Plane material plasma treatment equipment with adjustable distance and speed
By designing a plasma processing equipment with a three-axis linkage mobile module and water cooling function, the problem of existing equipment requiring vacuum and inert gas protection is solved, and the rapid and easy modification of thin materials in a normal temperature atmospheric environment is achieved.
Patent Information
- Application Number
- CN202422967312.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-03
- Publication Date
- 2025-10-17
- Estimated Expiration
- 2034-12-03
AI Technical Summary
Existing plasma equipment requires a vacuum environment and inert gas protection when processing thin PE materials. The equipment is large and complex to operate, the cost is high, and the processing time for flat materials is long.
A distance and speed adjustable flat material plasma processing equipment is designed. It adopts a three-axis linkage moving module, including a plasma processing nozzle, a front-to-back moving module, an up-down moving module, a left-to-right moving module, a stage and a power supply. It can process materials under normal temperature and atmospheric environment. The up-down, left-right and front-to-back movement of the plasma nozzle is realized through the moving module, combined with the vacuum adsorption and water cooling functions of the stage.
It achieves fast and easy processing of materials in a normal temperature and atmospheric environment, avoiding the need for vacuum and inert gas protection. The equipment is small and flexible to operate, and the material modification effect is good.
Smart Images
Figure CN223442833U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the technical field of plasma processing, especially relates to a distance speed adjustable plane material plasma processing equipment. BACKGROUND
[0002] The existing plasma equipment needs to be handled in a vacuum environment and with inert gas protection for the plasma treatment of 5-20 mu m thin PE materials, and the equipment is large in size and high in cost, and the material width roll diameter is limited. The plasma equipment for processing flat materials also needs to be handled in a vacuum environment and with inert gas protection, and the equipment operation is complex and the processing time is long.
[0003] Therefore, a distance speed adjustable plane material plasma processing equipment is needed to solve the above technical problems. UTILITY MODEL CONTENTS
[0004] The utility model discloses a distance speed adjustable plane material plasma processing equipment to solve the above technical problems.
[0005] To achieve the above object, the utility model provides the following technical scheme: a distance speed adjustable plane material plasma processing equipment, including plasma processing shower nozzle, front and back movement module, object table, up and down movement module, left and right movement module, work table and power supply, the front and back movement module sets up on the work table, and the object table is slidably arranged on the front and back movement module, the left and right movement module sets up at the rear end of the work table, and the front end of the left and right movement module is provided with up and down movement module, and the plasma processing shower nozzle is connected with the up and down movement module, the power supply sets up at the lower end of the work table, and the power supply is electrically connected with the plasma processing shower nozzle.
[0006] The work table includes an upper table, a lower table and a work table frame, and the upper table and the lower table are respectively arranged at the upper end and the lower end of the work table frame.
[0007] The front and back movement module includes front and back movement power supply, front and back movement shell, front and back movement drive wheel, front and back movement drive belt, two front and back movement linear guides, front and back movement slider and front and back movement fixed plate, the front and back movement power supply is arranged at the front and back ends of the front and back movement shell, and the front and back movement power supply is located at the lower end of the front and back movement shell, the front and back movement drive wheel is connected with the front and back movement power supply, and the front and back movement drive belt is connected with the two front and back movement drive wheels, the front and back movement drive belt is clamped on the front and back movement slider, the front and back movement linear guides are arranged in parallel at the bottom end of the front and back movement shell along the direction of the front and back movement drive belt, and the front and back movement slider is slidably arranged on the front and back movement linear guides, the upper end of the front and back movement fixed plate is provided with the object table, and the lower end of the front and back movement fixed plate is arranged on the upper end of the front and back movement slider.
[0008] The front and rear moving slider is provided with two front and rear moving sliding grooves and a front and rear moving clamping groove; the front and rear moving sliding grooves are arranged in parallel at the lower end of the front and rear moving slider and are arranged in sliding mode along the front and rear moving linear guide rail; the front and rear moving clamping groove is arranged at the upper end of the front and rear moving slider and is clamped and fixed outside the front and rear moving drive belt; the upper end of the front and rear moving sliding groove is provided with at least one front and rear moving limiting block which is clamped at the upper end of the front and rear moving drive belt.
