Pressure-sensitive element for pressure transmitter

Abstract

The utility model provides a pressure-sensitive element for a pressure transmitter, which comprises a silicon-based substrate, the silicon-based substrate is provided with a first surface located at the top and a second surface located at the bottom, the first surface and the second surface are arranged in parallel, the second surface is provided with a plurality of grooves, and the grooves are communicated with the silicon-based substrate. The section, in the direction perpendicular to the first face, of the groove is in a trapezoid shape. The piezoresistors are of a convex structure formed on the first surface of the silicon-based substrate, the number of the piezoresistors is plural, and the plurality of piezoresistors are arranged to form a single-arm bridge circuit; wherein the piezoresistor is bonded with the silicon-based substrate through a bonding agent. According to the invention, the surface of one side of the silicon-based substrate is integrated with the piezoresistor which forms the single-arm bridge, so that the size of the pressure-sensitive element is reduced to a great extent, the application scene of the pressure-sensitive element is expanded, and the application convenience of the pressure-sensitive element is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of pressure transmitters, in particular to a pressure sensitive element for a pressure transmitter. Background Art

[0002] A pressure transmitter is a device that converts pressure into a pneumatic or electrical signal for remote control and transmission. Conventional pressure transmitters consist of a pressure-sensitive element and control circuit. In conventional pressure transmitters, the pressure-sensitive element and control circuit are structurally separated, resulting in a relatively large overall product size.

[0003] Therefore, it is urgent to propose a pressure sensitive element for a pressure transmitter to solve the technical problem of the large size of the pressure sensitive element in the prior art. Utility Model Content

[0004] Aiming at the technical problem that in conventional pressure transmitters in the prior art, the pressure-sensitive element and the control circuit are designed to be structurally separated from each other, resulting in a relatively large overall product volume, the utility model provides a pressure-sensitive element for a pressure transmitter.

[0005] In a preferred embodiment of the present invention, a pressure sensitive element for a pressure transmitter is provided. The pressure sensitive element is in a sheet-like form and includes:

[0006] A silicon-based substrate having a first surface at the top and a second surface at the bottom, the first surface being parallel to the second surface, and a plurality of grooves being provided on the second surface, wherein the grooves have a trapezoidal cross-section along a direction perpendicular to the first surface;

[0007] A varistor is a protruding structure formed on the first surface of the silicon-based substrate. The varistor is in a plurality and the plurality of varistors are arranged to form a single-arm bridge circuit. The varistor is bonded to the silicon-based substrate by an adhesive.

[0008] Preferably, the plurality of varistors are arranged to form a single-arm bridge circuit having a strain pressure difference detection interface.

[0009] Preferably, the strain differential pressure detection interface can be connected to a differential pressure detection mechanism.

[0010] Preferably, the varistor includes two electrode layers and conductive particles sandwiched between the two electrode layers.

[0011] Preferably, the electrode layer of the varistor is a semi-monomeric ceramic electrode layer.

[0012] Preferably, the resistance of the varistor decreases as the pressure applied to the varistor increases.

[0013] Compared with the prior art, the present invention can achieve the following beneficial effects:

[0014] A pressure transmitter of the present application uses a pressure-sensitive element that integrates one side surface of a silicon-based substrate with a piezoresistor that constitutes a single-arm bridge, which greatly reduces the volume of the pressure-sensitive element, expands the application scenarios of the pressure-sensitive element, and increases the convenience of using the pressure-sensitive element. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The preferred implementation scheme will be described below in a clear and understandable manner with reference to the accompanying drawings to further illustrate the above characteristics, technical features, advantages and their implementation methods.

[0016] Figure 1 A pressure sensitive element for a pressure transmitter according to one embodiment of the present invention is shown. DETAILED DESCRIPTION

[0017] The various aspects of the present invention are further described below.

[0018] Unless otherwise defined or indicated, all professional and scientific terms used herein have the same meaning as those familiar to those skilled in the art. In addition, any methods and materials similar or equivalent to those described herein may be applied to the present invention.

[0019] Unless otherwise specified or limited, the "or" mentioned in this utility model includes the "and" relationship. The "and" is equivalent to the Boolean logic operator "AND", and the "or" is equivalent to the Boolean logic operator "OR", and "AND" is a subset of "OR".

[0020] It will be understood that although the terms "first," "second," and the like may be used herein to describe different elements, these elements should not be limited by these terms. These terms are merely used to distinguish one element from another. Thus, a first element may be referred to as a second element without departing from the teachings of the present invention.

[0021] In the present invention, the terms “mainly composed of” and “consisting of” are included in the terms “contain”, “include” or “include”.

[0022] Unless otherwise expressly specified or limited, the terms "connected," "connected," and "connected" in this application should be understood broadly. For example, they may refer to a fixed connection, a connection through an intermediary medium, internal communication between two components, or an interaction between two components. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0023] For example, if an element (or component) is referred to as being on, coupled to, or connected to another element, the element may be directly formed on, coupled to, or connected to the other element, or there may be one or more intervening elements therebetween. In contrast, if the expressions "directly on," "directly coupled to," and "directly connected to" are used herein, then no intervening elements are indicated. Other words used to describe relationships between elements should be interpreted similarly, such as "between" and "directly between," "attached" and "directly attached," "adjacent" and "directly adjacent," etc.

