Graphite-based pyrolytic carbon coating equipment

By introducing a stirring shaft and auger structure into the graphite-based pyrolytic carbon coating equipment, combined with a lifting rod and basket design, the problem of incomplete and uneven cleaning of the graphite substrate is solved, achieving a more efficient and uniform cleaning effect, and improving the coating quality and production efficiency.

CN223325130UActive Publication Date: 2025-09-12JIANGSU HENGCHENG SEMICON MATERIALS CO LTD
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Patent Information

Application Number
CN202422722192.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-11-08
Publication Date
2025-09-12
Estimated Expiration
2034-11-08

AI Technical Summary

Technical Problem

In the prior art, the pretreatment and cleaning of the graphite substrate is not thorough, resulting in stubborn pollutants remaining, affecting the adhesion and quality of the coating. In addition, the uneven cleaning leads to uneven coating thickness, increasing the difficulty and cost of subsequent processing.

Method used

A graphite-based pyrolytic carbon coating equipment is used, which includes a stirring shaft and an auger structure in a cleaning tank. The stirring shaft drives the auger to rotate, and combined with the lifting rod and basket design, it can achieve comprehensive and uniform cleaning of the graphite substrate to avoid rapid impact damage.

Benefits of technology

The surface of the graphite substrate is thoroughly cleaned, coating defects and unevenness problems are avoided, the adhesion and quality of the coating are improved, the subsequent process flow is simplified, and the production cost is reduced.

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Abstract

The utility model discloses graphite-based pyrolytic carbon coating equipment, which relates to the technical field of graphite-based processing and comprises a cleaning tank, a stirring shaft is inserted into the cleaning tank in a penetrating manner, an auger is arranged on the outer wall of one end, positioned in the cleaning tank, of the stirring shaft, and a plurality of lifting rods are arranged on the inner wall of the cleaning tank. A plurality of flower baskets are arranged on the sides, close to the stirring shaft, of the lifting rods at equal intervals, hanging rods are fixed to the top ends of the lifting rods, lower hanging barrels are fixed to the positions, located at the bottom ends of the lifting rods, of the cleaning tank, an externally-added motor drives the stirring shaft to rotate in the cleaning tank through a coupler, and the stirring shaft can drive an auger to rotate; according to the cleaning device, the cleaning liquid is arranged in the cleaning tank, so that upward power is generated for cleaning in the cleaning tank, the cleaning liquid can wash the graphite matrix in each flower basket, the cleaning liquid is in circulating contact with the surface of the cleaning liquid, pollutants on the surface of the graphite matrix can be more completely cleaned, and the problem that subsequent processing is affected due to incomplete cleaning is avoided.
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Description

Technical Field

[0001] The utility model relates to the technical field of graphite-based processing, in particular to a graphite-based pyrolytic carbon coating device. Background Art

[0002] Graphite-based pyrolytic carbon coating equipment is mainly used to deposit pyrolytic carbon coatings on graphite substrates to enhance their performance or meet specific application requirements. It is composed of a heating system, reaction chamber, gas control system, vacuum system, temperature control system, and cooling system. The details are as follows:

[0003] Pretreatment: The graphite substrate is subjected to surface treatment, such as polishing, cleaning, drying, etc., to remove surface impurities and processing traces;

[0004] Heating: Start the heating system to heat the reaction chamber to a predetermined temperature (usually between 1200 and 1400°C);

[0005] Introducing reaction gases: hydrocarbon gases (such as methane, propane, etc.) are introduced as carbon sources through a gas control system, while inert gases such as nitrogen or argon are introduced as carrier gases and dilution gases;

[0006] Pyrolytic deposition: At high temperatures, hydrocarbon gases undergo pyrolysis reactions to generate carbon atoms that are deposited on the surface of the graphite substrate to form a pyrolytic carbon coating. At the same time, inert gas discharges waste gases such as hydrogen produced by the reaction out of the reaction chamber.

[0007] Cooling: After the reaction is completed, turn off the heating system and start the cooling system to cool the reaction chamber;

[0008] Post-processing: The graphite substrate after coating is subjected to subsequent processing, such as cleaning and drying, to remove surface residues and improve coating quality.

