Height-adjustable microscope

Abstract

The utility model discloses a height-adjustable microscope, and relates to the field of microscopes, the microscope comprises a microscope body, the microscope body comprises a lens assembly, a mounting rack, a carrier platform, an X-axis mobile platform and a Y-axis mobile platform; the microscope further comprises a base, a lifting device and a sheet inserting table, the lifting device and the sheet inserting table are arranged between the base and the microscope body, the top of the lifting device is detachably connected with the installation frame and the Y-axis moving platform, the bottom of the lifting device is detachably connected with the base, and the sheet inserting table is detachably installed on the base. The beneficial effects of the utility model are that when a tower footing on the side surface of a silicon wafer is detected, the object carrying platform can be adjusted to a position far away from the lens assembly, the microscope body is integrally lifted through the lifting device, the wafer inserting table is installed on the base, the wafer inserting table is arranged corresponding to the lens assembly, and the wafer inserting table is located right below the lens assembly; the silicon wafer is vertically placed on the wafer inserting table, and the condition of the tower footing on the side face of the silicon wafer can be observed without breaking the silicon wafer.

Description

Technical Field

[0001] The utility model relates to the field of microscopes, in particular to a microscope with adjustable height. Background Art

[0002] A microscope is an optical instrument consisting of a lens or a combination of lenses. It is a symbol of humanity's entry into the atomic age. A microscope is an instrument primarily used to magnify tiny objects so that they can be seen by the naked eye.

[0003] During the silicon wafer alkali polishing process, each shift of products needs to undergo SPC testing, and a 3D microscope is required to inspect the side tower base of the silicon wafer. However, please refer to Figure 1 Due to the structural limitations of 3D microscopes in the existing technology, that is, the limited space between the lens assembly and the loading platform of the 3D microscope, the silicon wafers can only be broken into pieces for side tower base monitoring. Since SPC testing is required for each shift of products, at least the same number of silicon wafers need to be broken for each shift of products produced, resulting in a large loss.

[0004] Therefore, it is necessary to design a microscope that can detect the condition of the tower base on the side of the silicon wafer without directly breaking the silicon wafer. Utility Model Content

[0005] To overcome the structural limitations of 3D microscopes in existing technologies, the space between the lens assembly and the loading platform is limited, so the silicon wafer can only be broken into pieces for side tower base monitoring, which results in high losses.

[0006] The utility model provides a height-adjustable microscope, which includes a microscope body, a lens assembly, a mounting frame, a loading platform, an X-axis movable platform, and a Y-axis movable platform. The X-axis movable platform is mounted on the Y-axis movable platform and can move along the Y direction on the Y-axis movable platform. The loading platform is mounted on the X-axis movable platform and can move along the X direction on the X-axis movable platform. The lens assembly is mounted on the mounting frame and is arranged downward. The lower end of the mounting frame is fixedly connected to the Y-axis movable platform. The microscope also includes:

[0007] base;

[0008] A lifting device and an inserting table are arranged between the base and the microscope body. The top of the lifting device is detachably connected to the mounting frame and the Y-axis movable platform respectively, and the bottom of the lifting device is detachably connected to the base. The lifting device can simultaneously drive the mounting frame and the Y-axis movable platform to move in the vertical direction. The inserting table is detachably mounted on the base. The inserting table is arranged corresponding to the lens assembly and is used to insert sheet objects.

[0009] Preferably, the lifting device includes a plurality of electric cylinders, the cylinder body of each electric cylinder is detachably connected to the base, and the push rod of each electric cylinder is detachably connected to the mounting frame or the Y-axis movable platform.

[0010] Preferably, a first connecting piece is fixed to the bottom of the cylinder body of each electric cylinder, and each first connecting piece is detachably connected to the base via a first screw;

[0011] A second connecting piece is fixed to the top of each push rod of the electric cylinder, and each second connecting piece is detachably connected to the lower surface of the mounting frame or the lower surface of the Y-axis moving platform through a second screw.

[0012] Preferably, the base is provided with a plurality of first positioning holes evenly spaced apart;

[0013] A plurality of first guide holes extending vertically are respectively formed on the lower surface of the mounting frame and the lower surface of the Y-axis movable platform;

[0014] The lifting device further includes a plurality of guide rods, the lower end of each guide rod being detachably mounted in the corresponding first positioning hole, and the upper end of each guide rod being inserted into the corresponding first guide hole.

