Vertical lifting deflection device and thin film deposition equipment

Abstract

The utility model relates to the technical field of coating equipment, in particular to a vertical lifting deflection device and thin film deposition equipment. The vertical lifting deflection device comprises a workbench and a film forming chamber arranged on the workbench, and the top of the film forming chamber is covered with a thin film deposition workpiece table. The workbench is further provided with a supporting frame, and the supporting frame is provided with a jacking assembly and a guiding assembly. The guide assembly comprises a guide column and a guide frame, a connecting plate connected with the guide column and the guide frame in a sliding mode is arranged on the thin film deposition workpiece table, the jacking assembly abuts against the connecting plate, and when the connecting plate slides to the top end of the guide frame, the connecting plate can deflect relative to the guide frame with the guide column as the circle center. By adopting the mode, the convenience of maintaining the thin film deposition workpiece table can be improved, the operation difficulty is reduced, and the safety during operation is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating equipment, in particular to a vertical lifting deflection device and thin film deposition equipment. Background Art

[0002] Thin film deposition is a critical step in semiconductor manufacturing. For example, chemical vapor deposition (CVD) or physical vapor deposition (PVD) is used to deposit materials such as metals, oxides, or nitrides onto silicon wafers to form circuits, gates, and insulating layers.

[0003] Current thin film deposition equipment typically includes a film-forming chamber and a thin film deposition worktable located above the chamber. After a period of use, the thin film deposition worktable requires maintenance. During maintenance, the worktable is typically flipped over manually. This method subjects the worktable to lateral forces, potentially affecting its stability during subsequent operations and posing a safety hazard of pinching the operator during flipping. Utility Model Content

[0004] The technical problem to be solved by the embodiments of the present invention is to provide a vertical lifting and deflection device and a thin film deposition device, which can improve the convenience of maintaining the thin film deposition worktable, reduce the difficulty of operation, and improve the safety during operation.

[0005] The utility model discloses a vertical lifting and deflection device, comprising: a workbench, and a film forming chamber arranged on the workbench, the top cover of the film forming chamber is provided with a thin film deposition workbench; the workbench is also provided with a support frame, the support frame is provided with a jacking assembly and a guide assembly; the guide assembly comprises a guide column and a guide frame, the thin film deposition workbench is provided with a connecting plate that is slidably connected to the guide column and the guide frame, the jacking assembly is abutted against the connecting plate, and when the connecting plate slides to the top of the guide frame, it can deflect relative to the guide frame with the guide column as the center of the circle.

[0006] Optionally, the thin film deposition worktable includes a top cover and a worktable body connected to the top cover, the connecting plate is fixedly connected to the top cover, and the connecting plate is connected to the guide column via a linear bearing.

[0007] Optionally, the support frame includes an interconnected vertical plate and a positioning seat, the vertical plate is fixedly connected to the workbench, the lifting assembly is arranged on the positioning seat, and the lifting assembly is located on the side of the vertical plate away from the film forming chamber.

[0008] Optionally, the lifting assembly includes a cylinder connected to the positioning seat, and a butting head provided at the telescopic end of the cylinder, and a ball is provided on the butting head.

[0009] Optionally, the guide frame includes a column arranged on the positioning seat, and a guide plate arranged on one side of the column, the extension direction of the column is parallel to the extension direction of the guide column, the column is provided with a guide groove arranged along the length direction, and a cam follower is provided on the connecting plate, the cam follower can slide along the guide groove, and when the connecting plate deflects relative to the guide frame with the guide column as the center, the cam follower can abut against the top surface of the guide plate.

[0010] Optionally, the guide frame further includes a limiting plate arranged at the top end of the column, for limiting the connecting plate.

[0011] Optionally, the guide plate is arc-shaped, and a limiting protrusion is provided at the end of the guide plate. The opposite sides of the guide groove have a first protrusion and a second protrusion. The second protrusion is connected to the guide plate, and the height of the first protrusion is greater than the height of the second protrusion. A guiding arc surface is provided on the second protrusion.

[0012] Optionally, one end of the guide column is connected to the positioning seat, and the other end is connected to the limiting plate.

