Silicon wafer carrier plate machining fixing clamp

Abstract

The utility model discloses a silicon wafer carrier plate processing fixing clamp, which is used for fixing a carrier plate adsorbed on an adsorption platform, positioning grooves are arranged at corners of the carrier plate, and the fixing clamp can be embedded into the positioning grooves. The deviation rectifying heads with the directions perpendicular to each other are embedded into the positioning grooves formed in the two sides of the carrier plate, positioning of the four corners of the carrier plate is achieved, eight deviation rectifying heads and positioning rods are arranged in one set, every two deviation rectifying heads and positioning rods position the four corners of the carrier plate respectively, deflection of the carrier plate can be avoided, and the deviation rectifying efficiency of the carrier plate is improved. Meanwhile, the spherical deviation correcting head and the first groove can conveniently position the carrier plate deviating from the position, the phenomenon of deviation and inclination is not prone to occurring, the carrier plate is limited within a small range, and the stability of the negative pressure at the negative pressure hole is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer carrier clamps, in particular to a silicon wafer carrier processing and fixing clamp. Background Art

[0002] The large solar cell carrier is composed of two aluminum frames and two carbon fiber frames fixed with screws to form a square outer frame. Then tungsten wire is embedded in the outer frame and tightened. Finally, 16 small carriers are embedded between the tungsten wires. Each small carrier is used to carry 4 silicon wafers.

[0003] During the processing of small carrier boards, the aluminum frame needs to be end-milled or circumferentially milled using a milling cutter. Due to the high precision requirements, the carrier board needs to be fixed. The traditional method only uses negative pressure to suck the aluminum plate. However, due to the space reserved for loading the solar panels, the aluminum plate has fewer force points. After the milling cutter contacts the aluminum plate, the aluminum plate is prone to displacement, resulting in poor clamping and fixing effect on the aluminum plate. Utility Model Content

[0004] The purpose of the utility model is to solve the above-mentioned problem and provide a silicon wafer carrier processing fixing fixture.

[0005] The technical solution of the present utility model is achieved as follows:

[0006] The utility model provides a silicon wafer carrier processing fixing fixture, the fixing fixture is used to fix the carrier adsorbed on the adsorption platform, the corners of the carrier are provided with positioning grooves, the fixing fixture can be embedded in the positioning grooves;

[0007] The fixing fixture comprises:

[0008] Positioning rods arranged in pairs and correction heads installed on the upper ends of the positioning rods, wherein the correction heads are spherical in structure and the positioning rods are cylindrical in structure;

[0009] The shape of the positioning groove is adapted to the shape of the fixing fixture;

[0010] The center of the correction head deviates from the center of the positioning rod, and the extension line of the center of the correction head and the center of the positioning rod is L1, and the connecting line of the centers of the two positioning rods is L2;

[0011] There is an acute angle α between L1 and L2, and the acute angle α is located on the same side of L2;

[0012] The positioning grooves are symmetrically arranged on the side of the carrier plate with the height line of the corner of the carrier plate as the symmetry axis.

[0013] The advantages or beneficial effects of the above technical solution include at least:

[0014] By embedding the correcting heads that are perpendicular to each other into the positioning grooves on both sides of the carrier plate, the positioning of the four corners of the carrier plate is achieved. The correcting heads and positioning rods are set in a group of eight, and every two correcting heads and positioning rods respectively position the four corners of the carrier plate, which can prevent the carrier plate from deflecting. At the same time, the spherical correcting head and the first groove can facilitate the positioning of the carrier plate that deviates from the position, and it is not easy to offset and tilt. The carrier plate is confined to a smaller range, which improves the stability of the negative pressure at the negative pressure hole. In addition, the fixing fixture of the present application occupies a small volume and is stable. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The accompanying drawings illustrate exemplary embodiments of the present invention and, together with the description thereof, are used to explain the principles of the present invention. These drawings are included to provide a further understanding of the present invention, and the drawings are included in and constitute a part of this specification.

[0016] Figure 1 A schematic diagram showing the position of the second fixing fixture of an embodiment of the present utility model is shown;

[0017] Figure 2 A schematic diagram showing the position of a first fixing fixture according to an embodiment of the present utility model is shown;

[0018] Figure 3 A schematic diagram of a positioning groove according to an embodiment of the present utility model is shown;

[0019] Figure 4 A schematic structural diagram of a second fixing fixture according to an embodiment of the present utility model is shown;

[0020] Figure 5 A schematic diagram showing the second fixing fixture of the embodiment of the utility model extending into the positioning slot;

[0021] Figure 6 A schematic diagram showing the relative positions of the deviation correcting head and the positioning rod according to an embodiment of the present utility model is shown;

[0022] Figure 7 A schematic diagram showing an acute angle α of an embodiment of the present utility model is shown;

[0023] Figure 8 A schematic diagram showing the moving direction of the movable plate according to an embodiment of the present utility model is shown;

[0024] Reference numerals: 10, carrier plate; 11, positioning groove; 111, first groove; 112, second groove; 113, third groove; 20, adsorption platform; 21, movable groove; 212, positioning hole; 30, fixing fixture; 31, positioning rod; 32, deviation correction head; 33, movable plate; 34, fixing member; 341, fixing plate; 342, fixing screw; 301, first fixing fixture; 302, second fixing fixture; DETAILED DESCRIPTION

[0025] The following describes embodiments of the present invention in more detail with reference to the accompanying drawings. Although certain embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be construed as limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the present invention. It should be understood that the accompanying drawings and embodiments of the present invention are for illustrative purposes only and are not intended to limit the scope of protection of the present invention.