[0009] The object table comprises at least one water inlet, at least one vacuum port, a plurality of vacuum suction holes, an object plate and a bottom plate; the object plate is fixed at the upper end of the bottom plate, and a gap exists between the object plate and the bottom plate; the water inlet and the vacuum port are arranged on one side of the object plate, and the water inlet is in communication with the gap; the vacuum suction holes are arranged on the object table in gaps, and the vacuum suction holes are in communication with the gaps.
[0010] The up and down moving module comprises an up and down moving power supply, an up and down moving shell, two up and down moving drive wheels, an up and down moving drive belt, an up and down moving linear guide rail, an up and down moving slider and an up and down moving fixed plate; the upper end of the up and down moving shell is provided with the up and down moving power supply, and the up and down moving power supply is located at the rear end of the up and down moving shell; the up and down moving drive wheels are arranged at the upper and lower ends of the up and down moving shell respectively, the upper up and down moving drive wheel is connected with the up and down moving power supply, and the two up and down moving drive wheels are connected with the up and down moving drive belt; the up and down moving drive belt is clamped on the up and down moving slider; the up and down moving linear guide rail is arranged in parallel at the bottom end of the up and down moving shell along the direction of the up and down moving drive belt, and the up and down moving slider is arranged in sliding mode on the up and down moving linear guide rail; the front end of the up and down moving fixed plate is provided with a plasma processing nozzle fixing plate 11, and the rear end of the up and down moving fixed plate is arranged at the front end of the up and down moving slider.
[0011] The up and down moving slider is provided with an up and down moving sliding groove and an up and down moving clamping groove; the up and down moving sliding groove is arranged in parallel at the rear end of the up and down moving slider and is arranged in sliding mode along the up and down moving linear guide rail; the up and down moving clamping groove is arranged at the front end of the up and down moving slider and is clamped and fixed outside the up and down moving drive belt; the upper end of the up and down moving sliding groove is provided with at least one up and down moving limiting block which is clamped at the upper end of the up and down moving drive belt.
[0012] The left-right moving module comprises a left-right moving chain, a left-right moving shell, two supports, two left-right moving linear guides and a left-right moving slider.
[0013] The left-right moving slider is provided with a left-right moving sliding groove, which is arranged in parallel at the rear end of the left-right moving slider and is arranged in sliding mode along the left-right moving linear guide.
[0014] Compared with the prior art, the device has the advantages that:
[0015] The device of the utility model is in atmospheric environment, material is laid on the loading plate of loading platform, through setting up up and down moving module, left and right moving module, plasma processing nozzle moves in up and down, left and right two axes, through setting up front and back moving module, loading platform and material of upper end move in front and back single axis, realize three axes linkage, process whole surface of material, loading platform can vacuum adsorb material, can draw flowing water in loading platform, cooling loading platform and material of upper end, the device of the utility model is simple and fast, need not to fix material separately, also need not to make vacuum environment and add inert gas protection, can realize plasma processing of material fastly,
[0016] The utility model discloses a distance adjustable plasma processing nozzle, through relative or independent movement to control processing distance, reach predetermined processing effect, material reaches modification, utilize hydrophilic, coating or other subsequent efficacy,
[0017] The device has the advantages of convenient operation, flexible parameter adjustment, small size, and can be used in atmospheric environment at room temperature, and has good modification processing effect on materials. ACCURACY OF DRAWINGS
[0018] Figure 1 It is a kind of distance speed adjustable plane material plasma processing equipment's schematic diagram;
[0019] Figure 2 It is the schematic diagram of front and back moving module;
[0020] Figure 3 It is the use schematic diagram of front and back moving module;
[0021] Figure 4 It is the schematic diagram of loading platform;
[0022] Figure 5 Schematic diagram of the up-and-down moving module and the left-and-right moving module;