[0013] Optionally, an arc-shaped avoidance groove is provided at one end of the connecting plate connected to the top cover.

[0014] The utility model also discloses a thin film deposition device, comprising the vertical lifting and deflecting device described in any one of the above items.

[0015] Compared with the prior art, the beneficial effects of the vertical lifting and deflecting device and the thin film deposition equipment provided by the embodiment of the utility model are as follows: when the thin film deposition equipment needs to be maintained, the connecting plate can be lifted by the lifting assembly due to the abutment between the lifting assembly and the connecting plate. At this time, the thin film deposition worktable connected to the connecting plate can rise vertically synchronously with the connecting plate. Through the sliding cooperation between the guide column and the guide frame and the connecting plate respectively, when the lifting assembly drives the connecting plate to rise, the verticality of the connecting plate can be ensured during the rise, avoiding skewness during the rise and not being subjected to lateral force, which is conducive to improving the stability of the thin film deposition worktable when it is separated from the film forming chamber and avoiding damage to the thin film deposition worktable. When the connecting plate rises to a certain height, the thin film deposition worktable is completely separated from the film forming chamber. At this time, the connecting plate can be rotated so that the connecting plate rotates relative to the guide column. At the same time, the connecting plate is deflected relative to the guide frame to deflect the thin film deposition worktable from the thin film deposition area to the maintenance area, so as to facilitate the operator to perform related maintenance operations. The reverse operation process can return the thin film deposition worktable to its original position. During the above process of lifting the thin film deposition worktable, the thin film deposition worktable can be automatically controlled by the lifting assembly without human intervention. During the deflection of the thin film deposition worktable, the thin film deposition worktable is completely separated from the film forming chamber and will not cause damage to the thin film deposition worktable. While the lifting assembly supports the connecting plate, it can rotate around the guide column as the center, and with the cooperation of the guide frame, it can ensure the convenience and reliability of the horizontal deflection process, reduce the difficulty of operation, and improve safety during operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments, in which:

[0017] Figure 1 It is a structural diagram of the vertical lifting and deflection device provided by an embodiment of the utility model;

[0018] Figure 2 This is a schematic structural diagram of the cooperation between the guide post and the guide frame provided in an embodiment of the present utility model;

[0019] Figure 3 This is a schematic structural diagram of the deflection of the thin film deposition workpiece stage relative to the guide frame provided by an embodiment of the present utility model;

[0020] Figure 4 This is a schematic structural diagram of a guide frame provided by an embodiment of the present utility model;

[0021] Figure 5 yes Figure 4 A partial enlarged view of point A in the middle.

[0022] The reference numerals in the figures are:

[0023] 100. Vertical lifting and deflection device; 110. Workbench; 120. Film forming chamber; 130. Thin film deposition worktable; 132. Top cover; 134. Worktable body; 140. Support frame; 142. Vertical plate; 144. Positioning seat; 150. Lifting assembly; 152. Cylinder; 154. Push head; 1542. Ball; 160. Guide assembly; 162. Guide column; 164. Guide frame; 1642. Vertical column; 1642a. Guide groove; 1642b. First convex strip; 1642c. Second convex strip; 1642d. Guide arc surface; 1644. Guide plate; 1644a. Limiting cam; 1646. Limiting plate; 170. Connecting plate; 172. Cam follower; 174. Arc-shaped avoidance groove; 180. Linear bearing. DETAILED DESCRIPTION

[0024] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments in this application can be combined with each other. Now, in conjunction with the accompanying drawings, a detailed description of the preferred embodiments of the present utility model will be given.

[0025] like Figure 1 and Figure 2 As shown, an embodiment of the present invention provides a vertical lifting and deflection device 100, comprising: a workbench 110, and a film forming chamber 120 arranged on the workbench 110, the top cover of the film forming chamber 120 is provided with a thin film deposition workpiece table 130; a support frame 140 is also provided on the workbench 110, and a jacking assembly 150 and a guide assembly 160 are provided on the support frame 140; the guide assembly 160 includes a guide column 162 and a guide frame 164, and a connecting plate 170 slidably connected to the guide column 162 and the guide frame 164 is provided on the thin film deposition workpiece table 130, the jacking assembly 150 is in contact with the connecting plate 170, and when the connecting plate 170 slides to the top of the guide frame 164, it can deflect relative to the guide frame 164 with the guide column 162 as the center of the circle.