[0026] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0027] It should be understood that the term "including" and its variations used in this document are open inclusions, that is, "including but not limited to". The term "based on" means "based at least in part on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one other embodiment"; the term "some embodiments" means "at least some embodiments". The relevant definitions of other terms will be given in the following description. It should be noted that the concepts of "first", "second", etc. mentioned in this utility model are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.

[0028] It should be noted that the modifications of "one" and "multiple" mentioned in the present invention are illustrative rather than restrictive. Those skilled in the art should understand that unless otherwise clearly indicated in the context, it should be understood as "one or more".

[0029] The names of the messages or information exchanged between multiple devices in the embodiments of the present invention are only used for illustrative purposes and are not used to limit the scope of these messages or information.

[0030] Reference Figure 1A fixture 30 for processing a silicon wafer carrier 10 is provided. The fixture 30 is used to fix the carrier 10 adsorbed on the adsorption platform 20. Positioning grooves 11 are provided at the corners of the carrier 10. The positioning grooves 11 are symmetrically arranged on the sides of the carrier 10 with the height line of the corners of the carrier 10 as the symmetry axis. The fixture 30 can be embedded in the positioning grooves 11. By positioning the corners of the carrier 10, the carrier 10 is prevented from being skewed or offset on the adsorption platform 20.

[0031] Among them, the fixing clamp 30 includes: positioning rods 31 arranged in pairs and a correcting head 32 installed at the upper end of the positioning rods 31, wherein the correcting head 32 is a spherical structure, the positioning rods 31 is a cylindrical structure, the shape of the positioning groove 11 is adapted to the shape of the fixing clamp 30, and the two fixing clamps 30 are a group.

[0032] Specifically, the positioning groove 11 includes: a first groove 111 for accommodating the correcting head 32, which is a spherical groove structure; a second groove 112 for accommodating the positioning rod 31, which is a cylindrical groove structure. If there is a deviation in the height direction of the carrier plate 10, when the correcting head 32 is fully embedded in the first groove 111, since the correcting head 32 cannot move upward, the carrier plate 10 with the height deviation will naturally move downward so that the correcting head 32 can be completely stuck in the first groove 111. After the correcting head 32 and the positioning rod 31 on both sides of the carrier plate 10 are respectively embedded in the first groove 111 and the second groove 112, the corresponding corners of the carrier plate 10 are positioned. The carrier plate 10 is not easy to deflect or displace, thereby ensuring the processing accuracy. If the four corners of the carrier plate 10 are positioned by the fixing fixture 30, it can be ensured that the carrier plate 10 will not rotate or jump during the processing;

[0033] Further improvement based on the above structure: the center of the correction head 32 deviates from the center of the positioning rod 31, such as Figure 6 As shown, the extension line of the center of the correcting head 32 and the center of the positioning rod 31 is L1, and the center of the correcting head 32 and the center of the positioning rod 31 are on the same horizontal line, and the connection line of the centers of the two positioning rods 31 is L2; there is an acute angle α between L1 and L2, the acute angle α is on the same side of L2, and the angle α is 45° and the intersection angle of the two L1 is a right angle. Since the two adjacent sides of the carrier 10 are perpendicular to each other, such a design can ensure that the direction of the correcting head 32 of the fixing fixture 30 in a group deviates from the positioning rod 31 and is always toward the side of the carrier 10, so as to increase the contact area between the correcting head 32 and the carrier 10.

[0034] As a further improvement of the above structure:

[0035] The fixing fixture 30 includes a first fixing fixture 301 and a second fixing fixture 302;

[0036] The first fixing fixture 301 is fixed to the adsorption platform 20, such as Figure 2 As shown;

[0037] The second fixing fixture 302 is movably mounted on the adsorption platform 20. Figure 1 As shown, the second fixing fixture 302 further includes:

[0038] The movable plate 33 is movably mounted on the adsorption platform 20, and the positioning rod 31 is fixedly mounted on the movable plate 33. The moving direction of the movable plate 33 forms an angle β with the edge of the carrier plate 10, wherein the angle β is 135°. Figure 7 As shown, the movable plate 33 drives the second fixing fixture 302 to move back and forth; to sum up, when installing the carrier 10, first insert the carrier 10 into the first fixing fixture 301 close to the positioning groove 11 of the first fixing fixture 301, so that the first fixing fixture 301 is inserted into the positioning groove 11 at the corresponding position, and then move the movable plate 33. The movable plate 33 drives the positioning column and the correcting head 32 on the second fixing fixture 302 to be inserted into the positioning groove 11 at the corresponding position. When the three second fixing fixtures 302 at the other three corners are all inserted into the positioning groove 11, the carrier 10 can be positioned on the adsorption platform 20.

