Column arc target device of vacuum coating machine

Abstract

The utility model discloses a column arc target device of a vacuum coating machine, which comprises a power connection mechanism, a magnetic core mechanism and a first motor, the power connection mechanism comprises an upper power connection assembly and a lower power connection assembly, and the upper power connection assembly and the lower power connection assembly alternately supply power to a tube target; the magnetic core mechanism comprises a target core assembly and a magnet assembly, a first installation groove and a second installation groove are formed in the outer circle face of the target core assembly, the magnet assembly comprises a first magnet and a second magnet, the first magnet is installed in the first installation groove, the second magnet is installed in the second installation groove, and the first magnet and the second magnet are used for generating a balanced closed-loop magnetic field in a matched mode. The balanced closed-loop magnetic field is used for sputtering surface components of the tube target towards one radial side of the target core assembly; the first motor is used for driving the tube target to rotate along the axis of the target core assembly. According to the column arc target device of the vacuum coating machine, components on the surface of a tube target can be sputtered directionally, the coating efficiency is improved, tube targets of different types can be arranged in a vacuum cavity at the same time, and the film layer diversity of a substrate is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating equipment structure, in particular to a column arc target device of a vacuum coating machine. Background Art

[0002] Vacuum coating machines mainly refer to a type of coating that requires a relatively high vacuum level. There are many types of coating machines, including vacuum resistance heating evaporation, electron beam heating evaporation, magnetron sputtering, PLD laser sputtering deposition, ion beam sputtering, and many more. The main idea is to categorize them into two types: evaporation and sputtering.

[0003] The product to be coated is called a substrate, and the material to be coated is called a target. Both the substrate and the target are placed in the same vacuum chamber.

[0004] Sputtering coating can be simply understood as using ions or high-energy lasers to bombard the target material, and causing the surface components to be sputtered out in the form of atomic clusters or ions, deposited on the surface of the substrate, undergoing a film-forming process, and finally forming a thin film.

[0005] In related technologies, sputtering coating usually uses a tube target for coating. By energizing the tube target to form an electric field between the tube target and the container, the electric field ionizes the working gas to produce positive ions and electrons. The positive ions are accelerated by the electric field and quickly shot toward the tube target, causing the surface components of the tube target to be sputtered out in the form of atomic groups or ions. If there is no magnetic field constraint, the surface components of the tube target will sputter outward along the 360° periphery of the tube target. Therefore, the tube target usually needs to be arranged in the middle of the vacuum chamber, and the substrate to be plated is distributed around the 360° periphery of the tube target.

[0006] However, existing vacuum coating equipment has great limitations on the placement of tube targets and substrates, resulting in low coating efficiency and a single coating target material. Utility Model Content

[0007] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a cylindrical arc target device for a vacuum coating machine. By increasing the magnetic field, the device can directionally sputter the surface components of the tube target, increasing the power density and thus improving the coating efficiency. Furthermore, different types of tube targets can be arranged simultaneously in the vacuum chamber, increasing the diversity of the film layers on the substrate.

[0008] According to an embodiment of the first aspect of the present invention, a column arc target device for a vacuum coating machine includes: a power connection mechanism, including an upper power connection assembly and a lower power connection assembly, the upper power connection assembly and the lower power connection assembly being electrically connected to two ends of a tube target, respectively, and configured to alternately supply power to the tube target; a magnetic core mechanism, located within the tube target, including a target core assembly and a magnet assembly, the target core assembly being coaxially arranged with the tube target, the magnet assembly being arranged on one radial side of the target core assembly, the outer circumferential surface of the target core assembly having a first mounting groove and two second mounting grooves respectively located on either side of the first mounting groove, the length directions of the first mounting groove and the second mounting groove being arranged along the axial direction of the target core assembly; the magnet assembly including a first magnet and a second magnet with opposite magnetic poles, the first magnet being installed in the first mounting groove, and the second magnet being installed in the second mounting groove, the first magnet and the second magnet being configured to cooperate to generate a balanced closed-loop magnetic field, the balanced closed-loop magnetic field being configured to sputter surface components of the tube target toward one radial side of the target core assembly; and a first motor being configured to drive the tube target to rotate along the axis of the target core assembly.

