Object capturing device and cleaning unit

Abstract

The utility model provides an object capturing device and a cleaning unit. The object capturing device is used for capturing objects and preventing contaminants from contacting the objects. The object capturing device comprises a workbench for bearing an object, a first cleaning unit and a second cleaning unit. The first cleaning unit comprises a shell, a rotating head module connected to the shell and a negative pressure unit connected to the shell through an exhaust pipeline. The rotating head module comprises a rotating piece and a plurality of obtaining heads. The rotating member and the housing together form a configuration chamber, and the rotating member can rotate along the rotation direction. The plurality of acquisition heads are arranged at intervals in the rotation direction and are capable of reciprocating in the height direction to acquire an object. The negative pressure unit is communicated with the configuration cavity and used for generating adsorption force so that pollutants falling into the configuration cavity can be discharged out of the configuration cavity through the exhaust pipeline, the pollutants can be prevented from falling onto the object to be obtained, and therefore a high-cleanliness application environment is provided for the object capturing device.

Description

Technical Field

[0001] This application relates to a capture device, and more particularly to an object capture device and a cleaning unit. Background Technology

[0002] When existing object capturing devices acquire an object (such as a chip) through their rotating head module, contaminants are often generated due to the operation (such as friction) between the various components in the existing rotating head module, causing the contaminants to easily fall onto the object to be acquired.

[0003] Therefore, the applicant believes that the above-mentioned defects can be improved. So, the applicant has devoted himself to research and applied scientific principles, and finally proposed a design that is reasonable and effectively improves the above-mentioned defects. Utility Model Content

[0004] The technical problem to be solved by this application is to provide an object capture device and a cleaning unit, which can effectively solve the defects that may occur in existing object capture devices.

[0005] One embodiment of this application discloses an object capturing device, which can be used to capture an object and prevent contaminants from contacting the object. The object capturing device includes: a worktable having a platform and a support connected to the platform, wherein the platform is used to carry the object; a first clean unit including: a housing connected to the support; a rotating head module connected to the housing and facing the platform; wherein the rotating head module includes: a rotating member forming a configuration chamber with the housing, and the rotating member being rotatable along a rotation direction; and a plurality of capturing heads arranged at intervals along the rotation direction. The rotating component is connected to a plurality of acquisition heads located within the configuration chamber; wherein the plurality of acquisition heads are capable of reciprocating along a height direction perpendicular to the rotation direction to acquire the object; and a negative pressure unit and an exhaust pipe, the negative pressure unit being connected to the housing and the configuration chamber via the exhaust pipe, for generating an adsorption force in the configuration chamber to allow contaminants falling into the configuration chamber to be discharged from the configuration chamber via the exhaust pipe; and a second clean unit disposed on one side of the first clean unit, and the second clean unit being capable of generating a clean laminar flow toward the first clean unit.

[0006] Optionally, the rotating member is connected to one side of the housing; the rotating member has a gear-shaped shape and has a plurality of protrusions spaced apart along the rotation direction, and each of the protrusions covers one of the acquisition heads.

[0007] Optionally, the first cleaning unit further includes a camera disposed on the housing, and the position of the camera corresponds to between two adjacent protrusions of the rotating member.

[0008] Optionally, each of the protrusions of the rotating member has a first air slit between it and the corresponding acquisition head, and each first air slit is connected to the configuration chamber so that contaminants adjacent to each first air slit are drawn into the configuration chamber by the adsorption force.

[0009] Optionally, a second air gap is provided between the housing and the rotating member, and the second air gap communicates with the configuration chamber, so that pollutants adjacent to the second air gap are drawn into the configuration chamber by the adsorption force.

[0010] Optionally, the gap of the first air gap is between 0.2 mm and 0.5 mm, and the gap of the second air gap is between 0.2 mm and 0.5 mm.