[0015] Preferably, the lower end of each guide rod is threadedly connected or interference-fitted to the corresponding first positioning hole.

[0016] Preferably, the outer diameter of each guide rod is equal to the inner diameter of the first guide hole.

[0017] Preferably, the inserting platform includes a positioning plate and two clamping plates, the positioning plate is detachably mounted on the base, the two clamping plates are movably mounted on the positioning plate, the two clamping plates are arranged in parallel and have a socket in the middle.

[0018] Preferably, the base is provided with a plurality of second positioning holes evenly spaced apart;

[0019] A plurality of positioning posts are fixed to the lower surface of the positioning plate, and each of the positioning posts is inserted into a corresponding second positioning hole.

[0020] Preferably, the upper surface of the positioning plate is fixed with bosses provided on both sides of the clamping plate, and the inner side surfaces of the two bosses are respectively provided with sliding grooves, and the sliding grooves extend along the width direction of the horizontal cross section of the clamping plate;

[0021] The bottoms of the two clamping plates are fixedly connected via a slide bar, and the two ends of the slide bar are inserted into the two slide grooves in a one-to-one correspondence.

[0022] Preferably, a cushion layer is fixed to the inner surfaces of the two splints respectively.

[0023] Beneficial effects:

[0024] The beneficial effects produced by adopting the technical solution of this utility model are as follows:

[0025] (1) The X-axis moving platform is mounted on the Y-axis moving platform and can move along the Y direction on the Y-axis moving platform. The loading platform is mounted on the X-axis moving platform and can move along the X direction on the X-axis moving platform. The position of the loading platform is adjusted by the Y-axis moving platform and the X-axis moving platform. The lens assembly is mounted on the mounting frame and is set downward. The lower end of the mounting frame is fixedly connected to the Y-axis moving platform. When the object to be inspected needs to be placed on the loading platform, the loading platform can be adjusted to a position directly below the lens assembly. When inspecting the side tower base of the silicon wafer, the loading platform can be adjusted to a position away from the lens assembly to provide installation space for the inserting table. The top of the lifting device is detachably connected to the mounting frame and the Y-axis moving platform respectively, and the bottom of the lifting device is detachably connected to the base, so that the lifting device can simultaneously drive the mounting frame and the Y-axis moving platform to move in the vertical direction. When inspecting the side tower base of the silicon wafer, the lifting device can simultaneously lift the mounting frame and the Y-axis moving platform, so that the microscope body is lifted as a whole to provide space for the silicon wafer to be placed vertically.

[0026] (2) The inserting table can be detachably mounted on the base. When inspecting the side tower base of the silicon wafer, install the inserting table on the base and set the inserting table to correspond to the lens assembly. The inserting table is located directly below the lens assembly. Place the silicon wafer vertically on the inserting table. You can observe the side tower base of the silicon wafer without breaking the silicon wafer to avoid loss. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0028] Figure 1 It is a structural schematic diagram of a microscope in the prior art;

[0029] Figure 2 This is a schematic structural diagram of a height-adjustable microscope in the present utility model;

[0030] Figure 3 This is a schematic structural diagram of a height-adjustable microscope in the present utility model;

[0031] Figure 4 This is a schematic structural diagram of a height-adjustable microscope in the present utility model;

[0032] In the picture:

