Positioning and locking mechanism of wafer box

Abstract

The utility model relates to the technical field of wafer processing, in particular to a wafer box positioning and locking mechanism which comprises a bottom plate, a plurality of positioning pins are distributed on the bottom plate, and the positioning pins are matched with clamping grooves in the bottom of an external wafer box; a locking mechanism is arranged below the multiple bottom plates, the positioning mechanism comprises a locking buckle, and the locking buckle is matched with a locking opening in the bottom of the wafer box; and the locking buckle passes through the abdicating hole from the lower part of the bottom plate so as to be in contact with the locking opening and lock the wafer box. The device has the beneficial effects that when the wafer box is placed on the bottom plate by an external mechanical arm, a tool and the like, the automatic alignment adjustment process can be realized by inserting the positioning pin, the locking of the wafer box is realized through the locking buckle at the bottom, and then the wafer can be taken and placed. In the process, a mechanical arm does not need to be introduced for adjustment and control, and the wafer box can be used only by replacing the bottom plate for supporting the wafer box on the original process equipment, so that the use cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to a wafer box positioning and locking mechanism. Background Art

[0002] A wafer cassette is a device used to store and transfer wafers during wafer processing, including etching and cleaning. It typically includes multiple wafer racks for supporting and securing wafers, and an external housing. The housing is equipped with a lid for easy access to the wafers. During processing, when a wafer needs to be transferred to the next process node, it is placed in the wafer cassette using a robotic arm or other device. After reaching the corresponding process node, the wafer is removed from the wafer cassette using a robotic arm or other device.

[0003] In the prior art, considering that the wafer needs to reduce collisions, vibrations and other problems during processing, it is usually necessary to control the position of the wafer box and lock it before taking and placing the wafer, so that the subsequent wafer taking and placing actions are accurate. For example, Chinese patent CN202010073040.4 discloses a wafer box clamping device and a wafer cleaning machine. The clamping device includes a base plate, a support assembly, a clamping rod, a clamping arm, a motion track cylinder, a push plate and a power mechanism, wherein: the two clamping rods are rotatably mounted on the base plate through the support assembly; at least one pair of clamping arms are respectively mounted on the clamping rods and rotate coaxially with the clamping rods; the two motion track cylinders are respectively mounted on the two clamping rods, the motion track cylinder rotates coaxially with the clamping rod, and a guide groove is provided on the motion track cylinder, which is not parallel to the axis of the motion track cylinder; the power mechanism is connected to the push plate, and the two ends of the push plate are respectively inserted into the guide grooves. The power mechanism drives the push plate to move to drive the motion track cylinder and the clamping rod to rotate, and then drive the clamping arm to rotate.

[0004] However, during the actual implementation process, the inventor discovered that the above solution mainly relies on sensors and induction parts to detect the position of the wafer box. When the corresponding position is detected, a corresponding signal is generated to control the arm to move and clamp the wafer box in place, resulting in a relatively complex and costly overall control process. Utility Model Content

[0005] In view of the above problems existing in the prior art, a wafer box positioning and locking mechanism is now provided.

[0006] The specific technical solutions are as follows:

[0007] A wafer box positioning and locking mechanism, comprising:

[0008] A positioning unit, comprising a base plate and a plurality of positioning pins provided on the base plate, wherein the positioning pins match with the slots at the bottom of the wafer box to position the wafer box;

[0009] The locking unit includes a braking device and a locking buckle arranged below the base plate. The braking device drives the locking buckle to pass through the clearance hole of the base plate to contact the locking port of the wafer box to lock the wafer box.

[0010] On the other hand, the braking device is provided with a plurality of photoelectric switches distributed on the bottom plate, and the sensing parts of the photoelectric switches are directed upwards of the bottom plate.

[0011] On the other hand, the number of the positioning pins is three, and the positioning pins are distributed in an isosceles triangle on the bottom plate;

[0012] The positioning pins include a first bottom side positioning pin, a second bottom side positioning pin and a vertex positioning pin, and the line connecting the first bottom side positioning pin and the second bottom side positioning pin is the base of an isosceles triangle;

[0013] The positioning unit further includes a positioning detection component, which is distributed on the base plate and matched with the positioning pin arrangement, and is used to detect whether the wafer is placed stably.

