Shaping device and feeding and discharging conveying equipment

Abstract

The utility model provides a shaping device and feeding and discharging conveying equipment. The shaping device comprises a rack, a shaping device and a feeding and discharging device, the shaping assembly comprises at least one shaping unit, the shaping unit comprises a first shaping piece and a second shaping piece, the first shaping piece and the second shaping piece are movably arranged on the rack in the first direction, and the first shaping piece is suitable for being matched with the second shaping piece to shape a silicon wafer; the transmission assembly is provided with a first functional section and a second functional section which can move oppositely or oppositely in the first direction, one of the first functional section and the second functional section is connected with the first shaping part, and the other one of the first functional section and the second functional section is connected with the second shaping part; and the driving part is arranged on the rack, the driving part is in transmission connection with the transmission assembly, and the driving part is suitable for driving the first functional section and the second functional section to move.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cell manufacturing, and more specifically to a shaping device and loading and unloading conveying equipment comprising the shaping device. Background Art

[0002] In the solar photovoltaic industry, silicon wafers need to be shaped and placed in an orderly manner before proceeding to the next process. However, existing silicon wafer shaping devices often use two independent drivers to drive the shaping components. This design not only increases the manufacturing and operating costs of the shaping device but also complicates the equipment structure. Utility Model Content

[0003] The utility model provides a new technical solution for a shaping device, which can at least solve the problem of high manufacturing cost of existing shaping devices.

[0004] The utility model also provides a loading and unloading conveying device, which comprises the above-mentioned shaping device.

[0005] According to a first aspect of the present utility model, a shaping device is provided, comprising: a frame; a shaping assembly, the shaping assembly comprising at least one shaping unit, the shaping unit comprising a first shaping piece and a second shaping piece, the first shaping piece and the second shaping piece being movably arranged on the frame along a first direction respectively, the first shaping piece being suitable for cooperating with the second shaping piece to shape a silicon wafer; a transmission assembly, the transmission assembly being provided with a first functional segment and a second functional segment which can move toward or away from each other along the first direction, the first of the first functional segment and the second functional segment being connected to the first shaping piece, and the second being connected to the second shaping piece; a driving member, the driving member being arranged on the frame, the driving member being in transmission connection with the transmission assembly, the driving member being suitable for driving the first functional segment and the second functional segment to move.

[0006] Optionally, the transmission assembly includes: a first pulley, the first pulley is rotatably provided on the frame, the driving member is connected to the first pulley to drive the first pulley to rotate; a second pulley, the second pulley is spaced apart from the first pulley along a first direction, and the second pulley is rotatably provided on the frame; a first annular transmission belt, the first annular transmission belt is sleeved on the first pulley and the second pulley, the first annular transmission belt is meshed with the first pulley and the second pulley, and the first annular transmission belt is provided with the first functional segment and the second functional segment; in the second direction, the first pulley and the second pulley separate the first functional segment from the second functional segment.

[0007] Optionally, both ends of the first shaping member and the second shaping member are movably provided on the frame along a first direction, and the first ends of the first shaping member and the second shaping member are connected to the first annular transmission belt.

[0008] Optionally, the transmission assembly further includes: a third pulley, the third pulley being rotatably provided on the frame; a fourth pulley, the fourth pulley being spaced apart from the third pulley along the first direction, and the fourth pulley being rotatably provided on the frame; a connecting shaft, the first pulley and the third pulley being connected through the connecting shaft, or the second pulley and the fourth pulley being connected through the connecting shaft; a second endless transmission belt, the second endless transmission belt being sleeved on the third pulley and the fourth pulley, the second endless transmission belt being meshed with the third pulley and the fourth pulley, the second endless transmission belt being provided with the first functional segment and the second functional segment; in the second direction, the third pulley and the fourth pulley separate the first functional segment from the second functional segment, and the second ends of the first shaping member and the second shaping member are respectively connected to the second endless transmission belt.

[0009] Optionally, the shaping assembly includes two shaping units distributed along the first direction, the first shaping piece of the first shaping unit is adjacent to the second shaping piece of the second shaping unit, and the first shaping piece of the first shaping unit is spaced apart from the second shaping piece of the second shaping unit in the second direction.

[0010] Optionally, the frame is provided with a first guide rib and a second guide rib extending along the first direction, and the first guide rib is spaced apart from the second guide rib along the first direction. The shaping device further includes: a first slider, the first shaping piece is provided with the first slider, and the first slider is movably mounted on the first guide rib along the first direction; a second slider, the second shaping piece is provided with the second slider, and the second slider is movably mounted on the second guide rib along the first direction.

