Encircling type air floating workbench for detecting Z axis of silicon carbide

Abstract

The utility model discloses a surrounding type air floating workbench for detecting a Z axis of silicon carbide, relates to the technical field of silicon carbide detection, and solves the problems that the movement precision and stability of a detection device need to be ensured and the requirement of high-precision detection needs to be met in the prior art. Comprising two sets of main air floating sliding blocks and two sets of auxiliary supports, and the two sets of main air floating sliding blocks and the two sets of auxiliary supports are sequentially connected through connecting columns. A detector is connected to the outer side wall of the main air floating sliding block, a plurality of positive air holes and a plurality of pressure equalizing grooves are formed in the inner side wall of the main air floating sliding block, the pressure equalizing grooves are formed between the positive air holes, a vacuum cavity is formed in the main air floating sliding block, negative air holes are formed in the vacuum cavity, and the negative air holes are communicated with the pressure equalizing grooves. The negative air hole is formed in the inner side wall of the main air floating sliding block; and a plurality of auxiliary air floating cushions are connected to the interiors of the auxiliary brackets. The device has the beneficial effects that the suspension stability is improved, and the stable operation of the air-floating workbench can be assisted.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon carbide detection, in particular to an embracing air-floating workbench for detecting the Z axis of silicon carbide. Background Art

[0002] Silicon carbide is a high-performance ceramic material with excellent properties such as high hardness, high strength, high thermal stability, high temperature resistance, and chemical stability. Its hardness is second only to diamond and cubic boron nitride, and it has excellent wear resistance. It also has high yield strength and tensile strength, capable of withstanding high loads and mechanical stresses. Its excellent thermal stability enables stable operation in high-temperature environments, with an operating temperature limit exceeding 600°C. Furthermore, its wide bandgap and high electron mobility make it suitable for high-power and high-temperature applications. These properties make silicon carbide an ideal material for manufacturing high-precision, high-performance components.

[0003] With the continuous development of the manufacturing industry, the precision requirements for the silicon carbide Z-axis will become increasingly stringent, which is directly related to the precision and quality of the product. The current structure of a silicon carbide Z-axis detection device generally resembles that described in patent application number "CN202311091201.2," which includes an air-bearing slide. The slide comprises a main air-bearing portion, with side air-bearing portions and an adjustment air-bearing portion on the front and rear sides of the main air-bearing portion, respectively. Several air-bearing holes are formed in the main air-bearing portion, the side air-bearing portion, and the adjustment air-bearing portion. A mounting platform is installed on the right side wall of the air-bearing slide. Testing instruments, such as electronic levels or laser interferometers, are mounted on the mounting platform. This platform performs all-round testing of the entire silicon carbide Z-axis as the air-bearing slide rises and falls. However, the air-bearing mechanism of this invention is simple. Due to the high hardness and stability of silicon carbide materials, testing requires ensuring the motion accuracy and stability of the detection device to meet the requirements of high-precision testing.

[0004] Therefore, the present invention proposes an embracing air-floating workbench for detecting the Z-axis of silicon carbide, which is used to solve the above problems. Utility Model Content

[0005] The purpose of the utility model is to provide an embracing air-floating workbench for detecting the Z-axis of silicon carbide, which is used to solve the problem in the prior art that the motion accuracy and stability of the detection device must be ensured to meet the needs of high-precision detection.

[0006] The technical solution adopted by the utility model to solve its technical problems is:

[0007] A surrounding air-floating workbench for detecting the Z-axis of silicon carbide includes two groups of main air-floating sliders and two groups of auxiliary brackets. The two groups of main air-floating sliders and auxiliary brackets are connected in sequence through connecting columns, and the main air-floating sliders and the auxiliary brackets are arranged opposite to each other; the outer wall of the main air-floating slider is connected to a detector, and the inner wall of the main air-floating slider is provided with a plurality of positive air holes and a plurality of pressure-equalizing grooves, and the pressure-equalizing grooves are provided between the positive air holes. A vacuum cavity is provided inside the main air-floating slider, and negative air holes are provided in the vacuum cavity. The negative air holes are opened on the inner wall of the main air-floating slider; the interior of the auxiliary bracket is connected to a plurality of auxiliary air-floating pads.