[0033] 1-lens assembly, 2-mounting frame, 3-object loading platform, 4-X-axis moving platform, 5-Y-axis moving platform, 501-first guide hole, 6-base, 601-first positioning hole, 602-second positioning hole, 7-lifting device, 701-electric cylinder, 702-first connecting piece, 703-second connecting piece, 704-guide rod, 8-insertion table, 801-positioning plate, 802-clamping plate, 803-socket, 804-positioning column, 805-boss, 806-slide groove, 807-slide bar, 808-cushion layer. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the utility model for protection, but merely represents the selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0035] Please refer to Figures 2 to 4, this embodiment provides a height-adjustable microscope, which includes a microscope body, which includes a lens assembly 1, a mounting frame 2, a loading platform 3, an X-axis moving platform 4 and a Y-axis moving platform 5. The X-axis moving platform 4 is mounted on the Y-axis moving platform 5 and can move along the Y direction on the Y-axis moving platform 5. The loading platform 3 is mounted on the X-axis moving platform 4 and can move along the X direction on the X-axis moving platform 4. The position of the loading platform 3 is adjusted by the Y-axis moving platform 5 and the X-axis moving platform 4. The lens assembly 1 is mounted on the mounting frame 2 and is set downward. The lower end of the mounting frame 2 is fixedly connected to the Y-axis moving platform 5. When the object to be inspected needs to be placed on the loading platform 3, the loading platform 3 can be adjusted to a position directly below the lens assembly 1. When inspecting the side tower base of the silicon wafer, the loading platform 3 can be adjusted to a position away from the lens assembly 1 to provide installation space for the inserting table 8. The microscope also includes a base 6, and a lifting device 7 and an inserting table 8 arranged between the base 6 and the microscope body. The top of the lifting device 7 is detachably connected to the mounting frame 2 and the Y-axis movable platform 5 respectively, and the bottom of the lifting device 7 is detachably connected to the base 6, so that the lifting device 7 can simultaneously drive the mounting frame 2 and the Y-axis movable platform 5 to move in the vertical direction. When inspecting the side tower base of the silicon wafer, the mounting frame 2 and the Y-axis movable platform 5 can be lifted up at the same time by the lifting device 7, so that the microscope body is lifted up as a whole to provide space for the silicon wafer to be placed vertically. The inserting table 8 is detachably mounted on the base 6. When inspecting the side tower base of the silicon wafer, the inserting table 8 is mounted on the base 6, and the inserting table 8 is set corresponding to the lens assembly 1, and the inserting table 8 is located directly below the lens assembly 1. The silicon wafer is placed vertically on the inserting table 8. The side tower base of the silicon wafer can be observed without breaking the silicon wafer, thus avoiding loss.

[0036] As a preferred embodiment, the lifting device 7 includes several electric cylinders 701. The cylinder body of each electric cylinder 701 is detachably connected to the base 6, and the push rod of each electric cylinder 701 is detachably connected to the mounting frame 2 or the Y-axis movable platform 5. The electric cylinders 701 can be used to lift the microscope body as a whole. A first connecting piece 702 is fixed to the bottom of the cylinder body of each electric cylinder 701, and each first connecting piece 702 is detachably connected to the base 6 via a first screw. A second connecting piece 703 is fixed to the top of the push rod of each electric cylinder 701, and each second connecting piece 703 is detachably connected to the lower surface of the mounting frame 2 or the lower surface of the Y-axis movable platform 5 via a second screw.

[0037] As a preferred embodiment, the base 6 is provided with a plurality of evenly spaced first positioning holes 601; the lower surface of the mounting frame 2 and the lower surface of the Y-axis movable platform 5 are each provided with a plurality of vertically extending first guide holes 501; the lifting device 7 further includes a plurality of guide rods 704, the lower end of each guide rod 704 being removably mounted within a corresponding first positioning hole 601, and the upper end of each guide rod 704 being inserted into a corresponding first guide hole 501, thereby ensuring that the microscope body remains stable during movement. The lower end of each guide rod 704 is threadedly connected or interference-fitted with the corresponding first positioning hole 601 to prevent movement of the guide rod 704 when the microscope body is moved. The outer diameter of each guide rod 704 is equal to the inner diameter of the first guide hole 501, thereby ensuring that the microscope body remains stable during movement.

[0038] As a preferred embodiment, the wafer insertion platform 8 comprises a positioning plate 801 and two clamping plates 802. The positioning plate 801 is removably mounted on the base 6, and the two clamping plates 802 are movably mounted on the positioning plate 801. The two clamping plates 802 are arranged parallel to each other and have a socket 803 between them. The socket 803 is used to insert a vertically placed silicon wafer. The base 6 is provided with a plurality of evenly spaced second positioning holes 602. The lower surface of the positioning plate 801 is fixed with a plurality of positioning posts 804, each of which is inserted into a corresponding second positioning hole 602, facilitating the installation and removal of the wafer insertion platform 8 from the base 6. The top surface of positioning plate 801 is fixed with bosses 805, one on each side of clamping plate 802. The inner sides of the two bosses 805 are each provided with a slide groove 806, which extends along the width of the horizontal cross-section of clamping plate 802. The bottoms of the two clamping plates 802 are fixedly connected by a slide bar, the ends of which are inserted into the two slide grooves 806 in a one-to-one correspondence, allowing the two clamping plates 802 to move simultaneously along the slide grooves 806. A soft cushioning layer 808 is fixed to the inner surface of each clamping plate 802 to prevent damage to the silicon wafer during insertion.