[0011] Optionally, the rotating member surrounds the outer side of the housing and has a disc-shaped shape; wherein the rotating member further has a plurality of windows and each of the acquisition heads is located between two adjacent windows.

[0012] Optionally, the first clean unit further includes a camera disposed on the housing, and the position of the camera corresponds to one of the windows.

[0013] Optionally, the workbench further has a plurality of air extraction holes formed on the platform; the second clean unit further includes: a filter module disposed on one side of the first clean unit, the filter module including a pressure equalization chamber, an air supply channel connected to one side of the pressure equalization chamber, and a filter membrane disposed at the bottom of the pressure equalization chamber; wherein, the air supply channel is used to introduce an external airflow into the pressure equalization chamber, so that the external airflow passes through the filter membrane to form the clean laminar flow; wherein, the platform can draw the clean laminar flow into the platform through the plurality of air extraction holes, so that the clean laminar flow flows through the first clean unit.

[0014] One embodiment of this application discloses a cleanroom unit, the cleanroom unit comprising: a housing; a rotating head module connected to the housing; wherein the rotating head module comprises: a rotating member that forms a configuration chamber together with the housing, and the rotating member is rotatable along a rotation direction; and a plurality of acquisition heads arranged at intervals along the rotation direction and connected to the rotating member, and the plurality of acquisition heads partially located within the configuration chamber; wherein the plurality of acquisition heads are reciprocating along a height direction perpendicular to the rotation direction to acquire an object; and a negative pressure unit and an exhaust pipe, the negative pressure unit being connected to the housing through the exhaust pipe and also connected to the configuration chamber, for generating an adsorption force in the configuration chamber to allow contaminants falling into the configuration chamber to be discharged from the configuration chamber via the exhaust pipe.

[0015] In summary, the object capture device and clean unit disclosed in this application embodiment, through the design of "the rotating member and the housing together forming the configuration chamber" and "the plurality of acquisition heads partially located in the configuration chamber", can be used in conjunction with "the negative pressure unit to generate an adsorption force in the configuration chamber" so that all the contaminants falling into the configuration chamber can be discharged from the configuration chamber through the exhaust pipe, thereby preventing the contaminants from falling onto the object to be acquired, thereby providing a high-cleanliness application environment for the object capture device.

[0016] The other effects and embodiments of this application are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a perspective view of the object capturing device according to Embodiment 1 of this application;

[0019] Figure 2 for Figure 1 A three-dimensional schematic diagram of the first clean unit and its support structure;

[0020] Figure 3 for Figure 2 A cross-sectional view along section line III-III;

[0021] Figure 4 for Figure 3A magnified view of a portion of block IV;

[0022] Figure 5 for Figure 4 The rotating head module is used to obtain a magnified partial schematic diagram of the object;

[0023] Figure 6 This is a perspective view of the object capturing device according to Embodiment 2 of this application;

[0024] Figure 7 for Figure 6 A three-dimensional schematic diagram of the first clean unit and its support structure;

[0025] Figure 8 for Figure 7 A cross-sectional view along section line VIII-VIII;

[0026] Figure 9 for Figure 8 A magnified view of a portion of block IX;

[0027] Figure 10 for Figure 9 The rotating head module is used to obtain a magnified schematic diagram of a part of the object. Detailed Implementation

[0028] The following specific embodiments illustrate the implementation of the "object capture device and clean unit" disclosed in this application. Those skilled in the art can understand the advantages and effects of this application from the content disclosed in this specification. This application can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this application. Furthermore, the accompanying drawings are for simple illustration only and are not depictions of actual dimensions, as stated in advance. The following embodiments will further describe the relevant technical content of this application in detail, but the disclosed content is not intended to limit the scope of protection of this application.

[0029] It should be understood that while terms such as "first," "second," and "third" may be used in this document to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one signal from another. Furthermore, the term "or" as used herein should, as appropriate, include any combination of one or more of the related listed items.