[0008] By adopting the above technical solution, the stability of the suspension is improved, which can assist the air flotation workbench to operate smoothly.

[0009] Furthermore, the main air-floating slider and the connecting column are fixedly connected by bolts; and the auxiliary bracket and the connecting column are fixedly connected by bolts.

[0010] By adopting the above technical solution, a firm connection between the main air-floating slider, the auxiliary bracket and the connecting column can be ensured, and the workbench can withstand large external forces and vibrations, thereby maintaining the overall stability of the workbench.

[0011] Furthermore, a plurality of threaded holes are provided on the outer side walls of the main air-floating slider and the auxiliary bracket.

[0012] Furthermore, the detector is connected to the outer side wall of the main air-floating slider via a mounting platform, and the mounting platform is detachably connected to the main air-floating slider.

[0013] By adopting the above technical solution, it is easy to disassemble and assemble the special inspection tool. During inspection, the main air-floating slider and the auxiliary bracket can drive the special inspection tool to perform precise inspection on the Z-axis of silicon carbide in a vertical state.

[0014] Furthermore, a plurality of limiting rods are connected to the top of the mounting platform along the circumference of the detector.

[0015] By adopting the above technical solution, the position of the detector can be accurately fixed to prevent movement during operation, thereby ensuring the accuracy of detection.

[0016] Furthermore, the upper ends of the main air-floating slider and the auxiliary bracket are respectively connected to a suspension arm, the two groups of suspension arms are symmetrically arranged, and the tops of the suspension arms are fixedly connected to a suspension ring body.

[0017] By adopting the above technical solution, it is possible to ensure that the workbench is more balanced when subjected to force, thereby enhancing the stability of the workbench.

[0018] Furthermore, the boom is detachably connected to the main air-floating slider; and the boom is detachably connected to the auxiliary bracket.

[0019] By adopting the above technical solution, the workbench can be made more modular, and can be quickly reorganized according to different work requirements during the production process, with higher flexibility.

[0020] Furthermore, the main air-floating slider and the auxiliary bracket are both made of high-strength aluminum alloy.

[0021] By adopting the above technical solution, it has the advantages of high precision, light weight, etc., and is convenient for vertical reciprocating motion.

[0022] In summary, compared with the prior art, the present invention has the following beneficial effects:

[0023] 1. The design of the pressure equalizing tank of the utility model helps to balance the pressure in the air flotation layer and improve the stability of the suspension; each group of main air flotation sliders has two independent positive air holes and negative air holes, which do not interfere with each other and can be ventilated independently, ensuring the accuracy of the detection of a single side in the vertical direction of the silicon carbide Z axis. The interior of the auxiliary bracket is connected to multiple auxiliary air flotation pads, and compressed air is introduced to form an air film to assist the smooth operation of the air flotation workbench.

[0024] 2. The utility model can detect the accuracy of different vertical directions of the silicon carbide Z axis, and can achieve high-precision detection by supplying air to the detection route separately. Then, based on the detection results, it can be judged whether the silicon carbide Z axis meets the predetermined quality standards. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a vertical schematic diagram of the utility model Figure 1 ;

[0026] Figure 2 This is a vertical schematic diagram of the utility model Figure 2 ;

[0027] Figure 3 This is the main view of the utility model;

[0028] Figure 4 It is a top view of the utility model;

[0029] Figure 5 for Figure 4 AA cross-sectional diagram;

[0030] Figure 6 for Figure 4 BB cross-sectional diagram;

[0031] In the figure: 1. Main air flotation slider; 2. Auxiliary bracket; 3. Connecting column; 4. Positive air hole; 5. Pressure equalizing tank; 6. Vacuum chamber; 7. Negative air hole; 8. Auxiliary air flotation pad; 9. Threaded hole; 10. Detector; 11. Mounting platform; 12. Limit rod; 13. Hanging arm; 14. Lifting ring. DETAILED DESCRIPTION

[0032] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0033] In this application, terms such as "upper," "inner," "outer," and "middle" indicate positions or locations based on those shown in the accompanying drawings. These terms are intended to better describe this application and its embodiments and are not intended to limit the devices, elements, or components indicated to specific positions, or to their construction or operation in a specific position.