[0009] In the process of implementing this solution, the inventors found that the following problems existed in the prior art and were not well solved: during the initial pretreatment and cleaning process, the graphite substrate was directly placed in a cleaning tank with a cleaning liquid. This method of immersion can cause the following problems:

[0010] Incomplete cleaning:

[0011] Although immersion cleaning can effectively remove some surface dirt and loosely attached impurities, simple immersion may not be able to completely remove some stubborn oil stains, chemical residues or contaminants embedded in the graphite matrix. These residues may become sources of defects in the subsequent pyrolytic carbon coating process, affecting the adhesion and quality of the coating.

[0012] Surface unevenness:

[0013] Immersion cleaning may not ensure completely consistent cleaning effects across the graphite substrate surface, resulting in variations in the degree of cleaning. This unevenness may lead to uneven coating thickness and adhesion during subsequent coating processes, impacting the overall performance of the coating.

[0014] Inability to remove certain types of contaminants:

[0015] For certain types of contaminants, such as metal oxides and carbides, simple immersion cleaning may not be effective in removing them. These contaminants require more specialized cleaning methods, such as acid cleaning, alkaline cleaning, or mechanical cleaning, to be completely removed.

[0016] Impact on subsequent processes:

[0017] If cleaning is not thorough, residual contaminants may react during the high-temperature process of the pyrolytic carbon coating, producing harmful gases or affecting the chemical stability of the coating. In addition, surface unevenness may also cause thermal stress in the coating during heating, increasing the risk of cracking or peeling of the coating.

[0018] Increase the difficulty of subsequent processing:

[0019] If all contaminants are not completely removed after immersion cleaning, additional cleaning or treatment steps may be required during subsequent coating preparation to compensate; this not only increases process complexity and cost, but may also affect production efficiency and product quality. Utility Model Content

[0020] The main purpose of the utility model is to provide a graphite-based pyrolytic carbon coating device, which can effectively solve the problems in the background technology.

[0021] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0022] The cleaning agent discharging bottling line is connected with the cleaning agent discharging bottling line to form a through-hole, and the cleaning agent discharging bottling line is connected with the cleaning agent discharging bottling line to form a through-hole, and the cleaning agent discharging bottling line is connected with the cleaning agent discharging bottling line to form a through-hole.

[0023] Preferably, the stirring shaft is rotatably connected after passing through the bottom plate, and a plurality of brackets are fixed to the bottom of the stirring shaft, and the ends of the brackets away from the stirring shaft are respectively fixed to the inner walls of the bottom end of the cleaning tank.

[0024] Preferably, the mesh cylinder is sleeved on the outside of the auger, and the horizontal line of the top of the mesh cylinder is higher than the horizontal line of the top of the auger.

[0025] Preferably, the bottoms of the lifting rods are respectively connected to the lower hanging cylinders, the bottoms of the lifting rods are all conical, and the bottoms of the pads are respectively in contact with the tops of the lower hanging cylinders.

[0026] Preferably, the hanging rods are respectively connected to upper hanging tubes that are matched in position.

[0027] Preferably, a drain pipe is obliquely provided at one end of the bottom of the cleaning tank.

[0028] Compared with the prior art, the present invention has the following beneficial effects:

[0029] 1. The external motor drives the stirring shaft to rotate in the cleaning tank through the coupling. The stirring shaft can drive the auger to rotate, thereby generating upward power for the cleaning in the cleaning tank, so that the cleaning liquid can flush the graphite matrix in each flower basket. The circulating contact of the cleaning liquid with its surface can more completely clean the pollutants on its surface, avoiding the problem of affecting subsequent processing due to incomplete cleaning.

[0030] 2. The graphite substrate is placed inside the flower basket. The flower basket can reduce the flushing speed of the cleaning liquid. When the auger rotates, the mesh drum will also weaken the upward force of the cleaning liquid, thereby greatly reducing the flow rate of the cleaning liquid. As a result, the cleaning liquid can slowly contact the surface of the graphite substrate, avoiding the hidden danger of excessive stirring power causing rapid impact of the cleaning liquid and destroying the structural integrity of the graphite substrate.

