Detection device of pressure measurement mechanism

Abstract

The utility model discloses a detection device of a pressure measurement mechanism. The pressure measurement mechanism comprises an air bag and a pressure measurement head, the pressure measurement head is used for capturing an electronic component, and the air bag is used for pushing the pressure measurement head during inflation so as to press the electronic component into a test seat of a test machine table, so that the power-on test of the electronic component is carried out. According to the detection device and method, whether the air pressure in the air bag is normal or not can be detected, and whether the pressure measuring head is horizontal or not can be detected, so that whether the pressure measuring mechanism can accurately carry out the power-on test of an electronic element or not is judged, and the defect that the power-on test is inaccurate due to the fact that an alarm cannot be given out when the air bag of an existing pressure measuring mechanism leaks air or the pressure measuring head inclines is overcome.

Description

Technical Field

[0001] The present application relates to a detection technology for a pressure testing mechanism of an electronic component, and more particularly to a detection device for the pressure testing mechanism. Background Art

[0002] Figure 1A FIG. 1 is a partial cross-sectional view of a pressure test mechanism 1 for an existing semiconductor wafer 14. The semiconductor wafer 14 needs to be tested for power after it is manufactured. Figure 1A As shown, the pressure testing head 13 of the pressure testing mechanism 1 will suck the semiconductor chip 14 and then press the semiconductor chip 14 downward into the test socket 15, and make the semiconductor chip 14 electrically connected to the circuit pins 16 of the test socket 15 for power-on testing.

[0003] In order to press the semiconductor wafer 14 downward into the test socket 15 , the rubber airbag 12 must be inflated through the gas pipeline 11 of the pressure testing mechanism 1 to expand the rubber airbag 12 and push the pressure testing head 13 downward to press the semiconductor wafer 14 downward and fix it in the test socket 15 .

[0004] However, long-term high-temperature operation of the pressure measuring mechanism 1 may cause the rubber material of the rubber airbag 12 to harden or crack, and the rubber airbag 12 may rupture and leak during inflation.

[0005] For example Figure 1B As shown, the rupture 121 of the rubber airbag 12 leaks air during inflation, resulting in uneven air pressure, causing the pressure probe 13 to tilt. This causes the semiconductor chip 14 to tilt and fail to properly connect to the circuit pins 16 of the test socket 15. In addition, the existing pressure testing mechanism 1 does not have corresponding detection or warning functions, resulting in inaccurate power-on testing of the semiconductor chip 14.

[0006] Therefore, how to overcome the above-mentioned shortcomings of the prior art has become a technical problem that needs to be solved urgently. Utility Model Content

[0007] To address the aforementioned issues, the present application provides a pressure-testing mechanism detection device comprising a gas pipeline, an air pressure sensor, a display, and a height sensor. The pressure-testing mechanism includes an airbag and a pressure probe. The pressure probe is used to capture an electronic component. The airbag, when inflated, pushes the pressure probe to press the electronic component into a test socket on a test bench for conducting a power-on test of the electronic component. The gas pipeline is used to inflate the airbag. The air pressure sensor is used to sense the air pressure in the airbag. The display is used to display the numerical value of the air pressure. The height sensor is used to sense the height of the pressure probe.

[0008] The present application further provides a detection method for the above-mentioned pressure measuring mechanism, comprising: inflating the airbag; sensing the air pressure in the airbag; displaying the numerical value of the air pressure; and sensing the height of the pressure measuring head.

[0009] The detection device and method of the pressure testing mechanism of the present application can detect whether the air bag pressure of the pressure testing mechanism is normal, and can detect whether the pressure testing head is horizontal according to the height of the pressure testing head of the pressure testing mechanism, and issue an alarm when the air bag pressure is insufficient or the pressure testing head is not horizontal, so as to detect whether the pressure testing mechanism can accurately perform power-on tests on electronic components, so as to solve the shortcomings of existing pressure testing mechanisms that the air bag leaks or the pressure testing head is tilted and the warning cannot be issued, resulting in inaccurate power-on tests. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1A and Figure 1B It is a partial cross-sectional schematic diagram of an existing pressure testing mechanism for semiconductor wafers.

[0011] Figure 2 This is a flow chart of the detection method of the pressure testing mechanism of this application.

[0012] Figure 3A and Figure 3B This is a cross-sectional schematic diagram of the pressure measurement mechanism of this application.

[0013] Figure 3C and Figure 3D This is a schematic diagram of the detection device of the pressure testing mechanism of the present application.

[0014] Main component symbols

[0015] 1. Pressure testing mechanism

[0016] 11 Gas pipeline

[0017] 12 rubber airbags

[0018] 121 rupture

[0019] 13 Pressure probe

[0020] 14 semiconductor chips

[0021] 15 test socket

[0022] 16 circuit pins

[0023] Steps 21-26

[0024] 31 Pressure Testing Mechanism

[0025] 312 Airbag

[0026] 313 pressure probe

[0027] 3131 Plane

[0028] 32 Detection device

[0029] 321 Gas Pipeline

[0030] 322 Air Pressure Sensor

[0031] 323 Display

[0032] 324 Height Sensor

[0033] 3241 Probe

[0034] 341,342 dotted lines. DETAILED DESCRIPTION

[0035] The following describes the implementation of the present application through specific embodiments. Those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification.