[0039] Based on the above structure, the positioning groove 11 further includes: a third groove 113, which is used to avoid the correction head 32 entering the positioning groove 11 from the outside of the carrier plate 10, so as to prevent the correction head 32 from being blocked by the corresponding part of the carrier plate 10 during the process of entering the first groove 111. Figure 5 shown.

[0040] The adsorption platform 20 is provided with a movable groove 21, and the movable plate 33 is movably embedded in the movable groove 21. The movable groove 21 is provided with a positioning hole 212;

[0041] The second fixing fixture 302 further includes a fixing part 34 including: a fixing plate 341, one end of which is welded to the movable plate 33 and has a threaded hole; a fixing screw 342, which is threadedly matched with the threaded hole. When the threaded hole and the positioning hole 212 correspond to each other, the fixing screw 342 can be extended into the positioning hole 212 through the threaded hole to fix the movable plate 33. After the correction head 32 and the positioning rod 31 of the second fixing fixture 302 are embedded in the first groove 111 and the second groove 112, the user can fix the position of the movable plate 33 with screws.

[0042] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.

[0043] Those skilled in the art will appreciate that the above embodiments are merely for the purpose of illustrating the present invention and are not intended to limit the scope of the present invention. Other variations or modifications may be made based on the above disclosure, and such variations or modifications are still within the scope of the present invention.

Claims

1. A silicon wafer carrier processing fixture, characterized by: The fixing fixture (30) is used to fix the carrier plate (10) adsorbed on the adsorption platform (20), and the corners of the carrier plate (10) are provided with positioning grooves (11), and the fixing fixture (30) can be embedded in the positioning grooves (11); The fixing fixture (30) comprises: Positioning rods (31) are arranged in pairs, and a correction head (32) is installed on the upper end of the positioning rods (31), wherein the correction head (32) is a spherical structure and the positioning rods (31) is a cylindrical structure; The shape of the positioning groove (11) is adapted to the shape of the fixing fixture (30); The center of the correction head (32) deviates from the center of the positioning rod (31), and the extension line of the center of the correction head (32) and the center of the positioning rod (31) is L1, and the connecting line of the centers of the two positioning rods (31) is L2; There is an acute angle α between L1 and L2, and the acute angle α is located on the same side of L2; The positioning groove (11) is symmetrically opened on the side of the carrier plate (10) with the height line of the corner of the carrier plate (10) as the symmetry axis.

2. The silicon wafer carrier processing and fixing fixture according to claim 1, characterized in that: The fixing fixture (30) comprises a first fixing fixture (301) and a second fixing fixture (302); The first fixing fixture (301) is fixed to the adsorption platform (20); The second fixing fixture (302) is movably mounted on the adsorption platform (20), and the second fixing fixture (302) further comprises: A movable plate (33) is movably mounted on the adsorption platform (20), the positioning rod (31) is fixedly mounted on the movable plate (33), and an angle β is formed between the moving direction of the movable plate (33) and the edge of the carrier plate (10); A fixing member (34) is used to fix the movable plate (33) on the adsorption platform (20).

3. The silicon wafer carrier processing and fixing fixture according to claim 2, characterized in that: The angle α is 45°, and the intersection angle of the two L1 is a right angle.

4. The silicon wafer carrier processing and fixing fixture according to claim 2, characterized in that: The angle β is 135°.

5. The silicon wafer carrier processing and fixing fixture according to claim 2, characterized in that: The positioning groove (11) comprises: A first groove (111) for accommodating the deviation-correcting head (32) is in a spherical groove structure; The second groove (112) for accommodating the positioning rod (31) is in a cylindrical groove structure.

6. The silicon wafer carrier processing and fixing fixture according to claim 4, characterized in that: The positioning groove (11) further comprises: The third groove (113) is used to prevent the deviation-correcting head (32) from entering the positioning groove (11) from the outside of the carrier plate (10).

7. The silicon wafer carrier processing and fixing fixture according to claim 5, characterized in that: The adsorption platform (20) is provided with a movable groove (21), the movable plate (33) is movably embedded in the movable groove (21), and the movable groove (21) is provided with a positioning hole (212); The fixing member (34) comprises: A fixed plate (341), one end of which is welded to the movable plate (33) and is provided with a threaded hole; The fixing screw (342) is threadedly matched with the threaded hole. When the threaded hole and the positioning hole (212) correspond to each other, the fixing screw (342) can extend into the positioning hole (212) through the threaded hole.

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