[0030] [Example 1]

[0031] Please see Figures 1 to 5As shown, this is an embodiment of the present application. This embodiment discloses an object capturing device 100, which can be used to acquire (e.g., pick up and place) an object 200 and can prevent contaminants P from contacting the object 200. It should be noted that the object 200 in this embodiment is multiple chips, but the objects used by the object capturing device 100 (that is, the types of objects 200) can be adjusted and changed according to design requirements, and this application does not impose any limitations on this.

[0032] like Figure 1 As shown, the object capturing device 100 includes a workbench 2, a first clean unit 1 located on one side of the workbench 2, and a second clean unit 3 disposed on one side of the first clean unit 1. However, although the object capturing device 100 is described in this embodiment as being configured with the first clean unit 1, the workbench 2, and the second clean unit 3 in combination, this application is not limited thereto. For example, in other embodiments not shown in this application, the first clean unit 1 may be used alone (e.g., in implementation, manufacturing, or sales) or in combination with other components.

[0033] The workbench 2 includes a platform 21 and a support 22 connected to the platform 21. Notably, in this embodiment, the platform 21 further includes a movable support member 212 for supporting the objects 200 (i.e., the plurality of chips). To facilitate understanding of this embodiment, the structure of each component in the first clean unit 1 and their interconnections will be described below, and the relationship between the first clean unit 1 and other components in the object capturing device 100 will be explained as appropriate.

[0034] like Figures 1 to 4 As shown, the first clean unit 1 includes a housing 11 connected to the bracket 22, a rotating head module 12 connected to one side of the housing 11, an exhaust pipe 13 connected to the other side of the housing 11, and a negative pressure unit 14 connected to the exhaust pipe 13.

[0035] It should be further noted that the internal space of the bracket 22 is connected to the interior of the housing 11, and in this embodiment, the bracket 22 has multiple support columns 221 (e.g., four support columns 221) and a fixing frame 222 (e.g., a cross bracket) connected to the multiple support columns 221. However, the number of support columns 221 and the shape of the fixing frame 222 can be adjusted and varied according to design requirements, and this application is not limited thereto. In other words, in this embodiment, the fixing frame 222 and the multiple support columns 221 are also connected to the housing 11. The bracket 22 can fix the housing 11 through the fixing frame 222 and is supported on the platform 21 by the multiple support columns 221.

[0036] The rotating head module 12 faces the stage 21 and is connected to the housing 11. The rotating head module 12 includes a rotating component 121 and a plurality of acquisition heads 122 connected to the rotating component 121. The rotating component 121 and the plurality of acquisition heads 122 can all rotate along a rotation direction D1 via a rotating mechanism (not shown).

[0037] Furthermore, the rotating member 121 rotates relative to the housing 11 along the rotation direction D1, and the rotating member 121 and the housing 11 together form a configuration chamber A1. In this embodiment, the rotating member 121 has a gear-shaped shape and has a plurality of protrusions 1211 arranged at intervals along the rotation direction D1, but the shape of the rotating member 121 can be adjusted and varied according to design requirements, and this application does not limit it.

[0038] More specifically, each of the protrusions 1211 can correspondingly cover one of the acquisition heads 122, such that a portion of each acquisition head 122 is located within the configuration chamber A1, and the plurality of acquisition heads 122 can be arranged at intervals along the rotation direction D1. For further details, please also refer to... Figure 5 As shown, the plurality of acquisition heads 122 can reciprocate along a height direction D2 perpendicular to the rotation direction D1 to acquire the object 200.

[0039] like Figures 3 to 5As shown, each protrusion 1211 of the rotating member 121 has a first air gap S1 between it and the corresponding acquisition head 122, and each first air gap S1 communicates with the configuration chamber A1. Furthermore, a second air gap S2 is provided between the housing 11 and the rotating member 121, and the second air gap S2 also communicates with the configuration chamber A1. More specifically, the gap of the first air gap S1 is between 0.2 mm and 0.5 mm, and the gap of the second air gap S2 is between 0.2 mm and 0.5 mm.

