Correcting device

Abstract

The utility model relates to the technical field of automatic tooling instruments, and discloses a correction device, which comprises a flower basket main body, a silicon wafer storage box, a silicon wafer storage box and a silicon wafer storage box, the correction structure comprises a correction main body, the correction main body comprises a correction substrate and an adjusting assembly, the correction substrate is suitable for supporting a silicon wafer, the adjusting assembly is movably connected with a flower basket main body, and the flower basket main body is suitable for being switched between a limiting state and a correction state under the action of the adjusting assembly; and the first correction split bodies are arranged in the lateral direction of each column of silicon wafers, the length direction of the first correction split bodies is arranged in the same direction as the arrangement direction of the silicon wafers so as to correct the positions of the silicon wafers in the first direction, and the first direction and the arrangement direction of the silicon wafers are arranged vertically along the plate surface of the correction substrate. Therefore, the calibration effect of batch silicon wafers is effectively improved, the improvement precision is low, and the actual requirements can be met.

Description

Technical Field

[0001] The utility model relates to the technical field of automated tooling equipment, in particular to a correction device. Background Art

[0002] During the automated loading and unloading process of some electroplating equipment, silicon wafers need to be loaded into silicon wafer baskets. A single basket can carry multiple silicon wafers. Since there are multiple conductive points on the silicon wafer, the clamping points in the fixture need to correspond to the conductive points. For tooling fixtures with a high load capacity, it is necessary to quickly and accurately place more than dozens of silicon wafers into the target position.

[0003] At present, the tooling commonly used in electroplating equipment has poor calibration effect on batch silicon wafers and low accuracy, which makes it difficult to meet actual needs. Utility Model Content

[0004] In view of this, the present invention provides a correction device to solve the problem that the tooling commonly used in electroplating equipment has poor calibration effect on batch silicon wafers, low accuracy, and is difficult to meet actual needs.

[0005] In the first aspect, the utility model provides a correction device, comprising: a basket body with a built-in accommodating space suitable for accommodating at least one column of silicon wafers, the basket body having a limiting state for limiting at least one column of silicon wafers, and a correction state for releasing the silicon wafers; a correction structure, comprising: a correction body, including a correction substrate and an adjustment component, the correction substrate being suitable for supporting the silicon wafers, the adjustment component being movably connected to the basket body, the basket body being suitable for switching between the limiting state and the correction state under the action of the adjustment component; a first correction split body, arranged on the side of each column of silicon wafers, with its length direction being arranged in the same direction as the arrangement direction of the silicon wafers, suitable for clamping and limiting the silicon wafers in the same column to correct the position of the silicon wafers in the first direction, the first direction and the arrangement direction of the silicon wafers being arranged perpendicularly along the plate surface of the correction substrate.

[0006] The basket body is configured to have a limited position and a corrective position, and can be adjusted accordingly by an adjustment component on the corrective structure. When the basket body is in the corrective position, the silicon wafers placed in the external structure are not directly limited by the basket body. Instead, a first corrective sub-body is provided to effectively correct the position of each column of silicon wafers along the direction perpendicular to the arrangement of the silicon wafers on the corrective substrate. Simultaneously, when the silicon wafers fall onto the corrective substrate supporting them, gravity also effectively corrects the silicon wafers in the height direction, thereby achieving correction of each column of silicon wafers in multiple directions. When the basket body is switched to the limited position, the precisely calibrated silicon wafers can be accurately grasped. This configuration effectively improves the calibration effect of batches of silicon wafers, while improving the accuracy to a low level, which can meet practical needs.

[0007] In an optional embodiment, the correction device also includes: a second correction split body, inserted between adjacent silicon wafers, suitable for adjusting the spacing between adjacent silicon wafers to correct the position of the silicon wafers in a second direction, and the second direction is the same as the arrangement direction of the silicon wafers.

[0008] In an optional embodiment, the flower basket body includes: a pair of flower basket base plates, which are arranged opposite to each other and with the accommodating space provided therebetween, and the extension direction of the silicon wafers in each column is in the same direction as the connection direction of the flower basket base plates; a limit rod group, the two ends of which are respectively connected to the pair of flower basket base plates, with the flower basket base plates as the top and bottom sides, the limit rod group is arranged in the circumference of the silicon wafers in each column, and is arranged to avoid position with the correction structure, and the limit rod group is movably connected to the adjustment component.

