Three-dimensional temporary storage bin for silicon wafers

Abstract

The utility model relates to a silicon wafer temporary storage device, in particular to a silicon wafer three-dimensional temporary storage bin, which comprises a moving device, the feeding and discharging device is arranged on the moving device and used for feeding and discharging the flower basket; the storage device is arranged on one side of the moving device and provided with a plurality of sealing bins, sealing devices arranged on the sealing bins and a plurality of open bins; the feeding and discharging devices are arranged in the sealed bin and the open bin; the moving device is used for driving the feeding and discharging device to be matched with the feeding and discharging device to feed the flower baskets into the storage device or take the flower baskets out of the storage device. According to the three-dimensional temporary storage bin for the silicon wafers, three-dimensional storage is achieved through the moving device and the feeding and discharging device, butt joint between the AGV and the feeding and discharging device is achieved through the feeding and discharging device, feeding and discharging of flower baskets in the storage device are achieved, different storage conditions are provided through the sealing bin and the open bin, and the storage efficiency is improved. And the overall storage capacity is improved.

Description

Technical Field

[0001] The utility model relates to a silicon chip buffer device, in particular to a three-dimensional silicon chip buffer warehouse. Background Art

[0002] In order to facilitate the presence of silicon wafers in the production process, a photovoltaic flower basket cache machine, such as the one disclosed in CN216671588U, includes a frame, a moving mechanism, a height adjustment component and one or more conveying devices; the frame has two or more layers of frames with different horizontal heights; the moving mechanism is set at one end of the frame, and the two or more layers of frames are set at the other end of the frame. The photovoltaic flower basket cache machine prevents dust and other impurities in the environment from directly contacting the battery cells by setting a shell, thereby ensuring the cleanliness of the battery cells; the shell is provided with an automatic door to ensure that the wafer basket can be normally imported or exported from the cache station. Although the photovoltaic flower basket cache machine is provided with multiple groups of cache mechanisms in the vertical direction, it does not disclose how the multiple cache mechanisms arranged above and below are docked with the connecting mechanism. There is no device for moving the flower basket up and down, which means that three-dimensional storage cannot be achieved. Secondly, the storage capacity is limited. Utility Model Content

[0003] In order to solve the above-mentioned problems of not being able to perform three-dimensional caching and limited storage capacity, the utility model provides a three-dimensional silicon wafer caching warehouse, and the specific technical solution is as follows:

[0004] A three-dimensional silicon wafer buffer warehouse comprises: a moving device; a loading and unloading device, arranged on the moving device, for feeding and unloading flower baskets; a storage device, arranged on one side of the moving device and provided with a plurality of sealed bins, sealing devices arranged on the sealed bins, and a plurality of open bins; and a plurality of loading and unloading devices, arranged in the sealed bins and the open bins; wherein the moving device is used to drive the loading and unloading device to cooperate with the loading and unloading device to send the flower baskets into the storage device or take them out from the storage device.

[0005] Preferably, the moving device includes: a translation device; and a lifting device, which is provided on the translation device and connected to the loading and unloading device.

[0006] Preferably, the translation device includes: a translation frame; a translation guide rail, which is arranged on the translation frame; a translation base plate, which is arranged on the slider of the translation guide rail; a translation motor, which is arranged on the translation base plate; a translation gear, which is arranged on the translation motor; and a translation rack, which is arranged on the translation frame and engages with the translation gear.

[0007] Furthermore, the lifting device includes: a lifting frame, which is arranged on the translation base plate; a lifting guide rail, which is vertically arranged on the lifting frame; a lifting plate, which is arranged on the slider of the lifting guide rail; a plurality of lifting connecting seats, which are arranged on the lifting plate and connected to the loading and unloading device; a lifting motor, which is arranged on the lifting plate; a lifting gear, which is arranged on the lifting motor; and a lifting rack, which is arranged on the lifting frame and meshes with the lifting gear.

[0008] Wherein, it also includes: a fall arrester, which is arranged on the top of the lifting frame and connected to the lifting plate.