[0040] like Figures 1 to 3 As shown, in this embodiment, the exhaust pipe 13 is connected to the housing 11 away from the platform 21, but this application is not limited to this. For example, since the bracket 22, housing 11, and rotating head module 12 can all be connected to each other, in other embodiments not shown in this application, the exhaust pipe 13 may also be provided on the bracket 22 according to design requirements to connect to the housing 11.

[0041] Furthermore, the negative pressure unit 14 is connected to the housing 11 and the rotating head module 12 via the exhaust pipe 13, and the negative pressure unit 14 is also connected to the configuration chamber A1. Specifically, the negative pressure unit 14 is used to generate an adsorption force in the configuration chamber A1, so that the pollutants P falling into the configuration chamber A1 are discharged from the configuration chamber A1 via the exhaust pipe 13.

[0042] For example, such as Figure 4 and Figure 5 As shown, when the rotating head module 12 moves reciprocally along the height direction D2 relative to the rotating member 121 via each of the acquisition heads 122 to acquire (e.g., pick up and put down) the object 200, the contaminant P may be generated between the rotating member 121 and each of the acquisition heads 122 due to operation (e.g., friction).

[0043] As described above, the first clean unit 1 can generate the adsorption force on the first air gap S1 connected to the configuration chamber A1 through the negative pressure unit 14, so that the pollutants P around each of the first air gaps S1 can be drawn into the configuration chamber A1 by the adsorption force, and then discharged from the configuration chamber A1 through the exhaust pipe 13, thereby preventing the pollutants P from falling onto the object 200.

[0044] In other words, the rotating head module 12 can also be designed with the first air gap S1 in conjunction with the acquisition head 122 being partially located in the configuration chamber A1, so that the contaminants P generated by the various components in the rotating head module 12 during operation will not accumulate therein, thereby avoiding the problem of damage to the rotating head module 12 due to the accumulation of contaminants P.

[0045] Furthermore, when the rotating component 121 rotates relative to the housing 11 along the rotation direction D1, the contaminant P may be generated between the rotating component 121 and the housing 11 due to operation (e.g., friction). As described above, the first clean unit 1 can generate the adsorption force on the second air gap S2 through the negative pressure unit 14, so that the contaminant P around the second air gap S2 can be drawn into the configuration chamber A1 by the adsorption force, thereby preventing the contaminant P from drifting outside the first clean unit 1 and falling onto the object 200.

[0046] It is worth mentioning that the first clean unit 1 further includes a camera 15 disposed on the housing 11, but the number of cameras 15 can be adjusted and varied according to design requirements, and this application does not limit it here. Furthermore, the position of the camera 15 can correspond to the space between two adjacent protrusions 1211 in the rotating member 121, and the camera 15 can remain stationary and correspond to a space between any two adjacent protrusions 1211 by rotating the rotating member 121 along the rotation direction D1, for inspecting the condition of the acquisition head 122 when acquiring the object 200.

[0047] The above has described the structure of all components of the first clean unit 1 and their connections. It should be noted that... Figure 1 As shown, the second clean unit 3 can further generate a clean laminar flow G toward the first clean unit 1. In this embodiment, the second clean unit 3 may include a filter module 31 disposed on one side of the first clean unit 1, which includes a pressure equalization chamber 311, an air supply channel 312 connected to one side of the pressure equalization chamber 311, and a filter membrane 313 disposed at the bottom of the pressure equalization chamber 311.

[0048] Furthermore, the second clean unit 3 can introduce an external airflow into the equalization chamber 311 through the air supply channel 312, so that the external airflow passes through the filter membrane 313 to form the clean laminar flow G. It should be further noted that the workbench 2 further has a plurality of exhaust holes 211 formed on the platform 21, and the platform 21 uses the plurality of exhaust holes 211 to draw the clean laminar flow G into it, so that the clean laminar flow G flows through the first clean unit 1, thereby drawing in the contaminants P located around the first clean unit 1 into the platform 21.

