Nitric oxide gas metal ion sampling device

Abstract

The utility model discloses a nitric oxide gas metal ion sampling device. The nitric oxide gas metal ion sampling device comprises a gas inlet pipeline, a buffer bottle, a primary absorption bottle, a secondary absorption bottle, a tail gas absorption bottle and a tail gas adsorption assembly which are arranged in sequence, a flow controller is arranged on the gas inlet pipeline and connected with a gas inlet of the buffer bottle, a gas outlet of the buffer bottle is connected with a gas inlet of the first-stage absorption bottle, a gas outlet of the first-stage absorption bottle is connected with a gas inlet of the second-stage absorption bottle through a first pipeline, and a gas outlet of the second-stage absorption bottle is connected with a gas inlet of the tail gas absorption bottle through a pipeline; a gas outlet of the tail gas absorption bottle is connected with the tail gas adsorption assembly. The nitric oxide gas metal ion separation device has the beneficial effects that the separation of nitric oxide gas metal ions is realized, and the whole device is simple, simple and convenient to operate, safe and reliable, and cannot cause pollution to air and harm to sampling personnel.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of gas analysis, specifically relates to a nitric oxide gas metal ion sampling device. BACKGROUND

[0002] The demand of nitric oxide is large in the semiconductor industry, accounting for 71% of the total demand of electronic special gas. The application of nitric oxide in semiconductors is mainly as a plasma gas, which is used in the production of semiconductor devices. In the production of semiconductor devices, nitric oxide can be used as a kind of plasma gas, participating in the process of oxidation, chemical vapor deposition and other processes. It plays a role in chip manufacturing, deposition, lithography, etching, ion implantation, film forming and other aspects. Whether it is the production of semiconductor devices or the manufacture of chips, the content of metal ions in nitric oxide is required to be high. Since it is harmful to the environment, it can pollute water, soil and atmosphere, and there is risk in absorption by using traditional absorption bottles and the result is not accurate enough, so a reliable and safe device for sampling metal ions in nitric oxide gas is urgently needed. SUMMARY

[0003] To solve the above technical problems, the utility model provides a nitric oxide gas metal ion sampling device, which is simple in structure, easy to operate, can effectively absorb residual nitric oxide gas, will not cause harm to the sampling personnel, and can avoid polluting the environment.

[0004] Specifically, the utility model discloses a nitric oxide gas metal ion sampling device, which comprises: gas inlet pipeline, buffer bottle, primary absorption bottle, secondary absorption bottle, tail gas absorption bottle and tail gas adsorption assembly arranged in sequence.

[0005] The flow controller is arranged on the gas inlet pipeline and connected with the gas inlet of the buffer bottle, the gas outlet of the buffer bottle is connected with the gas inlet of the primary absorption bottle, the gas outlet of the primary absorption bottle is connected with the gas inlet of the secondary absorption bottle through a first pipeline, the gas outlet of the secondary absorption bottle is connected with the gas inlet of the tail gas absorption bottle through a pipeline, and the gas outlet of the tail gas absorption bottle is connected with the tail gas adsorption assembly.

[0006] The beneficial effects of the above technical scheme are that the separation of metal ions in nitric oxide gas is realized, the whole device is simple and easy to operate, air pollution is avoided, harm to the sampling personnel is avoided, and safety and reliability are achieved.

[0007] Further, the tail gas adsorption assembly comprises a primary tail gas adsorption column and a secondary tail gas adsorption column, the lower gas inlet of the primary tail gas adsorption column is connected with the tail gas absorption bottle, and the gas outlet of the primary tail gas adsorption column is connected with the gas inlet of the secondary tail gas adsorption column through a pipeline.

[0008] The beneficial effect of the above technical scheme is that the residual nitrogen monoxide in the tail gas is absorbed by the two tail gas adsorption devices, preventing the emission into the air, ensuring the safety of the sampling personnel, and avoiding environmental pollution.

[0009] Further, the tail gas adsorption assembly is connected with a color developing tube.

[0010] The beneficial effect of the above technical scheme is that when the discharged tail gas contains nitrogen monoxide, the color developing tube develops color, indicating that the residual nitrogen monoxide is not completely adsorbed, and it is necessary to check whether the tail gas adsorption device is normal.