[0009] The feeding and discharging device delivers the flower baskets into the storage device or takes them out from the storage device.

[0010] Preferably, the sealing device includes: sealing guide rails, symmetrically arranged on both sides of the sealing bin; a sealing door, slidingly arranged on the sealing guide rails; a sealing cylinder, respectively connected to the sealing door and the storage device, for lifting the sealing door; and a sealing strip, arranged on the sealing bin and opposite to the sealing door.

[0011] The feeding and discharging device delivers the flower baskets into the storage device or takes them out from the storage device.

[0012] Preferably, the loading and unloading device includes: a loading and unloading conveying device; a front stop device, arranged at one end of the loading and unloading conveying device; a rear stop device, arranged at the other end of the loading and unloading conveying device; loading and unloading sensors, arranged at both ends of the loading and unloading conveying device; and a loading and unloading connecting seat, arranged on the loading and unloading conveying device and connected to the moving device.

[0013] Furthermore, the loading and unloading conveying device includes: a conveying frame, which is arranged on the moving device; an active conveying shaft, which is rotatably arranged at one end of the conveying frame; two active conveying pulleys, which are arranged at both ends of the active conveying shaft; two driven conveying pulleys, which are rotatably arranged at the other end of the conveying frame; two conveying belts, which are respectively sleeved on the active conveying pulley and the driven conveying pulley; two conveying baffles, which are symmetrically arranged on the conveying frame and are respectively located on one side of the two conveying belts, and the conveying baffles are provided with anti-slip grooves; and a conveying drive device, which is arranged on the conveying frame and connected to the active conveying shaft.

[0014] Furthermore, it also includes: an end limit plate, which is provided with a belt groove, and the end limit plate is provided on the conveying frame and is respectively located on one side of the active conveying pulley and the driven conveying pulley; and an intermediate sliding plate, which is provided on the conveying frame and is located between two adjacent end limit plates; wherein the conveying belt is slidably provided on the belt groove and the intermediate sliding plate.

[0015] Preferably, the feeding and discharging device includes: two connecting bottom plates, which are arranged at both ends of the sealed warehouse and the open warehouse; two feeding and discharging conveying devices, whose ends are respectively arranged on the two connecting bottom plates; a positioning baffle, which is arranged at one end of the feeding and discharging conveying device; an intermediate support plate, which is arranged on the feeding and discharging conveying device; and an intermediate support screw, which is arranged on the intermediate support plate and rests against the bottom of the sealed warehouse and the open warehouse.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] The utility model provides a three-dimensional silicon wafer cache warehouse that realizes three-dimensional storage through a moving device and a loading and unloading device. The loading and unloading device is used to realize the docking between the AGV car and the loading and unloading device, thereby realizing the feeding and unloading of the flower basket in the storage device. Different storage conditions are provided through the sealed warehouse and the open warehouse, thereby improving the storage capacity as a whole. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the structure of this application;

[0019] Figure 2 It is a front view of the present application;

[0020] Figure 3 This is a schematic diagram after the loading box is hidden;

[0021] Figure 4 It is a structural diagram of the storage device;

[0022] Figure 5 It is a stereogram of the first perspective of the mobile device;

[0023] Figure 6 is a stereogram of the second viewing angle of the mobile device;

[0024] Figure 7 It is a structural diagram of the lifting device;

[0025] Figure 8 It is a structural diagram of the loading and unloading device;

[0026] Figure 9 This is the front view of the loading and unloading device;

[0027] Figure 10 It is a top view of the loading and unloading device;

[0028] Figure 11 It is a structural diagram of the end limit plate;

[0029] Figure 12 It is a structural diagram of the feeding and discharging device;

[0030] Figure 13 It is a top view of the feeding and discharging device;

[0031] Figure 14 It is a structural diagram of a feeding and discharging device equipped with a flower basket. DETAILED DESCRIPTION

[0032] The present invention will now be further described with reference to the accompanying drawings.