[0009] A column arc target device for a vacuum coating machine according to an embodiment of the present invention has at least the following beneficial effects:

[0010] 1. The utility model is provided with a power connection mechanism, which includes an upper power connection assembly and a lower power connection assembly. The upper power connection assembly and the lower power connection assembly are respectively electrically connected to the two ends of the tube target and are used to alternately supply power to the tube target, so that the power connection mechanism can energize the tube target to form an electric field, thereby allowing the working gas in the vacuum chamber to be ionized in the electric field to generate positive ions and electrons. The positive ions bombard the tube target so that the surface components of the tube target are sputtered out in the form of atomic groups or ions. Furthermore, the sputtered atomic groups or ions are deposited on the surface of the substrate, undergoing a film-forming process, and finally forming a thin film.

[0011] 2. The utility model provides a magnetic core mechanism, which is located in the tube target, and the magnetic core mechanism includes a target core assembly and a magnet assembly, wherein the target core assembly is coaxially arranged with the tube target, and the magnet assembly is arranged on a radial side of the target core assembly, and the outer cylindrical surface of the target core assembly has a first mounting groove and two second mounting grooves respectively located on both sides of the first mounting groove, and the length direction of the first mounting groove and the second mounting groove is arranged along the axial direction of the target core assembly, and the magnet assembly includes a first magnet and a second magnet with opposite magnetic poles, the first mounting groove is installed with the first magnet, and the second mounting groove is installed with the second magnet, the first magnet and the second magnet are used to cooperate to generate a balanced closed-loop magnetic field, and the balanced closed-loop magnetic field is used to sputter the surface components of the tube target toward the radial side of the target core assembly. It can be understood that the magnet assembly is arranged on the radial side of the target core assembly so that the balanced closed-loop magnetic field generated by the magnet assembly can be located on the radial side of the target core assembly, thereby enabling the balanced closed-loop magnetic field generated by the magnet assembly to confine positive ions and electrons generated by ionization of the working gas in the vacuum chamber to the target core assembly. The radial side of the component is arranged so that the positive ions therein bombard the tube target along the radial side of the target core assembly, so that the side of the tube target close to the magnet assembly can sputter atoms, while the portion of the tube target away from the magnet assembly and not in the direction of the balanced closed-loop magnetic field does not sputter atoms. This enables the column arc target device to directionally sputter the surface components of the tube target, so that the column arc target device can coat the substrate in a specified direction. Furthermore, on the one hand, multiple column arc target devices can be arranged to coat the substrate at the same time, which is beneficial to improving the coating efficiency and preventing the column arc target device from sputtering in a direction where no substrate is placed. Furthermore, by installing tube targets of different materials in multiple column arc target devices, the substrate can be coated with film layers of different materials, thereby increasing the diversity of the film layers on the substrate. On the other hand, compared with the prior art in which positive ions bombard the tube target as a whole and cause the tube target to sputter 360 degrees, the present invention restricts the positive ions to bombard the tube target in one direction, so that under the same output power condition of the power supply mechanism, the area of ​​the sputtering region can be reduced, the power density of the tube target is increased, the sputtering rate of the tube target is increased, and the coating efficiency is improved.

[0012] 3. The present invention provides a first motor for driving the tube target to rotate along the axis of the target core assembly. It can be understood that the first motor can drive the tube target to rotate relative to the magnetic core mechanism, so that the magnetic core mechanism can bombard positive ions at different positions of the tube target, and further, the surface components of the tube target can be evenly consumed along the circumference of the tube target during sputtering, thereby improving the utilization rate of the surface components of the tube target.

[0013] According to some embodiments of the present invention, the magnet assembly also includes two third magnets, the magnetic poles of the third magnets are oriented opposite to the magnetic poles of the first magnet, the two third magnets are respectively arranged at both ends of the first mounting slot, and the distance between the third magnet and the first magnet is not less than 10 mm. The first magnet, the second magnet and the third magnet are used to cooperate to generate a balanced closed-loop magnetic field.

[0014] According to some embodiments of the present invention, the first mounting slot is provided with a plurality of the first magnets, and the plurality of the first magnets are arranged along the length direction of the first mounting slot; the second mounting slot is provided with a plurality of the second magnets, and the plurality of the second magnets are arranged along the length direction of the second mounting slot.