[0014] The photoelectric switch comprises:

[0015] a first photoelectric switch, the first photoelectric switch being located on a side of the central axis of the isosceles triangle close to the first base positioning pin, and the first photoelectric switch being also located on an outer side of the base;

[0016] a second photoelectric switch, the second photoelectric switch being located on a side of the central axis of the isosceles triangle close to the second base positioning pin, and the second photoelectric switch being also located outside the base;

[0017] The third photoelectric switch is located on the left or right side of the vertex positioning pin and outside the isosceles triangle.

[0018] On the other hand, the braking device comprises:

[0019] A buckle fixing frame, the buckle fixing frame is fixed to a position below the bottom plate corresponding to the side of the clearance hole, and the buckle shaft of the locking buckle is fixed to the buckle fixing frame;

[0020] A pushing device, the pushing device is fixed below the bottom plate, and the push rod of the pushing device is connected to the locking buckle via a pushing shaft on the locking buckle;

[0021] The push rod is extended or shortened to extend or retract the locking buckle.

[0022] On the other hand, the locking buckle includes:

[0023] An arc segment, the arc segment being an L-shaped arc, and the arc segment and the locking opening being matched with each other;

[0024] a straight extension segment, the straight extension segment being connected to the circular arc segment;

[0025] The buckle shaft is provided at the middle position of the straight extension section, and the buckle shaft passes through the buckle shaft bearing on the buckle fixing frame;

[0026] The end point of the straight extension section away from the arc section is provided with the pushing shaft, and the pushing shaft passes through the pushing shaft bearing on the push rod.

[0027] On the other hand, the pushing device includes:

[0028] A cylinder bracket, the cylinder bracket is U-shaped and inverted below the base plate;

[0029] A cylinder is fixed in the accommodating space in the middle of the cylinder bracket;

[0030] The push rod is installed in the cylinder.

[0031] On the other hand, the middle part of the push rod is provided with a quick-tightening joint;

[0032] The cylinder support fixes the cylinder via a cylinder support rotating shaft.

[0033] On the other hand, the bottom plate is in the shape of a rounded rectangle, and the curvature of the rounded corner on the side close to the vertex positioning pin is greater than the curvature of the rounded corner on the side away from the vertex positioning pin.

[0034] The above technical solution has the following advantages or beneficial effects:

[0035] In view of the problem that the wafer box positioning device in the prior art relies on sensors to control the robotic arm, and its control process is relatively complex and costly, in this embodiment, the base plate used to support the wafer box is improved, and a plurality of positioning pins are provided on the base plate. When the wafer box is placed on the base plate by an external robotic arm, tooling, etc., the automatic alignment adjustment process can be achieved by inserting the positioning pins. Finally, after the wafer box falls to the bottom, the locking buckle at the bottom is used to lock the wafer box, and then the wafer can be taken in and out. The above process does not require the introduction of a robotic arm for adjustment and control, and only requires the replacement of the base plate used to support the wafer box on the original process equipment, which reduces the cost of use. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] The embodiments of the present invention will be described more fully with reference to the accompanying drawings, which are for illustration and description only and are not intended to limit the scope of the present invention.

[0037] Figure 1 It is an overall schematic diagram of an embodiment of the utility model;

[0038] Figure 2 This is a schematic diagram of a positioning pin in an embodiment of the present utility model;

[0039] Figure 3 This is a schematic diagram of a buckle bracket in an embodiment of the present utility model;

[0040] Figure 4 Schematic diagram of the pushing device in the embodiment of the present utility model. DETAILED DESCRIPTION

[0041] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0042] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features therein can be combined with each other.

[0043] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, but they are not intended to limit the present invention.