[0033] like Figures 1 to 14 As shown, a three-dimensional silicon wafer buffer warehouse includes a moving device 2, a loading and unloading device 4, a storage device 3 and a loading and unloading device 6. The moving device 2 is arranged at the feeding end of the storage device 3, and the loading and unloading device 4 is installed on the moving device 2 for feeding and unloading flower baskets; the storage device 3 is provided with a plurality of sealed bins 32 and open bins 31 in an array, and the sealed bins 32 and the open bins 31 are both equipped with loading and unloading devices 6, and the sealed bins 32 are also equipped with sealing devices; the moving device 2 is used to drive the loading and unloading device 4 to cooperate with the loading and unloading device 6 to send the flower baskets into the storage device 3 or take them out from the storage device 3.

[0034] In order to improve safety, the utility model further comprises a feeding box 1 which is installed on the ground and has a feeding port which is provided with a safety grating.

[0035] The storage device 3 includes a frame, a box cover and a sealing plate. The box cover is installed on the top, bottom, both sides and back of the frame. The interior of the frame is arrayed into several spaces. The sealing plate is installed on the frame to form a sealed sealed warehouse 32.

[0036] The sealing device includes two symmetrical sealing rails 36, a sealing door 33, a sealing cylinder 35, and sealing strips 34. The sealing rails 36 are fixed to the frame and positioned symmetrically on either side of the sealed chamber 32. The sealing door 33 slides onto the sealing rails 36. One end of the sealing cylinder 35 is pivotally mounted on the frame via a rotating mount, while the other end is connected to the top of the sealing door 33 via a rotating mount, allowing it to be raised and lowered. The sealing strips 34 are mounted on the frame and positioned around the sealed chamber 32, facing the sealing door 33 to ensure a tight seal. The bottom of the sealed chamber 32 can also be connected to an air pipe via a solenoid valve for injecting inert gas.

[0037] The moving device 2 includes a translation device 21 and a lifting device 22 . The translation device 21 is installed on the ground and located in the loading box 1 . The lifting device 22 is installed on the translation device 21 and connected to the loading and unloading device 4 .

[0038] The translation device 21 includes a translation frame 211, a translation guide rail 212, a translation base plate 217, a translation motor 214, and a translation gear 215. The translation frame 211 is mounted on the ground, the translation guide rail 212 is symmetrically mounted on the translation frame 211 and arranged horizontally, the slider on the translation guide rail 212 is connected to the translation base plate 217, the translation motor 214 is mounted on the translation base plate 217 and connected to the translation gear 215, and the translation gear 215 is engaged with the translation rack 213. The translation rack 213 is mounted on the translation frame 211 and arranged parallel to the translation guide rail 212. The translation rack 213 is also located on one side of the translation guide rail 212. The translation motor 214 drives the translation base plate 217 to move via the translation gear 215 and the translation rack 213.

[0039] The lifting device 22 includes a lifting frame 221, a lifting guide rail 222, a lifting plate 223, a lifting connection seat 224, a lifting motor 225, a lifting gear, a lifting rack 220, and a fall arrester 226. The lifting frame 221 is mounted on the translation base plate 217. The lifting guide rails 222 are symmetrically mounted on the lifting frame 221 and symmetrically located on both sides of the lifting frame 221. The sliders of the lifting guide rails 222 are connected to the lifting plate 223. The lifting connection seat 224 is mounted on the lifting plate 223, and there are three of them in an array. The lifting motor 225 is fixed to the lifting plate 223 and connected to the lifting gear. The lifting rack 220 is vertically mounted on the lifting frame 221 and meshes with the lifting gear. The lifting rack 220 is also located on one side of the lifting guide rail 222. The fall arrester 226 is mounted on the top of the lifting frame 221 and connected to the lifting plate 223. The lifting motor 225 drives the lifting plate 223 and the loading and unloading device 4 to move up and down through the lifting gear and the lifting rack 220.

