System for filling special gas
By designing a system for special gas filling and using programmable pneumatic valves to control valve movement, the problem of liquid leakage caused by human operational errors is solved, ensuring safety and continuous production in semiconductor and photovoltaic processes.
Patent Information
- Application Number
- CN202422443947.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-10
- Publication Date
- 2025-10-17
- Estimated Expiration
- 2034-10-10
AI Technical Summary
In the semiconductor and photovoltaic manufacturing processes, existing liquid supply systems can be prone to valve damage due to human error, leading to liquid leakage and threatening personnel safety, equipment loss, and production interruptions.
A system for special gas filling is designed, including a control cabinet, a filling rack, a liquid filling unit, an analysis unit, a purge unit, a helium leak detection unit, a vacuum unit, and a control display and operation unit. The valve action is controlled by a programmable pneumatic valve, reducing manual operation and avoiding direct contact with toxic and hazardous liquids.
It effectively reduces the harm of toxic and harmful liquids to personnel, ensures the safe operation of equipment, avoids production interruptions, and improves the safety and reliability of operations.
Smart Images
Figure CN223448116U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to special gas technical field especially relates to a system for special gas fills. BACKGROUND
[0002] The existing semiconductor production usually needs to go through the following main steps: wafer processing, oxidation, photolithography, etching film, deposition, interconnection and test package etc. steps, thereby providing corresponding guarantee for new energy industry.
[0003] But in the process commonly used in semiconductor, photovoltaic related industry needs to use many special liquids, wherein the special liquid filling equipment is required to be higher, some toxic, corrosive, flammable liquid hazard is quite high, once these liquid supply system occurs due to human operation error causes valve damage, and causes liquid leakage, will threaten the personnel life safety, equipment loss and production interruption. UTILITY MODEL CONTENT
[0004] The utility model aims at providing a system for special gas fills, which aims to solve the problem of valve damage caused by human operation error in the liquid supply system, and liquid leakage, which threatens the safety of personnel life, equipment loss and production interruption.
[0005] To achieve the above object, the utility model provides a system for special gas fills, which comprises a control cabinet, a filling frame, a liquid filling unit, an analysis unit, a purging unit, a helium leak detection unit, a vacuum pumping unit and a control display operation unit, the filling frame is connected with the control cabinet and located on one side of the control cabinet, the liquid filling unit is arranged on the panel of the filling frame, the analysis unit is arranged on the panel of the filling frame, the purging unit is arranged on the panel of the filling frame, the helium leak detection unit is arranged on the panel of the filling frame, and the vacuum pumping unit is arranged below the filling frame.
[0006] The system for special gas fills further comprises an alarm unit, which is arranged on the control cabinet.
[0007] The system for special gas fills further comprises a flowmeter display, which is arranged in the middle of the control cabinet.
[0008] The system for special gas fills further comprises a three-color lamp and an indicator lamp, the three-color lamp is arranged on the control cabinet, and the indicator lamp is arranged on the control cabinet.
[0009] The system for special gas fills further comprises an emergency stop button, which is arranged on the control cabinet.
[0010] The utility model discloses a system for special gas filling, and the operator can use the control display operation unit as a man-machine interface, so that the operator does not need to directly operate the valves of each unit, the valves can be controlled through the control display operation unit, and the raw material liquid input, liquid supply, pipeline purging and vacuum pipeline can be completed by the program-controlled pneumatic valve, thereby reducing the harm of toxic and harmful liquid to the personnel as much as possible. BRIEF DESCRIPTION OF DRAWINGS
[0011] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced.
[0012] Figure 1 is the structural schematic diagram of the control cabinet of the first embodiment of the utility model.
[0013] Figure 2 is the structural schematic diagram of the filling table of the first embodiment of the utility model.
[0014] Figure 3 is the disc surface schematic diagram of the filling table of the first embodiment of the utility model.
[0015] Figure 4 is the structural schematic diagram of the evacuation unit of the first embodiment of the utility model.
[0016] Figure 5 is the structural schematic diagram of the control display operation unit of the first embodiment of the utility model.
[0017] In the figure: 101-control cabinet, 102-filling frame, 103-liquid filling unit, 104-analysis unit, 105-purging unit, 106-helium leak detection unit, 107-vacuumizing unit, 108-control display operation unit, 109-alarm unit, 110-flow meter display, 111-three-color lamp, 112-indicator lamp, 113-emergency stop button, 114-microprocessor, 115-touch screen, 116-differential pressure switch, 117-acoustic light alarm. DETAILED DESCRIPTION
[0018] The embodiments of the utility model will be described in detail below, and the examples of the embodiments are shown in the drawings, and the embodiments described below are exemplary, and are intended to explain the utility model, and cannot be understood as the limitation of the utility model.
