Vacuum suction pen

Abstract

The utility model belongs to the technical field of semiconductor equipment, and discloses a vacuum chuck. The pen comprises a pen body, a vacuum generator, a pen point and a light-operated assembly. Light can penetrate through the pen body. The vacuum generator is installed on the pen body and can vacuumize. One end of the pen point is hermetically connected to the vacuum generator through the air pipe, the other end of the pen point is used for adsorbing the semiconductor element, and the vacuum generator can vacuumize the interior of the pen point, so that the semiconductor element is taken and placed through negative pressure under vacuum. The light-operated assembly is arranged on the pen body and connected with the air pipe, and the light-operated assembly is provided with a triggering part capable of sensing light. When the vacuum suction pen is not used, the triggering part senses light, the light-operated assembly can cut off the air pipe, and when the vacuum suction pen is used, the vacuum suction pen is held by hand, and fingers shield the triggering part so as to trigger the light-operated assembly to conduct the air pipe. The vacuum suction pen does not need to be controlled by a mechanical button, and the problem that the vacuum suction pen stops vacuumizing due to mistaken touch is effectively avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a vacuum suction pen. Background Art

[0002] With the development of the semiconductor industry, wafers are widely used in the field of LED chips. During the manufacturing process of wafers, the wafers need to be polished, cleaned and other processes, so the wafers need to be picked up and placed in the designated position.

[0003] Conventional wafer handling involves using a handheld vacuum wand, which offers flexibility and avoids the wear and tear that other methods can cause. Existing vacuum pens are typically mechanical; a simple press of a button creates a vacuum, securing the wafer.

[0004] After the existing mechanical vacuum pen has sucked the wafer, the mechanical button cannot be pressed again. If the mechanical button is pressed due to accidental touching, the vacuum pen stops pumping vacuum, causing the wafer to fall and become scrapped, increasing the cost of the wafer. Utility Model Content

[0005] The purpose of the utility model is to provide a vacuum suction pen, which can prevent the vacuum suction pen from stopping vacuuming due to accidental touch.

[0006] To achieve this purpose, the present invention adopts the following technical solutions:

[0007] Provided is a vacuum suction pen, comprising: a pen body, through which light can pass;

[0008] A vacuum generator, which is mounted on the pen body and is capable of vacuuming;

[0009] A pen tip, one end of which is sealed and connected to the vacuum generator via an air tube, and the other end of which is used for adsorbing semiconductor elements;

[0010] A light-controlled component is arranged on the pen body and connected to the air tube. The light-controlled component has a trigger part that can sense light. When the trigger part senses light, the light-controlled component blocks the air tube. When the trigger part is blocked, the light-controlled component conducts the air tube.

[0011] As a preferred solution of the above-mentioned vacuum suction pen, the light control component includes: a solenoid valve, which is arranged on the air pipe;

[0012] A photosensitive contact switch is installed in the pen body, has the trigger part, and is connected in series with the solenoid valve.

[0013] As a preferred solution of the above-mentioned vacuum suction pen, the pen body includes a hand-held part, and the trigger part is provided at a portion of the hand-held part corresponding to a finger.

[0014] As a preferred embodiment of the vacuum pen, the handle is in an arc shape, and the arc range of the arc is 170 degrees to 178 degrees so that it can fit the fingers during use.

[0015] As a preferred solution of the above-mentioned vacuum suction pen, the pen body includes a holding portion, and the holding portion is shaped like a tumbler so that the pen body can automatically reset after being placed.

[0016] As a preferred solution of the above vacuum suction pen, the vacuum suction pen further includes a battery connected to the light control component circuit, and the battery is installed at the bottom end of the containing part to lower the center of gravity of the containing part.

[0017] As a preferred embodiment of the above vacuum suction pen, the vacuum suction pen further includes a charging port, and the battery is electrically connected to a charging base via the charging port to charge the battery.