[0034] A wraparound air-floating workbench for testing the Z-axis of silicon carbide (SiC) includes two sets of main air-floating sliders 1 and two sets of auxiliary brackets 2. The two sets of main air-floating sliders 1 and auxiliary brackets 2 are sequentially connected via connecting columns 3. The main air-floating sliders 1 and connecting columns 3 are each fixedly connected by bolts; the auxiliary brackets 2 and connecting columns 3 are also fixedly connected by bolts. Both the main air-floating sliders 1 and auxiliary brackets 2 are constructed of high-strength aluminum alloy. The main air-floating sliders 1 and auxiliary brackets 2 are positioned opposite each other. Multiple threaded holes 9 are defined on the outer walls of each of the main air-floating sliders 1 and auxiliary brackets 2.

[0035] A detector 10 is connected to the outer wall of the main air-floating slider 1. This detector 10 is attached to the outer wall of the main air-floating slider 1 via a mounting platform 11, which is detachably connected to the main air-floating slider 1. During testing, the accuracy of the silicon carbide's Z-axis in different vertical directions can be checked. High-precision testing can be achieved by supplying air to separate test paths. Based on the test results, it can be determined whether the silicon carbide's Z-axis meets predetermined quality standards. Multiple limit rods 12 are connected to the top of the mounting platform 11, along the perimeter of the detector 10.

[0036] The inner wall of the main air float slider 1 is provided with multiple positive air holes 4 and multiple pressure equalizing grooves 5, with pressure equalizing grooves 5 located between the positive air holes 4. A vacuum chamber 6 is defined within the main air float slider 1, which contains negative air holes 7. The negative air holes 7 are located on the inner wall of the main air float slider 1. The inner wall of the main air float slider 1 is a precisely machined surface. Multiple positive air holes 4 and multiple pressure equalizing grooves 5 are defined on the inner wall of the main air float slider 1. Pressure equalizing grooves 5 are located between the positive air holes 4. When compressed air is introduced, a rigid air film is formed on this surface, causing the air float block to "float." The design of the pressure equalizing grooves 5 helps balance the pressure within the air float layer, improving the stability of the suspension. The main air-floating slider 1 is internally provided with a vacuum chamber 6, which is equipped with negative air holes 7. These holes are located on the inner wall of the main air-floating slider 1. Adjusting the negative air holes 7 allows for a desired balance between ejected and sucked air. Consequently, through the dual effects of air flotation and vacuum, the main air-floating slider 1 is capable of nearly frictionless, high-precision motion along the vertical Z-axis of the silicon carbide. Operation is frictionless, heat-free, pollution-free, and free of creeping, resulting in easy maintenance and a long service life. The vacuum chamber 6 collects positively scattered gas, and the resulting air film acts to average out errors. Each set of main air-floating sliders 1 has two independent sets of positive air holes 4 and negative air holes 7, which do not interfere with each other and allow for independent ventilation, ensuring accurate testing of a single side of the silicon carbide vertical Z-axis. Multiple auxiliary air-floating pads 8 are connected to the interior of each auxiliary bracket 2. Compressed air is introduced into the pads, forming an air film that assists in the smooth operation of the air-floating workbench.

[0037] The upper ends of the main air-floating slider 1 and the auxiliary support 2 are each connected to a boom 13. The two booms 13 are symmetrically arranged, and a lifting ring 14 is fixedly attached to the top of each boom 13. The lifting ring 14 is connected to a lifting mechanism, enabling the air-floating workbench to be moved. The boom 13 is detachably connected to the main air-floating slider 1 and the auxiliary support 2. This makes the workbench more modular, allowing for rapid reconfiguration during production to meet varying work requirements, providing greater flexibility.

[0038] The working process of this utility model is:

[0039] First, the Z-axis of the silicon carbide to be tested is placed at the specified position, and then the position and angle of the detector 10 are adjusted to ensure that it can accurately align with the Z-axis of the silicon carbide for testing. Then, the lifting ring 14 fixed to the top of the boom 13 is connected to the lifting device to move the position of the air flotation workbench.