[0019] The first embodiment of the present application is:
[0020] Please refer to Figures 1 to 5 , wherein Figure 1 is the structural schematic diagram of the system for special gas filling of the first embodiment of the utility model. Figure 2It is the structure schematic view of the filling table of the first embodiment of the utility model.
[0021] Figure 3 It is the disc surface schematic view of the filling table of the first embodiment of the utility model. Figure 4 It is the structure schematic view of the evacuation unit of the first embodiment of the utility model. Figure 5 It is the structure schematic view of the control display operation unit of the first embodiment of the utility model.
[0022] The utility model provides a kind of system for special gas filling, including control cabinet 101, filling frame 102, liquid filling unit 103, analysis unit 104, purging unit 105, helium leak detection unit 106, vacuum pumping unit 107, control display operation unit 108, alarm unit 109, flowmeter display 110, three-color lamp 111, pilot lamp 112 and emergency stop button 113, the control display operation unit includes microprocessor 114 and touch screen 115, the alarm unit includes differential pressure switch 116 and audible and visual alarm 117.Through the foregoing scheme, it is solved that valve damage caused by human operation error occurs in liquid supply system, and liquid leakage is caused, personnel life safety, equipment loss and production interruption will be threatened, it can be understood that, the foregoing scheme can be used in the case where it needs to avoid operator to directly operate the valve of each unit.
[0023] In the embodiment, the control cabinet 101 is divided into a box body and a box door, the control cabinet 101 adopts human-computer interface technology, and the flow direction of process gas is controlled through a pneumatic valve, so that various disadvantages of previous manual and semi-automatic supply cabinets can be effectively solved.
[0024] The filling frame 102 is connected with the control cabinet 101 and located at one side of the control cabinet 101, the liquid filling unit 103 is arranged on the panel of the filling frame 102, the analysis unit 104 is arranged on the panel of the filling frame 102, the purging unit 105 is arranged on the panel of the filling frame 102, the helium leak detection unit 106 is arranged on the panel of the filling frame 102, the vacuum pumping unit 107 is arranged below the filling frame 102, the filling frame 102 is connected with the cabinet of the control cabinet 101, the liquid filling unit 103 is arranged on the panel of the filling frame 102 and has a filling inlet pneumatic valve AV3-1, AV3-2, AV3-4, a filling inlet filter F3-1, F3-2, a filling inlet manual valve MV3, a filling pressure gauge PG1, a filling pneumatic isolation valve AV3-3, a temperature sensor TT1, a filling main pipeline manual valve MV4, a filling main pipeline pressure sensor PT2, a filling main pipeline pressure gauge PG2, a filling main pipeline bellows valve ABWV1, ABWV2, a backflow pneumatic valve AV4, a backflow high-pressure end pressure gauge PG4, a backflow pressure regulating valve REG2, a backflow low-pressure end pressure gauge PG5, a backflow check valve CV3 and a backflow manual valve MV7, the front end of the filling inlet pneumatic valve AV3-1, AV3-2, AV3-4 is a filling liquid inlet, the rear end is connected to the filling inlet filter F3-1, F3-2, the filling inlet manual valve MV3, the pipeline is provided with the filling pressure gauge PG1, the rear end of the filling pneumatic isolation valve AV3-3 is connected to the filling main pipeline bellows valve ABWV1, ABWV2 through the pipeline, the main pipeline is provided with the temperature sensor TT1, the filling main pipeline manual valve MV4, the rear end is connected to the filling main pipeline pressure sensor PT2, the filling main pipeline pressure gauge PG2, the front end of the backflow pneumatic valve AV4 is connected to the main pipeline, the rear end is connected to the backflow pressure regulating valve REG2, the pipeline is provided with the backflow high-pressure end pressure gauge PG4, the front end of the backflow check valve CV3 is connected to the backflow pressure regulating valve REG2, the rear end is connected to the backflow manual isolation valve MV7, the analysis unit 104 is arranged on the panel of the filling frame 102 and has an analysis manual isolation valve MV8, an analysis check valve CV4, an analysis high-pressure end pressure gauge PG6, an analysis pressure regulating valve REG3, an analysis low-pressure end pressure gauge PG7 and an analysis pneumatic valve AV5, the front end of the analysis pneumatic valve AV5 is connected to the main pipeline, the rear end is connected to the analysis pressure regulating valve REG3, the pipeline is provided with the analysis high-pressure end pressure gauge PG6, the front end of the analysis check valve CV4 is connected to the analysis pressure regulating valve REG2, the pipeline is provided with the analysis