[0036] It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for the understanding and reading of those skilled in the art, and are not used to limit the limiting conditions for the implementation of this application. Therefore, they have no substantial technical significance. Any modification of the structure, change in the proportional relationship, or adjustment of the size should still fall within the scope of the technical content disclosed in this application without affecting the efficacy and purpose that can be achieved by this application. At the same time, terms such as "upper", "lower", "one", "first" and "second" quoted in this specification are only for the convenience of description and are not used to limit the scope of the implementation of this application. Changes or adjustments in their relative relationships should also be regarded as the scope of the implementation of this application without substantially changing the technical content.

[0037] Figure 2 Flowchart of the testing method of the pressure testing mechanism of the present application: First, in step 21, the pressure testing mechanism is removed from the electronic component testing machine and turned upside down.

[0038] Please also refer to Figure 3A and Figure 3B , Figure 3A is a cross-sectional view of the pressure testing mechanism (i.e., the pressure testing mechanism 31) after being disassembled from the test machine. Figure 3B FIG. 3 is a cross-sectional view of the pressure measuring mechanism 31 after being turned upside down.

[0039] The pressure testing mechanism 31 includes at least one airbag 312 and at least one corresponding pressure testing head 313. The diagram of this embodiment shows multiple airbags 312 and corresponding pressure testing heads 313. For example, the airbag 312 can be made of rubber. The pressure testing head 313 is used to capture electronic components, for example, by vacuum suction. When inflated, the airbag 312 pushes the pressure testing head 313, pressing the electronic component into the test socket of the test machine for power-on testing.

[0040] The electronic component may be an active component, a passive component, or a combination thereof. The active component is, for example, a semiconductor chip, and the passive component is, for example, a resistor, a capacitor, and an inductor.

[0041] In step 22 , the pressure measuring mechanism 31 is installed on the detection device of the pressure measuring mechanism.

[0042] Please also refer to Figure 3C and Figure 3D , Figure 3C This is a schematic diagram of the detection device 32 of the pressure measurement mechanism 31 of the present application. Figure 3D This diagram illustrates the installation of a pressure measurement mechanism 31 on a detection device 32 for testing. The detection device 32 includes a gas pipeline 321, a pressure sensor 322, a display 323, and an altitude sensor 324. The pressure sensor 322 is connected to the gas pipeline 321, while the display 323 is connected to the pressure sensor 322.

[0043] Step 21 and step 22 can be performed manually or by a mobile device such as a robot arm. The mobile device can be a part of the detection device 32 or another independent device.

[0044] In step 23 , the gas line 321 inflates each airbag 312 according to a predetermined air pressure.

[0045] In step 24 , the air pressure sensor 322 and the display 323 detect and display whether the air pressure in each airbag 312 is normal.

[0046] In detail, the air pressure sensor 322 may sense the air pressure in each airbag 312 after the airbag 312 is inflated, and the display 323 may display the value of the air pressure in each airbag 312 .

[0047] For example, the display 323 may be a display screen or a meter to display the numerical value of the air pressure in each airbag 312 .

[0048] In one embodiment, the display 323 may select one of a plurality of different display modes for displaying the air pressure in each airbag 312, depending on whether the air pressure has reached the predetermined pressure. For example, the plurality of different display modes may display the air pressure value in a plurality of different colors. In another example, the display 323 may display the air pressure value that has reached the predetermined pressure in green (i.e., normal air pressure value) and the air pressure value that has not reached the predetermined pressure in red (i.e., abnormal air pressure value), thereby detecting and displaying whether the air pressure in each airbag 312 is normal.

[0049] In addition, the display 323 may issue a warning by displaying text messages, sending electronic messages, and / or emitting sounds when the air pressure in any airbag 312 does not reach the predetermined pressure.

[0050] At step 25, the height sensor 324 detects whether each pressure head 313 is horizontal.

[0051] In detail, the height sensor 324 is used to detect the height of each pressure head 313, which refers to the height of the pressure head 313 when no electronic component is captured.

[0052] For example, for each pressure head 313, the height sensor 324 can be horizontally moved to detect the heights of multiple positions on a plane (e.g. Figure 3D the uppermost plane 3131) of the pressure head 313. For another example, the height sensor 324 can be a digital micrometer including a probe 3241, and the height sensor 324 is horizontally moved to allow the probe 3241 to directly contact the plane 3131 of the pressure head 313 to detect the heights of the multiple positions on the plane 3131.

[0053] After the heights of the multiple positions on the plane 3131 are obtained, the height sensor 324 can determine whether the pressure head 313 is horizontal according to the heights.