[0009] In an optional embodiment, the limiting rod group includes: a fixed rod, whose two ends are respectively connected to a pair of the basket base plates for limiting purposes, the fixed rod is provided with a plurality of first extending ends on the side facing the accommodating space, the first extending ends are extended into the accommodating space, and are suitable for being inserted between two adjacent silicon wafers, and the first extending ends are bent toward the direction of one silicon wafer; a movable rod, whose two ends are respectively movably connected to the pair of the basket base plates, the movable rod is provided with a plurality of second extending ends on the side facing the accommodating space, the second extending ends are extended into the accommodating space, and are suitable for being inserted between two adjacent silicon wafers, and are arranged one-to-one with the first extending ends, and the second extending ends and the corresponding first extending ends are arranged opposite to each other; the movable rod is connected to the adjustment component and is suitable for moving under the action of the adjustment component so that the second extending ends on the movable rod and the corresponding first extending ends move toward each other and clamp the silicon wafer, or the second extending ends on the movable rod and the corresponding first extending ends move away from each other and loosen the silicon wafer.

[0010] In an optional embodiment, the correction substrate includes: a substrate main body, which is arranged on the lower side of the flower basket main body and has a plurality of through holes provided thereon; the second correction split body has a working state of passing through the through holes and adjusting the spacing between the silicon wafers, and a retracted state of being retracted from one side of the through holes so that the silicon wafers fall onto the substrate main body; a side plate, which is connected to the substrate main body and extends to the top and bottom sides of the flower basket main body, respectively adjacent to the flower basket substrate, and has the adjustment component provided thereon.

[0011] In an optional embodiment, the adjustment assembly includes: a telescopic mechanism, including a telescopic driving member and a telescopic adjusting member, the telescopic adjusting member is detachably connected to the movable rod, and the telescopic adjusting member is suitable for driving the movable rod to move under the action of the telescopic driving member; a clamping mechanism, including a clamping member and a clamping driving member, the clamping member is suitable for moving toward the flower basket base plate under the action of the clamping driving member to abut and limit the flower basket base plate.

[0012] In an optional embodiment, the first correction split body includes: a plurality of correction rods, the length direction of the correction rods is in the same direction as the arrangement direction of the silicon wafers, and the correction rods are distributed on both sides of each column of the silicon wafers; a first correction drive component, which is connected to the correction rods and is suitable for driving the correction rods to clamp and limit the silicon wafers in the same column.

[0013] In an optional embodiment, the correction rods are alternately distributed with the silicon wafers in each column, and the number of the correction rods exceeds the number of silicon wafer columns by one; the first correction drive member includes an annular drive belt and a first correction drive body, and the annular drive belt is respectively connected to each correction rod at intervals, and is suitable for rotating along the first rotation direction and the second rotation direction respectively under the drive of the first correction drive body.

[0014] In an optional embodiment, the second correction split body includes: at least one second correction member corresponding to each column of silicon wafers, the second correction member is arranged on the bottom side of the flower basket body, and is provided with a plurality of comb teeth, the tooth grooves between the comb teeth are suitable for correspondingly accommodating silicon wafers, and the silicon wafers are suitable for slowly falling into the tooth grooves under the friction of the outer walls of the comb teeth; a second correction drive member, which is connected to the second correction member and is suitable for driving the second correction member to switch between a working state and a retracted state.

[0015] In an optional embodiment, the substrate body is arranged at an angle, including a relatively low side and a relatively high side, the relatively low side is in the same direction as the first extension end of the fixed rod, and the relatively high side is in the same direction as the second extension end of the movable rod, and the angle between the substrate body and the horizontal plane is A, 0≤A≤30°. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0017] Figure 1This is a schematic diagram of the three-dimensional structure of a correction device according to an embodiment of the present utility model;

[0018] Figure 2 for Figure 1 A schematic three-dimensional structural diagram of the correction device shown in another angle;

[0019] Figure 3 for Figure 1 A schematic diagram of the top view of the correction device;

[0020] Figure 4 for Figure 1 A schematic structural diagram of the first correction component of the correction device;

[0021] Description of reference numerals:

[0022] 1. Flower basket body; 11. Flower basket substrate; 12. Fixed rod; 13. First extension end; 14. Movable rod; 15. Second extension end; 2. Silicon wafer; 3. Correction substrate; 31. Substrate body; 32. Via hole; 33. Side plate; 4. Telescopic mechanism; 5. Clamping mechanism; 6. Second correction split body; 61. Second correction member; 62. Second correction drive member; 7. First correction split body; 71. Correction rod; 72. Annular drive belt; 73. First correction drive body. DETAILED DESCRIPTION

[0023] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts shall fall within the scope of protection of the present invention.