[0011] Optionally, a first limiting rib is provided at one end of the first guide rib away from or close to the second guide rib, and the first limiting rib is suitable for limiting the active position of the first slider in the first direction; and / or a second limiting rib is provided at one end of the second guide rib close to or away from the first guide rib, and the second limiting rib is suitable for limiting the active position of the second slider in the first direction.

[0012] Optionally, the distance between the first guide rib and the second limiting rib is not less than the size of the first slider in the first direction; or the distance between the second guide rib and the first limiting rib is not less than the size of the second slider in the first direction.

[0013] Optionally, the shaping device further comprises: a lifting assembly, the lifting assembly being arranged on the frame, the lifting assembly being suitable for lifting or lowering the silicon wafer along the second direction so that the silicon wafer can be switched between a shaping position and a placement position.

[0014] Optionally, the shaping device includes at least two shaping assemblies, and the number of the transmission assemblies, the driving members and the lifting assemblies corresponds to the number of the shaping assemblies.

[0015] According to a second aspect of the present invention, a loading and unloading conveying device is provided, comprising the shaping device according to any one of the above claims.

[0016] According to the shaping device of the present invention, by providing a transmission assembly with a first functional segment and a second functional segment, the driving member can drive the first shaping member and the second shaping member to move closer to or away from each other, thereby realizing the shaping process of the silicon wafer. Compared with the prior art, the shaping device of the present invention only uses a single driving member to drive the first shaping member and the second shaping member to move, reducing the number of required driving members, effectively simplifying the complexity of the shaping device, and at the same time reducing the manufacturing and operating costs of the shaping device.

[0017] Other features and advantages of the present invention will become apparent from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.

[0019] Figure 1 This is a structural diagram of a loading and unloading conveying device according to an embodiment of the present invention;

[0020] Figure 2 This is a structural diagram of a shaping device according to an embodiment of the present invention;

[0021] Figure 3 This is a structural diagram of a transmission assembly and a driving member of a shaping device according to an embodiment of the present invention;

[0022] Figure 4 This is a partial structural diagram of a shaping device according to an embodiment of the present invention;

[0023] Figure 5 yes Figure 4 An enlarged schematic diagram of the center circle A;

[0024] Figure 6This is a structural diagram of a shaping unit of a shaping device according to an embodiment of the present invention;

[0025] Figure 7 This is a structural schematic diagram of a lifting assembly of a shaping device according to an embodiment of the present invention;

[0026] Figure 8 This is a schematic diagram of a shaping device according to an embodiment of the present invention when shaping a silicon wafer.

[0027] Reference numerals

[0028] 100. Loading and unloading conveying equipment;

[0029] 10. Frame; 10a. First bracket; 10b. Second bracket; 11. First guide rib; 11a. First limiting rib; 12. Second guide rib; 12a. Second limiting rib;

[0030] 20. Shaping unit; 21. First shaping member; 211. First slider; 212. First connecting member; 22. Second shaping member; 221. Second slider; 222. Second connecting member;

[0031] 30. Transmission assembly; 31. First pulley; 32. Second pulley; 33. First endless transmission belt; 34. Third pulley; 35. Fourth pulley; 36. Connecting shaft; 37. Second endless transmission belt;

[0032] 40. Driving parts;

[0033] 50. Lifting assembly; 51. Base; 52. Bracket; 53. Tooth support member; 53a. Tooth support;

[0034] 60. Conveyor belt;

[0035] 200. Flower basket. DETAILED DESCRIPTION

[0036] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention.

[0037] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the present invention, its application, or uses.

[0038] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0039] In all examples shown and discussed herein, any specific values should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0040] It should be noted that like reference numerals and letters refer to like items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0041] The shaping device according to an embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

[0042] like Figures 1 to 8 As shown, the shaping device according to an embodiment of the present invention includes a frame 10, a shaping assembly, a transmission assembly 30 and a driving member 40.

[0043] Specifically, the shaping assembly includes at least one shaping unit 20, the shaping unit 20 includes a first shaping part 21 and a second shaping part 22, the first shaping part 21 and the second shaping part 22 are respectively movably provided on the frame 10 along the first direction, the first shaping part 21 is suitable for cooperating with the second shaping part 22 to shape the silicon wafer, the transmission assembly 30 is provided with a first functional segment and a second functional segment that can move toward or away from each other along the first direction, the first of the first functional segment and the second functional segment is connected to the first shaping part 21, and the second is connected to the second shaping part 22, the driving member 40 is provided on the frame 10, the driving member 40 is in transmission connection with the transmission assembly 30, and the driving member 40 is suitable for driving the first functional segment and the second functional segment to move.