[0031] 3. There are multiple lifting rods in the cleaning tank. The lifting rods can be limited in the cleaning tank by passing through the lower hanging tube and the hanging rod and the upper hanging tube, which is convenient for subsequent loading and unloading of cleaning materials. There are multiple flower baskets on the lifting rods, which can clean more substrate parts at a time and have better practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 This is a schematic structural diagram of a graphite-based pyrolytic carbon coating device of the utility model;

[0033] Figure 2 This is a schematic diagram of the internal structure of a cleaning tank of a graphite-based pyrolytic carbon coating device according to the present invention after cross-section;

[0034] Figure 3This is a schematic diagram of the separation structure between the hanging rod and the upper hanging cylinder, and the pulling rod and the lower hanging cylinder of a graphite-based pyrolytic carbon coating device of the utility model;

[0035] Figure 4 This is a schematic diagram of the auger structure of a graphite-based pyrolytic carbon coating device of the utility model.

[0036] In the figure: 1. Cleaning tank; 2. Stirring shaft; 3. Bottom plate; 4. Auger; 5. Lifting rod; 6. Flower basket; 7. Hanging rod; 8. Upper hanging cylinder; 9. Lower hanging cylinder; 10. Pad; 11. Net cylinder; 12. Bracket; 13. Drain pipe; 14. Sealed bearing. DETAILED DESCRIPTION

[0037] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific implementation methods.

[0038] like Figure 1-4 As shown, a graphite-based pyrolytic carbon coating equipment comprises a cleaning tank 1, a stirring shaft 2 is inserted through the interior of the cleaning tank 1, an auger 4 is provided on the outer wall of the stirring shaft 2 at one end of the cleaning tank 1, a plurality of lifting rods 5 are provided on the inner wall of the cleaning tank 1, a plurality of flower baskets 6 are equidistantly provided on the side of the lifting rod 5 close to the stirring shaft 2, a hanging rod 7 is fixed to the top of the lifting rod 5, a lower hanging cylinder 9 is fixed to the position of the cleaning tank 1 at the bottom end of the lifting rod 5, an upper hanging cylinder 8 is fixed to the position of the cleaning tank 1 at the hanging rod 7, a pad 10 is fixed to the bottom end of the lifting rod 5, the outer wall of the stirring shaft 2 below the auger 4 is provided with a bottom plate 3, a mesh cylinder 11 is fixed to the top of the bottom plate 3, the bottom of the stirring shaft 2 is connected to the bottom of the cleaning tank 1, and a sealed bearing 14 is provided on the inner bottom of the cleaning tank 1, and the cleaning tank 1 is rotatably connected to the stirring shaft 2 through the sealed bearing 14.

[0039] Specifically, the stirring shaft 2 is connected to the bottom plate 3 after passing through, and a plurality of brackets 12 are fixed to the bottom of the stirring shaft 2. The ends of the brackets 12 away from the stirring shaft 2 are respectively fixed to the inner wall of the bottom end of the cleaning tank 1, so that the rotation of the stirring shaft 2 is more stable.

[0040] Specifically, the net tube 11 is sleeved on the outside of the auger 4, and the horizontal line of the top of the net tube 11 is higher than the horizontal line of the top of the auger 4, which plays a role in reducing the speed.

[0041] Specifically, the bottom of the lifting rod 5 is respectively connected with the lower hanging tube 9, the bottom of the lifting rod 5 is conical, the bottom of the pad 10 is respectively in contact with the top of the lower hanging tube 9, and the hanging rod 7 is respectively connected with the upper hanging tube 8 of matching position, so that the lifting rod 5 can be hung and limited in the cleaning tank 1. The lifting rod 5 with a conical bottom is convenient for passing through the lower hanging tube 9, and the pad 10 is mounted on the top of the lower hanging tube 9 to facilitate supporting the lifting rod 5.

[0042] Specifically, a drain pipe 13 is obliquely provided at one end of the bottom of the cleaning tank 1 to facilitate the discharge of dirty liquid.