[0040] The loading and unloading device 4 includes a loading and unloading conveying device, a front stopper 51, a rear stopper 52, a loading and unloading sensor 54 and a loading and unloading connecting seat 53. The loading and unloading conveying device includes a conveying frame 41, a driving conveying shaft 46, a driving conveying pulley 45, a driven conveying pulley 40, a conveying belt 48, a conveying stopper plate 44 and a conveying drive device 47. The conveying frame 41 is installed on the lifting connecting seat 224. The driving conveying shaft 46 is rotatably mounted on one end of the conveying frame 41 through a bearing seat, and a driving conveying pulley 45 is respectively installed at both ends; the driven conveying pulley 40 is rotatably mounted on the other end of the conveying frame 41 through a bearing, and two symmetrically arranged driven conveying pulleys 45 are also arranged in parallel with the two driving conveying pulleys 45. Two conveyor belts 48 are provided, one mounted on the driving conveyor pulley 45 and the other on the driven conveyor pulley 40. Two conveyor baffles 44 are provided, each with an anti-slip groove 441. The conveyor baffles 44 are symmetrically mounted on the conveyor frame 41 via a baffle connecting seat 49, and are located on either side of the two conveyor belts 48. The conveyor drive device 47 includes a conveyor motor and a synchronous belt transmission. The conveyor motor is mounted on the conveyor frame 41 and connected to the conveyor motor via the synchronous belt transmission to drive the conveyor belts 48. The two sides of the flower basket's bottom plate are movably inserted into the anti-slip groove 441 to prevent the flower basket from tipping over during movement, thereby improving the safety and reliability of the conveyor. To reduce wear on the conveyor belt 48 and to limit the position of the conveyor belt 48 to prevent it from deviating while providing better support for the flower baskets, the conveyor frame 41 also includes end limit plates 42 and an intermediate sliding plate 43. The end limit plates 42 are mounted at both ends of the conveyor frame 41, one on each side of the driving conveyor pulley 45 and the other on the driven conveyor pulley 40. The end limit plates 42 are provided with belt grooves 421 that match the conveyor belt 48. The intermediate sliding plate 43 is mounted on the conveyor frame 41 and is located between two adjacent end limit plates 42. The conveyor belt 48 slides on the belt grooves 421 and the intermediate sliding plate 43. Both the end limit plates 42 and the intermediate sliding plate 43 are made of plastic. The depth of the belt groove 421 is less than the thickness of the conveyor belt 48. The width of the belt groove 421 is slightly greater than the width of the conveyor belt 48, thereby limiting the position of the conveyor belt 48. The end stop plates 42 and the middle sliding plate 43 can reduce the friction between the conveyor belt 48 and the conveyor frame 41, thereby increasing the service life of the conveyor belt 48 and making the conveying of flower baskets smoother. The front stopper 51 and the rear stopper 52 are respectively mounted at both ends of the conveyor frame 41 and each includes a cylinder and a movable stopper plate. The cylinder is mounted on the conveyor frame 41 and is connected to the movable stopper plate. The movable stopper plate is raised by the cylinder to stop the material, and the movable stopper is lowered by the cylinder to stop the material. The loading and unloading sensors 54 are mounted at both ends of the conveyor frame 41, one on each side of the front stopper 51 and the other on each side of the rear stopper 52, to detect whether a flower basket has passed through. There are several loading and unloading connection seats 53, which are mounted on the conveyor frame 41 and connected to the lifting connection seat 224.The front stopper 51 and the rear stopper 52 prevent the flower basket from escaping from the loading and unloading conveying device during movement, thereby improving safety and reliability.

[0041] The in-and-out material device 6 includes a connecting base plate 62, an in-and-out material conveying device 69, a positioning baffle 63, an intermediate support plate 66 and an intermediate support screw 67. The structure of the in-and-out material conveying device 69 is the same as that of the upper and lower material conveying devices. The connecting base plate 62 is respectively installed at the two ends of the sealed bin 32 and the open bin 31, and is connected to the in-and-out material conveying device 69. Two in-and-out material conveying devices 69 are installed in each sealed bin 32 and the open bin 31. The connecting base plate 62 is used to provide a horizontal surface and facilitate the installation of the two in-and-out material devices 6. The two in-and-out material conveying devices 69 share one in-and-out material motor 61. The intermediate support plate 66 is installed on the conveying frame 41 and is connected to the intermediate support screw 67. The end of the intermediate support screw 67 is against the bottom of the sealed bin 32 and the open bin 31, which is used to support the conveying frame 41, improve the overall strength of the conveying frame 41, and prevent the middle part of the conveying frame 41 from deformation. The positioning baffle 63 is installed at one end of the in-and-out material conveying device 69 , and the other end of the in-and-out material conveying device 69 is the feeding end, and is equipped with a feeding sensor 65 .