[0023] Figure: 1. Plasma treatment nozzle; 11. Plasma treatment nozzle fixing plate; 2. Forward and backward moving module; 21. Forward and backward moving power supply; 22. Forward and backward moving housing; 23. Forward and backward moving driving wheel; 24. Forward and backward moving driving belt; 25. Forward and backward moving linear guide; 26. Forward and backward moving slider; 27. Forward and backward moving fixing plate; 28. Forward and backward moving sliding groove; 281. Forward and backward moving limit block; 3. Loading platform; 31. Water inlet; 32. Vacuum port; 33. Vacuum suction hole; 34. Loading plate; 35. Bottom plate; 4. Up and down moving module; 41. Up and down moving power supply Source; 42. Move the outer shell up and down; 43. Move the driving wheel up and down; 44. Move the driving belt up and down; 45. Move the linear guide rail up and down; 46. Move the slider up and down; 47. Move the fixed plate up and down; 48. Move the sliding groove up and down; 481. Move the limit block up and down; 5. Move the module left and right; 51. Move the chain left and right; 52. Move the outer shell left and right; 53. Bracket; 54. Move the linear guide rail left and right; 55. Move the slider left and right; 56. Move the sliding groove left and right; 6. Workbench; 61. Upper table; 62. Lower table; 63. Workbench frame; 7. Power supply. DETAILED DESCRIPTION
[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0025] See also Figures 1-5 The utility model provides a technical solution: a plasma processing device for planar materials with adjustable distance and speed, comprising a plasma processing nozzle 1, a front-and-back moving module 2, a loading platform 3, an up-and-down moving module 4, a left-and-right moving module 5, a workbench 6 and a power supply 7; the front-and-back moving module 2 is arranged on the workbench 6, and the loading platform 3 is slidably arranged on the front-and-back moving module 2; the left-and-right moving module 5 is arranged at the rear end of the workbench 6, and the up-and-down moving module 4 is arranged at the front end of the left-and-right moving module 5, and the plasma processing nozzle 1 is connected to the up-and-down moving module 4; the power supply 7 is arranged at the lower end of the workbench 6, and the power supply 7 is electrically connected to the plasma processing nozzle 1.
[0026] The workbench 6 includes an upper table 61, a lower table 62 and a workbench frame 63. The upper table 61 and the lower table 62 are respectively arranged at the upper and lower ends of the workbench frame 63. When in use, the power supply 7 is arranged on the lower table 62.
[0027] The front and rear moving module 2 comprises a front and rear moving power supply 21, a front and rear moving shell 22, front and rear moving drive wheels 23, a front and rear moving drive belt 24, two front and rear moving linear guides 25, a front and rear moving slider 26 and a front and rear moving fixed plate 27; the front and rear ends of the front and rear moving shell 22 are both provided with the front and rear moving power supply 21, and the front and rear moving power supply 21 is located at the lower end of the front and rear moving shell 22; the front and rear moving drive wheels 23 are connected with the front and rear moving power supply 21, and the two front and rear moving drive wheels 23 are connected with the front and rear moving drive belt 24; the front and rear moving drive belt 24 is clamped on the front and rear moving slider 26; the front and rear moving linear guides 25 are arranged in parallel at the bottom end of the front and rear moving shell 22 along the direction of the front and rear moving drive belt 24, and the front and rear moving linear guides 25 are slidably provided with the front and rear moving slider 26; the upper end of the front and rear moving fixed plate 27 is provided with the object table 3, and the lower end of the front and rear moving fixed plate 27 is arranged at the upper end of the front and rear moving slider 26.
[0028] The front and rear moving shell 22 is arranged on the workbench 6. Specifically, the lower end of the front and rear moving shell 22 is arranged on the upper table top 61.
[0029] The front and rear moving slider 26 is provided with two front and rear moving sliding grooves 28 and a front and rear moving clamping groove 29; the front and rear moving sliding grooves 28 are arranged in parallel at the lower end of the front and rear moving slider 26 and are slidably arranged along the front and rear moving linear guides 25; the front and rear moving clamping groove 29 is arranged at the upper end of the front and rear moving slider 26 and is clamped and fixed outside the front and rear moving drive belt 24.
[0030] Further, there is a gap between the two sides of the front and rear moving slider 26 and the front and rear moving shell 22, so that the front and rear moving slider 26 can not touch the front and rear moving shell 22 when moving forward and backward.
