Single crystal furnace auxiliary chamber cylinder and single crystal furnace

Abstract

The utility model relates to a single crystal furnace auxiliary chamber cylinder and a single crystal furnace, the auxiliary chamber cylinder comprises a cylinder body, the bottom opening of the cylinder body is set to be a flaring structure, and the cylinder body is used for guiding a feeder hung in from the bottom opening of the cylinder body; and the argon cleaning device is arranged at the position of the opening in the bottom of the cylinder body and is used for blowing and cleaning the surface of the feeder hung in from the opening in the bottom of the cylinder body. According to the automatic blowing and guiding device, automatic blowing of the feeder and automatic guiding of the feeder can be combined, intervention of operators is thoroughly avoided, the automation degree in the production process is improved, and the probability of accident risks is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal furnaces, and in particular to a single crystal furnace auxiliary chamber tube and a single crystal furnace. Background Art

[0002] The vertical single crystal pulling furnace is currently the most commonly used single crystal silicon manufacturing device. As production capacity continues to expand within the industry and the degree of automation becomes increasingly higher, the following problems currently exist with the automatic re-feeding barrel: During the automatic feeding process, the operator must purge the feeder surface after hanging it on the weight. This not only increases the operator's workload, but also, due to differences in human operation, the cleanliness of the barrel cannot be guaranteed. If the barrel with dust enters the auxiliary chamber and water-cooling screen, it will directly affect the quality of the crystal pulling. Moreover, after the feeder is purged, the barrel will tilt or shake during the ascent, so manual guidance is required during the ascent to prevent the barrel from hitting the auxiliary chamber and causing damage. This not only increases the amount of operation, but also delays working hours, and even poses the risk of the feeder falling and injuring people.

[0003] Therefore, it is urgent to provide a single crystal furnace sub-chamber tube and a single crystal furnace to solve the above-mentioned technical problems. Utility Model Content

[0004] Based on this, a single crystal furnace sub-chamber tube and a single crystal furnace are provided, which can combine the automatic purge of the feeder with the automatic guidance of the feeder, completely get rid of the manual intervention of the operator, promote the degree of automation in the production process, and reduce the probability of accident risks.

[0005] In a first aspect, a single crystal furnace sub-chamber barrel is provided, comprising: a barrel, the bottom opening of the barrel being configured as a flared structure for guiding a feeder hoisted from the bottom opening of the barrel; an argon cleaning device, the argon cleaning device being arranged at the bottom opening position of the barrel, for purging and cleaning the surface of the feeder hoisted from the bottom opening of the barrel.

[0006] Preferably, the expansion structure is configured as an arc-shaped expansion structure that gradually expands from the inside to the outside along the radial direction.

[0007] Preferably, the inner wall of the bottom opening of the cylinder is set to be a smooth surface.

[0008] Preferably, the argon cleaning device includes an air inlet pipe, an annular air duct and a plurality of argon blowing ports provided on the inner side wall of the bottom of the cylinder; the air inlet end of the air inlet pipe is connected to an external air source, and the air outlet end is connected to the annular air duct; the argon blowing ports are connected to the annular air duct.

[0009] Preferably, the annular air duct is provided in the interlayer at the bottom of the cylinder, and the air inlet end of the air inlet pipe passes through the outer side wall of the bottom of the cylinder and is connected to an external air source.

[0010] Preferably, the plurality of argon blowing ports are symmetrically and evenly arranged along the circumference of the inner side wall of the bottom of the cylinder.

[0011] Preferably, the argon gas blowing port is arranged with its axis tilted downward.

[0012] In a second aspect, a single crystal furnace is also provided, comprising a main chamber, a furnace cover arranged at the top opening of the main chamber, a small auxiliary chamber installed on the top of the furnace cover, and the single crystal furnace auxiliary chamber tube.

[0013] Preferably, the upper end of the small auxiliary chamber is configured to match the bottom of the cylinder and the two are connected; the lower end of the small auxiliary chamber is configured to match the furnace cover and the two are connected.

[0014] Preferably, the cross-sectional diameter of the small auxiliary chamber is in the shape of a truncated cone with a larger upper portion and a smaller lower portion.