low-pressure end pressure gauge PG7, and the rear end is connected to the analysis manual isolation valve MV8.The purge unit 105 is arranged on the panel of the filling rack 102, and is provided with a nitrogen inlet manual valve MV2, a nitrogen filter F2, a nitrogen manual valve MV2-2, a nitrogen pressure sensor PT4, a nitrogen check valve CV2, a nitrogen pneumatic valve AV2, discharge pneumatic valves AV6 and AV7, a discharge high-pressure end pressure gauge PG9, a discharge pressure regulating valve REG4, a discharge low-pressure end pressure gauge PG10, discharge check valves CV5 and CV6, a discharge manual valve MV5, a discharge rupture disc RD, a discharge pressure sensor PT3, a safety valve, and a discharge check valve. The front end of the nitrogen inlet manual valve MV2 is connected to a nitrogen pipeline, and the rear end is connected to the nitrogen filter F2. The front end of the nitrogen check valve CV2 is connected to the nitrogen inlet filter F2 through a pipeline, and the rear end is connected to the nitrogen pneumatic valve AV2. The nitrogen manual valve MV2-2 and the nitrogen pressure sensor PT4 are arranged in the pipeline. The front end of the discharge pneumatic valve AV6 is connected to a main pipeline, and the rear end is connected to the discharge check valve CV5. The front end of the discharge pneumatic valve AV7 is connected to the main pipeline, and the rear end is connected to the discharge pressure regulating valve REG4. The discharge high-pressure end pressure gauge PG9 is arranged in the pipeline. The front end of the discharge check valve CV6 is connected to the discharge pressure regulating valve REG4. The discharge low-pressure end pressure gauge PG10 is arranged in the pipeline. The rear ends of the discharge check valves CV5 and CV6 are combined into one pipeline and connected to a discharge pipeline. The front end of the discharge manual valve MV5 is connected to the main pipeline, and the rear end is connected to the discharge rupture disc RD. The front end of the discharge safety valve is connected to the discharge rupture disc RD, and the rear end is connected to the discharge check valve CV7. The discharge pressure sensor PT3 is arranged in the pipeline. The helium leak detection unit 106 is arranged on the panel of the filling rack 102, and is provided with a helium inlet isolation valve MV1-1, a helium filter F1, a helium manual valve MV1-2, a helium pressure sensor PT1, a helium check valve CV1, a helium high-pressure end pressure gauge PG3, a helium pressure regulating valve REG1, a helium low-pressure end pressure gauge PG2, and helium pneumatic isolation valves AV1-1 and AV1-2. The front end of the helium inlet isolation valve MV1-1 is connected to a helium pipeline, and the rear end is connected to the helium filter F1. The front end of the helium check valve CV1 is connected to the helium inlet filter F1 through a pipeline, and the rear end is connected to the helium pneumatic valve AV1-2 and the helium pressure regulating valve REG1, respectively. The helium manual valve MV1-2 and the helium pressure sensor PT1 are arranged in the pipeline. The front end of the helium pneumatic isolation valve AV1-1 is connected to the helium pressure regulating valve REG1, and the rear end is connected to a main pipeline. The vacuum pumping unit 107 is arranged below the filling rack 102, and is provided with a vacuum pumping pipeline, a cooling water pipeline, a cooling water return pipeline, and a nitrogen pipeline. The vacuum pumping pipeline is provided with a main pipeline bellows valve ABWV3, a vacuum pumping bellows valve MBWV1, a vacuum pressure sensor PT4, an oil mist filter OilMistFilter, a dry pump DryPump, and a discharge pneumatic valve AV8.The main pipe wave tube valve ABWV3 is connected to the main pipe at the front end and connected to the vacuum wave tube valve MBWV1 through the pipe at the rear end, the vacuum pressure sensor PT4 is connected to the vacuum wave tube valve MBWV1 at the front end and connected to the oil mist filter OilMistFilter at the rear end, the oil mist filter OilMistFilter is connected to the vacuum pump Dry Pump at the rear end, the discharge pneumatic valve AV8 is connected to the vacuum wave tube valve MBWV1 at the front end and connected to the discharge pipe at the rear end. The cooling water pipe has a cooling water isolation ball valve BV1, a cooling water filter F1 and a cooling water flow meter, the cooling water isolation ball valve BV1 is connected to the cooling water pipe at the front end and connected to the cooling water filter F1 at the rear end, the cooling water flow meter is connected to the cooling water filter F1 at the front end and connected to the vacuum pump at the rear end, the cooling water return pipe has a cooling water return isolation ball valve BV2, the cooling water return isolation ball valve BV2 is connected to the vacuum pump at the front end and connected to the cooling water pipe at the rear end. The nitrogen pipe has a nitrogen inlet isolation ball valve BV4 and a nitrogen pressure regulating valve