[0044] In other words, if Figures 1 to 7 As shown, according to an embodiment of the present invention, a shaping device is mainly used in a silicon wafer loading and unloading conveying device 100. The shaping device mainly includes a frame 10, a shaping assembly, a transmission assembly 30, and a driving member 40. The shaping assembly includes at least one shaping unit 20, which mainly includes a first shaping member 21 and a second shaping member 22. The first shaping member 21 and the second shaping member 22 are movably arranged on the frame 10 along a first direction (for example, the width direction of the first shaping member 21). In the first direction, a plurality of shaping teeth are provided on the side of the first shaping member 21 and the second shaping member 22 that is close to each other. The plurality of shaping teeth are distributed along the length direction of the first shaping member 21 and the second shaping member 22. The distance between adjacent shaping teeth gradually decreases from the tooth tip to the tooth root. The surface from the tooth tip to the tooth root can be an arc surface. The distance between adjacent tooth roots is approximately equal to the thickness of the silicon wafer, and the distance between adjacent tooth tips is greater than the thickness of the silicon wafer.

[0045] like Figures 1 to 3As shown, the transmission assembly 30 is mounted on the frame 10 and includes a first functional section and a second functional section. In a first direction, the first and second functional sections can move away from or toward each other. In this embodiment, the first functional section is connected to the first shaping member 21, and the second functional section is connected to the second shaping member 22; alternatively, the first functional section is connected to the second shaping member 22, and the second functional section is connected to the first shaping member 21.

[0046] like Figures 1 to 3 As shown, the driving member 40 is installed on the frame 10, and the driving member 40 is connected to the transmission assembly 30. The driving member 40 can drive the first functional segment and the second functional segment to move toward or away from each other in the first direction, thereby driving the first shaping member 21 and the second shaping member 22 to move closer to or away from each other to achieve the shaping of the silicon wafer.

[0047] Therefore, according to the shaping device provided by this embodiment, by providing a transmission assembly 30 having a first functional segment and a second functional segment, the driving member 40 can drive the first shaping member 21 and the second shaping member 22 to be closer to or away from each other, thereby realizing the shaping process of the silicon wafer. Compared with the prior art, the shaping device of the present invention only uses a single driving member 40 to drive the first shaping member 21 and the second shaping member 22 to move, reducing the number of required driving members 40, effectively simplifying the complexity of the shaping device, and at the same time reducing the manufacturing and operating costs of the shaping device.

[0048] According to one embodiment of the present invention, the transmission assembly 30 includes: a first pulley 31, a second pulley 32 and a first annular transmission belt 33, the first pulley 31 is rotatably provided on the frame 10, the driving member 40 is connected to the first pulley 31 to drive the first pulley 31 to rotate, the second pulley 32 is spaced apart from the first pulley 31 along the first direction, the second pulley 32 is rotatably provided on the frame 10, the first annular transmission belt 33 is sleeved on the first pulley 31 and the second pulley 32, the first annular transmission belt 33 is engaged with the first pulley 31 and the second pulley 32, and the first annular transmission belt 33 is provided with a first functional segment and a second functional segment; in the second direction, the first pulley 31 and the second pulley 32 separate the first functional segment from the second functional segment.

[0049] That is to say, if Figures 1 to 3As shown, the transmission assembly 30 mainly includes a first pulley 31, a second pulley 32 and a first annular transmission belt 33, wherein the axial directions of the first pulley 31 and the second pulley 32 can be the same as the length direction of the first shaping member 21, the first pulley 31 and the second pulley 32 are spaced apart along the first direction, and the first pulley 31 and the second pulley 32 are both rotatably mounted on one side of the frame 10 around their own axes, and the driving member 40 can be a motor, the driving member 40 is fixedly connected to the frame 10, and the output end of the driving member 40 is fixedly connected to the first pulley 31, so that the first pulley 31 can be driven to rotate through the driving member 40. The first annular transmission belt 33 is sleeved on the first pulley 31 and the second pulley 32, and the inner side of the first annular transmission belt 33 is engaged with the first pulley 31 and the second pulley 32, so that when the first pulley 31 rotates, the first annular transmission belt 33 can be driven to rotate around the first pulley 31 and the second pulley 32, and at the same time drive the second pulley 32 to rotate around its own axis.

[0050] In the second direction (for example, the thickness direction of the first shaping member 21), the first annular transmission belt 33 has a first portion and a second portion that are relatively arranged and can move relative to each other along the first direction. A portion of the first annular transmission belt 33 forms a first functional segment, and the second portion of the first annular transmission belt 33 forms a second functional segment. As a result, the first annular transmission belt 33 can drive the first shaping member 21 and the second shaping member 22 to move, thereby ensuring the synchronization of the first shaping member 21 and the second shaping member 22. In addition, the structure is simple and easy to produce.