[0024] like Figure 1-Figure 4 This embodiment provides a correction device, including: a flower basket body 1 and a correction structure.

[0025] The basket body 1 includes a built-in storage space suitable for accommodating at least one row of silicon wafers 2. In this embodiment, the silicon wafers 2 are arranged in three rows, but a single row, two rows, or multiple rows are also possible, with each row of silicon wafers 2 extending in the same direction. The basket body 1 has a retaining state for retaining at least one row of silicon wafers 2 and a correction state for releasing the silicon wafers 2.

[0026] The correction structure includes a correction body and a first correction sub-body 7.

[0027] The correction body includes a correction substrate 3 and an adjustment assembly. In this embodiment, the correction substrate 3 is positioned on the bottom side of the basket body 1 to support the silicon wafer 2. As an alternative embodiment, the correction substrate 3 can be positioned elsewhere, with two opposing correction substrates 3 interlocking with a drive element positioned on other sides of the basket body 1. The drive element's driving force replaces gravity to achieve the desired support for the silicon wafer 2. The adjustment assembly is movably connected to the basket body 1, preferably in a removable, movable manner. The basket body 1 is adapted to transition between a restricted position and a correction position under the action of the adjustment assembly.

[0028] The first correction members 7 are disposed laterally to each row of silicon wafers 2, with their lengths oriented in the same direction as the arrangement direction of the silicon wafers 2 in each row. They are adapted to clamp and position the silicon wafers 2 in the same row to correct the position of the silicon wafers 2 in a first direction. The first direction and the arrangement direction of the silicon wafers 2 in each row are perpendicular to each other along the surface of the correction substrate 3. It will be appreciated that when the surface of the correction substrate 3 is parallel to a horizontal plane, the two directions are perpendicular to each other along the horizontal plane.

[0029] The basket body 1 is configured to have a limited position and a correcting position, and can be adjusted accordingly by the adjustment components on the correcting structure. When the basket body 1 is in the correcting position, the silicon wafers 2 placed in the external structure are not directly limited by the basket body 1. Instead, a first correcting sub-body 7 is provided to effectively correct the position of each column of silicon wafers 2 along the direction perpendicular to the arrangement of the silicon wafers 2 on the surface of the correcting substrate 3. Simultaneously, when the silicon wafers 2 fall onto the correcting substrate 3 supporting them, gravity also effectively corrects the height of the silicon wafers 2, thereby achieving correction of each column of silicon wafers 2 in multiple directions. When the basket body 1 is switched to the limited position, the precisely calibrated silicon wafers 2 can be accurately grasped. This configuration effectively improves the calibration effect of batches of silicon wafers 2, while improving accuracy to a low level, which can meet practical needs.

[0030] The correction device further includes a second correction sub-body 6 .

[0031] In this embodiment, the second correction member 6 has an active state and a retracted state. When in the active state, the second correction member 6 is inserted between adjacent silicon wafers 2 and is suitable for adjusting the spacing between adjacent silicon wafers 2 to correct the position of the silicon wafers 2 in a second direction. The second direction is the same as the arrangement direction of the silicon wafers 2, and the second direction and the first direction are horizontally perpendicular to each other. When in the retracted state, the second correction member 6 is away from the corrected silicon wafers 2.

[0032] The second correction sub-body 6 can cooperate with the first correction sub-body 7 to effectively correct the surface of the correction substrate 3. As an alternative embodiment, the second correction sub-body 6 can be arranged away from the correction main body and the first correction sub-body 7 and remain inserted between adjacent silicon wafers 2.

[0033] The flower basket body 1 includes a pair of flower basket base plates 11 and a limiting rod set.

[0034] A pair of basket substrates 11 are arranged opposite to each other with an accommodating space between them. The extension direction of each column of silicon wafers 2 is in the same direction as the connection direction of the basket substrates 11; the two ends of the limit rod group are respectively connected to a pair of basket substrates 11, with the basket substrates 11 as the top and bottom sides. The limit rod group is arranged in the circumference of each column of silicon wafers 2 and is arranged to avoid position with the correction structure. The limit rod group is movably connected to the adjustment component.

[0035] Furthermore, the circumference of the storage space includes two opposing limiting sides and two opposing correcting sides. Two limiting sub-sides are provided in the direction corresponding to the limiting sides of each row of silicon wafers 2. One correcting side is provided at the bottom of the storage space and is correspondingly provided with the correcting substrate 3 and the second correcting sub-body 6. Each limiting sub-side is provided with one or more limiting rod groups. The other correcting side is correspondingly provided with the first correcting sub-body 7.