[0015] According to some embodiments of the present invention, the target core assembly includes a central water pipe and a magnetic shoe, the magnetic shoe is installed on a radial side of the central water pipe, and the first mounting groove and the second mounting groove are provided on the magnetic shoe.

[0016] According to some embodiments of the present invention, a first positioning portion is provided on a radial side of the central water pipe, and a second positioning portion is provided on a side of the magnetic shoe facing away from the magnet assembly, and the second positioning portion cooperates with the first positioning portion for positioning.

[0017] According to some embodiments of the present invention, a first bolt is provided on the magnetic shoe, and the first bolt is threadedly connected to the central water pipe to fix the magnetic shoe on the central water pipe.

[0018] According to some embodiments of the present invention, the lower power connection assembly includes a carbon brush, a limit seat and a conductive part. The carbon brush is arranged on the limit seat and is connected to the power supply. The conductive part is connected to the tube target. When the tube target rotates to drive the conductive part to rotate synchronously, the conductive part and the carbon brush contact and frictionally conduct electricity.

[0019] According to some embodiments of the present invention, the carbon brush is slidably arranged on the limit seat along the direction of the rotation axis of the tube target, and a first spring is also arranged between the carbon brush and the limit seat. The first spring is used to squeeze the carbon brush so that the carbon brush is in close contact with the conductive part.

[0020] According to some embodiments of the present invention, the upper electrical component is configured as a magnetic fluid, the magnetic fluid includes a sealing seat and a conductive tube rotatably arranged in the sealing seat, the sealing seat is connected to the conductive tube, the sealing seat is used to connect to a power supply, and the conductive tube is connected to the tube target.

[0021] According to some embodiments of the present invention, a transmission belt is provided between the rotating shaft of the first motor and the conductive tube, and the transmission belt is used for transmission between the first motor and the conductive tube.

[0022] Additional aspects and advantages of the present invention will be given in part in the following description and will become apparent from the following description or learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0024] Figure 1 This is a structural schematic diagram of a column arc target device of a vacuum coating machine according to an embodiment of the present utility model;

[0025] Figure 2 for Figure 1 A front view is shown;

[0026] Figure 3 for Figure 2 AA cross-sectional view shown;

[0027] Figure 4 for Figure 2 BB cross-sectional view shown;

[0028] Figure 5 for Figure 3 An enlarged view of point C is shown;

[0029] Figure 6 for Figure 3 An enlarged view of point D is shown.

[0030] Figure markings: 100-power connection mechanism, 110-tube target, 120-magnetic core mechanism, 130-mounting tube, 140-magnet assembly, 150-first mounting slot, 160-second mounting slot, 170-first magnet, 180-second magnet, 190-upper power connection assembly, 200-lower power connection assembly, 210-limiting seat, 220-third magnet, 230-center water pipe, 240-magnetic shoe, 250-first positioning part, 260-second positioning part, 270-carbon brush, 280-conductive part, 290-first spring, 300-first motor, 310-transmission belt, 320-sealing seat, 330-conductive tube. DETAILED DESCRIPTION

[0031] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0032] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.

[0033] In the description of this utility model, "several" means one or more, "many" means more than two, "greater than," "less than," and "exceed" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. The use of "first" and "second" in the description is solely for the purpose of distinguishing technical features and is not to be construed as indicating or implying relative importance, implicitly specifying the number of the indicated technical features, or implicitly specifying the order of the indicated technical features.

[0034] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0035] A column arc target device of a vacuum coating machine according to an embodiment of the present invention will be described below with reference to the accompanying drawings.

[0036] Reference Figure 1 、 Figure 2 and Figure 3 A column arc target device of a vacuum coating machine according to an embodiment of the present invention includes a power connection mechanism 100 , a magnetic core mechanism 120 and a first motor 300 .

