Main heater splicing surface non-threaded hole structure

Abstract

The utility model relates to the technical field of single crystal furnace main heaters, in particular to a main heater splicing surface non-threaded hole structure which comprises a connecting assembly, the connecting assembly comprises a main heater heating ring and two foot plates, two splicing plates are symmetrically arranged on the lower surface of the main heater heating ring, and the two foot plates are symmetrically arranged on the lower surface of the main heater heating ring. Splicing grooves are formed in the upper surfaces of the foot plates. During working, the splicing plates are in butt joint with the splicing grooves, the connecting blocks are inserted into the connecting grooves, the foot plates support the heating ring of the main heater, and the inner side walls of the connecting grooves and the outer side walls of the connecting blocks are bonded through graphite glue, so that threaded-hole-free connection between the heating ring of the main heater and the splicing surfaces of the foot plates is achieved; the problems of poor contact, ignition, cracks and the like caused by the fact that a traditional main heater is connected through carbon-carbon screws are solved, the abnormal damage rate of the main heater is reduced, the service life of the main heater is prolonged, and therefore the use cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of main heaters for single crystal furnaces, in particular to a main heater splicing surface structure without threaded holes. Background Art

[0002] A single crystal furnace is a device that uses a heater to melt silicon materials in an inert gas environment and produce single crystal silicon. The main heater is the main equipment in the single crystal furnace and provides the main heat source for melting silicon materials.

[0003] In order to reduce the production cost of single crystal silicon wafers and achieve grid parity, the size of single crystal furnaces and large-scale thermal fields have been changed at a faster pace. The size of the main heater and the distance between the main electrodes have also increased accordingly, and the deformation of the main heater has also increased accordingly. Traditional main heaters generally use carbon-carbon screws to connect the main heater and the foot plate when in use. Due to the inconsistent expansion coefficients of carbon-carbon screws and graphite heaters, after a period of use, poor contact, sparks, and cracks occur at the joints between the main foot plate and the heating coil, and the heating coil becomes abnormally red and withdraws, which reduces the service life of the main heater. For this reason, a main heater splicing surface without threaded holes structure is proposed. Utility Model Content

[0004] The purpose of the present utility model is to provide a main heater joint surface structure without threaded holes, so as to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a main heater splicing surface non-threaded hole structure, including a connecting assembly, the connecting assembly including a main heater heating coil and a foot plate, the lower surface of the main heater heating coil is symmetrically provided with two splicing plates, the number of the foot plates is two, the upper surface of the foot plate is provided with a splicing groove, the outer side wall of the splicing plate is symmetrically provided with two connecting grooves, the inner side wall of the splicing groove is symmetrically provided with two connecting blocks, and the inner side wall of the connecting groove and the outer side wall of the connecting block are bonded with graphite glue.

[0006] As a further preferred embodiment of the present technical solution: two positioning blocks are symmetrically provided on the lower surface of the splicing plate.

[0007] As a further preferred embodiment of the present technical solution: two positioning grooves are symmetrically provided on the lower surface of the splicing groove.

[0008] As a further preferred embodiment of the present technical solution: a sliding groove is provided on the lower surface of the foot plate, and a sliding plate is slidably connected to the inner side wall of the sliding groove.

[0009] As a further preferred embodiment of the present technical solution: a bottom plate is provided at the bottom of the slide plate, and a mounting hole is provided on the lower surface of the bottom plate.

[0010] As a further preferred embodiment of the present technical solution: a pin rod is threadedly connected to the bottom of the outer side wall of the foot plate, and pin holes are evenly formed on the outer side wall of the skateboard.

[0011] As a further preferred embodiment of the present technical solution: a knob is installed at one end of the pin away from the foot plate.

[0012] Compared with the prior art, the beneficial effects of the present invention are:

[0013] When the utility model is in operation, the splicing plate is docked with the splicing groove, the connecting block is inserted into the connecting groove, and the foot plate supports the heating coil of the main heater. Since the inner wall of the connecting groove and the outer wall of the connecting block are bonded with graphite glue, a threadless hole connection is achieved between the heating coil of the main heater and the splicing surface of the foot plate, avoiding the problems of poor contact, sparking, cracks, etc. caused by the traditional main heater connected by carbon-carbon screws, reducing the abnormal damage rate of the main heater, and increasing the service life of the main heater, thereby reducing the cost of use. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the main structure of the utility model;

[0015] Figure 2 This is a structural diagram of the connecting groove and the positioning block in the utility model;

[0016] Figure 3 This is a structural diagram of the connecting block and the positioning groove in the utility model;

[0017] Figure 4 This is a schematic diagram of the bottom-up structure of the present invention;

[0018] Figure 5 This is an enlarged view of the structure of area A of the present utility model.