[0043] Working principle:

[0044] The external motor drives the stirring shaft 2 to rotate in the cleaning tank 1 through the coupling, and the stirring shaft 2 can drive the auger 4 to rotate, thereby generating an upward power for the cleaning in the cleaning tank 1, so that the cleaning liquid can flush the graphite substrate in each flower basket 6. The circulating contact of the cleaning liquid with its surface can more completely clean the pollutants on its surface, avoiding the problem of affecting subsequent processing due to incomplete cleaning. The graphite substrate is placed inside the flower basket 6, and the flower basket 6 can reduce the flushing speed of the cleaning liquid. When the auger 4 rotates, the net cylinder 11 will also The upward force of the cleaning liquid is weakened, thereby greatly reducing the flow rate of the cleaning liquid, and then the cleaning liquid can slowly contact the surface of the graphite substrate, avoiding the hidden danger of rapid impact of the cleaning liquid caused by excessive stirring power to destroy the structural integrity of the graphite substrate. A plurality of lifting rods 5 are provided in the cleaning tank 1. The lifting rod 5 can be limited in the cleaning tank 1 by passing through the lower hanging tube 9 and the hanging rod 7 and the upper hanging tube 8, which is convenient for subsequent loading and unloading work of cleaning, and a plurality of flower baskets 6 are provided on the lifting rod 5, which can clean more substrate components at a single time and has better practicality.

[0045] The circuits, electronic components and control modules involved are all existing technologies and can be fully implemented by those skilled in the art. Needless to say, the content protected by this utility model does not involve improvements to software and methods.

[0046] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and improvements are intended to fall within the scope of the present invention. The scope of protection claimed in this invention is defined by the appended claims and their equivalents.

Claims

1. A graphite-based pyrolytic carbon coating device, comprising a cleaning tank (1), characterized in that: A stirring shaft (2) is inserted through the interior of the cleaning tank (1), and an auger (4) is provided on the outer wall of the stirring shaft (2) at one end of the cleaning tank (1). A plurality of lifting rods (5) are provided on the inner wall of the cleaning tank (1), and a plurality of flower baskets (6) are equidistantly provided on the side of the lifting rod (5) close to the stirring shaft (2). A hanging rod (7) is fixed to the top of each lifting rod (5), and a lower hanging cylinder (9) is fixed to the bottom end of each lifting rod (5) of the cleaning tank (1). An upper hanging cylinder (8) is fixed at the position of the hanging rod (7), a pad (10) is fixed to the bottom end of the pulling rod (5), the outer wall of the stirring shaft (2) located below the auger (4) is provided with a bottom plate (3), the top of the bottom plate (3) is fixed with a mesh cylinder (11), the bottom of the stirring shaft (2) is connected to the bottom of the cleaning tank (1), and a sealed bearing (14) is provided at the inner bottom of the cleaning tank (1), and the cleaning tank (1) is rotatably connected to the stirring shaft (2) through the sealed bearing (14).

2. The graphite-based pyrolytic carbon coating device according to claim 1, characterized in that: The stirring shaft (2) is rotatably connected to the bottom plate (3) after passing through it. A plurality of brackets (12) are fixed to the bottom of the stirring shaft (2). The ends of the brackets (12) away from the stirring shaft (2) are respectively fixed to the inner wall of the bottom end of the cleaning tank (1).

3. The graphite-based pyrolytic carbon coating device according to claim 1, characterized in that: The net cylinder (11) is sleeved on the outside of the auger (4), and the horizontal line of the top of the net cylinder (11) is higher than the horizontal line of the top of the auger (4).

4. The graphite-based pyrolytic carbon coating device according to claim 1, characterized in that: The bottoms of the lifting rods (5) are respectively connected to the lower hanging cylinders (9), the bottoms of the lifting rods (5) are all conical, and the bottoms of the pads (10) are respectively in contact with the tops of the lower hanging cylinders (9).

5. The graphite-based pyrolytic carbon coating device according to claim 1, characterized in that: The hanging rods (7) are respectively connected to upper hanging cylinders (8) that are matched in position.

6. The graphite-based pyrolytic carbon coating device according to claim 1, characterized in that: A drain pipe (13) is obliquely provided at one end of the bottom of the cleaning tank (1).