[0037] The power connection mechanism 100 includes an upper power connection assembly 190 and a lower power connection assembly 200. The upper power connection assembly 190 and the lower power connection assembly 200 are respectively electrically connected to the two ends of the tube target 110 and are used to alternately supply power to the tube target 110, so that the power connection mechanism 100 can energize the tube target 110 to form an electric field, thereby allowing the working gas in the vacuum chamber to be ionized in the electric field to generate positive ions and electrons. The positive ions bombard the tube target 110 so that the surface components of the tube target 110 are sputtered out in the form of atomic groups or ions. In addition, the sputtered atomic groups or ions are deposited on the surface of the substrate, undergoing a film forming process, and finally forming a thin film.

[0038] It should be explained that the power supply used in the power connection mechanism 100 of the column arc target device of this embodiment has the characteristics of low voltage and high current. The electric field generated by it is not sufficient to ionize the working gas. Therefore, an arc starting device needs to be provided. Before the tube target 110 works, a rotating cylinder is used to push the arc starting needle to short-circuit with the tube target 110 to generate an arc, and then separate from the tube target 110 within one second; the energy density of the arc is very high and can instantly ionize the working gas. The cations generated after the working gas is ionized bombard the surface of the tube target 110 under the acceleration of the electric field, and the surface components of the tube target 110 are sputtered from the surface of the tube target 110 to the substrate; the working gas needs to be continuously filled during the coating process for ionization.

[0039] Reference Figure 4 As for the magnetic core mechanism 120, the magnetic core mechanism 120 is located in the tube target 110, and includes a target core assembly 130 and a magnet assembly 140. The target core assembly 130 is coaxially arranged with the tube target 110, and the magnet assembly 140 is arranged on the radial side of the target core assembly 130. The outer cylindrical surface of the target core assembly 130 has a first mounting groove 150 and two second mounting grooves 160 respectively located on both sides of the first mounting groove 150. The length direction of the first mounting groove 150 and the second mounting groove 160 is arranged along the axial direction of the target core assembly 130. The magnet assembly 140 includes a first magnet 170 and a second magnet 180 with opposite magnetic poles. The first mounting groove 150 is installed with the first magnet 170, and the second mounting groove 160 is installed with the second magnet 180. The first magnet 170 and the second magnet 180 are used to cooperate to generate a balanced closed-loop magnetic field. The balanced closed-loop magnetic field is used to sputter the surface components of the tube target 110 toward the radial side of the target core assembly 130.

[0040] It can be understood that the magnet assembly 140 is arranged on the radial side of the target core assembly 130, so that the balanced closed-loop magnetic field generated by the magnet assembly 140 can be located on the radial side of the target core assembly 130, thereby enabling the balanced closed-loop magnetic field generated by the magnet assembly 140 to confine the positive ions and electrons generated by the ionization of the working gas in the vacuum chamber to the radial side of the target core assembly 130, so that the positive ions therein bombard the tube target 110 along the radial side of the target core assembly 130, so that the side of the tube target 110 close to the magnet assembly 140 can sputter atoms, while the part of the tube target 110 that is away from the magnet assembly 140 and not in the direction of the balanced closed-loop magnetic field does not sputter atoms, so that the column arc target device can directionally sputter the surface components of the tube target 110, so that the column arc target device can The substrate is coated in a specified direction. Furthermore, on the one hand, multiple column arc target devices can be arranged to coat the substrate at the same time, which is beneficial to improving the coating efficiency and can prevent the column arc target device from sputtering in the direction where no substrate is placed. Moreover, by installing tube targets 110 of different materials in multiple column arc target devices, the substrate can be coated with film layers of different materials, thereby increasing the diversity of the film layers of the substrate. On the other hand, compared with the prior art in which positive ions bombard the tube target 110 as a whole to cause the tube target 110 to sputter 360°, the utility model confines the positive ions to bombard the tube target 110 in one direction, so that under the same output power condition of the power connection mechanism 100, the area of ​​the sputtering region can be reduced, the power density of the tube target 110 is increased, the sputtering rate of the tube target 110 is increased, and the coating efficiency is improved.

[0041] In some specific embodiments, the magnet assembly 140 also includes two third magnets 220, the magnetic poles of the third magnets 220 are oriented opposite to the magnetic poles of the first magnet 170, and the two third magnets 220 are respectively arranged at both ends of the first mounting groove 150. The distance between the third magnet 220 and the first magnet 170 is not less than 10 mm. The first magnet 170, the second magnet 180 and the third magnet 220 are used to cooperate to generate a more uniform magnetic field distribution of the balanced closed-loop magnetic field.