[0031] Further, the front and rear moving sliding grooves 28 are adapted to the moving linear guides 25.
[0032] Further, there is a gap between the front and rear moving fixed plate 27 and the front and rear moving sliding grooves 28, so that the front and rear moving fixed plate 27 will not touch the front and rear moving drive belt 24 when the front and rear moving slider 26 moves forward and backward.
[0033] Further, the upper end of the front and rear moving sliding groove 28 is provided with at least one front and rear moving limiting block 281, and the front and rear moving limiting block 281 is clamped at the upper end of the front and rear moving drive belt 24.
[0034] In operation, the front and back moving power supply 21 drives the front and back moving driving wheel 23 to rotate, so that the front and back moving driving belt 24 between the front and back moving driving wheel 23 rotates, so that the front and back moving slider 26 engaged with the front and back moving driving belt 24 moves forward and backward along the front and back moving linear guide rail 25, and then the front and back moving fixed plate 27 at the upper end of the front and back moving slider 26 and the object table 3 move forward and backward.
[0035] The object table 3 comprises at least one water inlet 31, at least one vacuum port 32, a plurality of vacuum suction holes 33, an object plate 34 and a bottom plate 35; the object plate 34 is fixed on the upper end of the bottom plate 35, and there is a gap between the object plate 34 and the bottom plate 35; the water inlet 31 and the vacuum port 32 are arranged on one side of the object plate 34, and the water inlet 31 is communicated with the gap; the vacuum suction holes 33 are arranged on the object table 3 and communicated with the gap.
[0036] Further, the water inlet 31 and the vacuum port 32 are respectively connected with external water pipes and vacuum pipes. The water flow mirror water inlet 31 enters the object table 3 to cool the object table 3, so that the material on the object table 3 is cooled; the object table 3 can make the plurality of vacuum suction holes 33 suck the material on the object table 3 through the vacuum port 32, so that the plasma processing equipment can be used in a normal temperature atmospheric environment, and the modification treatment effect on the material is good.
[0037] The utility model is provided with two water inlets 31 and one vacuum port 32, and the water inlets 31 are respectively located on the two sides of the vacuum port 32, so as to ensure the cooling effect and the vacuum suction effect of the object table 3. In use, the number of the water inlets 31 and the vacuum port 32 can be adjusted according to requirements.
[0038] In use, in order to increase the front and back moving effect of the object table 3, the bottom plate 35 is connected with external chains at the lower end, and the external chains move synchronously when the object table 3 moves forward and backward.
[0039] The up-down moving module 4 comprises an up-down moving power supply 41, an up-down moving shell 42, two up-down moving drive wheels 43, an up-down moving drive belt 44, an up-down moving linear guide rail 45, an up-down moving sliding block 46 and an up-down moving fixing plate 47; the up-down moving power supply 41 is arranged at the upper end of the up-down moving shell 42 and located at the rear end of the up-down moving shell 42; the up-down moving drive wheels 43 are arranged at the upper and lower ends of the up-down moving shell 42 respectively, the upper up-down moving drive wheel 43 is connected with the up-down moving power supply 41, and the two up-down moving drive wheels 43 are connected with the up-down moving drive belt 44; the up-down moving drive belt 44 is clamped on the up-down moving sliding block 46; the up-down moving linear guide rail 45 is arranged at the bottom end of the up-down moving shell 42 in parallel with the direction of the up-down moving drive belt 44, and the up-down moving sliding block 46 is slidably arranged on the up-down moving linear guide rail 45; the front end of the up-down moving fixing plate 47 is provided with the plasma processing nozzle fixing plate 11, and the rear end of the up-down moving fixing plate 47 is arranged at the front end of the up-down moving sliding block 46.
[0040] The up-down moving sliding groove 48 and the up-down moving clamping groove 49 are arranged on the up-down moving sliding block 46; the up-down moving sliding groove 48 is arranged at the rear end of the up-down moving sliding block 46 in parallel and slidably arranged along the up-down moving linear guide rail 45; the up-down moving clamping groove 49 is arranged at the front end of the up-down moving sliding block 46 and clamped and fixed outside the up-down moving drive belt 44.