[0044] The utility model includes:

[0045] A wafer box positioning and locking mechanism, such as Figure 1 As shown, including:

[0046] The positioning unit comprises a base plate and a plurality of positioning pins 1 arranged on the base plate;

[0047] A bottom plate is provided with a plurality of positioning pins 1, which match the slots at the bottom of the external wafer box;

[0048] The area surrounded by the multiple positioning pins 1 is a fixed area, and a clearance hole 2 is opened on the fixed area;

[0049] The locking unit includes a brake device 3 and a locking buckle 31. The brake device 3 drives the locking buckle 31 to pass through the clearance hole of the bottom plate to contact the locking port of the wafer box;

[0050] A brake device 3 is provided below the bottom plate. The brake device 3 includes a locking buckle 31. The locking buckle 31 matches the locking opening at the bottom of the wafer box.

[0051] The locking buckle 31 passes through the clearance hole 2 from the bottom of the bottom plate to contact the locking port and lock the wafer box.

[0052] Specifically, in order to address the problem that the wafer box positioning device in the prior art relies on sensors to control the robotic arm, and its control process is relatively complex and costly, in this embodiment, the base plate for supporting the wafer box is improved, and a plurality of positioning pins 1 are provided on the base plate. When the wafer box is placed on the base plate by an external robotic arm, tooling, etc., the card slot at the bottom of the wafer box will automatically fall into the positioning pin 1, and then the positioning pin 1 will press against the side wall to eliminate the position offset generated during placement. After the wafer box falls to the bottom, the locking buckle 31 under the base plate extends out, passes through the clearance hole 2 and buckles into the locking port at the bottom of the wafer box, thereby locking the wafer box and facilitating the removal and placement of wafers. The above process does not require the introduction of a robotic arm for adjustment and control, and only requires the base plate for supporting the wafer box to be replaced on the original process equipment, which reduces the cost of use.

[0053] In one embodiment, the positioning unit further includes a positioning detection component, which is distributed on the base plate and matched with the positioning pin 1 to detect whether the wafer is placed stably.

[0054] A plurality of photoelectric switches 4 are distributed on the bottom plate, and the sensing parts of the photoelectric switches 4 point upwards of the bottom plate.

[0055] Specifically, in order to achieve a better control effect, in this embodiment, a plurality of photoelectric switches are set on the bottom plate. By sensing the output signal of the photoelectric switch 4, the triggering status of the photoelectric switch 4 is obtained, so that it is easy to judge whether the wafer box has landed accurately on the bottom plate; when the wafer box has landed accurately on the bottom plate, the locking buckle is fastened, thereby avoiding the problem of the locking buckle being locked incorrectly and the wafer box not falling into place. In one embodiment, as Figure 2 As shown, there are three positioning pins 1, and the positioning pins 1 are distributed in an isosceles triangle on the bottom plate;

[0056] The positioning pin 1 includes a first bottom side positioning pin 11, a second bottom side positioning pin 12 and a vertex positioning pin 13. The line connecting the first bottom side positioning pin 11 and the second bottom side positioning pin 12 is the base of an isosceles triangle.

[0057] The bottom plate is in the shape of a rounded rectangle, and the curvature of the rounded corners on the side close to the vertex positioning pin 13 is greater than the curvature of the rounded corners on the side away from the vertex positioning pin 13 .

[0058] The photoelectric switch 4 includes:

[0059] A first photoelectric switch 41 is located on the side of the central axis of the isosceles triangle close to the first bottom edge positioning pin 11, and the first photoelectric switch 41 is also located outside the bottom edge;

[0060] A second photoelectric switch 42 is located on the side of the central axis of the isosceles triangle close to the second bottom edge positioning pin 12, and the second photoelectric switch 42 is also located on the outside of the bottom edge;

[0061] The third photoelectric switch 43 is located on the left or right side of the vertex positioning pin 13 and outside the isosceles triangle.