[0019] In the figure: 10, connecting assembly; 11, main heater heating coil; 12, splicing plate; 13, foot plate; 14, splicing groove; 15, connecting groove; 16, connecting block; 17, positioning block; 18, positioning groove; 19, slide groove; 110, slide plate; 111, bottom plate; 112, mounting hole; 113, pin rod; 114, pin hole; 115, knob. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0021] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," "connected," and "installed" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and can refer to internal communication between two components or the interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0022] See also Figure 1-5 The utility model provides a technical solution: a main heater splicing surface without threaded hole structure, including a connecting assembly 10, the connecting assembly 10 includes a main heater heating coil 11 and a foot plate 13, the lower surface of the main heater heating coil 11 is symmetrically provided with two splicing plates 12, the number of the foot plates 13 is two, the upper surface of the foot plate 13 is provided with a splicing groove 14, the outer side wall of the splicing plate 12 is symmetrically provided with two connecting grooves 15, the inner side wall of the splicing groove 14 is symmetrically provided with two connecting blocks 16, the inner side wall of the connecting groove 15 is symmetrical with the connecting block 1 6 are bonded with graphite glue; the splicing plate 12 is docked with the splicing groove 14, and the connecting block 16 is inserted into the connecting groove 15. The foot plate 13 supports the main heater heating coil 11. Since the inner wall of the connecting groove 15 and the outer wall of the connecting block 16 are bonded with graphite glue, a threadless hole connection is achieved between the main heater heating coil 11 and the splicing surface of the foot plate 13, avoiding problems such as poor contact, sparking, and cracks caused by the traditional main heater connected with carbon-carbon screws, thereby reducing the abnormal damage rate of the main heater.

[0023] In this embodiment, specifically, two positioning blocks 17 are symmetrically provided on the lower surface of the splicing plate 12 , so that the positioning blocks 17 and the splicing plate 12 can move synchronously.

[0024] In this embodiment, specifically: two positioning grooves 18 are symmetrically opened on the lower surface of the splicing groove 14; when splicing the main heater heating coil 11 and the foot plate 13, by inserting the positioning block 17 into the positioning groove 18, the main heater heating coil 11 and the foot plate 13 can be quickly and accurately positioned.

[0025] In this embodiment, specifically: a sliding groove 19 is formed on the lower surface of the foot plate 13, and a slide plate 110 is slidably connected to the inner side wall of the sliding groove 19, so that the slide plate 110 can slide up and down.

[0026] In this embodiment, specifically: a bottom plate 111 is provided at the bottom of the slide plate 110, and a mounting hole 112 is opened on the lower surface of the bottom plate 111; the bottom plate 111 can be fixed inside the single crystal furnace by means of the mounting hole 112 and the external screws.

[0027] In this embodiment, specifically: the bottom of the outer wall of the foot plate 13 is threadedly connected with a pin rod 113, and the outer wall of the slide plate 110 is evenly provided with pin holes 114; by moving the foot plate 13 up and down and tightening the pin rod 113 so that the pin rod 113 is inserted into the pin hole 114, the height of the foot plate 13 can be adjusted to adapt to the installation environment inside different single crystal furnaces.

[0028] In this embodiment, specifically: a knob 115 is installed at one end of the pin rod 113 away from the foot plate 13 to facilitate the rotation of the pin rod 113.

[0029] The working principle of the present invention is: the splicing plate 12 is docked with the splicing groove 14, the connecting block 16 is inserted into the connecting groove 15, and the foot plate 13 supports the heating coil 11 of the main heater. Since the inner wall of the connecting groove 15 and the outer wall of the connecting block 16 are bonded with graphite glue, a threadless hole connection is achieved between the heating coil 11 of the main heater and the splicing surface of the foot plate 13, avoiding the problems of poor contact, sparking, cracks, etc. caused by the traditional main heater connected by carbon-carbon screws, reducing the abnormal damage rate of the main heater, and increasing the service life of the main heater, thereby reducing the cost of use.

[0030] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A main heater splicing surface without threaded holes structure, comprising a connecting assembly (10), characterized in that: The connecting assembly (10) includes a main heater heating coil (11) and a foot plate (13), the lower surface of the main heater heating coil (11) is symmetrically provided with two splicing plates (12), the number of the foot plates (13) is two, the upper surface of the foot plate (13) is provided with a splicing groove (14), the outer side wall of the splicing plate (12) is symmetrically provided with two connecting grooves (15), the inner side wall of the splicing groove (14) is symmetrically provided with two connecting blocks (16), and the inner side wall of the connecting groove (15) and the outer side wall of the connecting block (16) are bonded with graphite glue; Two positioning blocks (17) are symmetrically provided on the lower surface of the splicing plate (12); Two positioning grooves (18) are symmetrically formed on the lower surface of the splicing groove (14).

2. The main heater joint surface non-threaded hole structure according to claim 1, characterized in that: A sliding groove (19) is provided on the lower surface of the foot plate (13), and a sliding plate (110) is slidably connected to the inner side wall of the sliding groove (19).

3. The main heater joint surface non-threaded hole structure according to claim 2, characterized in that: A bottom plate (111) is provided at the bottom of the slide plate (110), and a mounting hole (112) is provided on the lower surface of the bottom plate (111).

4. The main heater joint surface non-threaded hole structure according to claim 2, characterized in that: The bottom of the outer wall of the foot plate (13) is threadedly connected to a pin rod (113), and the outer wall of the slide plate (110) is evenly provided with pin holes (114).

5. The main heater joint surface non-threaded hole structure according to claim 4, characterized in that: A knob (115) is mounted on one end of the pin rod (113) away from the foot plate (13).

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