[0054] For example, if the heights of the multiple positions on the plane 3131 are the same as shown by the dashed line 341 in Figure 3D , the pressure head 313 is horizontal. Otherwise, if the heights of the multiple positions on the plane 3131 are different as shown by the dashed line 342 in Figure 3D , the pressure head 313 is tilted and not horizontal.

[0055] Alternatively, the height sensor 324 can calculate the difference value of the heights, and then determine whether the pressure head 313 is horizontal according to the difference value.

[0056] In an embodiment, when the height sensor 324 determines that any pressure head 313 is not horizontal, the height sensor 324 can issue a warning by displaying text information, sending electronic information, and / or emitting sound.

[0057] At step 26, the pressure testing mechanism 31 is determined to be qualified according to the air pressure of each air bag 312 and the height of each pressure head 313.

[0058] In detail, if the air pressure of each air bag 312 has reached the predetermined air pressure, and each pressure head 313 is horizontal, the pressure testing mechanism 31 is determined to be qualified. Otherwise, if the air pressure of at least one air bag 312 has not reached the predetermined air pressure, or at least one pressure head 313 is not horizontal, the pressure testing mechanism 31 is determined to be unqualified.

[0059] For example, Figure 3DOf the four airbags 312 shown, the three airbags 312 on the left side have not leaked, so the air pressure therein has reached the predetermined pressure, and the corresponding three pressure probes 313 are all horizontal. In addition, the airbag 312 on the far right has leaked, so the air pressure therein has not reached the predetermined pressure, and the corresponding pressure probe 313 on the far right side is not horizontal. Therefore, Figure 3D The pressure measuring mechanism 31 in the test was found to be unqualified.

[0060] In one embodiment, step 26 may include subsequent processing of the qualified judgment of the pressure measuring mechanism 31. Specifically, if the pressure measuring mechanism 31 is qualified, the pressure measuring mechanism 31 is installed back into the aforementioned test machine to perform a power-on test on the electronic components. On the contrary, if the pressure measuring mechanism is unqualified, the airbag 312 that does not reach the predetermined air pressure is replaced, or the entire pressure measuring mechanism 31 is replaced, and then the replaced pressure measuring mechanism 31 is subjected to the test. Figure 2 The above detection method shown.

[0061] Step 26 can be performed manually, by the detection device 32, or by a mobile device such as a robotic arm. The mobile device can be a part of the detection device 32 or another independent device.

[0062] In summary, the pressure-testing mechanism detection device and method of the present application can detect whether the pressure in the pressure-testing mechanism's airbag is normal and whether the pressure probe of the pressure-testing mechanism is level, thereby determining whether the pressure-testing mechanism can accurately perform power-on tests on electronic components. This addresses the shortcomings of existing pressure-testing mechanisms, such as the inability to issue warnings when the airbag leaks or the pressure probe is tilted, resulting in inaccurate power-on tests. Furthermore, in one embodiment, the pressure-testing mechanism detection device and method of the present application can improve the pressure-testing yield of electronic components by approximately 10%.

[0063] The above embodiments are intended to illustrate the principles and effects of this application and are not intended to limit this application. Those skilled in the art may modify the above embodiments without departing from the spirit and scope of this application. Therefore, the scope of protection of this application shall be as set forth in the claims.

Claims

1. A testing device for a pressure testing mechanism, the pressure testing mechanism comprising an airbag and a pressure testing head, the pressure testing head being used to capture an electronic component, the airbag being used to push the pressure testing head when inflated to press the electronic component into a test socket of a test machine for conducting a power-on test of the electronic component, characterized in that: The detection device comprises: a gas pipeline for inflating the airbag; An air pressure sensor, used for sensing the air pressure in the airbag; a display for displaying the numerical value of the air pressure; and The height sensor is used to sense the height of the pressure probe.

2. The detection device according to claim 1, wherein The display is further configured to select one of a plurality of different display modes according to whether the air pressure reaches a predetermined pressure, so as to display the numerical value of the air pressure.

3. The detection device according to claim 2, wherein: The multiple different display modes display the numerical value of the air pressure in multiple different colors.

4. The detection device according to claim 2, wherein: The display is also used to issue a warning when the air pressure does not reach the predetermined pressure.

5. The detection device according to claim 1, wherein The height of the pressure probe is the height of the pressure probe when the electronic component is not captured.

6. The detection device according to claim 1, wherein The height sensor is further configured to move horizontally to sense a plurality of heights of a plurality of positions on a plane of the pressure probe, and to determine whether the pressure probe is horizontal according to the plurality of heights.

7. The detection device according to claim 6, characterized in that The height sensor calculates the difference between the plurality of heights and determines whether the pressure probe is level according to the difference.

8. The detection device according to claim 6, wherein: The height sensor includes a probe, and when the height sensor moves horizontally, the probe directly contacts the plane of the pressure probe to sense the multiple heights of the plane.

9. The detection device according to claim 6, wherein: The height sensor is also used to issue an alarm when it determines that the pressure probe is not horizontal.

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