[0036] The limiting rod assembly includes a fixed rod 12 and a movable rod 14 .

[0037] The ends of the fixing rod 12 are respectively connected to the pair of basket base plates 11 with limited space, which can be screwed or welded. The fixing rod 12 is provided with a plurality of first extension ends 13 on the side facing the storage space. The first extension ends 13 extend into the storage space and are suitable for insertion between two adjacent silicon wafers 2. The first extension ends 13 are bent toward one silicon wafer 2.

[0038] The two ends of the movable rod 14 are movably connected to a pair of basket base plates 11 respectively. A plurality of second extension ends 15 are provided on the side of the movable rod 14 facing the accommodating space. The second extension ends 15 are extended into the accommodating space and are suitable for being inserted between two adjacent silicon wafers 2. The second extension ends 15 are arranged in one-to-one correspondence with the first extension ends 13. The second extension ends 15 and the corresponding first extension ends 13 are arranged opposite to each other. Preferably, the portion of the second extension end 15 bent toward the silicon wafer 2 is arranged in an elastic structure, which can be made of metal, alloy, plastic, silicone, rubber or other polymer elastic composite materials.

[0039] The movable rod 14 is connected to the adjustment component and is suitable for moving under the action of the adjustment component so that the second extension end 15 on the movable rod 14 and the corresponding first extension end 13 move toward each other and clamp the silicon wafer 2, or the second extension end 15 on the movable rod 14 and the corresponding first extension end 13 move away from each other and loosen the silicon wafer 2.

[0040] Preferably, the number of the first extension ends 13 , the number of the second extension ends 15 and the number of silicon wafers 2 in a single row are equal.

[0041] The correction base plate 3 includes a base plate body 31 and side plates 33 .

[0042] The base plate 31 is positioned below the basket body 1 and is provided with a plurality of vias 32, the number of which is equal to or greater than the number of rows of silicon wafers 2. The vias 32 are elongated, with a length greater than or equal to the length of a single row of silicon wafers 2 and a width less than the width of the silicon wafers 2, ensuring that the base plate 31 supports the silicon wafers 2. The second correction member 6 can pass through the vias 32 and adjust the spacing between the silicon wafers 2, and can also be retracted from the side of the vias 32 to allow the silicon wafers 2 to rest on the base plate 31.

[0043] The side panels 33 are connected to the base body 31 . In this embodiment, two side panels 33 are provided. The two side panels 33 extend to the top and bottom sides of the flower basket body 1 , respectively, and are adjacent to the flower basket base 11 . An adjustment component is provided on the side panels 33 .

[0044] Specifically, the adjustment assembly includes: a telescopic mechanism 4 and a clamping mechanism 5 .

[0045] The telescopic mechanism 4 includes a telescopic driving member and a telescopic adjusting member. The telescopic adjusting member is detachably connected to the end of the movable rod 14, specifically by a snap-fit or threaded fit. The telescopic adjusting member is adapted to drive the movable rod 14 to move under the action of the telescopic driving member. The telescopic mechanism 4 can be provided on a single or both side panels 33.

[0046] The clamping mechanism 5 includes a clamping member and a clamping drive member. The clamping mechanism 5 is provided on both side plates 33. The clamping member is suitable for moving toward the flower basket base plate 11 under the action of the clamping drive member to abut against the limiting flower basket base plate 11. It can also move away from the flower basket base plate 11 under the action of the clamping drive member to release the flower basket base plate 11, thereby facilitating the entire flower basket to be removed and enter the subsequent process.

[0047] The first correction split body 7 includes: a plurality of correction rods 71 and a first correction driving member.

[0048] The length of the correction rods 71 is aligned with the second direction. Preferably, the length of the correction rods 71 is greater than or equal to the length of a single row of silicon wafers 2. The correction rods 71 are positioned on both sides of each row of silicon wafers 2. A first correction driver is coupled to the correction rods 71 and adapted to drive the correction rods 71 to clamp and position the silicon wafers 2 in the same row.

[0049] Preferably, the correction rods 71 are arranged alternately with the rows of silicon wafers 2, with the number of correction rods 71 exceeding the number of rows of silicon wafers 2 by one. The first correction drive member includes an annular drive belt 72 and a first correction drive body 73. The annular drive belt 72 connects the correction rods 71 at intervals and is adapted to rotate in first and second opposite rotational directions, respectively, under the drive of the first correction drive body 73. Preferably, a guide rail and a slider can also be used to achieve guidance. This arrangement reduces the number of correction rods 71 and the drive structure of the first correction drive body 73, effectively simplifying the structure of the first correction split body 7.