[0051] In some embodiments of the present invention, both ends of the first shaping member 21 and the second shaping member 22 are movably disposed on the frame 10 along the first direction, and the first ends of the first shaping member 21 and the second shaping member 22 are connected to the first annular transmission belt 33 .

[0052] Specifically, if Figure 1 and Figure 2 As shown, the frame 10 includes a first bracket 10a and a second bracket 10b spaced apart along the length direction of the first shaping member 21 and the second shaping member 22. The first ends of the first shaping member 21 and the second shaping member 22 are movably mounted on the first bracket 10a along the first direction, and the second ends of the first shaping member 21 and the second shaping member 22 are movably mounted on the second bracket 10b along the first direction, thereby ensuring the stability of the first shaping member 21 and the second shaping member 22 during movement and ensuring the accuracy of shaping.

[0053] In this embodiment, the first pulley 31, the second pulley 32 and the first annular transmission belt 33 are installed on the first bracket 10a, the first end of the first shaping member 21 is connected to the first functional segment on the first annular transmission belt 33, and the first end of the second shaping member 22 is connected to the second functional segment on the first annular transmission belt 33.

[0054] In some optional examples of the present invention, the transmission assembly 30 also includes: a third pulley 34, a fourth pulley 35, a connecting shaft 36 and a second annular transmission belt 37, the third pulley 34 is rotatably arranged on the frame 10, the fourth pulley 35 is spaced apart from the third pulley 34 along the first direction, the fourth pulley 35 is rotatably arranged on the frame 10, the first pulley 31 is connected to the third pulley 34 by the connecting shaft 36, or the second pulley 32 is connected to the fourth pulley 35 by the connecting shaft 36, the second annular transmission belt 37 is sleeved on the third pulley 34 and the fourth pulley 35, the second annular transmission belt 37 is meshed with the third pulley 34 and the fourth pulley 35, and the second annular transmission belt 37 is provided with a first functional segment and a second functional segment; in the second direction, the third pulley 34 and the fourth pulley 35 separate the first functional segment from the second functional segment, and the second ends of the first shaping member 21 and the second shaping member 22 are respectively connected to the second annular transmission belt 37.

[0055] That is to say, if Figures 1 to 3 As shown, the transmission assembly 30 can also include a third pulley 34, a fourth pulley 35, a connecting shaft 36 and a second annular transmission belt 37, wherein the third pulley 34 can be coaxially arranged with the first pulley 31, the fourth pulley 35 can be coaxially arranged with the second pulley 32, the third pulley 34 and the fourth pulley 35 are spaced apart along the first direction, and the third pulley 34 and the fourth pulley 35 are rotatably mounted on the second bracket 10b along their own axes.

[0056] In one example, the connecting shaft 36 is arranged between the third pulley 34 and the first pulley 31, the connecting shaft 36 is rotatably connected to the first bracket 10a and the second bracket 10b, the first end of the connecting shaft 36 is fixedly connected to the third pulley 34, and the second end of the connecting shaft 36 is fixedly connected to the first pulley 31, so that when the first pulley 31 rotates, the third pulley 34 can be driven to rotate.

[0057] In another example, the connecting shaft 36 is arranged between the fourth pulley 35 and the second pulley 32, the connecting shaft 36 is rotatably connected to the first bracket 10a and the second bracket 10b, the first end of the connecting shaft 36 is fixedly connected to the fourth pulley 35, and the second end of the connecting shaft 36 is fixedly connected to the second pulley 32, so that when the second pulley 32 rotates, it can drive the fourth pulley 35 to rotate.

[0058] like Figures 1 to 3As shown, the second annular transmission belt 37 is sleeved on the third pulley 34 and the fourth pulley 35, and the inner side of the second annular transmission belt 37 is engaged with the third pulley 34 and the fourth pulley 35, so that when the third pulley 34 rotates, the second annular transmission belt 37 can be driven to rotate around the third pulley 34 and the fourth pulley 35, and at the same time drive the fourth pulley 35 to rotate around its own axis; or, when the fourth pulley 35 rotates, the second annular transmission belt 37 can be driven to rotate around the third pulley 34 and the fourth pulley 35, and at the same time drive the third pulley 34 to rotate around its own axis.

[0059] In the second direction, the second endless transmission belt 37 has a first portion and a second portion that are arranged opposite each other and movable relative to each other along the first direction. One portion of the second endless transmission belt 37 forms a first functional segment, and the second portion of the second endless transmission belt 37 forms a second functional segment. The second ends of the first and second shaping members 21 and 22 are respectively connected to the corresponding first and second functional segments of the second endless transmission belt 37.