[0026] Specifically, the workbench 110 plays the role of supporting the film forming chamber 120 and the support frame 140 to ensure that the film forming chamber 120 and the support frame 140 are stably connected to the workbench 110 respectively. When the thin film deposition equipment needs to be maintained, since the lifting assembly 150 is in contact with the connecting plate 170, the connecting plate 170 can be lifted by the lifting assembly 150. At this time, the thin film deposition worktable 130 connected to the connecting plate 170 can rise vertically synchronously with the connecting plate 170. Through the sliding cooperation of the guide column 162 and the guide frame 164 with the connecting plate 170 respectively, when the lifting assembly 150 drives the connecting plate 170 to rise, the verticality of the connecting plate 170 can be ensured when it rises, avoiding skew during the rising process and not being subjected to lateral force, which is conducive to improving the stability of the thin film deposition worktable 130 when it is separated from the film forming chamber 120 and avoiding damage to the thin film deposition worktable 130. When the connecting plate 170 rises to a certain height, the thin film deposition worktable 130 is completely separated from the film forming chamber 120. At this time, the connecting plate 170 can be rotated so that the connecting plate 170 rotates relative to the guide column 162. At the same time, the connecting plate 170 is deflected relative to the guide frame 164 to deflect the thin film deposition worktable 130 from the thin film deposition area to the maintenance area, so as to facilitate the operator to perform related maintenance operations. The reverse operation process can return the thin film deposition worktable 130 to its original position. The above process can be automatically controlled by the lifting assembly 150 during the lifting process of the thin film deposition worktable 130 without human intervention. During the deflection process of the thin film deposition worktable 130, the thin film deposition worktable 130 is completely separated from the film forming chamber 120, and will not cause damage to the thin film deposition worktable 130. While the lifting assembly 150 supports the connecting plate 170, it can rotate around the guide column 162 and, with the cooperation of the guide frame 164, ensure the convenience and reliability of the horizontal deflection process, reduce the difficulty of operation, and improve the safety during operation.

[0027] like Figure 3 As shown, the thin film deposition workpiece stage 130 includes a top cover 132 and a workpiece stage body 134 connected to the top cover 132 , a connecting plate 170 is fixedly connected to the top cover 132 , and the connecting plate 170 is connected to the guide column 162 via a linear bearing 180 .

[0028] Specifically, the top cover 132 is used to engage with the film forming chamber 120 to ensure the vacuum level of the film forming chamber 120, and the workpiece stage body 134 can be used to place the workpiece to be processed for coating. The connecting plate 170 is fixedly connected to the top cover 132 by bolts, so that the thin film deposition workpiece stage 130 can be driven to move as a whole through the top cover 132. In addition, the connecting plate 170 is connected to the guide column 162 through a linear bearing 180, which can improve the smoothness of movement by reducing friction between components, reduce vibration and noise during operation, and can also withstand and distribute loads to ensure the reliability of the connection.

[0029] like Figure 1 and Figure 4 As shown, the support frame 140 includes an interconnected vertical plate 142 and a positioning seat 144. The vertical plate 142 is fixedly connected to the workbench 110. The jacking assembly 150 is arranged on the positioning seat 144, and the jacking assembly 150 is located on the side of the vertical plate 142 away from the film forming chamber 120.

[0030] Specifically, the support frame 140 is connected to the vertical plate 142 and the positioning seat 144, so that the positioning seat 144 can be lifted to a certain height via the vertical plate 142, facilitating the cooperation between the lifting assembly 150 provided on the positioning seat 144 and the connecting plate 170. In addition, the lifting assembly 150 is located on the side of the vertical plate 142 facing away from the film forming chamber 120, thereby avoiding occupying a large amount of space on the workbench 110 and improving space utilization. At the same time, to strengthen the connection strength between the vertical plate 142 and the positioning seat 144, reinforcing ribs can be provided at the connection between the vertical plate 142 and the positioning seat 144.