[0041] Further, there is a gap between the up-down moving sliding block 46 and the up-down moving shell 42, so that the up-down moving sliding block 46 will not touch the up-down moving shell 42 when moving up and down.
[0042] Further, the up-down moving sliding groove 48 and the up-down moving linear guide rail 45 are matched.
[0043] Further, there is a gap between the up-down moving fixing plate 47 and the up-down moving sliding groove 48, so that the up-down moving fixing plate 47 will not touch the up-down moving drive belt 44 when the up-down moving sliding block 46 moves up and down.
[0044] Further, the up-down moving sliding groove 48 is provided with at least one up-down moving limiting block 481 at the upper end, and the up-down moving limiting block 481 is clamped at the upper end of the up-down moving drive belt 44.
[0045] During operation, the up and down moving power supply 41 drives the up and down moving driving wheel 43 to rotate, so that the moving driving wheel 43 at the upper end rotates, and the moving driving wheel 43 at the lower end rotates through the up and down moving driving belt 44, so that the up and down moving slider 46 engaged with the up and down moving driving belt 44 moves up and down along the up and down moving linear guide 45, thereby making the up and down moving fixed plate 47 at the front end of the up and down moving slider 46, the plasma treatment nozzle fixed plate 11 and the plasma treatment nozzle 1 move up and down.
[0046] The left-right moving module 5 includes a left-right moving chain 51, a left-right moving shell 52, two brackets 53, two left-right moving linear guides 54 and a left-right moving slider 55; the upper end of the left-right moving shell 52 is provided with a left-right moving chain 51, and the left-right moving chain 51 is connected to the rear end of the up and down moving power supply 41; the left-right moving linear guides 54 are arranged in parallel at the bottom end of the left-right moving shell 52, and a left-right moving slider 55 is slidingly arranged on the left-right moving linear guides 54; the brackets 53 are arranged at both ends of the left-right moving shell 52, and the lower end of the brackets 53 is arranged on the workbench 6; the front end of the left-right moving slider 55 is fixed to the rear end of the up and down moving shell 42.
[0047] The left-right movable slider 55 is provided with a left-right movable sliding groove 56 , which is arranged parallel to the rear end of the left-right movable slider 55 , and the left-right movable sliding groove 56 is slidably arranged along the left-right movable linear guide rail 54 .
[0048] Furthermore, the left-right moving linear guide rail 54 is provided along the long side direction of the left-right moving housing 52. The left-right moving sliding groove 56 is adapted to the left-right moving linear guide rail 54.
[0049] Furthermore, there is a gap between the two sides of the left-right movable slider 55 and the left-right movable housing 52 , so that the left-right movable slider 55 will not hit the left-right movable housing 52 when moving left-right.
[0050] Furthermore, the left-right moving chain 51 is connected to an external power source, so that when the left-right moving chain 51 moves left-right, the up-down moving power source 41 connected to the left-right moving chain 51 moves left-right, causing the up-down moving module 4 to move left-right.
[0051] During operation, the horizontal moving chain 51 moves horizontally, causing the vertical moving power supply 41 to move horizontally, thereby driving the vertical moving module 4 to move horizontally along the horizontal moving linear guide 54 via the horizontal moving slider 55, so that the plasma treatment nozzle 1 moves horizontally.
[0052] The plasma processing nozzle 1 is used for processing the material surface, the plasma processing nozzle 1 of the utility model is the existing finished product, when using, according to the use effect and requirement, the plasma processing nozzle 1 of different model is selected.
[0053] The equipment of the utility model is used in atmospheric environment, and thin material is laid on the material loading plate 34 of the material loading table 3. The plasma processing nozzle 1 is moved up and down and left and right through the up-down moving module 4 and the left-right moving module 5. The material loading table 3 and the material at the upper end are moved forward and backward through the front-back moving module 2, so that three-axis linkage is realized. The material loading table 3 can vacuum adsorb the material, and the material loading table 3 can be connected with flowing water to cool the material loading table 3 and the material at the upper end. The equipment of the utility model is simple and fast, and the material does not need to be fixed by a clamp, and the vacuum environment and inert gas protection are not needed, so that the plasma processing of the material can be realized quickly.