[0060] In this example, the first annular transmission belt 33 and the second annular transmission belt 37 can drive the movement of the first shaping member 21 and the second shaping member 22 at both ends, so that the force applied to the first shaping member 21 and the second shaping member 22 during the shaping process is more uniform, effectively extending the service life of the first shaping member 21 and the second shaping member 22.

[0061] According to one embodiment of the present invention, the shaping assembly includes two shaping units 20 distributed along a first direction, the first shaping member 21 of the first shaping unit 20 is adjacent to the second shaping member 22 of the second shaping unit 20, and the first shaping member 21 of the first shaping unit 20 is spaced apart from the second shaping member 22 of the second shaping unit 20 in a second direction.

[0062] Specifically, if Figure 1 and Figure 2 As shown, the shaping assembly includes two shaping units 20, which are distributed along the first direction, so that the shaping device can shape the silicon wafers in the two half-wafer placement spaces in the half-wafer basket 200, thereby improving the shaping efficiency of the shaping device.

[0063] In this embodiment, the first shaping member 21 of the first shaping unit 20 is relatively close to the second shaping member 22 of the second shaping unit 20 in the first direction, and the first shaping member 21 of the first shaping unit 20 is spaced apart from the second shaping member 22 of the second shaping unit 20 in the second direction, thereby effectively avoiding the two restricting each other's movement in the first direction, making full use of the space in the first direction, and facilitating the shaping of silicon wafers in the smaller half-wafer basket 200.

[0064] In some optional examples of the present invention, the frame 10 is provided with a first guide rib 11 and a second guide rib 12 extending along the first direction, and the first guide rib 11 and the second guide rib 12 are spaced apart along the first direction. The shaping device also includes: a first slider 211 and a second slider 221. The first shaping member 21 is provided with a first slider 211, and the first slider 211 is movably mounted on the first guide rib 11 along the first direction. The second shaping member 22 is provided with a second slider 221, and the second slider 221 is movably mounted on the second guide rib 12 along the first direction.

[0065] That is to say, if Figures 1 to 5 As shown, both ends of the first shaping member 21 are fixedly connected to first sliders 211, and the frame 10 is provided with a first guide rib 11 adapted to the first slider 211. The first guide rib 11 extends in a first direction, and the first slider 211 is movably mounted on the first guide rib 11 along the first direction. Both ends of the second shaping member 22 are fixedly connected to second sliders 221, and the frame 10 is provided with a second guide rib 12 adapted to the second slider 221. The second guide rib 12 extends in the first direction, and the second slider 221 is movably mounted on the second guide rib 12 along the first direction.

[0066] In this example, the first slider 211 cooperates with the first guide rib 11 to accurately guide and limit the first shaping member 21, and the second slider 221 cooperates with the second guide rib 12 to accurately guide and limit the second shaping member 22, which can effectively improve the shaping accuracy and stability of the shaping device.

[0067] In some embodiments of the present invention, Figures 1 to 6 As shown, first connecting members 212 are provided at both ends of the first shaping member 21, and the first connecting member 212 is fixedly connected to the first slider 211 by screws. One side of the first connecting member 212 is fixedly connected to the first pressure plate, and the first annular transmission belt 33 is provided between the first connecting member 212 and the first pressure plate. The first connecting member 212 can be fixed to the first annular transmission belt 33 by the clamping force generated by the first connecting member 212 and the first pressure plate.

[0068] Second connecting members 222 are provided at both ends of the second shaping member 22. The second connecting member 222 and the second slider 221 are fixedly connected together by screws. A second pressure plate is fixedly connected to one side of the second connecting member 222. The second annular transmission belt 37 is provided between the second connecting member 222 and the second pressure plate. The second connecting member 222 can be fixed to the second annular transmission belt 37 by the clamping force generated by the second connecting member 222 and the second pressure plate.

[0069] According to one embodiment of the present invention, a first limiting rib 11a is provided at one end of the first guide rib 11 away from or close to the second guide rib 12, and the first limiting rib 11a is suitable for limiting the active position of the first slider 211 in the first direction; and / or, a second limiting rib 12a is provided at one end of the second guide rib 12 close to or away from the first guide rib 11, and the second limiting rib 12a is suitable for limiting the active position of the second slider 221 in the first direction.