[0050] The second correction sub-body 6 includes at least one second correction component 61 and a second correction driving component 62 .

[0051] The number of second corrective members 61 corresponds to the number of rows of silicon wafers 2. These members are positioned on the bottom side of the basket body 1 and are equipped with a plurality of comb teeth. The grooves between the teeth are suitable for accommodating corresponding silicon wafers 2, allowing the silicon wafers 2 to fall slowly into the grooves due to friction from the outer walls of the comb teeth. Because the space between the two comb teeth for accommodating the silicon wafers 2 is relatively small, when a silicon wafer 2 falls into the grooves between the two comb teeth, friction occurs between the outer walls of the silicon wafer 2 and the outer walls of the comb teeth that form the grooves, reducing the impact of the silicon wafer 2's fall and providing a cushioning effect. This arrangement allows the second corrective members 61 to cushion the silicon wafers 2, preventing hard contact between the silicon wafers 2 and the substrate body 31, which could lead to problems such as fragmentation. As an alternative embodiment, the second corrective member 61 could also be positioned on the side or top of the basket body 1.

[0052] The second correction driving member 62 is cooperatively connected with the second correction member 61 , and the second correction driving member 62 is suitable for driving the second correction member 61 to switch between a working state and a retracted state.

[0053] Specifically, the second correction drive member 62 and the first correction drive body 73 can be a cylinder, an electric cylinder, an electric push rod or a motor, etc., and a structure such as a platform that cooperates with them can also be added.

[0054] Furthermore, base plate body 31 is tilted, including a relatively low side and a relatively high side. The relatively low side is aligned with first extension end 13 of fixed rod 12, and the relatively high side is aligned with second extension end 15 of movable rod 14. Preferably, base plate body 31 includes an angle A with a range of 0 ≤ A ≤ 30° with respect to the horizontal plane, specifically 0°, 5°, 10°, 15°, 20°, 25°, or 30°.

[0055] With this arrangement, when the flower basket body 1 is in a correction state with the silicon wafer 2 released, when the silicon wafer 2 falls onto the second correction split 6 or the substrate body 31, it can be slightly tilted on one side and abut against the first extension end 13 of the fixing rod 12 to achieve stable landing, thereby avoiding the problem that the landing directions of the silicon wafers 2 are uneven in the correction state, which may easily cause fragments or reduce the correction effect.

[0056] Although the embodiments of the present invention have been described with reference to the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations shall fall within the scope defined by the appended claims.

Claims

1. A correction device, characterized in that: include: The flower basket body (1) has a built-in accommodation space suitable for accommodating at least one row of silicon wafers (2), and the flower basket body (1) has a limiting state for limiting at least one row of silicon wafers (2) and a correcting state for releasing the silicon wafers (2); Corrective structures, including: A correction body, comprising a correction substrate (3) and an adjustment component, wherein the correction substrate (3) is suitable for supporting the silicon wafer (2), the adjustment component is movably connected to the basket body (1), and the basket body (1) is suitable for switching between the limiting state and the correction state under the action of the adjustment component; The first correction split body (7) is arranged on the side of each row of the silicon wafers (2), and its length direction is arranged in the same direction as the arrangement direction of the silicon wafers (2). It is suitable for clamping and limiting the silicon wafers (2) in the same row to correct the position of the silicon wafers (2) in the first direction. The first direction and the arrangement direction of the silicon wafers (2) are arranged vertically along the plate surface of the correction substrate (3).

2. The correction device according to claim 1, characterized in that Also includes: The second correction split body (6) is inserted between adjacent silicon wafers (2) and is suitable for adjusting the spacing between adjacent silicon wafers (2) to correct the position of the silicon wafers (2) in a second direction, and the second direction is the same as the arrangement direction of the silicon wafers (2).

3. The correction device according to claim 1 or 2, characterized in that The flower basket body (1) comprises: A pair of basket substrates (11) are arranged opposite to each other with the accommodation space provided therebetween, and the extending direction of the silicon wafers (2) in each row is in the same direction as the connecting direction of the basket substrates (11); A limit rod group, with both ends respectively connected to the pair of basket substrates (11), with the basket substrates (11) as the top side and the bottom side, the limit rod group is arranged in the circumference of each column of the silicon wafers (2), and is arranged to avoid position with the correction structure, and the limit rod group is movably connected to the adjustment component.

