Crucible for vacuum evaporation

Abstract

The crucible for vacuum evaporation comprises a crucible main body and a crucible cover body, the crucible cover body covers the crucible main body, the crucible cover body comprises a left side cover and a right side cover, the left side cover is fixedly connected with the right side cover, and the left side cover and the right side cover are oppositely arranged left and right. A spacing area is arranged between the left side cover and the right side cover and is positioned in the middle of the crucible cover body. The crucible main body is used for placing the to-be-plated material, and the left side cover and the right side cover cover the part of the crucible, so that during heating, the pressure in the crucible is increased, the pressure borne by the to-be-plated material in the crucible is increased, and the evaporation material evaporated in the crucible rushes out of the spacer region and collides with an evaporation target object at a higher acceleration; and the binding force between the evaporation target object and the to-be-plated material is larger.

Description

Technical Field

[0001] The utility model relates to the field of vacuum evaporation, in particular to a crucible used for vacuum evaporation. Background Art

[0002] Vacuum evaporation, or simply evaporation, refers to a process in which a coating material (or film material) is evaporated under vacuum conditions using a specific heating evaporation method, causing the vaporized particles to fly to the substrate surface and condense into a film. Currently, due to the rise of composite current collectors, vacuum evaporation is increasingly used in their production. However, composite current collectors produced using current vacuum evaporation equipment have a weak bond between the metal and the film, making them prone to detachment. Utility Model Content

[0003] In view of the above-mentioned deficiencies in the prior art, an object of the present invention is to provide a crucible for vacuum evaporation.

[0004] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0005] The utility model provides a crucible for vacuum evaporation, comprising a crucible body and a crucible cover, wherein the crucible cover is arranged on the crucible body, the crucible cover comprises a left cover and a right cover, the left cover is fixedly connected to the right cover, the left cover and the right cover are arranged opposite to each other on the left and right, a spacer is provided between the left cover and the right cover, and the spacer is located in the middle of the crucible cover.

[0006] Specifically, in the crucible for vacuum evaporation, the spacing between the left cover and the right cover is 2 cm to 5 cm.

[0007] Specifically, for the crucible for vacuum evaporation, the thickness of the left cover is 1 cm to 3 cm, and the thickness of the right cover is 1 cm to 3 cm.

[0008] Specifically, in the crucible for vacuum evaporation, the spacer is a rectangular spacer opening, and the width of the spacer is 2 cm to 5 cm.

[0009] Specifically, in the crucible for vacuum evaporation, the crucible body is a cylindrical crucible body, the crucible cover is a circular cover, and the length of the spacer is smaller than the inner diameter of the crucible body.

[0010] Specifically, in the crucible for vacuum evaporation, the left cover and the right cover are graphite covers.

[0011] Specifically, in the crucible for vacuum evaporation, the inner diameter of the crucible body is 100 mm-120 mm, and the outer diameter of the crucible body is 120 mm-140 mm.

[0012] Specifically, the crucible for vacuum evaporation has a crucible body made of silicon nitride or silicon carbide.

[0013] Specifically, in the crucible for vacuum evaporation, the four top corners of the spacing area are chamfered and transitionally arranged.

[0014] Specifically, in the crucible for vacuum evaporation, the diameter of the crucible cover is larger than the outer diameter of the crucible body.

[0015] Compared to the prior art, the present invention provides a crucible for vacuum evaporation, comprising a crucible body and a crucible cover, wherein the crucible cover is arranged on the crucible body, and the crucible cover comprises a left cover and a right cover, wherein the left cover is fixedly connected to the right cover, the left cover and the right cover are arranged opposite to each other on the left and right sides, and a spacer is provided between the left cover and the right cover, wherein the spacer is located in the middle of the crucible cover. The crucible body of the present invention is used to place the material to be plated. Since the left cover and the right cover cover part of the crucible, when heated, the pressure inside the crucible increases, and the pressure on the material to be plated inside increases. The evaporated evaporation material inside gushes out from the spacer and hits the evaporation target with a greater acceleration, thereby making the bonding force between the evaporation target and the material to be plated greater. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0017] Figure 1 This is a schematic structural diagram of a crucible for vacuum evaporation provided by the present invention.