[0070] Specifically, if Figure 5 As shown, in the first direction, the first guide rib 11 and the second guide rib 12 are provided with a limiting rib at the same end. That is, the first limiting rib 11a is provided at the end of the first guide rib 11 away from the second guide rib 12, and the second limiting rib 12a is provided at the end of the second guide rib 12 closer to the first guide rib 11; alternatively, the first limiting rib 11a is provided at the end of the first guide rib 11 closer to the second guide rib 12, and the second limiting rib 12a is provided at the end of the second guide rib 12 away from the first guide rib 11.

[0071] If the first slider 211 moves toward the first limiting rib 11a, the first shaping member 21 and the second shaping member 22 move away from each other. The first limiting rib 11a cooperates with the first slider 211 to limit the position of the first slider 211 in the first direction, thereby limiting the positions of the first shaping member 21 and the second shaping member 22 moving away from each other. The second limiting rib 12a cooperates with the second slider 221 to limit the position of the first slider 211 in the second direction, thereby limiting the positions of the first shaping member 21 and the second shaping member 22 moving close to each other.

[0072] If the first slider 211 moves toward the first limiting rib 11a, the first shaping member 21 and the second shaping member 22 approach each other, and the first limiting rib 11a cooperates with the first slider 211 to limit the position of the first slider 211 in the first direction, thereby limiting the positions of the first shaping member 21 and the second shaping member 22 approaching each other. The second limiting rib 12a cooperates with the second slider 221 to limit the position of the first slider 211 in the second direction, thereby limiting the positions of the first shaping member 21 and the second shaping member 22 moving away from each other.

[0073] Therefore, the first limiting ribs 11a and the second limiting ribs 12a can limit the range of movement of the first shaping member 21 and the second shaping member 22, which can effectively prevent the first shaping member 21 and the second shaping member 22 from damaging the silicon wafer during the shaping process.

[0074] In some embodiments of the present invention, the distance between the first guide rib 11 and the second limiting rib 12a is not less than the size of the first slider 211 in the first direction; or, the distance between the second guide rib 12 and the first limiting rib 11a is not less than the size of the second slider 221 in the first direction.

[0075] That is to say, when the first guide rib 11 is provided with a first limiting rib 11a on the side away from the first guide rib 11, and the second guide rib 12 is provided with a second limiting rib 12a on the side close to the first guide rib 11, the distance between the first guide rib 11 and the second limiting rib 12a is not less than the size of the first slider 211 in the first direction, so that the first slider 211 can be mounted on the first guide rib 11 from one end of the first guide rib 11; when the first guide rib 11 is provided with a first limiting rib 11a on the side close to the first guide rib 11, and the second guide rib 12 is provided with a second limiting rib 12a on the side away from the first guide rib 11, the distance between the first guide rib 11 and the second limiting rib 12a is not less than the size of the second slider 221 in the first direction, so that the second slider 221 can be mounted on the second guide rib 12 from one end of the second guide rib 12; thereby facilitating the production and assembly of the shaping device.

[0076] In some optional examples of the present invention, the shaping device also includes: a lifting component 50, which is arranged on the frame 10, and the position of the lifting component 50 corresponds to the position of the shaping component. The lifting component 50 is suitable for lifting or lowering the silicon wafer along the second direction so that the silicon wafer can move between the shaping position and the placement position.

[0077] That is to say, if Figure 1 and Figure 7 As shown, the frame 10 is provided with a lifting assembly 50 corresponding to the position of the shaping assembly. The silicon wafer lifting assembly 50 mainly includes a base 51, a bracket 52, a driving structure and a plurality of tooth members 53, wherein the base 51 is fixed to the frame 10, and the bracket 52 is movably provided on the base 51 between a first position and a second position along a second direction. The plurality of tooth members 53 are spaced apart along the first direction and fixedly connected to the base 51. The tooth member 53 is provided with a plurality of teeth 53a spaced apart and distributed along the length direction of the first shaping member 21. The teeth 53a are roughly formed into a needle-shaped structure. The adjacent teeth 53a are suitable for accommodating silicon wafers to be lifted or put down, and the teeth 53a correspond to the gaps in the flower basket 200, so that when the bracket 52 moves from the first position to the second position, the teeth 53a can extend into the flower basket 200 and lift the silicon wafers in the flower basket 200.

[0078] like Figure 1 and Figure 7As shown, the driving structure can be a motor screw slider structure or a cylinder structure. The driving structure is arranged on the base 51, and the output end of the driving structure is fixedly connected to the bracket 52. The driving structure can drive the bracket 52 to move from the first position to the second position, so that the tooth member 53 can lift the silicon wafer in the flower basket 200 (that is, the silicon wafer in the placement position) to the shaping position, so that the first shaping member 21 and the second shaping member 22 of the shaping unit 20 can shape the silicon wafer. After the shaping is completed, the shaped silicon wafer is transferred to the next process through the robotic arm of the external equipment, or the shaped silicon wafer is moved to the second position with the bracket 52, that is, the shaped bracket 52 is put back into the flower basket 200.