[0062] Specifically, in order to achieve better detection of the falling condition of the wafer box, in this embodiment, the positioning pins 1 are arranged in an isosceles triangle, so that the positioning pins 1 arranged in this manner can achieve a better alignment process during the falling process of the wafer box; at the same time, by controlling the positions of the first photoelectric switch 41, the second photoelectric switch 42 and the third photoelectric switch 43 to be distributed next to the corresponding positioning pins 1, it is possible to judge whether each slot of the wafer box is accurately inserted into the corresponding positioning pins 1 during the falling process of the wafer box along the positioning pins 1; when any photoelectric switch 4 fails to correctly output the corresponding trigger signal, it indicates that the wafer box has not correctly fallen onto the corresponding positioning pin 1.

[0063] In one embodiment, Figure 3 As shown, the braking device 3 includes:

[0064] The buckle fixing frame 32 is fixed at a position corresponding to the clearance hole below the bottom plate, and the buckle shaft 311 of the locking buckle 31 is fixed on the buckle fixing frame 32;

[0065] The pushing device 33 is fixed below the bottom plate, and the push rod 331 of the pushing device 33 is connected to the locking buckle 31 via the pushing shaft 312 on the locking buckle 31;

[0066] The push rod 331 is extended or shortened to extend or retract the locking buckle 31 .

[0067] Specifically, to achieve the extension and retraction of the locking buckle 31, in this embodiment, a buckle fixing frame 32 extending downward from the bottom of the base plate is configured in the braking device 3. The buckle fixing frame 32 is fixed to the bottom of the base plate at a position corresponding to the clearance hole. The buckle rotation axis 311 of the locking buckle 31 is fixed to the buckle fixing frame 32, so that the locking buckle 31 rotates around the buckle rotation axis 311 on the buckle fixing frame 32, thereby extending or retracting from the clearance slot 2. To achieve this action, a pushing device 33 is also configured. The pushing device 33 is fixed to the bottom of the base plate. The push rod 331 of the pushing device 33 is connected to the locking buckle 31 via the push rotation axis 312 on the locking buckle 31. When the push rod 331 extends, it pushes the locking buckle 31 to flip upward and extend through the clearance hole 2. When the push rod 331 shortens, it pulls the locking buckle 31 to flip downward, thereby achieving the buckle's retraction and extension process.

[0068] In one embodiment, Figure 3 As shown, the locking buckle 31 includes:

[0069] The arc segment 313 is an L-shaped arc, and the arc segment 313 matches the locking opening;

[0070] a straight extension segment 314 , the straight extension segment 314 being connected to the arc segment 313 ;

[0071] A buckle shaft 311 is provided in the middle of the straight extension section 314 , and the buckle shaft 311 passes through a buckle shaft bearing on the buckle fixing frame 32 ;

[0072] A driving shaft 315 is provided at the end point of the straight extension section 314 away from the arc section. The driving shaft 315 passes through a driving shaft bearing on the push rod 331 .

[0073] The push shaft bearing can adopt a deep groove ball shaft to achieve a better fit between the push rod and the locking buckle.

[0074] Specifically, to facilitate the retraction and extension of the locking buckle 31, in this embodiment, an arc segment 313 is formed at the first end of the linear extension 314. Arc segment 313 is L-shaped and mates with the locking opening to lock the buckle when extended. A buckle shaft 311 is disposed in the middle of the linear extension 314. Buckle shaft 311 passes through a buckle shaft bearing on the buckle fixing frame 32, serving as the shaft during the pushing process. A push shaft 315 is disposed at the endpoint of the linear extension 314 away from the arc segment. Push shaft 315 passes through a push shaft bearing on the push rod 331, facilitating its engagement with the push rod 331. When the push rod 331 is extended or shortened, the push shaft 315 rotates.

[0075] In one embodiment, Figure 4 As shown, the pushing device 33 includes:

[0076] The cylinder bracket 332 is inverted in a U shape below the bottom plate;

[0077] The cylinder 333 is fixed in the accommodation space in the middle of the cylinder bracket 332;

[0078] A push rod 331 is installed in the cylinder 333 .