[0018] Figure 2 The present invention is a schematic diagram of the top view of the crucible cover for vacuum evaporation of the crucible provided by the present invention.

[0019] Description of Figure Numbers:

[0020] Crucible body 100

[0021] Crucible cover 200

[0022] Left side cover 210

[0023] Right side cover 220

[0024] Spacer 230 DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0026] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the various components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indications will also change accordingly.

[0027] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features specified as "first" or "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between the various embodiments can be combined with each other, but this must be based on the fact that ordinary technicians in this field can implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0028] like Figure 1 and Figure 2As shown, the present invention provides a crucible for vacuum evaporation, including a crucible body 100 and a crucible cover 200, wherein the crucible cover 200 is covered on the crucible body 100, and the crucible cover 200 includes a left cover 210 and a right cover 220, wherein the left cover 210 is fixedly connected to the right cover 220, and the left cover 210 and the right cover 220 are arranged opposite to each other on the left and right sides, and a spacer 230 is provided between the left cover 210 and the right cover 220, and the spacer 230 is located in the middle of the crucible cover 200. The crucible cover 200 of the present invention is divided into a left cover 210 and a right cover 220. The left cover 210 is arranged on one side of the crucible opening, while the right cover 220 is arranged on the other side of the crucible opening. The left cover 210 and the right cover 220 are arranged opposite to each other, and the ends of the left cover 210 and the right cover 220 are connected. There is a certain distance between the left cover 210 and the right cover 220 on the side near the center of the crucible opening. The crucible body 100 of the present invention is used to place the material to be plated. Since the left cover 210 and the right cover 220 cover part of the crucible, when heated, the pressure inside the crucible increases, and the pressure on the material to be plated inside increases. The evaporated deposition material inside gushes out from the spacer 230 and hits the deposition target with greater acceleration, making the deposition target and the deposition material more bonded.

[0029] Specifically, in the crucible for vacuum evaporation provided by the present invention, the spacing between the left cover 210 and the right cover 220 is 2 cm to 5 cm. The spacing between the spacing 230 is preferably 2 cm to 5 cm, which can ensure a high level of bonding between the material to be plated and the film.

[0030] Specifically, the crucible for vacuum evaporation provided by the present invention has a thickness of 1cm-3cm for the left cover 210 and a thickness of 1cm-3cm for the right cover 220. Such a thickness of the cover can ensure the strength of the graphite cover and also ensure that the crucible will not be pushed open by the internal gas pressure of the crucible during the evaporation process.

[0031] Specifically, the crucible for vacuum evaporation provided by the present invention has a rectangular spacer 230 with a width of 2 cm to 5 cm. The rectangular spacer 230 of the present invention can make the material to be plated on the film more uniform.

[0032] Specifically, in the crucible for vacuum evaporation provided by the present invention, the crucible body 100 is a cylindrical crucible body, the crucible cover 200 is a circular cover, and the length of the spacer 230 is smaller than the inner diameter of the crucible body 100 .

[0033] Specifically, the crucible for vacuum evaporation provided by the present invention comprises a graphite cover, the left cover 210 and the right cover 220. Graphite is heat-resistant, reaching temperatures of up to 1500°C, allowing for long-term use in the crucible, thereby increasing the lifespan of the crucible cover. Specifically, the four top corners of the spacer 230 are chamfered.

[0034] Specifically, the crucible for vacuum evaporation provided by the present invention has an inner diameter of the crucible body 100 of 100 mm to 120 mm, and an outer diameter of the crucible body 100 of 120 mm to 140 mm. For example, if the inner diameter of the crucible body 100 is set to 100 mm, then the outer diameter of the crucible body 100 can be set to 120 mm; if the inner diameter of the crucible body 100 is set to 110 mm, then the outer diameter of the crucible body 100 can be set to 130 mm; if the inner diameter of the crucible body 100 is set to 120 mm, then the outer diameter of the crucible body 100 can be set to 140 mm. This design ensures that the material to be plated placed in the crucible will not remain at the bottom of the crucible after plating. If this remains at the bottom, after evaporation stops and the crucible cools, the remaining material to be plated will cool and solidify, damaging the crucible. Of course, the wall thickness of the crucible body 100 can be controlled to 10 mm to 20 mm to ensure sufficient strength to withstand a certain amount of pressure. Specifically, the crucible for vacuum evaporation provided by the present invention has a crucible body 100 made of silicon nitride or silicon carbide. Of course, other high-temperature materials may also be used. Specifically, the crucible for vacuum evaporation provided by the present invention has a crucible cover 200 with a diameter greater than the outer diameter of the crucible body 100. This facilitates handling of the crucible cover 200 and prevents heat leakage from the crucible, reducing heat loss.