[0011] Further, a pollution prevention bottle is arranged between the secondary absorption bottle and the tail gas absorption bottle, the air inlet of the pollution prevention bottle is connected with the secondary absorption bottle through a second pipeline, and the air outlet of the pollution prevention bottle is connected with the tail gas absorption bottle through a third pipeline.

[0012] The beneficial effect of the above technical scheme is that the pollution prevention bottle is used to prevent the liquid in the tail gas absorption bottle from being sucked back into the secondary absorption bottle, which affects the sampling of metal ions.

[0013] Further, a valve V1 and a valve V2 are arranged on the air inlet pipeline, a branch pipeline is arranged between the valve V1 and the valve V2, and a valve V3 is arranged on the branch pipeline.

[0014] Further, a nitrogen monoxide air inlet pipeline and a nitrogen gas air inlet pipeline are connected to the front side of the air inlet pipeline, and the flow controller is arranged on the nitrogen monoxide air inlet pipeline and the nitrogen gas air inlet pipeline, respectively.

[0015] The beneficial effect of the above technical scheme is that the branch pipeline is used to discharge nitrogen gas when the nitrogen gas is filled into the pipeline of the whole device for purging, so as to avoid the influence of other gases in the pipeline on the detection result.

[0016] Further, the primary absorption bottle and the secondary absorption bottle are filled with dilute nitric acid solution.

[0017] The beneficial effect of the above technical scheme is that the dilute nitric acid solution is used to absorb metal ions in the nitrogen monoxide gas, separate the metal ions from the nitrogen monoxide gas, and facilitate subsequent detection.

[0018] Further, the tail gas absorption bottle is filled with acidic potassium permanganate solution.

[0019] The beneficial effect of the above technical scheme is that the acidic potassium permanganate solution absorbs nitrogen monoxide in the gas through reaction, preventing the nitrogen monoxide from entering the air.

[0020] Further, the air outlet of the buffer bottle is connected with an internal connecting pipe, and the internal connecting pipe extends into the bottom of the buffer bottle.

[0021] The buffer bottle prevents liquid in the first-stage absorption bottle from being sucked back into the gas pipeline and causing pollution. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiments or prior art description will be briefly introduced.

[0023] Figure 1 is the overall structure schematic diagram of the nitric oxide gas metal ion sampling device

[0024] The labels involved in the drawings are as follows:

[0025] Gas inlet pipeline 1; flow controller 11; valve V112; valve V213; branch pipeline 14; valve V315; nitric oxide gas inlet pipeline 16; nitrogen gas inlet pipeline 17; buffer bottle 2; first-stage absorption bottle 3; second-stage absorption bottle 4; tail gas absorption bottle 5; first pipeline 31; first-stage tail gas adsorption column 6; second-stage tail gas adsorption column 61; color developing tube 7; anti-pollution bottle 8; second pipeline 81; third pipeline 82. DETAILED DESCRIPTION

[0026] The present application will be further described in detail below with reference to the drawings.

[0027] As shown in the drawings, the present application discloses a nitric oxide gas metal ion sampling device, comprising: gas inlet pipeline 1, buffer bottle 2, first-stage absorption bottle 3, second-stage absorption bottle 4, tail gas absorption bottle 5 and tail gas adsorption assembly arranged in sequence.

[0028] The flow controller 11 is arranged on the gas inlet pipeline 1 and connected with the gas inlet of the buffer bottle 2, the gas outlet of the buffer bottle 2 is connected with the gas inlet of the first-stage absorption bottle 3, the gas outlet of the first-stage absorption bottle 3 is connected with the gas inlet of the second-stage absorption bottle 4 through the first pipeline 31, the gas outlet of the second-stage absorption bottle 4 is connected with the gas inlet of the tail gas absorption bottle 5 through a pipeline, and the gas outlet of the tail gas absorption bottle 5 is also connected with the tail gas adsorption assembly through a pipeline.

[0029] The above technical solution has the advantages that the separation of nitric oxide gas metal ions is realized, the whole device is simple and easy to operate, air pollution is avoided, and the sampling personnel are not harmed, which is safe and reliable.