[0079] Specifically, to achieve the retraction and extension of the locking buckle 31, in this embodiment, a U-shaped cylinder bracket is inverted below the base plate. A cylinder 333 is fixed to the central space of the cylinder bracket 332. Cylinder 333 is positioned at a roughly predetermined angle toward the buckle holder 32, so that when the push rod 331 is pushed to extend or retract, it can cause the locking buckle 31 to swing. Cylinder 333 can be connected to an external air pump, air power source, or other equivalent device, as long as it can drive the push rod 331 to move.

[0080] In one embodiment, a quick-tighten joint 3311 is provided at the middle portion of the push rod 331;

[0081] The cylinder support 332 fixes the cylinder 333 via the cylinder support rotating shaft 3321 .

[0082] Specifically, in order to achieve better maintainability, in this embodiment, a quick-screw joint 3311 is provided in the middle part of the push rod 331, so that the push rod can be disconnected from each other on the side close to the locking buckle 31 and the side close to the cylinder 333; at the same time, after the push rod 331 is disconnected, the cylinder 333 can be rotated downward via the cylinder bracket shaft 3321 for easy maintenance.

[0083] The above are only preferred embodiments of the present invention and do not limit the implementation methods and protection scope of the present invention. Those skilled in the art should be aware that all solutions obtained by equivalent substitutions and obvious changes made using the description and illustrations of the present invention should be included in the protection scope of the present invention.

Claims

1. A wafer box positioning and locking mechanism, characterized in that: include: A positioning unit, comprising a base plate and a plurality of positioning pins provided on the base plate, wherein the positioning pins match with the slots at the bottom of the wafer box to position the wafer box; The locking unit includes a braking device and a locking buckle arranged below the base plate. The braking device drives the locking buckle to pass through the clearance hole of the base plate to contact the locking port of the wafer box to lock the wafer box.

2. The wafer box positioning and locking mechanism according to claim 1, characterized in that: There are three positioning pins, which are distributed on the bottom plate in an isosceles triangle shape. The clearance holes are opened in the area surrounded by the positioning pins.

3. The wafer box positioning and locking mechanism according to claim 2, characterized in that: The positioning unit further includes a positioning detection component, which is distributed on the base plate and matched with the positioning pin arrangement, and is used to detect whether the wafer is placed stably.

4. The wafer box positioning and locking mechanism according to claim 1, characterized in that: The braking device comprises: A buckle fixing frame, the buckle fixing frame is fixed to a position below the bottom plate corresponding to the side of the clearance hole, and the buckle shaft of the locking buckle is fixed to the buckle fixing frame; A pushing device, the pushing device is fixed below the bottom plate, and the push rod of the pushing device is connected to the locking buckle via a pushing shaft on the locking buckle; The push rod is extended or shortened to extend or retract the locking buckle.

5. The wafer box positioning and locking mechanism according to claim 4, characterized in that: The locking buckle comprises: An arc segment, the arc segment being an L-shaped arc, and the arc segment and the locking opening being matched with each other; a straight extension segment, the straight extension segment being connected to the circular arc segment; The buckle shaft is provided at the middle position of the straight extension section, and the buckle shaft passes through the buckle shaft bearing on the buckle fixing frame; The end point of the straight extension section away from the arc section is provided with the pushing shaft, and the pushing shaft passes through the pushing shaft bearing on the push rod.

6. The wafer box positioning and locking mechanism according to claim 4, characterized in that: The pushing device comprises: A cylinder bracket, the cylinder bracket is U-shaped and inverted below the base plate; A cylinder is fixed in the accommodating space in the middle of the cylinder bracket; The push rod is installed in the cylinder.

7. The wafer box positioning and locking mechanism according to claim 6, characterized in that: The middle part of the push rod is provided with a quick-tightening joint; The cylinder support fixes the cylinder via a cylinder support rotating shaft.

8. The wafer box positioning and locking mechanism according to claim 2, wherein: The bottom plate is in the shape of a rounded rectangle, and the curvature of the rounded corner on the side close to the vertex positioning pin is greater than the curvature of the rounded corner on the side away from the vertex positioning pin.

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