[0031] like Figure 4 As shown, the lifting assembly 150 includes a cylinder 152 connected to the positioning seat 144 and a push-up head 154 provided at the telescopic end of the cylinder 152 , and a ball 1542 is provided on the push-up head 154 .

[0032] Specifically, when the thin film deposition worktable 130 needs to be lifted, the cylinder 152 is actuated to move the connecting plate 170 upward along the guide post 162. After the connecting plate 170 is in place, the abutting head 154 always abuts against the connecting plate 170 to ensure stability in the current state. At this time, when the connecting plate 170 is rotated, in order to reduce the friction between the abutting head 154 and the connecting plate 170, the abutting head 154 is provided with a ball 1542, which can convert sliding friction into rolling friction, thereby greatly reducing the friction at the contact position, which helps to ensure that the connecting plate 170 is rotated more smoothly and effortlessly.

[0033] like Figure 3 and Figure 4 As shown, the guide frame 164 includes a column 1642 arranged on the positioning seat 144, and a guide plate 1644 arranged on one side of the column 1642. The extension direction of the column 1642 is parallel to the extension direction of the guide column 162. The column 1642 is provided with a guide groove 1642a arranged along the length direction. The connecting plate 170 is provided with a cam follower 172. The cam follower 172 can slide along the guide groove 1642a, and when the connecting plate 170 deflects relative to the guide frame 164 with the guide column 162 as the center, the cam follower 172 can abut against the top surface of the guide plate 1644.

[0034] Specifically, by providing guide grooves 1642a along the length of uprights 1642, when connecting plate 170 slides along guide posts 162, it is constrained not only by guide posts 162 but also by guide grooves 1642a, thereby preventing deflection of connecting plate 170 during upward movement. This helps ensure positional accuracy during upward movement and ensures the reliability of connecting plate 170 during upward movement. By providing cam followers 172 on connecting plate 170, smoother engagement between connecting plate 170 and guide grooves 1642a is achieved. When connecting plate 170 moves upward to the position of guide plate 1644, cam follower 172 disengages from guide grooves 1642a and moves to the top surface of guide plate 1644, thereby ensuring smooth engagement of connecting plate 170 with guide grooves 1642a during upward movement and with guide plate 1644 during deflection, thereby ensuring smooth operation and preventing jamming.

[0035] like Figure 4 As shown, the guide frame 164 further includes a limiting plate 1646 disposed at the top of the column 1642 for limiting the connection plate 170 .

[0036] By adopting the above-mentioned method, the upward movement height of the connecting plate 170 can be limited to prevent the connecting plate 170 from accidentally falling off from the guide column 162, thereby improving safety during use.

[0037] like Figure 5 As shown, the guide plate 1644 is arc-shaped, and a limiting protrusion 1644a is provided at the end of the guide plate 1644, and the opposite sides of the guide groove 1642a have a first protrusion 1642b and a second protrusion 1642c, the second protrusion 1642c is connected to the guide plate 1644, and the height of the first protrusion 1642b is greater than the height of the second protrusion 1642c, and a guiding arc surface 1642d is provided on the second protrusion 1642c.

[0038] Specifically, the guide groove 1642a is formed by first and second protrusions 1642b, 1642c, on opposite sides of the guide groove 1642a. These first and second protrusions 1642b, 1642c act as position limiters for the cam follower 172. By setting the height of the first protrusion 1642b greater than the height of the second protrusion 1642c, the cam follower 172 can only slide out of the second protrusion 1642c when it is about to exit the guide groove 1642a. This ensures that the cam follower 172 can cooperate with the guide plate 1644 to ensure reliable vertical movement and deflection. Furthermore, the second protrusion 1642c is provided with a guide arc 1642d, which facilitates a smooth transition between the second protrusion 1642c and the guide plate 1644. At the same time, by providing a limiting protrusion 1644a at the end of the guide plate 1644, the moving stroke of the cam follower 172 can be limited to prevent the cam follower 172 from accidentally falling off from the guide plate 1644, which is beneficial to ensuring reliability and safety during use.