[0030] In some embodiments, the tail gas adsorption assembly includes a first tail gas adsorption column 6 and a second tail gas adsorption column 61, the lower side gas inlet of the first tail gas adsorption column 6 is connected with the tail gas absorption bottle 5, the gas outlet of the first tail gas adsorption column 6 is connected with the gas inlet of the second tail gas adsorption column 61 through a pipeline, the first tail gas adsorption column 6 is filled with alumina particles, which functions to absorb water and acidic substances in the tail gas absorption bottle 5 to prevent the water and acidic substances from affecting the adsorption effect of the second tail gas adsorption column 61, the second tail gas adsorption column 61 is filled with activated carbon particles, which functions to adsorb residual nitric oxide in the tail gas to prevent the residual nitric oxide from being discharged into the air, thereby ensuring the safety of the sampling personnel and avoiding environmental pollution. The first tail gas adsorption column and the second tail gas adsorption column can be regenerated by heating to achieve reuse.

[0031] Further, the tail gas adsorption assembly is connected with a color developing tube 7, when the discharged tail gas contains nitric oxide, the color developing tube 7 develops color to prompt that the adsorption of residual nitric oxide is incomplete, and the tail gas adsorption column needs to be checked.

[0032] In some embodiments, a pollution prevention bottle 8 is arranged between the second absorption bottle 4 and the tail gas absorption bottle 5, the gas inlet of the pollution prevention bottle 8 is connected with the second absorption bottle 4 through a second pipeline 81, the gas outlet of the pollution prevention bottle 8 is connected with the tail gas absorption bottle 5 through a third pipeline 82, the gas inlet of the pollution prevention bottle 8 extends into the bottle body and the end portion is located at the upper side inside the bottle body, and the gas outlet of the pollution prevention bottle 8 extends into the bottom of the bottle body, so that when backflow occurs, the liquid enters the bottom of the bottle body and the gas inlet is located at the upper side, so that the liquid cannot enter the second absorption bottle 4 in front.

[0033] The pollution prevention bottle 8 is used to prevent the liquid in the tail gas absorption bottle 5 from being sucked back into the second absorption bottle 4 to affect the sampling of metal ions.

[0034] In some embodiments, the gas inlet pipeline 1 is provided with a valve V112 and a valve V213, a branch pipeline 14 is arranged between the valve V112 and the valve V213, and the branch pipeline 14 is provided with a valve V315. The gas inlet pipeline 1 is connected with a nitric oxide gas inlet pipeline 16 and a nitrogen gas inlet pipeline 17 in front, and flow controllers 11 are arranged on the nitric oxide gas inlet pipeline 16 and the nitrogen gas inlet pipeline 17, respectively, to control the types and flow rates of the gases introduced.

[0035] The nitrogen branch pipeline 14 is used to fill nitrogen to purge the pipelines in the entire device to avoid other gases in the pipelines from affecting the detection results.

[0036] Further, the first absorption bottle 3 and the second absorption bottle 4 are filled with dilute nitric acid solution. The dilute nitric acid solution is used to absorb metal ions in the nitric oxide gas to separate the metal ions from the nitric oxide gas, thereby facilitating subsequent detection.

[0037] Further, the tail gas absorption bottle 5 is filled with acidic potassium permanganate solution. The acidic potassium permanganate solution absorbs the nitrogen monoxide in the gas by reaction, preventing the nitrogen monoxide from entering the air.

[0038] In some embodiments, the buffer bottle 2 is connected with an internal connecting pipe at the gas outlet, and the internal connecting pipe extends into the bottom of the buffer bottle 2.

[0039] The beneficial effects of the above technical solution are that the buffer bottle 2 prevents the liquid in the primary absorption bottle 3 from being sucked back into the gas pipeline and causing pollution.

[0040] The process of sampling the metal ions in the nitrogen monoxide is as follows:

[0041] 1. 200 mL of 5% dilute nitric acid solution of chromatographic grade is filled into the primary absorption bottle 3 and the secondary absorption bottle 4, and 2000 mL of acidic potassium permanganate solution is filled into the tail gas absorption bottle 5; a nitrogen monoxide cylinder is connected to the nitrogen monoxide inlet pipeline 16, and a nitrogen cylinder is connected to the nitrogen inlet pipeline 17.

[0042] 2. The valves V112 and V3 are opened, and the bypass is purged with nitrogen for 30 min.

[0043] 3. After the bypass is purged, the valve V315 is closed, the valve V213 is opened, and the sampling device is purged with nitrogen for 1 h.