[0079] In this example, the supporting assembly 50 can be set to enable the silicon wafer to switch between the shaping position and the placement position. When the silicon wafer is in the placement position, the shaping unit 20 will not affect the movement of the silicon wafer along the first direction, which is conducive to the transportation of the silicon wafer. When the silicon wafer needs to be shaped, the silicon wafer can be lifted to the shaping position by the supporting assembly 50, which is convenient to operate.

[0080] According to one embodiment of the present invention, the shaping device includes at least two shaping components, and the number of the transmission components 30, the driving member 40 and the lifting components 50 corresponds to the number of the shaping components.

[0081] Specifically, if Figure 1 As shown, the shaping device is provided with a plurality of shaping components, for example, two shaping components, which are distributed along a first direction. The number of transmission components 30, driving components 40 and supporting components 50 corresponds to the number of shaping components, that is, one transmission component 30, one driving component and one supporting component 50 correspond to one shaping component, so that the shaping device can shape the silicon wafers in multiple half-wafer baskets 200 at multiple workstations, which can effectively improve the shaping efficiency of the silicon wafers.

[0082] like Figure 1 As shown, an embodiment of the present invention further provides a loading and unloading conveying device 100, including the shaping device described in any of the above embodiments. Since the shaping device according to the embodiment of the present invention has the above technical effects, the loading and unloading conveying device 100 according to the embodiment of the present invention also has corresponding technical effects, which will not be described in detail in this embodiment.

[0083] According to one embodiment of the present invention, the frame 10 of the shaping device is the body of the loading and unloading conveying equipment 100 .

[0084] like Figure 1 As shown, in some optional examples of the present invention, the loading and unloading conveying device 100 further includes a conveyor belt 60 , which is located between the first bracket 10 a and the second bracket 10 b , and is suitable for conveying the flower basket 200 along the first direction.

[0085] Before use, the loading and unloading conveying equipment 100 according to an embodiment of the present invention is arranged so that the first shaping member 21 and the second shaping member 22 of the shaping unit 20 are far away from each other, the distance between the first shaping member 21 and the second shaping member 22 is greater than the size of the silicon wafer in the first direction, the bracket 52 is located in the first position, and the tooth member 53 is lower than the conveying surface of the conveyor belt 60.

[0086] like Figure 1 and Figure 8 As shown, when the unloading and loading conveying device 100 according to the embodiment of the present invention is used, the conveyor belt 60 is first used to convey the flower basket 200 carrying the silicon wafers to the position corresponding to the lifting component 50 and the shaping unit 20, and then the driving structure drives the bracket 52 to move from the first position to the second position, so that the tooth member 53 lifts the silicon wafers in the flower basket 200 to the shaping position, and then the driving member 40 drives the first shaping member 21 and the second shaping member 22 to approach each other, so that the side wall of the tooth tip of the shaping tooth first contacts the silicon wafer, and as the first shaping member 21 and the second shaping member 22 approach each other, the shaping member 21 and the second shaping member 22 are moved closer to each other. The shaping teeth shape the silicon wafer toward a predetermined position. When the first shaping member 21 and the second shaping member 22 move by the height of a shaping tooth respectively, the silicon wafer is in a predetermined position (i.e., the position after shaping). Then the driving member 40 drives the first shaping member 21 and the second shaping member 22 away from each other. At the same time, the shaped silicon wafer is transferred to the next process through the robotic arm of the external equipment, or the driving structure drives the bracket 52 to move from the second position to the first position, so that the tooth member 53 puts the shaped silicon wafer back into the flower basket 200, and finally the flower basket 200 is transported to the next workstation by the conveyor belt 60.

[0087] Although some specific embodiments of the present invention have been described in detail through examples, those skilled in the art will appreciate that the above examples are for illustration only and are not intended to limit the scope of the present invention. Those skilled in the art will appreciate that modifications may be made to the above embodiments without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A shaping device, characterized in that: include: Frame (10); A shaping assembly, the shaping assembly comprising at least one shaping unit (20), the shaping unit (20) comprising a first shaping member (21) and a second shaping member (22), the first shaping member (21) and the second shaping member (22) being movably arranged on the frame (10) along a first direction, the first shaping member (21) being adapted to cooperate with the second shaping member (22) to shape a silicon wafer; A transmission assembly (30), the transmission assembly (30) comprising a first functional segment and a second functional segment movable toward or away from each other along the first direction, the first of the first functional segment and the second functional segment being connected to the first shaping member (21), and the second of the first functional segment and the second functional segment being connected to the second shaping member (22); A driving member (40) is provided on the frame (10), the driving member (40) is in driving connection with the transmission assembly (30), and the driving member (40) is suitable for driving the first functional section and the second functional section to move.