[0018] As a preferred embodiment of the above-mentioned vacuum suction pen, the pen head includes a pen tip and a vacuum suction tube, one end of the vacuum suction tube is sealed and connected to the pen tip, and the other end of the vacuum suction tube is sealed and connected to the air tube.

[0019] As a preferred solution of the above-mentioned vacuum suction pen, the pen body is provided with a connecting head, one end of the connecting head is connected to the air pipe, and the other end of the connecting head is detachably connected to the pen tip.

[0020] As a preferred embodiment of the vacuum pen, the pen body is made of soft ferrite material.

[0021] Beneficial effects of the utility model:

[0022] The utility model provides a vacuum suction pen, which includes a pen body, a vacuum generator, a pen tip, and a light-controlled assembly. Light can pass through the pen body. The vacuum generator is mounted on the pen body and is capable of producing a vacuum. One end of the pen tip is sealed to the vacuum generator via an air tube, and the other end of the pen tip is used to attract semiconductor components. The vacuum generator can evacuate the interior of the pen tip, thereby enabling the removal and placement of semiconductor components through the negative pressure under vacuum. The light-controlled assembly is disposed on the pen body and connected to the air tube. The light-controlled assembly has a trigger portion that can sense light. When the vacuum suction pen is not in use, the trigger portion senses light, and the light-controlled assembly blocks the air tube. When the vacuum suction pen is in use, the trigger portion is blocked by the finger by holding the vacuum suction pen, thereby triggering the light-controlled assembly and unblocking the air tube. The vacuum suction pen does not require mechanical button control; simply by maintaining a firm grip on the pen body, the light from the trigger portion is blocked, thereby ensuring that the vacuum generator continuously produces a vacuum. This effectively avoids the problem of the vacuum suction pen stopping due to accidental touch, reduces the possibility of chips falling and being scrapped, and effectively reduces the cost of chips. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a front view of the vacuum pen provided by an embodiment of the utility model;

[0024] Figure 2 This is a top view of the vacuum pen provided by an embodiment of the utility model;

[0025] Figure 3 This is a side view of the vacuum pen provided by an embodiment of the present utility model;

[0026] Figure 4 This is an axonometric diagram of the vacuum pen provided in an embodiment of the present utility model;

[0027] Figure 5 This is a driving principle diagram of the light control component provided in the embodiment of the utility model.

[0028] In the picture:

[0029] 1. Pen body; 11. Handle; 12. Container; 13. Photosensitive hole; 14. Connector; 2. Pen head; 21. Pen tip; 22. Vacuum straw; 3. Light control component; 31. Light contact switch; 32. Solenoid valve. DETAILED DESCRIPTION

[0030] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.

[0031] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0032] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0033] In the description of this embodiment, the terms "upper," "lower," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0034] like Figure 1-Figure 4 As shown, this embodiment provides a vacuum suction pen, which includes a pen body 1, a vacuum generator, a pen tip 2 and a light control component 3. Light can pass through the pen body 1. The vacuum generator is installed on the pen body 1, and the vacuum generator can draw a vacuum. One end of the pen tip 2 is sealed and connected to the vacuum generator through an air tube, and the other end of the pen tip 2 is used to adsorb semiconductor components. The vacuum generator can draw a vacuum inside the pen tip 2, thereby realizing the removal and placement of semiconductor components through the negative pressure under vacuum. The light control component 3 is arranged on the pen body 1 and connected to the air tube. The light control component 3 has a trigger part that can sense light. When the trigger part senses light, the light control component 3 blocks the air tube. When the trigger part is blocked, the light control component 3 conducts the air tube.

[0035] When the vacuum wand is not in use, the trigger section senses light, and the light-controlled assembly 3 blocks the airway. When the vacuum wand is in use, the user holds the wand with their finger blocking the trigger section, thereby triggering the light-controlled assembly 3 and unblocking the airway. This vacuum wand does not require mechanical buttons; simply holding the wand body 1 ensures that the trigger section is shielded from light, ensuring continuous vacuuming by the vacuum generator. This effectively prevents the vacuum wand from stopping due to accidental contact, reduces the possibility of wafers falling and becoming scrapped, and significantly reduces wafer costs.