[0035] In other embodiments, the spacer 230 can be set to a larger size, and then a first spacer can be installed in the spacer 230. The first spacer can be embedded in the spacer 230, and the spacer has a first spacing opening, and the first spacing opening is a proportionally reduced size of the spacer 230. Multiple spacers can be provided. For example, a second spacer can be installed in the first spacing opening, and the second spacer can be embedded in the first spacing opening. The second spacer has a second spacing opening, and the second spacing opening is a proportionally reduced size of the first spacing opening. For another example, further, a third spacer can be installed in the second spacing opening, and the third spacer can be embedded in the second spacing opening. The third spacer has a third spacing opening, and the third spacing opening is a proportionally reduced size of the second spacing opening, and so on.

[0036] In summary, the crucible cover of the present invention is divided into a left cover portion and a right cover portion. The left cover portion is arranged on one side of the crucible opening, while the right cover portion is arranged on the other side of the crucible opening. The left cover portion and the right cover portion are arranged opposite to each other, and the ends of the left cover portion and the right cover portion are connected. There is a certain distance between the left cover portion and the right cover portion on the side close to the center of the crucible opening. The crucible body of the present invention is used to place the material to be plated. Since the left cover and the right cover cover part of the crucible, when heated, the pressure inside the crucible increases, and the pressure on the material to be plated inside increases. The evaporated deposition material inside surges out of the spacing area and hits the deposition target with greater acceleration, making the deposition target and the material to be plated more bonded.

[0037] The above description is only a preferred embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made by using the contents of the present invention specification and drawings under the utility model concept, or direct / indirect application in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A crucible for vacuum evaporation, characterized in that, The crucible comprises a crucible body and a crucible cover, wherein the crucible cover is arranged on the crucible body, the crucible cover comprises a left cover and a right cover, the left cover is fixedly connected to the right cover, the left cover and the right cover are arranged opposite to each other on the left and right sides, a spacer is provided between the left cover and the right cover, and the spacer is located in the middle of the crucible cover.

2. The crucible for vacuum evaporation according to claim 1, characterized in that: The spacing between the left cover and the right cover is 2 cm to 5 cm.

3. The crucible for vacuum evaporation according to claim 2, characterized in that: The thickness of the left cover is 1cm-3cm, and the thickness of the right cover is 1cm-3cm.

4. The crucible for vacuum evaporation according to claim 3, characterized in that: The spacer is a rectangular spacer opening, and the width of the spacer is 2cm-5cm.

5. The crucible for vacuum evaporation according to claim 4, characterized in that: The crucible body is a cylindrical crucible body, the crucible cover is a circular cover body, and the length of the spacer is smaller than the inner diameter of the crucible body.

6. The crucible for vacuum evaporation according to claim 5, characterized in that: The left cover and the right cover are graphite cover bodies.

7. The crucible for vacuum evaporation according to claim 5, characterized in that: The inner diameter of the crucible body is 100 mm to 120 mm, and the outer diameter of the crucible body is 120 mm to 140 mm.

8. The crucible for vacuum evaporation according to claim 6, characterized in that: The crucible body is a silicon nitride crucible body or a silicon carbide crucible body.

9. The crucible for vacuum evaporation according to claim 4, characterized in that: The four top corners of the spacer area are chamfered and transitionally arranged.

10. The crucible for vacuum evaporation according to claim 1, characterized in that: The crucible cover has a diameter greater than an outer diameter of the crucible body.

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