[0040] The inner wall of the main air-floating slider 1 is a precisely machined surface. It is equipped with multiple positive air holes 4 and multiple pressure-equalizing grooves 5. Pressure-equalizing grooves 5 are located between the positive air holes 4. When compressed air is introduced, this surface forms an air film of a certain rigidity, causing the air-floating block to "float." The design of the pressure-equalizing grooves 5 helps balance the pressure within the air-floating layer, improving the stability of the suspension. A vacuum chamber 6 is defined within the main air-floating slider 1, which contains negative air holes 7. These holes are located on the inner wall of the main air-floating slider 1. Adjusting these holes can achieve the desired balance between ejected and sucked air. Consequently, through the dual effects of "air flotation" and "vacuum," the main air-floating slider 1 achieves nearly frictionless, high-precision motion along the vertical Z-axis of the silicon carbide. Operation is frictionless, heat-free, pollution-free, and free of creeping, making it easy to maintain and durable. The vacuum chamber 6 collects the positively scattered gas, and the air film acts to equalize errors. Each set of main air-floating sliders 1 has two independent sets of positive air holes 4 and negative air holes 7, which do not interfere with each other and can be ventilated independently, ensuring the accuracy of testing a single side of the vertical direction of the silicon carbide Z-axis. Multiple auxiliary air-floating pads 8 are connected to the interior of the auxiliary brackets 2, which are fed with compressed air to form an air film to assist in the smooth operation of the air-floating workbench, thereby activating the detector 10 and starting to test the silicon carbide Z-axis. During the testing process, the accuracy of the silicon carbide Z-axis in different vertical directions can be tested with high precision by supplying air to the test route air path separately. Based on the test results, it can be determined whether the silicon carbide Z-axis meets the predetermined quality standards.

Claims

1. An embracing air-floating workbench for detecting the Z-axis of silicon carbide, comprising two sets of main air-floating sliders (1) and two sets of auxiliary brackets (2), characterized in that: The two groups of main air-floating sliders (1) and auxiliary brackets (2) are connected in sequence through connecting columns (3), and the main air-floating sliders (1) and the auxiliary brackets (2) are arranged opposite to each other; the outer wall of the main air-floating slider (1) is connected to a detector (10), the inner wall of the main air-floating slider (1) is provided with a plurality of positive air holes (4) and a plurality of equalizing pressure grooves (5), and the equalizing pressure grooves (5) are provided between the positive air holes (4); the interior of the main air-floating slider (1) is provided with a vacuum cavity (6), and the vacuum cavity (6) is provided with negative air holes (7), and the negative air holes (7) are provided on the inner wall of the main air-floating slider (1); the interior of the auxiliary bracket (2) is connected to a plurality of auxiliary air-floating pads (8).

2. The enveloping air-floating workbench for detecting the Z-axis of silicon carbide according to claim 1 is characterized in that: The main air-floating slider (1) and the connecting column (3) are fixedly connected via bolts; and the auxiliary bracket (2) and the connecting column (3) are fixedly connected via bolts.

3. The enveloping air-floating workbench for detecting the Z-axis of silicon carbide according to claim 2, characterized in that: Multiple threaded holes (9) are provided on the outer side walls of the main air-floating slider (1) and the auxiliary bracket (2).

4. The enveloping air-floating workbench for detecting the Z-axis of silicon carbide according to claim 3 is characterized in that: The detector (10) is connected to the outer side wall of the main air-floating slider (1) via a mounting platform (11), and the mounting platform (11) is detachably connected to the main air-floating slider (1).

5. The enveloping air-floating workbench for detecting the Z-axis of silicon carbide according to claim 4 is characterized in that: The top of the mounting platform (11) is connected to a plurality of limiting rods (12) along the circumference of the detector (10).

6. The enveloping air-floating workbench for detecting the Z-axis of silicon carbide according to claim 5, characterized in that: The upper ends of the main air-floating slider (1) and the auxiliary bracket (2) are respectively connected to a suspension arm (13), and the two groups of suspension arms (13) are symmetrically arranged. The tops of the suspension arms (13) are fixedly connected to a suspension ring body (14).

7. The enveloping air-floating workbench for detecting the Z-axis of silicon carbide according to claim 6, characterized in that: The suspension arm (13) is detachably connected to the main air-floating slider (1); and the suspension arm (13) is detachably connected to the auxiliary bracket (2).

8. The enveloping air-floating workbench for detecting the Z-axis of silicon carbide according to claim 7, characterized in that: The main air-floating slider (1) and the auxiliary bracket (2) are both made of high-strength aluminum alloy.

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