[0036] Specifically, a circular photosensitive hole 13 is provided on the side wall of the pen body 1. The diameter of the photosensitive hole 13 is less than 5 mm, allowing a finger to completely block the photosensitive hole 13, thereby completely blocking the light from the trigger unit. The trigger unit is located inside the pen body 1 and corresponds to the photosensitive hole 13. Light from the outside of the pen body 1 can pass through the photosensitive hole 13 and illuminate the trigger unit. In other embodiments, the portion of the pen body 1 where the photosensitive hole 13 is provided can be replaced with a light-transmitting portion, which can also allow light to pass through the pen body 1 while still blocking light when the pen is held.

[0037] The vacuum generator is installed in the pen body 1 and can be connected to the inner wall of the pen body 1 by bonding. The specific model of the vacuum generator can refer to the existing technology, and this application will not go into details here. The inside of the pen tip 2 is provided with a channel for gas to pass through. The vacuum generator evacuates the internal channel of the pen tip 2 to generate negative pressure, thereby achieving the absorption of semiconductor components. The light control component 3 is sealed with the air pipe. In this embodiment, the length range of the pen body 1 is 10-15 cm, the mass of the pen body 1 is 200g to 250g, and the pen tip 2 is used to absorb the chip. The size of the pen tip 2 is determined according to the size of the chip, and this embodiment does not limit this.

[0038] Furthermore, the pen body 1 is made of a soft ferrite material, which provides the pen body 1 with a good touch and safety performance. In this embodiment, the pen body 1 is made of FPT (wide temperature soft ferrite material).

[0039] Alternatively, as Figure 1 and Figure 5 As shown, the light-controlled assembly 3 includes a solenoid valve 32 and a light-sensitive contact switch 31. The solenoid valve 32 is located in the air pipe, and the light-sensitive contact switch 31 is installed in the pen body 1. The light-sensitive contact switch 31 has a trigger unit, and the light-sensitive contact switch 31 and the solenoid valve 32 are connected in series. The trigger unit controls the opening and closing of the light-sensitive contact switch 31, thereby controlling the conduction and isolation of the solenoid valve 32.

[0040] Specifically, the solenoid valve 32 is a two-position, two-way solenoid valve. The solenoid valve 32 is connected to the trachea. When connecting, the trachea is cut in the middle, one end is connected to the air inlet of the solenoid valve 32 through a connector, and the other end is connected to the air outlet of the solenoid valve 32 through a connector. The specific connector model can be referred to the prior art, and this application will not elaborate on it here. When the solenoid valve 32 is not energized, it is in a closed state, thereby isolating the trachea and preventing gas from passing through; when the solenoid valve 32 is energized, it is in a conductive state, and gas can pass through the trachea. The specific model of the solenoid valve 32 can be referred to the prior art, and this application will not elaborate on it here. The trigger part is provided on the light-sensitive contact switch 31, and the light-sensitive contact switch 31 is installed inside the pen body 1, and the trigger part corresponds to the photosensitive hole 13. When the trigger part senses light, the light-sensitive contact switch 31 is disconnected. At this time, the circuit is not conductive, and the solenoid valve 32 will isolate the trachea. If the trigger unit doesn't sense light, the light-sensitive contact switch 31 closes, completing the circuit. The solenoid valve 32 opens the airway, and the vacuum generator draws a vacuum into the internal passages of the pen tip 2. The pen body 1 can also be equipped with a negative pressure display assembly, electrically connected to the light-sensitive contact switch 31, to display the negative pressure. This allows the user to determine the magnitude of the negative pressure within the vacuum pen and prevent wafers from falling during suction due to insufficient negative pressure.

[0041] Optionally, the pen body 1 includes a hand-held portion 11 , and a trigger portion is provided at a portion of the hand-held portion 11 corresponding to a finger.

