups of basket teeth evenly arranged along the third direction, and there is a tooth gap between two adjacent groups of the basket teeth for inserting silicon wafers.
[0012] As a further improvement of the present invention, the flower basket frame body includes a group of side frames, and a front cross bar, a rear cross bar and a bottom bar are arranged between the side frames of the group. Each group of flower basket teeth is respectively arranged on the front cross bar, the rear cross bar and the bottom bar, and the positions of the tooth gaps of the flower basket teeth on the front cross bar, the rear cross bar and the bottom bar correspond to each other.
[0013] As a further improvement of the present invention, the side frame is provided with a mounting groove, and the mounting groove is used for allowing both ends of the mounting member to be clamped in the first direction.
[0014] As a further improvement of the present invention, the isolation piece is aligned with the position where the center line of the turnbuckle is located.
[0015] The beneficial effects of the present invention are as follows: a first separating device and a second separating device are provided in the present invention patent. The first separating device can cooperate with the edge side of the silicon wafer to limit the edge sides of two adjacent silicon wafers from sticking together when the silicon wafer is lifted from the liquid; and the isolation member in the second separating device extends along the first direction (vertical) and is arranged along the second direction (horizontally), so that the isolation member can pass through between the two adjacent silicon wafers, so that the middle parts of the two adjacent silicon wafers have an isolation gap, thereby preventing the middle parts of the two adjacent silicon wafers from sticking together when they are lifted from the liquid, thereby improving the process yield. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] The following is a detailed description of preferred embodiments of the present invention with reference to the accompanying drawings to help understand the purpose and advantages of the present invention, wherein:
[0017] Figure 1 This is a schematic structural diagram of an embodiment of the utility model;
[0018] Figure 2 For the embodiment of the utility model corresponding Figure 1A partial enlarged view of the middle part;
[0019] Figure 3 For the embodiment of the utility model corresponding Figure 1 A partial enlarged view of point B in the middle. DETAILED DESCRIPTION
[0020] The present invention will be described in further detail below based on the accompanying drawings and implementation examples.
[0021] In this specification, directional terms such as up, down, left, right, front, back, front, back, top, and bottom, which are mentioned or may be mentioned, are defined relative to the configurations shown in the accompanying drawings. The terms "inside" and "outside" refer to directions toward or away from the geometric center of a specific component, respectively. These are relative concepts and may vary depending on the location and usage of the component. Therefore, these or other directional terms should not be construed as restrictive.
[0022] refer to Figures 1 to 3 , the embodiments of the present utility model disclose:
[0023] A silicon wafer carrying basket includes a basket frame body 1, wherein the basket frame body 1 is used to carry a plurality of silicon wafers. The basket frame body 1 is provided with a first separator and a second separator. The first separator is used to support the edge sides of each silicon wafer to limit the adhesion of the edge sides of two adjacent silicon wafers. The second separator includes at least one set of spacers 2 provided on the basket frame body 1. The spacers 2 extend along a first direction and are arranged along a second direction to pass through the gap between two adjacent silicon wafers to limit the adhesion of the middle parts of the two adjacent silicon wafers. In this embodiment, the first direction is a vertical direction and the second direction is a horizontal direction. direction, and as shown in the figure, in this embodiment, the second separating device is provided with two groups, which are arranged in the front-to-back direction and arranged in the basket frame body 1 shown; wherein, the first separating device can cooperate with the edge side of the silicon wafer, thereby limiting the edge sides of the two adjacent silicon wafers from sticking together when the silicon wafers are lifted from the liquid; and the isolation member 2 in the second separating device extends along the first direction (vertical) and is arranged along the second direction (lateral), so that the isolation member 2 can pass through between the two adjacent silicon wafers, so that the middle parts of the two adjacent silicon wafers have an isolation gap, thereby preventing the middle parts of the two adjacent silicon wafers from sticking together when they are lifted from the liquid, thereby improving the process yield.
[0024] At least one mounting member 3 is provided on the flower basket frame body 1, and the isolation member 2 is detachably provided on the mounting member 3; specifically, the mounting member 3 includes two oppositely arranged adsorption plates 301, and each of the two adsorption plates 301 is provided with at least one magnetic member (magnet, not shown in the figure), and the magnetic members provided on the two adsorption plates 301 are arranged oppositely, so that the two adsorption plates 301 attract each other and connect one end of the isolation member 2. When the two adsorption plates 301 approach each other, they are attracted to each other by the magnetic force of the magnetic members, thereby clamping one end of the isolation member 2.