[0042] In some specific embodiments, the first mounting groove 150 is provided with a plurality of first magnets 170, and the plurality of first magnets 170 are arranged along the length direction of the first mounting groove 150; the second mounting groove 160 is provided with a plurality of second magnets 180, and the plurality of second magnets 180 are arranged along the length direction of the second mounting groove 160. Thus, the volume of a single first magnet 170 and a second magnet 180 is reduced while ensuring the length of the magnetic field, thereby facilitating the procurement and installation of the first magnet 170 and the second magnet 180.

[0043] In some specific embodiments, the target core assembly 130 includes a central water pipe 230 and a magnetic shoe 240. The magnetic shoe 240 is installed on the radial side of the central water pipe 230. The first mounting groove 150 and the second mounting groove 160 are set on the magnetic shoe 240. It should be explained that the magnetic shoe 240 is made of high magnetic permeability material, which can control the direction of the magnetic induction line. It functions like the iron core of a transformer coil. The magnetic field has the characteristic of spontaneously transmitting along a path with low resistance. When the magnetic shoe 240 is placed near the magnet, the magnetic field will be transmitted along the magnetic shoe 240, thereby making the magnetic field generated by the magnetic core mechanism 120 more stable.

[0044] In some specific embodiments, a first positioning portion 250 is provided on a radial side of the central water pipe 230, and a second positioning portion 260 is provided on the side of the magnetic shoe 240 facing away from the magnet assembly 140. The second positioning portion 260 cooperates with the first positioning portion 250 for positioning, thereby facilitating the positioning and installation of the magnetic shoe 240 and the central water pipe 230 during assembly.

[0045] Specifically, the first positioning portion 250 is a notch on one side of the central water pipe 230 , and a convex strip is provided in the middle of the bottom wall of the notch. The second positioning portion 260 is a groove, and the groove cooperates with the convex strip for positioning.

[0046] Furthermore, a first bolt is provided on the magnetic shoe 240, and the first bolt is threadedly connected to the central water pipe 230 to fix the magnetic shoe 240 on the central water pipe 230, thereby fixing the magnetic shoe 240 on the central water pipe 230 by the first bolt, thereby facilitating the disassembly and assembly of the magnetic shoe 240 and the central water pipe 230.

[0047] The first motor 300 is used to drive the tube target 110 to rotate along the axis of the target core assembly 130 .

[0048] It can be understood that the first motor 300 can drive the tube target 110 to rotate relative to the magnetic core mechanism 120, so that the magnetic core mechanism 120 can bombard the positive ions at different positions of the tube target 110, and further, the surface components of the tube target 110 can be uniformly consumed along the circumference of the tube target 110 during sputtering, thereby improving the utilization rate of the surface components of the tube target 110.

[0049] Reference Figure 5 In some specific embodiments, the lower power connection assembly 200 includes a carbon brush 270, a limit seat 210, and a conductive member 280. The carbon brush 270 is set on the limit seat 210 and is connected to the power supply. The conductive member 280 is connected to the tube target 110. When the tube target 110 rotates to drive the conductive member 280 to rotate synchronously, the conductive member 280 and the carbon brush 270 contact and conduct electricity through friction.

[0050] It can be understood that the carbon brush 270 is set on the limit seat 210 and is connected to the power supply. At the same time, the conductive member 280 is connected to the tube target 110. When the tube target 110 rotates to drive the conductive member 280 to rotate synchronously, the carbon brush 270 and the conductive member 280 can be connected through friction contact, so that the power supply does not rotate with the tube target 110, thereby facilitating the arrangement of the wires of the lower power connection assembly 200 and, further, facilitating the electrical conduction between the lower power connection assembly 200 and the tube target 110.

[0051] In some specific embodiments, the carbon brush 270 is slidably arranged on the limit seat 210 along the direction of the rotation axis of the tube target 110, and a first spring 290 is also arranged between the carbon brush 270 and the limit seat 210. The first spring 290 is used to squeeze the carbon brush 270 so that the carbon brush 270 is in close contact with the conductive member 280.