[0042] Specifically, a light-sensitive hole 13 is provided at a portion of the hand-held portion 11 corresponding to a finger. When the hand-held portion 11 is held, the finger can completely block the light-sensitive hole 13 , thereby blocking light and triggering the light control component 3 .

[0043] Furthermore, the handle portion 11 is arc-shaped, and the arc range of the arc is 170 degrees to 178 degrees, so that when using the vacuum pen, the handle portion 11 can fit with the fingers, reducing the user's discomfort and the arc shape facilitates cleaning.

[0044] Optionally, the pen body 1 includes a holding portion 12, which is shaped like a tumbler so that the pen body 1 can automatically reset after being placed. The pen body 1 can be placed at will after use. Under the action of potential energy, the pen body 1 will automatically reset, which is convenient for the placement of the vacuum pen and reduces the trouble of placing the pen in a standardized manner.

[0045] The vacuum stylus further includes a battery connected to the light-operated assembly 3. The battery is mounted at the bottom of the container 12 to lower the center of gravity of the container 12. When the container 12 is shaped like a tumbler, the battery serves as the center of gravity for the tumbler. The battery is also connected to the light-operated assembly 3 to provide power.

[0046] Specifically, the battery can be fixed to the receiving portion 12 by bonding or clamping. The battery is connected to the light-sensitive contact switch 31 and the electromagnetic valve 32 through a wire circuit. When the light-sensitive contact switch 31 is closed, the battery can provide power to the electromagnetic valve 32.

[0047] Optionally, the pen body 1 is provided with a connector 14, one end of which is connected to the trachea, and the other end of which is detachably connected to the pen tip 2, facilitating installation and removal of the pen body 1 and enabling quick replacement of the pen body 1. In this embodiment, the connector 14 is a vacuum rotary joint, which is threadedly connected to the pen tip 2, facilitating removal and ensuring the integrity and sealing of the vacuum system. The specific model of the vacuum rotary joint can be referred to in the prior art and is not described in detail in this application.

[0048] Optionally, the pen tip 2 includes a pen tip 21 and a vacuum suction tube 22, one end of the vacuum suction tube 22 is sealed connected to the pen tip 21, and the other end of the vacuum suction tube 22 is sealed connected to the air pipe, so that the pen tip 21 can more conveniently suck up the wafer.

[0049] Specifically, the pen tip 21 and the vacuum tube 22 can be designed as an integrated structure. In other embodiments, the pen tip 21 is sealed and connected to the side wall of one end of the vacuum tube 22 by welding, or the two can be threaded together or a rubber ring or other sealing member is provided at the connection between the two to achieve a sealed connection between the two. The end face of the pen tip 21 in contact with the wafer is tilted relative to the vacuum tube 22. When the vacuum pen is held, the end face of the pen tip 21 in contact with the wafer can just fit the wafer, making it convenient to use the vacuum pen. The end of the pen tip 2 away from the vacuum tube 22 is convex, which makes it convenient to remove the wafer from the tray or jig. The other end of the vacuum tube 22 is sealed and connected to one end of the vacuum rotary joint. The pen tip 21 is made of PEEK (polyetheretherketone), which is resistant to high temperature, wear and corrosion and will not damage the wafer. The vacuum tube 22 is made of 316 stainless steel.

[0050] Optionally, the vacuum pen further includes a charging port, and the battery is electrically connected to the charging base via the charging port to charge the battery.

[0051] Specifically, the charging port is a magnetic interface, which is provided on the battery. The charging base is a magnetic charging base. The magnetic charging base is a rectangular structure, and the upper portion of the magnetic charging base is provided with a groove of the same shape as the receiving portion 12. During charging, the receiving portion 12 is adsorbed into the groove of the magnetic charging base, and the magnetic interface can receive the signal from the magnetic charging base, thereby charging the battery. The pen body 1 can also be provided with a power display component electrically connected to the battery to display the power level, so that the battery can be charged in time when the battery is low.