[0042] The sealing cylinder 35 is located between two adjacent feeding and discharging conveying devices 69 and does not affect the feeding and discharging of the flower basket.

[0043] When the flower basket is sent into the three-dimensional buffer warehouse, the AGV trolley moves to the feed port, the moving device 2 and the lifting device 22 move the loading and unloading device 4 to align with the AGV trolley, and then the AGV trolley transports the flower basket to the loading and unloading conveying device. The two sides of the bottom plate of the flower basket are movably inserted into the anti-slip groove 441. The loading and unloading sensor 54 detects the number of flower baskets entering. When the loading and unloading sensor 54 at the end far from the AGV trolley detects the flower basket, the rear stop device 52 rises to block the flower basket. When the loading and unloading sensor 54 close to the AGV trolley detects the set number of flower baskets At this time, the loading and unloading conveying device stops and the front stopper 51 is raised. Then the translation device 21 and the lifting device 22 drive the loading and unloading device 4 and the flower basket to move to the corresponding storage bin. Then the rear stopper 52 descends, and the loading and unloading conveying device and the in-and-out conveying device 69 in the storage bin are started, and the flower basket is transferred to the in-and-out conveying device 69 and moved to the positioning baffle 63. The feed sensor 65 detects the number of flower baskets entering until all the flower baskets on the loading and unloading conveying device are sent out or the set number of flower baskets are sent in, and then the in-and-out conveying device 69 stops.

[0044] When the flower basket is sent out of the three-dimensional buffer warehouse, the translation device 21 and the lifting device 22 drive the loading and unloading device 4 and the flower basket to move to the corresponding warehouse position, and then the rear stopper device 52 descends, and the loading and unloading conveying device and the in-and-out conveying device 69 in the warehouse are started to transfer the flower basket to the loading and unloading conveying device. The flower basket is blocked by the front stopper device 51, and the loading and unloading sensor 54 detects the number of flower baskets entering. When the set number is reached, the loading and unloading conveying device and the in-and-out conveying device 69 both stop, and the rear stopper device 52 rises. Then the moving device 2 and the lifting device 22 move the loading and unloading device 4 to align with the AGV cart, and convey the flower basket to the AGV cart through the loading and unloading conveying device.

[0045] The technical principles of the present invention have been described above with reference to specific embodiments. These descriptions are intended solely to illustrate the principles of the present invention and should not be construed in any way as limiting the scope of protection of the present invention. Based on the explanations herein, those skilled in the art will be able to devise other specific embodiments of the present invention without inventive effort, and such embodiments will fall within the scope of protection of the claims of the present invention.

Claims

1. A three-dimensional silicon wafer cache, characterized in that: include: Mobile device (2); A loading and unloading device (4), provided on the moving device (2), for feeding and discharging the flower baskets; A storage device (3) is provided on one side of the mobile device (2) and is provided with a plurality of sealed bins (32), a sealing device provided on the sealed bins (32) and a plurality of open bins (31); and A plurality of feeding and discharging devices (6) are arranged in the sealed bin (32) and the open bin (31); The moving device (2) is used to drive the loading and unloading device (4) to cooperate with the feeding and discharging device (6) to send the flower basket into the storage device (3) or take it out from the storage device (3).

2. The three-dimensional silicon wafer buffer according to claim 1, characterized in that: The mobile device (2) comprises: a translation device (21); and The lifting device (22) is arranged on the translation device (21) and is connected to the loading and unloading device (4).