[0015] Beneficial effects:

[0016] The above-mentioned single crystal furnace sub-chamber tube and single crystal furnace, by modifying the cylinder, set the bottom opening of the cylinder into a flared structure. Through this design, the feeder can be automatically guided, and an argon cleaning device is set at the bottom opening of the cylinder. During the rising process of the feeder, the argon cleaning device starts to blow air to clean the surface of the feeder, thereby combining the automatic purging of the feeder with the automatic guiding of the feeder, completely getting rid of the manual intervention of the operator, promoting the degree of automation in the production process, and reducing the probability of accident risks. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 Schematic diagram of the structure of the auxiliary chamber tube of a single crystal furnace in one embodiment;

[0018] Figure 2 This is a schematic diagram of the structure in which the small auxiliary chamber is installed on the furnace cover in one embodiment;

[0019] Figure 3 is a schematic cross-sectional view of an argon cleaning device in one embodiment;

[0020] Figure 4 A bottom view of a cylinder in one embodiment;

[0021] Figure 5 This is a schematic diagram of a structure in which an argon gas blowing port is obliquely arranged on a cylinder in one embodiment;

[0022] Figure 6 Schematic diagram of the structure of a single crystal furnace in one embodiment;

[0023] Figure 7 A schematic diagram of the feeder entering the barrel in one embodiment Figure 1 ;

[0024] Figure 8 A schematic diagram of the feeder entering the barrel in one embodiment Figure 2 ;

[0025] Figure 9 A schematic diagram of the feeder entering the barrel in one embodiment Figure 3 .

[0026] Figure numerals: 1. Cylinder; 2. Feeder; 3. Argon cleaning device; 31. Air inlet pipe; 32. Annular air duct; 33. Argon blowing port; 4. Small auxiliary chamber; 5. Main chamber; 6. Furnace cover. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solutions and advantages of this application more clear, the following further describes this application in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not intended to limit this application.

[0028] It should be noted that the illustrations provided in this embodiment only illustrate the basic concept of the present application in a schematic manner. Therefore, the illustrations only show components related to the present application and are not drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component can be changed at will, and the component layout type may also be more complicated.

[0029] The structures, proportions, sizes, etc. depicted in the drawings of this specification are only used to match the contents disclosed in the specification so as to facilitate understanding and reading by persons familiar with this technology. They are not intended to limit the conditions under which this application can be implemented, and therefore have no substantive technical significance. Any structural modifications, changes in proportional relationships, or adjustments in size, without affecting the efficacy and objectives that can be achieved by this application, should still fall within the scope of the technical contents disclosed in this application.

[0030] The directions or positional relationships indicated in this specification, such as "upper," "lower," "left," "right," "center," "longitudinal," "transverse," "horizontal," "inner," "outer," "radial," and "circumferential," are based on the directions or positional relationships shown in the accompanying drawings and are intended solely for the purpose of simplifying the description. They do not indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0031] The embodiment of the present application provides a single crystal furnace sub-chamber barrel and a single crystal furnace, which avoids the risk of collision between the barrel and the feeder. At the same time, the operator does not need to hold the barrel by hand, which reduces the operator's workload, improves the degree of automation, and also avoids the situation where impurities in the feeder due to differences in human operation affect the quality of crystal pulling.

[0032] The following is a detailed description of a single crystal furnace auxiliary chamber provided by this embodiment in conjunction with the accompanying drawings. Figure 1 As shown, it includes: a cylinder 1 and an argon cleaning device 3. The bottom opening of the cylinder 1 is set to a flared structure for guiding the feeder 2 hoisted from the bottom opening of the cylinder 1; the argon cleaning device 3 is set at the bottom opening position of the cylinder 1 for blowing and cleaning the surface of the feeder 2 hoisted from the bottom opening of the cylinder 1.