[0054] The equipment of the utility model can process the breathable material with the size of 200*300mm and the thickness of 5-500um, the distance between the plasma processing nozzle 1 and the material is adjustable, the water contact angle of the material surface is at least 40 degrees, and the fiber is not damaged.
[0055] The utility model utilizes the plasma processing nozzle 1 with adjustable distance, controls the processing distance through relative or independent movement, achieves the predetermined processing effect, modifies the material, and utilizes the hydrophilic, coating or other subsequent functions.
[0056] The equipment is easy to operate, the parameters are flexible to adjust, the equipment is small, and the modification processing effect of the material is good under the atmospheric environment at room temperature.
[0057] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and spirits of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.
Claims
1. A planar material plasma processing device with adjustable distance and speed, characterized in that: The invention comprises a plasma treatment nozzle (1), a front-back moving module (2), a loading platform (3), an up-down moving module (4), a left-right moving module (5), a workbench (6) and a power supply (7); the front-back moving module (2) is arranged on the workbench (6), and the loading platform (3) is slidably arranged on the front-back moving module (2); the left-right moving module (5) is arranged at the rear end of the workbench (6), and the up-down moving module (4) is arranged at the front end of the left-right moving module (5); the plasma treatment nozzle (1) and the up-down moving module (4) are connected; the power supply (7) is arranged at the lower end of the workbench (6), and the power supply (7) and the plasma treatment nozzle (1) are electrically connected.
2. The distance and speed adjustable planar material plasma processing device according to claim 1, characterized in that: The workbench (6) comprises an upper table (61), a lower table (62) and a workbench frame (63), wherein the upper table (61) and the lower table (62) are respectively arranged at the upper and lower ends of the workbench frame (63).
3. The distance and speed adjustable planar material plasma processing device according to claim 1, characterized in that: The front-to-back moving module (2) comprises a front-to-back moving power supply (21), a front-to-back moving housing (22), a front-to-back moving driving wheel (23), a front-to-back moving driving belt (24), two front-to-back moving linear guide rails (25), a front-to-back moving slider (26) and a front-to-back moving fixed plate (27); the front and rear ends of the front and rear moving housing (22) are both provided with a front-to-back moving power supply (21), and the front and rear moving power supply (21) is located at the lower end of the front and rear moving housing (22); the front and rear moving driving wheel (23) is connected to the front and rear moving power supply (21), and the two front and rear moving linear guide rails (25) are connected to the front and rear moving linear guide rails (25). A front-to-back moving driving belt (24) is connected to the moving driving wheel (23); the front-to-back moving driving belt (24) is engaged with the front-to-back moving slider (26); the front-to-back moving linear guide rail (25) is arranged at the bottom end of the front-to-back moving housing (22) in parallel with the direction of the front-to-back moving driving belt (24), and a front-to-back moving slider (26) is slidably arranged on the front-to-back moving linear guide rail (25); a loading platform (3) is arranged at the upper end of the front-to-back moving fixed plate (27), and the lower end of the front-to-back moving fixed plate (27) is arranged at the upper end of the front-to-back moving slider (26).
4. The distance and speed adjustable planar material plasma processing device according to claim 3, characterized in that: The front-to-back movable slider (26) is provided with two front-to-back movable sliding grooves (28) and a front-to-back movable engaging groove (29); the front-to-back movable sliding grooves (28) are arranged in parallel at the lower end of the front-to-back movable slider (26), and the front-to-back movable sliding grooves (28) are arranged to slide along the front-to-back movable linear guide rail (25); the front-to-back movable engaging grooves (29) are arranged at the upper end of the front-to-back movable slider (26), and the front-to-back movable engaging grooves (29) are engaged and fixed to the outside of the front-to-back movable driving belt (24); at least one front-to-back movable limiting block (281) is arranged at the upper end of the front-to-back movable sliding groove (28), and the front-to-back movable limiting block (281) is engaged with the upper end of the front-to-back movable driving belt (24).