[0052] It is understandable that during the long-term friction between the carbon brush 270 and the conductive part 280, the carbon brush 270 and the conductive part 280 are easily worn, resulting in the length of the carbon brush 270 and the conductive part 280 becoming smaller. By providing a first spring 290 between the carbon brush 270 and the limit seat 210, when the carbon brush 270 and the conductive part 280 are worn, the first spring 290 can squeeze the carbon brush 270 close to the conductive part 280, so that the carbon brush 270 and the conductive part 280 can maintain contact and conduction.

[0053] In some specific embodiments, a plurality of carbon brushes 270 are provided, and the plurality of carbon brushes 270 are arranged circumferentially along the rotation axis of the rotating base 210, and the limit seat 210 is provided with a plurality of sliding grooves for accommodating the sliding of the carbon brushes 270, so that the plurality of carbon brushes 270 are in contact with the conductive part 280 at the same time, thereby avoiding the detachment of a certain carbon brush 270 from the conductive part 280 and causing the failure of the connection between the carbon brush 270 and the conductive part 280.

[0054] Reference Figure 6 In some specific embodiments, the upper electrical component 190 is configured as a magnetic fluid, which includes a sealing seat 320 and a conductive tube 330 rotatably arranged in the sealing seat 320. The sealing seat 320 is connected to the conductive tube 330. The sealing seat 320 is used to connect to a power source, and the conductive tube 330 is connected to the tube target 110.

[0055] It can be understood that by providing a magnetic fluid to conduct the power supply and the tube target 110, there is good electrical conductivity between the sealing seat 320 of the magnetic fluid and the conductive tube 330, and the conductive tube 330 can be rotated relative to the sealing seat 320. Therefore, when the tube target 110 rotates, the power supply can rotate independently of the tube target 110, thereby facilitating the wiring arrangement of the upper electrical component 190.

[0056] Specifically, a bearing and a magnetic liquid are provided between the sealing seat 320 and the conductive tube 330 . The bearing is used to support the sealing seat 320 and the conductive tube 330 . The magnetic liquid forms a sealed liquid layer through the action of a magnetic field to achieve a sealing effect.

[0057] In some specific embodiments, a transmission belt 310 is provided between the rotating shaft of the first motor 300 and the conductive tube 330. The transmission belt 310 is used for transmission between the first motor 300 and the conductive tube 330, so that the first motor 300 can be arranged on one side of the conductive tube 330, thereby making the position arrangement of the first motor 300 more flexible.

[0058] In some specific embodiments, a water inlet pipe and a water return seat are further included. The water inlet pipe is connected to one end of the target core assembly 130. The inner hole of the conductive tube 330 accommodates the water inlet pipe. One end of the conductive tube 330 is connected to and sealed at one end of the tube target 110. The conductive member 280 is used to block the other end of the target core assembly 130 and connect and seal the other end of the tube target 110. The side wall of the target core assembly 130 away from the water inlet pipe has a first through hole. The first through hole connects the inner side and the outer side of the target core assembly 130. The water return seat has a water return cavity. The water return cavity is connected to the end of the conductive tube 330 away from the tube target 110. After entering from the water inlet pipe, the cooling water flows through the interior of the target core assembly 130, the first through hole, between the outer side of the target core assembly 130 and the tube target 110, between the outer side of the water inlet pipe and the conductive tube 330, and the water return cavity in sequence, so that the cooling water can circulate and cool the tube target 110.

[0059] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the illustrative use of the above terms does not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0060] The embodiments of the present invention are described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made within the scope of knowledge possessed by ordinary technicians in the technical field without departing from the purpose of the present invention.