2. The shaping device according to claim 1, characterized in that The transmission assembly (30) comprises: a first pulley (31), the first pulley (31) being rotatably disposed on the frame (10), and the driving member (40) being connected to the first pulley (31) to drive the first pulley (31) to rotate; a second pulley (32), the second pulley (32) being spaced apart from the first pulley (31) along a first direction, and the second pulley (32) being rotatably disposed on the frame (10); a first annular transmission belt (33), the first annular transmission belt (33) being sleeved on the first pulley (31) and the second pulley (32), the first annular transmission belt (33) being meshed with the first pulley (31) and the second pulley (32), and the first annular transmission belt (33) being provided with the first functional section and the second functional section; In the second direction, the first pulley (31) and the second pulley (32) separate the first functional section from the second functional section.

3. The shaping device according to claim 2, characterized in that Both ends of the first shaping member (21) and the second shaping member (22) are movably arranged on the frame (10) along a first direction, and the first ends of the first shaping member (21) and the second shaping member (22) are connected to the first annular transmission belt (33).

4. The shaping device according to claim 3, characterized in that The transmission assembly (30) further comprises: a third pulley (34), the third pulley (34) being rotatably mounted on the frame (10); a fourth pulley (35), the fourth pulley (35) being spaced apart from the third pulley (34) along the first direction, and the fourth pulley (35) being rotatably disposed on the frame (10); a connecting shaft (36), wherein the first pulley (31) is connected to the third pulley (34) via the connecting shaft (36), or the second pulley (32) is connected to the fourth pulley (35) via the connecting shaft (36); a second annular transmission belt (37), wherein the second annular transmission belt (37) is sleeved on the third pulley (34) and the fourth pulley (35), the second annular transmission belt (37) is meshed with the third pulley (34) and the fourth pulley (35), and the second annular transmission belt (37) is provided with the first functional section and the second functional section; In the second direction, the third pulley (34) and the fourth pulley (35) separate the first functional section from the second functional section, and the second ends of the first shaping member (21) and the second shaping member (22) are respectively connected to the second endless transmission belt (37).

5. The shaping device according to claim 1, characterized in that The shaping assembly comprises two shaping units (20) distributed along the first direction, the first shaping piece (21) of the first shaping unit (20) is adjacent to the second shaping piece (22) of the second shaping unit (20), and the first shaping piece (21) of the first shaping unit (20) is spaced apart from the second shaping piece (22) of the second shaping unit (20) in the second direction.

6. The shaping device according to claim 1, characterized in that The frame (10) is provided with a first guide rib (11) and a second guide rib (12) extending along a first direction, the first guide rib (11) and the second guide rib (12) being spaced apart along the first direction, and the shaping device further comprises: A first slider (211), the first shaping member (21) is provided with the first slider (211), and the first slider (211) is movably sleeved on the first guide rib (11) along a first direction; A second slider (221), the second shaping member (22) is provided with the second slider (221), and the second slider (221) is movably sleeved on the second guide rib (12) along a first direction.

7. The shaping device according to claim 6, characterized in that A first limiting rib (11a) is provided at one end of the first guide rib (11) away from or close to the second guide rib (12), and the first limiting rib (11a) is suitable for limiting the movable position of the first slider (211) in the first direction; and / or, A second limiting rib (12a) is provided at one end of the second guide rib (12) close to or away from the first guide rib (11), and the second limiting rib (12a) is suitable for limiting the movable position of the second slider (221) in the first direction.

8. The shaping device according to claim 7, characterized in that The distance between the first guide rib (11) and the second limiting rib (12a) is not less than the size of the first sliding block (211) in the first direction; Alternatively, the distance between the second guide rib (12) and the first limiting rib (11a) is not less than the size of the second sliding block (221) in the first direction.

9. The shaping device according to claim 1, characterized in that The shaping device also includes: A lifting assembly (50) is provided on the frame (10), and the lifting assembly (50) is suitable for lifting or lowering the silicon wafer along the second direction so that the silicon wafer can move between a shaping position and a placement position.

10. The shaping device according to claim 9, characterized in that The shaping device comprises at least two shaping assemblies, and the number of the transmission assembly (30), the driving member (40) and the lifting assembly (50) corresponds to the number of the shaping assemblies.

11. A loading and unloading conveying device, characterized in that: A shaping device comprising the shaping device according to any one of claims 1 to 10.

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