[0039] The above is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, various modifications and variations of the present invention are possible. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of protection of the present invention.

Claims

1. A height-adjustable microscope, comprising a microscope body, the microscope body comprising a lens assembly, a mounting frame, a loading platform, an X-axis movable platform, and a Y-axis movable platform, the X-axis movable platform being mounted on the Y-axis movable platform and movable in the Y direction, the loading platform being mounted on the X-axis movable platform and movable in the X direction, the lens assembly being mounted on the mounting frame and arranged downward, the lower end of the mounting frame being fixedly connected to the Y-axis movable platform; characterized in that The microscope further comprises: base; A lifting device and an inserting table are arranged between the base and the microscope body. The top of the lifting device is detachably connected to the mounting frame and the Y-axis movable platform respectively, and the bottom of the lifting device is detachably connected to the base. The lifting device can simultaneously drive the mounting frame and the Y-axis movable platform to move in the vertical direction. The inserting table is detachably mounted on the base. The inserting table is arranged corresponding to the lens assembly and is used to insert sheet objects.

2. A height-adjustable microscope according to claim 1, characterized in that: The lifting device includes a plurality of electric cylinders, the cylinder body of each electric cylinder is detachably connected to the base, and the push rod of each electric cylinder is detachably connected to the mounting frame or the Y-axis moving platform.

3. A height-adjustable microscope according to claim 2, characterized in that: A first connecting piece is fixed to the bottom of the cylinder body of each electric cylinder, and each first connecting piece is detachably connected to the base via a first screw; A second connecting piece is fixed to the top of each push rod of the electric cylinder, and each second connecting piece is detachably connected to the lower surface of the mounting frame or the lower surface of the Y-axis moving platform through a second screw.

4. The height-adjustable microscope according to claim 1, wherein: The base is provided with a plurality of first positioning holes evenly spaced apart; A plurality of first guide holes extending vertically are respectively formed on the lower surface of the mounting frame and the lower surface of the Y-axis movable platform; The lifting device further includes a plurality of guide rods, the lower end of each guide rod being detachably mounted in the corresponding first positioning hole, and the upper end of each guide rod being inserted into the corresponding first guide hole.

5. A height-adjustable microscope according to claim 4, characterized in that: The lower end of each guide rod is respectively connected to the corresponding first positioning hole by thread connection or interference fit connection.

6. The height-adjustable microscope according to claim 4, wherein: The outer diameter of each guide rod is equal to the inner diameter of the first guide hole.

7. The height-adjustable microscope according to claim 1, wherein: The inserting platform includes a positioning plate and two clamping plates. The positioning plate is detachably mounted on the base. The two clamping plates are movably mounted on the positioning plate. The two clamping plates are arranged in parallel and have a socket in the middle.

8. The height-adjustable microscope according to claim 7, wherein: The base is provided with a plurality of second positioning holes evenly spaced apart; A plurality of positioning posts are fixed to the lower surface of the positioning plate, and each of the positioning posts is inserted into a corresponding second positioning hole.

9. The height-adjustable microscope according to claim 7, wherein: The upper surface of the positioning plate is fixed with bosses provided on both sides of the clamping plate, and the inner side surfaces of the two bosses are respectively provided with sliding grooves, and the sliding grooves extend along the width direction of the horizontal cross section of the clamping plate; The bottoms of the two clamping plates are fixedly connected via a slide bar, and the two ends of the slide bar are inserted into the two slide grooves in a one-to-one correspondence.

10. The height-adjustable microscope according to claim 7, wherein: Soft cushion layers are respectively fixed on the inner surfaces of the two splints.

Images