[0039] like Figure 2 As shown, one end of the guide post 162 is connected to the positioning seat 144 , and the other end is connected to the limiting plate 1646 .

[0040] The above-mentioned form can prevent the connecting plate 170 from falling off from the top of the guide column 162, and can also support the limiting plate 1646 to ensure the overall structural strength of the guide assembly 160 and improve reliability during use.

[0041] Please continue to refer to Figure 2 An arc-shaped avoidance groove 174 is provided at one end of the connecting plate 170 connected to the top cover 132 .

[0042] By adopting the above-mentioned form, while ensuring the stable connection between the connecting plate 170 and the top cover 132, more functional mechanical mechanisms can be provided on the top cover 132 to enhance the compactness and convenience of the mutual cooperation.

[0043] The present invention also discloses a thin film deposition apparatus, including the vertical lift and deflection device 100 of the aforementioned embodiment. This thin film deposition apparatus has the same structure and benefits as the vertical lift and deflection device 100 of the aforementioned embodiment. The structure and benefits of the vertical lift and deflection device 100 have been described in detail in the aforementioned embodiment and will not be repeated here.

[0044] It should be understood that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Those skilled in the art may modify the technical solutions described in the above embodiments, or make equivalent replacements for some of the technical features therein; and all these modifications and replacements should fall within the scope of protection of the claims attached to the present invention.

Claims

1. A vertical lifting and deflection device, characterized in that: include: A workbench, and a film forming chamber arranged on the workbench, the top cover of the film forming chamber is provided with a thin film deposition workbench; the workbench is also provided with a support frame, the support frame is provided with a jacking assembly and a guide assembly; the guide assembly includes a guide column and a guide frame, and the thin film deposition workbench is provided with a connecting plate that is slidably connected to the guide column and the guide frame, the jacking assembly is abutted against the connecting plate, and when the connecting plate slides to the top of the guide frame, it can deflect relative to the guide frame with the guide column as the center of the circle.

2. The vertical lifting and deflection device according to claim 1, characterized in that: The thin film deposition worktable includes a top cover and a worktable body connected to the top cover. The connecting plate is fixedly connected to the top cover, and the connecting plate is connected to the guide column via a linear bearing.

3. The vertical lifting and deflection device according to claim 2, characterized in that: The support frame includes a vertical plate and a positioning seat connected to each other, the vertical plate is fixedly connected to the workbench, the lifting assembly is arranged on the positioning seat, and the lifting assembly is located on the side of the vertical plate away from the film forming chamber.

4. The vertical lifting and deflection device according to claim 3, characterized in that: The lifting assembly includes a cylinder connected to the positioning seat and a butting head arranged at the telescopic end of the cylinder, and a ball is arranged on the butting head.

5. The vertical lifting and deflection device according to claim 3 or 4, characterized in that: The guide frame includes a column arranged on the positioning seat, and a guide plate arranged on one side of the column. The extension direction of the column is parallel to the extension direction of the guide column. The column is provided with a guide groove arranged along the length direction. The connecting plate is provided with a cam follower. The cam follower can slide along the guide groove, and when the connecting plate deflects relative to the guide frame with the guide column as the center, the cam follower can abut against the top surface of the guide plate.

6. The vertical lifting and deflection device according to claim 5, characterized in that: The guide frame further includes a limiting plate arranged at the top end of the column, for limiting the connection plate.

7. The vertical lifting and deflection device according to claim 6, characterized in that: The guide plate is arc-shaped, and a limiting protrusion is provided at the end of the guide plate. The opposite sides of the guide groove have a first protrusion and a second protrusion. The second protrusion is connected to the guide plate, and the height of the first protrusion is greater than the height of the second protrusion. A guiding arc surface is provided on the second protrusion.

8. The vertical lifting and deflection device according to claim 7, characterized in that: One end of the guide column is connected to the positioning seat, and the other end is connected to the limiting plate.

9. The vertical lifting and deflection device according to any one of claims 2 to 4, characterized in that: An arc-shaped avoidance groove is provided at one end of the connecting plate connected to the top cover.

10. A thin film deposition device, characterized in that: It comprises the vertical lifting and deflection device according to any one of claims 1 to 9.

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