[0024] It should be noted that the terms "front," "rear," "left," "right," "upper," and "lower" used in the following description refer to directions in the accompanying drawings. The terms "inner" and "outer" are used to refer to directions toward and away from, respectively, the geometric center of a particular component. It will be understood that these terms are used herein to describe the relationship of one element, layer, or region relative to another element, layer, or region as illustrated in the accompanying drawings. These terms are intended to encompass orientations of the device in addition to those depicted in the accompanying drawings.

[0025] Other aspects of the present invention will be apparent to those skilled in the art from the disclosure herein.

[0026] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the specific implementation methods of the present invention will be described below with reference to the accompanying drawings. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings and other implementation methods can be obtained based on these drawings without inventive work.

[0027] It should also be noted that the figures provided in the following embodiments are merely schematic illustrations of the basic concepts of the present application. The figures only show components relevant to the present application and are not drawn according to the number, shape, and size of components in actual implementation. In actual implementation, the type, quantity, and proportion of each component may be varied arbitrarily, and the component layout may be more complex. For example, the thickness of components in the drawings may be exaggerated for clarity.

[0028] Example

[0029] As attached Figure 1 As shown, the utility model realizes a pressure sensitive element for a pressure transmitter, wherein the pressure sensitive element is in a sheet-like form and comprises:

[0030] A silicon-based substrate 1 having a first surface at the top and a second surface at the bottom, wherein the first surface is parallel to the second surface, and a plurality of grooves 2 are provided on the second surface, wherein the grooves 2 have a trapezoidal cross-section along a direction perpendicular to the first surface;

[0031] The varistor 3 is a protruding structure formed on the first surface of the silicon-based substrate 1. The number of the varistor 3 is plural and the plural varistors are arranged to form a single-arm bridge circuit; wherein the varistor is bonded to the silicon-based substrate by an adhesive.

[0032] It should be noted that integrating one side surface of the silicon-based substrate with the varistor that constitutes a single-arm bridge greatly reduces the volume of the varistor, expands the application scenarios of the varistor, and increases the convenience of the application of the varistor.

[0033] As a preferred embodiment, the plurality of piezoresistors are arranged to form a single-arm bridge circuit having a strain gauge pressure difference detection interface.

[0034] As a preferred embodiment, the strain differential pressure detection interface can be connected to a differential pressure detection mechanism.

[0035] As a preferred embodiment, the varistor includes two electrode layers and conductive particles sandwiched between the two electrode layers.

[0036] As a preferred embodiment, the electrode layer of the varistor is a semi-monomeric ceramic electrode layer.

[0037] As a preferred embodiment, the resistance of the varistor decreases as the pressure applied to the varistor increases.

[0038] It should be noted that a plurality of grooves are provided on the second surface, and a piezoresistor is provided on the first surface corresponding to the groove setting area. When one side of the second surface of the piezoresistive element faces the fluid, the plurality of groove areas are more likely to deform due to the pressure difference. At this time, the resistance of the piezoresistor in the single-arm bridge structure will change, causing the pressure detection mechanism of the pressure difference detection interface of the single-arm circuit to record the above-mentioned pressure difference and output it in the form of a bridge voltage, and the subsequent mechanism will convert the voltage data into pressure difference data output.

[0039] Based on this application, those skilled in the art will appreciate that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, an apparatus and / or method can be implemented using any number and aspects described herein. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement the apparatus and / or method.

[0040] It should be noted that the above embodiments can be freely combined as needed. The above description is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention, and such improvements and modifications should also be considered as the scope of protection of the present invention.

[0041] All documents mentioned in this application are incorporated herein by reference, just as if each document were incorporated herein by reference individually. It should also be understood that after reading the above disclosure, those skilled in the art may make various changes or modifications to the present invention, and that such equivalents also fall within the scope of the claims appended hereto.

Claims

1. A pressure sensitive element for a pressure transmitter, wherein the pressure sensitive element is in a sheet-like form and is characterized in that: The pressure sensitive element comprises: A silicon-based substrate having a first surface at the top and a second surface at the bottom, the first surface being parallel to the second surface, and a plurality of grooves being provided on the second surface, wherein the grooves have a trapezoidal cross-section along a direction perpendicular to the first surface; A varistor is a protruding structure formed on the first surface of the silicon-based substrate. The varistor is in a plurality and the plurality of varistors are arranged to form a single-arm bridge circuit. The varistor is bonded to the silicon-based substrate by an adhesive.

2. A pressure sensitive element for a pressure transmitter according to claim 1, characterized in that: The plurality of piezoresistors are arranged to form a single-arm bridge circuit having a strain pressure difference detection interface.

3. A pressure sensitive element for a pressure transmitter according to claim 2, characterized in that: The strain differential pressure detection interface can be connected to a differential pressure detection mechanism.

4. A pressure sensitive element for a pressure transmitter according to claim 3, characterized in that: The varistor includes two electrode layers and conductive particles sandwiched between the two electrode layers.

5. A pressure sensitive element for a pressure transmitter according to claim 4, characterized in that: The electrode layer of the varistor is a semi-monomeric ceramic electrode layer.

6. A pressure sensitive element for a pressure transmitter according to claim 5, characterized in that: The resistance of the varistor decreases as the pressure applied to the varistor increases.

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