[0033] In this embodiment, the bottom opening of the cylinder 1 is set to a flared structure, which has a guiding function. During the rising process of the feeder 2, even if the feeder 2 is in a tilted or shaking state before entering the cylinder 1, it can be restored to a stable vertical state after being guided by the flared structure. After entering the cylinder 1 in a vertical state, the feeder 2 can be prevented from colliding with the cylinder 1 inside the cylinder 1. At the same time, there is no need for the operator to hold the feeder 2 by hand, and the feeder 2 can be remotely controlled to automatically enter the cylinder 1. There is no need for personnel to observe or operate on site, which improves the degree of automation. At the same time, an argon cleaning device 3 is set at the bottom opening position of the cylinder 1, and the surface of the feeder 2 hoisted from the bottom opening of the cylinder 1 is purged and cleaned by the argon cleaning device 3. After the system recognizes that the feeder 2 is suspended on the heavy hammer by weight, the argon cleaning device 3 automatically opens to clean the feeder 2. This structure reduces the workload of the operator and avoids the situation where impurities in the feeder 2 due to differences in human operations affect the quality of crystal pulling.

[0034] In this embodiment, it should be noted that the flaring structure is configured as an arc-shaped flaring structure that gradually expands from the inside to the outside in the radial direction, and the inner wall is configured as a smooth surface. By configuring the bottom flaring structure of the cylinder 1 to be an arc-shaped flaring, when the upper end of the feeder 2 enters the bottom opening of the cylinder 1, even if the feeder 2 is in a skewed state and hits the inner wall of the bottom opening of the cylinder 1, since the bottom opening of the cylinder 1 is configured as a flaring structure and the inner wall is a smooth arc surface, the upper end of the feeder 2 will be guided to slide smoothly to a vertical state, not only without causing damage to the surface of the feeder 2, but also the feeder 2 can be better guided, and the auxiliary feeder 2 will eventually enter the cylinder 1 in a vertical state.

[0035] Please refer to Figure 1 、 Figure 3 as well as Figure 4As shown, in this embodiment, it should be noted that the argon cleaning device 3 includes an air inlet pipe 31, an annular air channel 32 provided in the bottom interlayer of the cylinder 1, and a plurality of argon blowing ports 33 provided on the inner side wall of the bottom of the cylinder 1; the air inlet end of the air inlet pipe 31 passes through the outer side wall of the bottom interlayer of the cylinder 1 to connect to the external air source, and the air outlet end is connected to the annular air channel 32, and the argon blowing ports 33 are connected to the annular air channel 32. Preferably, the plurality of argon blowing ports 33 are symmetrically and evenly arranged along the circumference of the inner side wall of the bottom of the cylinder 1. Thus, the external air source transports the argon into the annular air channel 32 through the air inlet pipe 31, and then distributes it to the plurality of argon blowing ports 33 through the annular air channel 32 for blowing out. The argon blown out through the argon blowing ports 33 blows and cleans the surface of the feeder 2, and can cover the entire outer peripheral surface of the feeder 2 by being symmetrically distributed in the circumference, thereby ensuring complete cleaning.

[0036] Please refer to Figure 1 、 Figure 5 As shown, in some embodiments, the axis direction of the argon blowing port 33 is tilted downward. Preferably, the axis of the argon blowing port 33 is at a 45° angle to the vertical axis of the cylinder 1. By setting the argon blowing port 33 to be tilted downward, the argon gas is purged downward during the rising process of the feeder 2, so that the feeder 2 can be purged before entering the cylinder 1.

[0037] Please refer to Figure 6 As shown, this embodiment also provides a single crystal furnace, comprising a main chamber 5, a furnace cover 6 disposed at the top opening of the main chamber 5, a small auxiliary chamber 4 mounted on the furnace cover 6, and a barrel 1 docked with the small auxiliary chamber 4. The small auxiliary chamber 4 is fixed to the furnace cover 6, and the barrel 1 is connected to and disconnected from the small auxiliary chamber 4 by rotation.

[0038] Please refer to Figure 1 、 Figure 2 As shown, in this embodiment, it should also be noted that the upper end of the small auxiliary chamber 4 is configured to have a flared structure that matches the bottom of the barrel 1 and the two are connected, and the lower end of the small auxiliary chamber 4 is configured to match the opening on the furnace cover 6 and the two are connected. The cross-sectional diameter of the small auxiliary chamber 4 is a truncated cone with a larger upper portion and a smaller lower portion. In other words, the diameter of the small auxiliary chamber 4 gradually decreases from the upper end to the lower end. Since this embodiment is equivalent to expanding the diameter of the bottom opening of the barrel 1, the upper end of the small auxiliary chamber 4 is also correspondingly expanded to match the bottom of the barrel 1, while the lower end diameter of the small auxiliary chamber 4 remains unchanged to match the furnace cover 6 to form a match with the original equipment. Then, through this structural design, this new auxiliary chamber barrel in this embodiment can be installed without replacing the remaining parts, which is convenient for replacement and maintenance. In addition, the expanded diameter of the upper end of the small auxiliary chamber 4 is larger than that of the traditional auxiliary chamber at the unscrewed opening, which facilitates the positioning of the AGV trolley and the feeder 2.