Claims

1. A column arc target device for a vacuum coating machine, characterized in that: include: The power connection mechanism (100) comprises an upper power connection component (190) and a lower power connection component (200), wherein the upper power connection component (190) and the lower power connection component (200) are respectively electrically connected to two ends of the tube target (110) and are used to alternately supply power to the tube target (110); The magnetic core mechanism (120) is located in the tube target (110) and includes a target core assembly (130) and a magnet assembly (140). The target core assembly (130) is coaxially arranged with the tube target (110). The magnet assembly (140) is arranged on one radial side of the target core assembly (130). The outer cylindrical surface of the target core assembly (130) has a first mounting groove (150) and two second mounting grooves (160) respectively located on both sides of the first mounting groove (150). The length direction of the first mounting groove (150) and the second mounting groove (160) are parallel to each other. The target core assembly (130) is axially arranged, and the magnet assembly (140) includes a first magnet (170) and a second magnet (180) with opposite magnetic poles, the first mounting groove (150) is mounted with the first magnet (170), and the second mounting groove (160) is mounted with the second magnet (180), and the first magnet (170) and the second magnet (180) are used to cooperate to generate a balanced closed-loop magnetic field, and the balanced closed-loop magnetic field is used to sputter the surface components of the tube target (110) toward the radial side of the target core assembly (130); The first motor (300) is used to drive the tube target (110) to rotate along the axis of the target core assembly (130).

2. The column arc target device of a vacuum coating machine according to claim 1, characterized in that: The magnet assembly (140) further includes two third magnets (220), wherein the magnetic poles of the third magnets (220) are oriented in the opposite direction to the magnetic poles of the first magnet (170), and the two third magnets (220) are respectively arranged at the two ends of the first mounting groove (150), and the distance between the third magnets (220) and the first magnet (170) is not less than 10 mm. The first magnet (170), the second magnet (180) and the third magnet (220) are used to cooperate to generate the balanced closed-loop magnetic field.

3. The column arc target device of a vacuum coating machine according to claim 1, characterized in that: The first mounting groove (150) is provided with a plurality of the first magnets (170), and the plurality of the first magnets (170) are arranged along the length direction of the first mounting groove (150); the second mounting groove (160) is provided with a plurality of the second magnets (180), and the plurality of the second magnets (180) are arranged along the length direction of the second mounting groove (160).

4. The column arc target device of a vacuum coating machine according to claim 1, characterized in that: The target core assembly (130) comprises a central water pipe (230) and a magnetic shoe (240), wherein the magnetic shoe (240) is mounted on a radial side of the central water pipe (230), and the first mounting groove (150) and the second mounting groove (160) are arranged on the magnetic shoe (240).

5. The column arc target device of a vacuum coating machine according to claim 4, characterized in that: A first positioning portion (250) is provided on one radial side of the central water pipe (230), and a second positioning portion (260) is provided on a side of the magnetic shoe (240) facing away from the magnet assembly (140), wherein the second positioning portion (260) cooperates with the first positioning portion (250) for positioning.

6. The column arc target device of a vacuum coating machine according to claim 4, characterized in that: The magnetic shoe (240) is provided with a first bolt, and the first bolt is threadedly connected to the central water pipe (230) to fix the magnetic shoe (240) on the central water pipe (230).

7. The column arc target device of a vacuum coating machine according to claim 1, characterized in that: The lower power connection assembly (200) comprises a carbon brush (270), a limit seat (210) and a conductive member (280); the carbon brush (270) is arranged on the limit seat (210) and is connected to a power source; the conductive member (280) is connected to the tube target (110); when the tube target (110) rotates to drive the conductive member (280) to rotate synchronously, the conductive member (280) and the carbon brush (270) contact and conduct electricity through friction.

8. The column arc target device of a vacuum coating machine according to claim 7, characterized in that: The carbon brush (270) is slidably arranged on the limiting seat (210) along the direction of the rotation axis of the tube target (110), and a first spring (290) is further arranged between the carbon brush (270) and the limiting seat (210). The first spring (290) is used to press the carbon brush (270) so that the carbon brush (270) is in close contact with the conductive member (280).

9. The column arc target device of a vacuum coating machine according to claim 1, characterized in that: The upper electrical component (190) is configured as a magnetic fluid, the magnetic fluid comprising a sealing seat (320) and a conductive tube (330) rotatably disposed in the sealing seat (320), the sealing seat (320) being in conduction with the conductive tube (330), the sealing seat (320) being used to connect to a power source, and the conductive tube (330) being connected to the tube target (110).

10. The column arc target device of a vacuum coating machine according to claim 9, characterized in that: A transmission belt (310) is provided between the rotating shaft of the first motor (300) and the conductive tube (330), and the transmission belt (310) is used for transmission between the first motor (300) and the conductive tube (330).

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