REG5, the nitrogen inlet isolation ball valve BV4 is connected to the nitrogen pipe at the front end and connected to the nitrogen pressure regulating valve REG5 at the rear end, a high-pressure side and a low-pressure side pressure gauge are arranged in front of and behind the nitrogen pressure regulating valve REG5 respectively, and the nitrogen pressure regulating valve REG5 is connected to the vacuum pump at the rear end; the control display operation unit 108 has a microprocessor 114 and a touch screen 115, the touch screen 115 is arranged on the box door of the control cabinet 101, the microprocessor 114 is arranged in the box body of the control cabinet 101, and the microprocessor 114 controls the touch screen 115, so that the operator can use the control display operation unit 108 as a man-machine interface, the operator does not need to directly operate the valves of each unit, the valve action can be controlled through the control display operation unit 108, the raw material liquid input, liquid supply, pipeline purging and vacuum pipeline can be completed by the program-controlled pneumatic valve, and the harm of toxic and harmful liquid to personnel is minimized.
[0025] Secondly, the alarm unit 109 is arranged on the control cabinet 101, the alarm unit 109 includes a differential pressure switch 116 and an audible and visual alarm 117, the differential pressure switch 116 is arranged in the control cabinet 101 and connected to the microprocessor 114, the audible and visual alarm 117 is arranged on the control cabinet 101 and controlled by the microprocessor 114, and the alarm unit 109 can be additionally provided with a flame detector, a temperature sensor and a smoke sensor for flammable liquid.
[0026] Meanwhile, the flow meter display 110 is arranged in the middle of the box door of the control cabinet 101, and the medium flow data in the system can be displayed through the flow meter display 110.
[0027] In addition, the three-color light 111 is arranged on the control cabinet 101; the indicating light 112 is arranged on the control cabinet 101, the control cabinet 101 is provided with the three-color light 111; the control cabinet 101 is provided with a program running the indicating light 112, and the running state of the whole equipment can be indicated through the three-color light 111 and the indicating light 112.
[0028] Finally, the emergency stop button 113 is arranged on the control cabinet 101, and in a critical situation, the emergency stop button 113 can quickly cut off the power source of the whole equipment to stop the operation of the equipment.
[0029] When the system for special gas filling is used, the operator can use the control display operation unit 108 as a man-machine interface, and the operator does not need to directly operate the valves of each unit. The valve action can be controlled through the control display operation unit 108, the raw material liquid input, liquid supply, pipeline purging, and vacuum pipeline can be completed by the program-controlled pneumatic valve itself, so that the harm of toxic and harmful liquid to the personnel can be minimized.
[0030] The above only discloses one or more preferred embodiments of the application, and cannot limit the scope of the application. Those skilled in the art can understand that all or part of the above-mentioned embodiments can be implemented, and equivalent changes made according to the claims of the application still belong to the scope of the application.
Claims
1. A system for filling special gases, characterized in that: It includes a control cabinet, a filling rack, a liquid filling unit, an analysis unit, a purge unit, a helium leak detection unit, a vacuum unit and a control display operation unit. The filling rack is connected to the control cabinet and is located on one side of the control cabinet. The liquid filling unit is arranged on the panel of the filling rack, the analysis unit is arranged on the panel of the filling rack, the purge unit is arranged on the panel of the filling rack, the helium leak detection unit is arranged on the panel of the filling rack, and the vacuum unit is arranged below the filling rack.
2. The system for special gas filling according to claim 1, characterized in that: The system for special gas filling further includes an alarm unit, which is arranged on the control cabinet.
3. The system for special gas filling according to claim 1, characterized in that: The system for special gas filling further includes a flow meter display, which is arranged in the middle of the control cabinet.
4. The system for special gas filling according to claim 1, characterized in that: The system for special gas filling also includes a three-color lamp and an indicator light. The three-color lamp is arranged on the control cabinet; the indicator light is arranged on the control cabinet.
5. The system for special gas filling according to claim 1, characterized in that: The system for special gas filling further includes an emergency stop button, which is arranged on the control cabinet.