[0052] When using the vacuum wand, first pick up the vacuum wand:

[0053] The first step is to use the base of the nail of your right middle finger to push the pen upward from the bottom of the pen body 1, leaving a distance of 3 to 5 cm from the pen body 1;

[0054] Step 2: Use your thumb to pinch the pen body 1 from the inside and your index finger to pinch the pen body 1 from the outside, then press down lightly. Use the pads of your thumb and index finger to hold the pen body 1 tightly without exerting much effort.

[0055] Step 3: Use your ring finger and little finger to slightly bend them into a front-to-back position, forming a flat surface with the two fingers. Add palm support to lift the middle finger and the entire pen body 1, forming a stable and flexible pen-holding posture.

[0056] Step 4: Keep your index finger, middle finger, ring finger, and little finger firmly pressed together. Do not curl your ring finger and little finger back into your palm. If you do, the middle finger will lose its support, making your hand unstable when holding the pen.

[0057] After the picking is completed, use a vacuum suction pen to pick up the chip. When picking up, the wrist should not be tense, but should be relaxed and flexible so that the movement of the wrist can be used when holding the pen to achieve the effect of "cleverly picking up and placing".

[0058] The vacuum suction pen of the utility model is simple and convenient to operate. The vacuum suction pen can be used to manually take and place wafers conveniently and quickly, and the vacuum suction pen can be placed at will for easy operation.

[0059] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A vacuum pen, characterized in that: include: a pen body (1), through which light can pass; A vacuum generator, the vacuum generator being mounted on the pen body (1) and capable of creating a vacuum; A pen tip (2), one end of the pen tip (2) being sealed and connected to the vacuum generator via an air tube, and the other end of the pen tip (2) being used for adsorbing semiconductor elements; A light control component (3) is provided on the pen body (1) and connected to the trachea. The light control component (3) has a trigger portion capable of sensing light. When the trigger portion senses light, the light control component (3) blocks the trachea. When the trigger portion is blocked, the light control component (3) conducts the trachea.

2. The vacuum pen according to claim 1, characterized in that: The light control component (3) comprises: a solenoid valve (32), the solenoid valve (32) being arranged on the air pipe; A light-sensitive contact switch (31) is installed in the pen body (1), the light-sensitive contact switch (31) has the trigger part, and the light-sensitive contact switch (31) is connected in series with the electromagnetic valve (32).

3. The vacuum pen according to claim 1, characterized in that: The pen body (1) comprises a hand-held portion (11), and the trigger portion is provided at a portion of the hand-held portion (11) corresponding to a finger.

4. The vacuum pen according to claim 3, characterized in that: The hand-held portion (11) is in an arc shape, and the arc range of the arc shape is 170 degrees to 178 degrees so that it can fit the fingers when in use.

5. The vacuum pen according to claim 1, characterized in that: The pen body (1) comprises a holding portion (12), and the holding portion (12) is shaped like a tumbler so that the pen body (1) can automatically reset after being placed.

6. The vacuum pen according to claim 5, characterized in that: The vacuum suction pen further comprises a battery connected to the circuit of the light control component (3), and the battery is installed at the bottom end of the containing portion (12) to lower the center of gravity of the containing portion (12).

7. The vacuum pen according to claim 6, characterized in that: The vacuum suction pen further includes a charging port, and the battery is electrically connected to a charging base through the charging port to charge the battery.

8. The vacuum suction pen according to any one of claims 1 to 7, characterized in that: The pen tip (2) comprises a pen tip (21) and a vacuum suction tube (22), one end of the vacuum suction tube (22) is sealed and connected to the pen tip (21), and the other end of the vacuum suction tube (22) is sealed and connected to the air tube.

9. The vacuum pen according to any one of claims 1 to 7, characterized in that: The pen body (1) is provided with a connecting head (14), one end of the connecting head (14) is connected to the air pipe, and the other end of the connecting head (14) is detachably connected to the pen tip (2).

10. The vacuum suction pen according to any one of claims 1 to 7, characterized in that: The pen body (1) is made of soft ferrite material.

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