4. The correction device according to claim 3, characterized in that The limiting rod group includes: A fixing rod (12), both ends of which are respectively connected to a pair of the basket base plates (11) in a limiting manner, and a plurality of first extension ends (13) are provided on one side of the fixing rod (12) facing the accommodating space, the first extension ends (13) being extended into the accommodating space and suitable for being inserted between two adjacent silicon wafers (2), and the first extension ends (13) being bent toward the direction of the silicon wafer (2) on one side; A movable rod (14), both ends of which are movably connected to a pair of the basket substrates (11), and a plurality of second extension ends (15) are provided on one side of the movable rod (14) facing the accommodating space, wherein the second extension ends (15) are extended into the accommodating space and are suitable for being inserted between two adjacent silicon wafers (2), and are arranged in a one-to-one correspondence with the first extension ends (13), and the second extension ends (15) and the corresponding first extension ends (13) are arranged opposite to each other; The movable rod (14) is connected to the adjustment component and is suitable for moving under the action of the adjustment component, so that the second extension end (15) on the movable rod (14) and the corresponding first extension end (13) move toward each other and clamp the silicon wafer (2), or the second extension end (15) on the movable rod (14) and the corresponding first extension end (13) move away from each other and loosen the silicon wafer (2).

5. The correction device according to claim 2, characterized in that The correction substrate (3) comprises: A substrate body (31) is arranged on the lower side of the basket body (1) and is provided with a plurality of through holes (32). The second correction split body (6) has a working state of passing through the through holes (32) and adjusting the spacing between the silicon wafers (2), and a retracted state of retracting from one side of the through holes (32) so that the silicon wafers (2) fall onto the substrate body (31). The side panels (33) are connected to the base plate body (31) and extend to the top and bottom sides of the flower basket body (1), respectively adjacent to the flower basket base plate (11) of the flower basket body (1), and the adjustment assembly is arranged thereon.

6. The correction device according to claim 4, characterized in that The adjustment component includes: A telescopic mechanism (4) comprising a telescopic driving member and a telescopic adjusting member, wherein the telescopic adjusting member is detachably connected to the movable rod (14), and the telescopic adjusting member is adapted to drive the movable rod (14) to move under the action of the telescopic driving member; The clamping mechanism (5) comprises a clamping member and a clamping driving member, wherein the clamping member is adapted to move toward the flower basket base plate (11) under the action of the clamping driving member so as to abut against and limit the flower basket base plate (11).

7. The correction device according to any one of claims 1-2, 4-6, characterized in that: The first correction split body (7) comprises: a plurality of correction rods (71), wherein the length direction of the correction rods (71) is in the same direction as the arrangement direction of the silicon wafers (2), and the correction rods (71) are correspondingly distributed on both sides of each column of the silicon wafers (2); The first correction driving member is connected in cooperation with the correction rod (71) and is suitable for driving the correction rod (71) to clamp and limit the silicon wafers (2) in the same column.

8. The correction device according to claim 7, characterized in that The correction rods (71) are alternately distributed with the silicon wafers (2) in each column, and the number of the correction rods (71) exceeds the number of the silicon wafers (2) by one. The first correction drive member comprises an annular drive belt (72) and a first correction drive body (73), wherein the annular drive belt (72) is connected to each correction rod (71) at intervals and is adapted to rotate along a first rotation direction and a second rotation direction respectively under the drive of the first correction drive body (73).

9. The correction device according to claim 2, characterized in that The second correction split body (6) comprises: at least one second correcting member (61) corresponding to each row of silicon wafers (2), the second correcting member (61) being arranged on the bottom side of the basket body (1), and having a plurality of comb teeth, the tooth grooves between the comb teeth being suitable for correspondingly accommodating the silicon wafers (2), and the silicon wafers (2) being suitable for slowly falling into the tooth grooves under the friction of the outer walls of the comb teeth; The second correction driving member (62) is connected to the second correction member (61) and is suitable for driving the second correction member (61) to switch between a working state and a retracted state.

10. The correction device according to claim 4, characterized in that The base plate body (31) of the correction base plate (3) is tilted and includes a relatively low side and a relatively high side. The relatively low side corresponds to the first extension end (13) of the fixed rod (12) in the same direction, and the relatively high side corresponds to the second extension end (15) of the movable rod (14) in the same direction. The angle between the base plate body (31) and the horizontal plane is A, 0≤A≤30°.

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