[0039] The implementation principle of this embodiment is as follows: the barrel 1 in this embodiment is installed on the small auxiliary chamber 4 of the single crystal furnace, and the single crystal furnace is operated. When the feeder 2 reaches the designated area and the single crystal furnace starts to be recharged, the barrel 1 is unscrewed, and the feeder 2 is hung on the weight. The feeder 2 starts to rise. At the same time, after the system recognizes that the feeder 2 is hung on the weight by weight, the argon cleaning device 3 is turned on to clean the surface of the feeder 2. The feeder 2 shakes when it rises (such as Figure 7 、 Figure 8 As shown), after being guided by the expansion structure of the bottom opening of the cylinder 1, the feeder 2 tends to be stable (as shown Figure 9 As shown), it will no longer collide with the vertical inner wall of the cylinder 1. Through this design, the automatic purge of the feeder 2 is combined with the automatic guidance of the feeder 2, completely getting rid of the operator's manual intervention, promoting the degree of automation in the production process, and reducing the probability of accident risks.

[0040] The technical features of the above embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0041] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, and these modifications and improvements fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A single crystal furnace auxiliary chamber tube, characterized in that: include: A cylinder (1), wherein the bottom opening of the cylinder (1) is configured as a flared structure for guiding a feeder (2) suspended from the bottom opening of the cylinder (1); An argon cleaning device (3) is provided at the bottom opening of the cylinder (1) and is used for blowing and cleaning the surface of a feeder (2) suspended from the bottom opening of the cylinder (1).

2. The single crystal furnace auxiliary chamber tube according to claim 1, characterized in that: The expansion structure is configured as an arc-shaped expansion structure that gradually expands from the inside to the outside along the radial direction.

3. The single crystal furnace auxiliary chamber tube according to claim 2, characterized in that: The inner wall of the bottom opening of the cylinder (1) is configured as a smooth surface.

4. The single crystal furnace auxiliary chamber tube according to claim 1, characterized in that: The argon cleaning device (3) comprises an air inlet pipe (31), an annular air channel (32), and a plurality of argon blowing ports (33) provided on the inner side wall of the bottom of the cylinder (1); The air inlet end of the air inlet pipe (31) is connected to an external air source, and the air outlet end is connected to the annular air channel (32); The argon blowing port (33) is connected to the annular air channel (32).

5. The single crystal furnace auxiliary chamber tube according to claim 4, characterized in that: The annular air channel (32) is provided in the bottom interlayer of the cylinder (1), and the air inlet end of the air inlet pipe (31) passes through the outer wall of the bottom of the cylinder (1) and is in communication with an external air source.

6. The single crystal furnace auxiliary chamber tube according to claim 4, characterized in that: The plurality of argon blowing ports (33) are symmetrically and evenly arranged along the circumference of the inner side wall of the bottom of the cylinder (1).

7. The single crystal furnace auxiliary chamber tube according to any one of claims 4 to 6, characterized in that: The axial direction of the argon gas blowing port (33) is tilted downward.

8. A single crystal furnace, characterized in that: The invention comprises a main chamber (5), a furnace cover (6) arranged at the top opening of the main chamber (5), a small auxiliary chamber (4) installed on the top of the furnace cover (6), and a single crystal furnace auxiliary chamber tube as described in any one of claims 1 to 7.

9. The single crystal furnace according to claim 8, characterized in that: The upper end of the small auxiliary chamber (4) is configured to match the bottom of the cylinder (1) and the two are connected; The lower end of the small auxiliary chamber (4) is configured to match the furnace cover (6) and the two are connected.

10. The single crystal furnace according to claim 9, characterized in that: The cross-sectional diameter of the small auxiliary chamber (4) is in the shape of a truncated cone with a larger diameter at the top and a smaller diameter at the bottom.

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