[0044] 4. After the sampling device is purged, the valve on the nitrogen cylinder is closed.

[0045] 5. The flow rate of the nitrogen monoxide is set to 500 mL / min through the flow controller 11 on the nitrogen monoxide inlet pipeline 16, and the nitrogen monoxide gas is passed for 20 min.

[0046] 6. After the sampling is completed, the valve on the nitrogen monoxide cylinder is closed, the valve on the nitrogen cylinder is opened, and the device is purged with N2 for 2 h.

[0047] The metal ions in the nitrogen monoxide gas enter the primary absorption bottle 3 and the secondary absorption bottle 4, then the absorption liquids in the primary absorption bottle 3 and the secondary absorption bottle 4 are combined and uniformly mixed, the concentration of the metal ions in the absorption liquid is tested by the ion chromatograph, and finally the concentration of the metal ions in the nitrogen monoxide gas is obtained by calculation. The device has simple structure and convenient operation, does not cause pollution to the air, does not cause harm to the sampling personnel, and is safe and reliable.

[0048] For those skilled in the art, without departing from the creative concept of the present application, a number of modifications and improvements can be made, which all belong to the protection scope of the present application.

Claims

1. A nitric oxide gas metal ion sampling device, characterized in that: include: An air intake pipe (1), a buffer bottle (2), a first-stage absorption bottle (3), a second-stage absorption bottle (4), a tail gas absorption bottle (5) and a tail gas adsorption assembly are arranged in sequence; A flow controller (11) is provided on the air inlet pipe (1) and is connected to the air inlet of the buffer bottle (2); the air outlet of the buffer bottle (2) is connected to the air inlet of the first-stage absorption bottle (3); the air outlet of the first-stage absorption bottle (3) is connected to the air inlet of the second-stage absorption bottle (4) via a first pipe (31); the air outlet of the second-stage absorption bottle (4) is connected to the air inlet of the tail gas absorption bottle (5) via a pipe; and the air outlet of the tail gas absorption bottle (5) is connected to the tail gas adsorption component.

2. The nitric oxide gas metal ion sampling device according to claim 1, characterized in that: The tail gas adsorption assembly comprises a primary tail gas adsorption column (6) and a secondary tail gas adsorption column (61); the lower air inlet of the primary tail gas adsorption column (6) is connected to the tail gas absorption bottle (5); and the air outlet of the primary tail gas adsorption column (6) is connected to the air inlet of the secondary tail gas adsorption column (61) via a pipeline.

3. The nitric oxide gas metal ion sampling device according to claim 1, characterized in that: The tail gas adsorption component is connected to a color developing tube (7).

4. The nitric oxide gas metal ion sampling device according to claim 1, characterized in that: An anti-pollution bottle (8) is provided between the secondary absorption bottle (4) and the tail gas absorption bottle (5); an air inlet of the anti-pollution bottle (8) is connected to the secondary absorption bottle (4) via a second pipe (81); and an air outlet of the anti-pollution bottle (8) is connected to the tail gas absorption bottle (5) via a third pipe (82).

5. The nitric oxide gas metal ion sampling device according to claim 1, characterized in that: The air intake pipe (1) is provided with a valve V1 (12) and a valve V2 (13), a branch pipe (14) is provided between the valve V1 (12) and the valve V2 (13), and a valve V3 (15) is provided on the branch pipe (14).

6. The nitric oxide gas metal ion sampling device according to claim 1, characterized in that: The front side of the air intake pipe (1) is connected to a nitric oxide air intake pipe (16) and a nitrogen air intake pipe (17), and the flow controller (11) is respectively arranged on the nitric oxide air intake pipe (16) and the nitrogen air intake pipe (17).

7. The nitric oxide gas metal ion sampling device according to claim 1, characterized in that: The first-level absorption bottle (3) and the second-level absorption bottle (4) are filled with dilute nitric acid solution.

8. The nitric oxide gas metal ion sampling device according to claim 2, characterized in that: The tail gas absorption bottle (5) is filled with acidic potassium permanganate solution.

9. The nitric oxide gas metal ion sampling device according to claim 1, characterized in that: The gas outlet of the buffer bottle (2) is connected to an internal connecting pipe, and the internal connecting pipe extends into the bottom of the buffer bottle (2).

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