3. The three-dimensional silicon wafer buffer according to claim 2, characterized in that: The translation device (21) comprises: Translation frame (211); A translation guide rail (212) is provided on the translation frame (211); A translation base plate (217) is provided on the slider of the translation guide rail (212); A translation motor (214) is provided on the translation base plate (217); a translation gear (215), provided on the translation motor (214); and The translation rack (213) is provided on the translation frame (211) and meshes with the translation gear (215).

4. The three-dimensional silicon wafer buffer according to claim 3, characterized in that: The lifting device (22) comprises: A lifting frame (221) is provided on the translation base plate (217); A lifting guide rail (222) is vertically arranged on the lifting frame (221); A lifting plate (223) is provided on the slider of the lifting guide rail (222); A plurality of lifting connection seats (224) are provided on the lifting plate (223) and connected to the loading and unloading device (4); A lifting motor (225) is provided on the lifting plate (223); A lifting gear, provided on the lifting motor (225); and A lifting rack (220) is provided on the lifting frame (221) and meshes with the lifting gear.

5. The three-dimensional silicon wafer buffer according to claim 4, characterized in that: Also includes: The anti-fall device (226) is arranged on the top of the lifting frame (221) and is connected to the lifting plate (223).

6. The three-dimensional silicon wafer buffer according to claim 1, characterized in that: The sealing device comprises: Sealing guide rails (36) are symmetrically arranged on both sides of the sealing chamber (32); A sealing door (33) is slidably mounted on the sealing guide rail (36); a sealing cylinder (35), connected to the sealing door (33) and the storage device (3), respectively, for lifting and lowering the sealing door (33); and A sealing strip (34) is provided on the sealing chamber (32) and is arranged opposite to the sealing door (33).

7. The three-dimensional silicon wafer buffer according to claim 1, characterized in that: The loading and unloading device (4) comprises: Loading and unloading conveying device; A front stopper (51) is provided at one end of the loading and unloading conveying device; A rear stopper (52) is provided at the other end of the loading and unloading conveying device; Loading and unloading sensors (54) are provided at both ends of the loading and unloading conveying device; and The loading and unloading connecting seat (53) is provided on the loading and unloading conveying device and is connected to the moving device (2).

8. The three-dimensional silicon wafer buffer according to claim 7, characterized in that: The loading and unloading conveying device comprises: A conveying frame (41) is provided on the moving device (2); An active conveying shaft (46) is rotatably mounted on one end of the conveying frame (41); Two active conveying pulleys (45) are provided at both ends of the active conveying shaft (46); Two driven conveyor pulleys (40) are rotatably arranged at the other end of the conveyor frame (41); Two conveyor belts (48) are respectively sleeved on the active conveyor pulley (45) and the driven conveyor pulley (40); Two conveying baffle plates (44) are symmetrically arranged on the conveying frame (41) and are respectively located on one side of the two conveying belts (48), and the conveying baffle plates (44) are provided with anti-slip grooves (441); and The conveying drive device (47) is arranged on the conveying frame (41) and connected to the active conveying shaft (46).

9. The three-dimensional silicon wafer buffer according to claim 8, characterized in that: Also includes: an end stop plate (42), wherein a belt groove (421) is provided on the end stop plate (42), and the end stop plate (42) is provided on the conveying frame (41) and is respectively located on one side of the active conveying pulley (45) and the driven conveying pulley (40); and An intermediate sliding plate (43) is provided on the conveying frame (41) and is located between two adjacent end limit plates (42); Wherein, the conveying belt (48) is slidably arranged on the belt groove (421) and the intermediate sliding plate (43).

10. The three-dimensional silicon wafer buffer according to claim 7, characterized in that: The feeding and discharging device (6) comprises: Two connecting bottom plates (62) are provided at both ends of the sealed chamber (32) and the open chamber (31); Two inlet and outlet conveying devices (69), both ends of which are respectively arranged on the two connecting bottom plates (62); A positioning baffle (63) is provided at one end of the inlet and outlet conveying device (69); an intermediate support plate (66) provided on the inlet and outlet conveying device (69); and The intermediate support screw (67) is provided on the intermediate support plate (66) and abuts against the bottom of the sealing chamber (32) and the open chamber (31).

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