5. The distance and speed adjustable planar material plasma processing equipment according to claim 1, characterized in that: The loading platform (3) comprises at least one water inlet (31), at least one vacuum port (32), a plurality of vacuum suction holes (33), a loading plate (34) and a bottom plate (35); the loading plate (34) is fixed to the upper end of the bottom plate (35), and a gap exists between the loading plate (34) and the bottom plate (35); the water inlet (31) and the vacuum port (32) are arranged on one side of the loading plate (34), and the water inlet (31) and the gap are communicated; the vacuum suction holes (33) are arranged on the loading platform (3), and the vacuum suction holes (33) and the gap are communicated.
6. The distance and speed adjustable planar material plasma processing equipment according to claim 1, characterized in that: The up-and-down moving module (4) comprises an up-and-down moving power supply (41), an up-and-down moving shell (42), two up-and-down moving driving wheels (43), an up-and-down moving driving belt (44), an up-and-down moving linear guide rail (45), an up-and-down moving slider (46) and an up-and-down moving fixed plate (47); the up-and-down moving power supply (41) is provided at the upper end of the up-and-down moving shell (42), and the up-and-down moving power supply (41) is located at the rear end of the up-and-down moving shell (42); the up-and-down moving driving wheels (43) are respectively provided at the upper and lower ends of the up-and-down moving shell (42), and the upper up-and-down moving driving wheel (43) and the up-and-down moving fixed plate (47) are provided at the upper and lower ends of the up-and-down moving shell (42). A power source (41) is connected, and two up-and-down moving driving wheels (43) are connected with an up-and-down moving driving belt (44); the up-and-down moving driving belt (44) is engaged with an up-and-down moving slider (46); the up-and-down moving linear guide (45) is arranged at the bottom end of the up-and-down moving housing (42) in parallel with the direction of the up-and-down moving driving belt (44), and an up-and-down moving slider (46) is slidably arranged on the up-and-down moving linear guide (45); the front end of the up-and-down moving fixed plate (47) is provided with a plasma treatment nozzle fixing plate 11, and the rear end of the up-and-down moving fixed plate (47) is provided at the front end of the up-and-down moving slider (46).
7. The distance and speed adjustable planar material plasma processing equipment according to claim 6, characterized in that: The up-and-down moving slider (46) is provided with an up-and-down moving sliding groove (48) and an up-and-down moving engaging groove (49); the up-and-down moving sliding groove (48) is provided in parallel with the rear end of the up-and-down moving slider (46), and the up-and-down moving sliding groove (48) is provided for sliding along the up-and-down moving linear guide rail (45); the up-and-down moving engaging groove (49) is provided at the front end of the up-and-down moving slider (46), and the up-and-down moving engaging groove (49) is engaged and fixed to the outside of the up-and-down moving driving belt (44); at least one up-and-down moving limiting block (481) is provided at the upper end of the up-and-down moving sliding groove (48), and the up-and-down moving limiting block (481) is engaged with the upper end of the up-and-down moving driving belt (44).
8. The distance and speed adjustable planar material plasma processing equipment according to claim 6, characterized in that: The left-right moving module (5) comprises a left-right moving chain (51), a left-right moving housing (52), two brackets (53), two left-right moving linear guides (54) and a left-right moving slider (55); the left-right moving chain (51) is provided at the upper end of the left-right moving housing (52), and the left-right moving chain (51) is connected to the rear end of the up-down moving power supply (41); the left-right moving linear guides (54) are arranged in parallel at the bottom end of the left-right moving housing (52), and a left-right moving slider (55) is slidably arranged on the left-right moving linear guides (54); the brackets (53) are arranged at both ends of the left-right moving housing (52), and the lower ends of the brackets (53) are arranged on the workbench (6); the front end of the left-right moving slider (55) is fixed to the rear end of the up-down moving housing (42).
9. The distance and speed adjustable planar material plasma processing equipment according to claim 8, characterized in that: The left-right movable slider (55) is provided with a left-right movable sliding groove (56), which is arranged parallel to the rear end of the left-right movable slider (55), and the left-right movable sliding groove (56) is slidably arranged along the left-right movable linear guide rail (54).