[0025] Specifically, in this embodiment, a plurality of slots 302 are provided on the adsorption plate 301. When the two adsorption plates 301 attract each other, the slots 302 respectively located on the two adsorption plates 301 correspond to each other and cooperate to form a receiving channel for accommodating one end of the isolation member 2, wherein the isolation member 2 is provided with a counterweight end 4 at both ends; in addition, the isolation member 2 is an isolation line or an isolation strip or an isolation plate. Specifically in this embodiment, the isolation member 2 is an isolation line, and the isolation member 2 is provided with a counterweight end 4 at both ends, such as Figure 3 As shown, when the two adsorption plates 301 attract each other, one end of the isolation member is located in the accommodating channel, while the counterweight end 4 is located outside the accommodating channel.
[0026] The first separating device includes a plurality of groups of turnbuckles 5 evenly arranged along the third direction, and a tooth gap is provided between two adjacent groups of the turnbuckles 5 for inserting silicon wafers.
[0027] The flower basket frame body 1 includes a set of side frames 101, and a front cross bar 102, a rear cross bar 103 and a bottom bar 104 are arranged between the side frames 101. Each set of flower basket teeth 5 is respectively arranged on the front cross bar 102, the rear cross bar 103 and the bottom bar 104, and the positions of the tooth gaps of the flower basket teeth 5 on the front cross bar 102, the rear cross bar 103 and the bottom bar 104 correspond to each other. In addition, Figure 3 As shown, the turnbuckles 5 on the front crossbar 102 and the rear crossbar 103 are arranged opposite to each other, while the turnbuckles 5 on the bottom bar 104 face upwards. There is a tooth gap between two adjacent groups of the turnbuckles 5 to allow silicon wafers to be inserted and installed vertically.
[0028] The side frame 101 is provided with a mounting groove 6 for receiving both ends of the mounting member 3 in a first direction. By inserting the mounting member 3 in the first direction (vertical), the mounting member 3 is installed, which has a simple structure and is easy to install.
[0029] In addition, in this embodiment, the isolation member 2 is aligned with the center line of the turnbuckle 5 .
[0030] Finally, it should be noted that the above implementation cases are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above implementation cases, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the above implementation cases, or replace some of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the implementation cases of the present invention.
Claims
1. A silicon wafer carrying basket, comprising a basket frame body (1), wherein the basket frame body (1) is used to carry a plurality of silicon wafers, and is characterized in that: The flower basket frame body (1) is provided with a first partitioning device and a second partitioning device, wherein the first partitioning device is used to support the edge side of each silicon wafer, and the second partitioning device comprises at least one group of spacers (2) provided on the flower basket frame body (1), wherein the spacers (2) extend along a first direction and are arranged along a second direction so as to pass through the gap between two adjacent silicon wafers; At least one mounting member (3) is provided on the flower basket frame body (1), and the isolation member (2) is detachably provided on the mounting member (3); The mounting member (3) comprises two adsorption plates (301) arranged opposite to each other, each of the two adsorption plates (301) being provided with at least one magnetic member, and the magnetic members arranged on the two adsorption plates (301) are arranged opposite to each other, so as to allow the two adsorption plates (301) to attract each other and connect one end of the isolation member (2).
2. The silicon wafer carrying basket according to claim 1, characterized in that: A plurality of slots (302) are provided on the adsorption plate (301). When the two adsorption plates (301) attract each other, the slots (302) respectively located on the two adsorption plates (301) correspond to each other and cooperate to form an accommodating channel for accommodating one end of the isolation member (2).
3. The silicon wafer carrying basket according to claim 1, characterized in that: Counterweight ends (4) are provided at both ends of the isolation member (2).
4. The silicon wafer carrying basket according to claim 1, characterized in that: The isolation member (2) is an isolation line, an isolation strip, or an isolation plate.
5. The silicon wafer carrying basket according to claim 1, characterized in that: The first separating device comprises a plurality of groups of basket teeth (5) uniformly arranged along a third direction, and a tooth gap is provided between two adjacent groups of the basket teeth (5) for inserting a silicon wafer.
6. The silicon wafer carrying basket according to claim 5, characterized in that: The flower basket frame body (1) comprises a group of side frames (101), a front cross bar (102), a rear cross bar (103) and a bottom bar (104) are arranged between the group of side frames (101), and each group of flower basket teeth (5) is respectively arranged on the front cross bar (102), the rear cross bar (103) and the bottom bar (104), and the positions of the tooth gaps of the flower basket teeth (5) on the front cross bar (102), the rear cross bar (103) and the bottom bar (104) correspond to each other.
7. The silicon wafer carrying basket according to claim 6, characterized in that: The side frame (101) is provided with a mounting groove (6), and the mounting groove (6) is used for receiving two ends of the mounting member (3) along a first direction.
8. The silicon wafer carrying basket according to claim 7, characterized in that: The isolation member (2) is aligned with the position where the tooth center line of the turnbuckle (5) is located.