[0049] As described above, the object capturing device 100 can further, through the cooperation of the first clean unit 1, the workbench 2, and the second clean unit 3, effectively prevent the contaminants P present around the object capturing device 100 from falling onto the object 200 when the rotating head module 12 acquires the object 200, thereby providing the object capturing device 100 with a high-cleanliness application environment.

[0050] [Example 2]

[0051] Please see Figures 6 to 10 As shown, this is Embodiment Two of this application. It should be noted that since this embodiment is similar to Embodiment One above, the similarities between the two embodiments (such as the matching relationship between the first clean unit 1, the workbench 2, and the second clean unit 3; and the component structure of the workbench 2 and the second clean unit 3) will not be described again.

[0052] Furthermore, the matching relationship between "the housing 11 and the rotating head module 12" and "the exhaust pipe 13 and the negative pressure unit 14" in this embodiment is the same as that in Embodiment 1 above. The difference between this embodiment and Embodiment 1 above lies in the matching relationship between the housing 11 and the rotating head module 12, as explained below:

[0053] like Figures 7 to 9 As shown, in this embodiment, the rotating member 121 has a disc-shaped shape and surrounds the outer side of the housing 11, so that the rotating member 121 and the housing 11 together form the configuration chamber A1. Furthermore, the housing 11 can partially cover a plurality of the acquisition heads 122, such that a portion of each acquisition head 122 is located within the configuration chamber A1.

[0054] It is worth mentioning that the shape of the housing 11 in this embodiment is designed to correspond to the overall shape of the multiple acquisition heads 122, but the shape of the housing 11 can be adjusted and changed according to design requirements, and this application does not limit it here.

[0055] In other words, in this embodiment, each of the acquisition heads 122 is spaced apart from each other and partially located within the configuration chamber A1. Furthermore, the rotating member 121 also has a plurality of windows 1212 (e.g., transparent windows), and each of the acquisition heads 122 is located between two adjacent windows 1212.

[0056] Furthermore, in this embodiment, the position of the camera 15 disposed on the housing 11 can correspond to one of the windows 1212, and the camera 15 can remain stationary and correspond to one of the windows 1212 by rotating the rotating member 121 along the rotation direction D1, thereby being used to inspect the condition of the acquisition head 122 when acquiring the object 200.

[0057] [Technical Effects of the Embodiments in this Application]

[0058] In summary, the object capture device and clean unit disclosed in this application embodiment, through the design of "the rotating member and the housing together forming the configuration chamber" and "the plurality of acquisition heads partially located in the configuration chamber", can be used in conjunction with "the negative pressure unit to generate an adsorption force in the configuration chamber" so that all the contaminants falling into the configuration chamber can be discharged from the configuration chamber through the exhaust pipe, thereby preventing the contaminants from falling onto the object to be acquired, thereby providing a high-cleanliness application environment for the object capture device.

[0059] Furthermore, the object capturing device and cleaning unit disclosed in the embodiments of this application can also be designed with "each of the protrusions of the rotating member having a first air gap between it and the corresponding acquisition head" and "each first air gap being able to communicate with the configuration chamber" to cooperate with "the negative pressure unit to generate an adsorption force in the configuration chamber" in order to avoid the accumulation of contaminants in the rotating head module, thereby avoiding the problem of damage to the rotating head module due to the accumulation of contaminants.

[0060] The embodiments and / or implementation methods described above are merely preferred embodiments and / or implementation methods for implementing the technology of this application, and are not intended to limit the implementation methods of the technology of this application in any way. Any person skilled in the art may make some modifications or alterations to other equivalent embodiments without departing from the scope of the technical means disclosed in this application, but these should still be regarded as the technology or embodiments that are substantially the same as those of this application.

Claims

1. An object capturing device, characterized in that, The object capturing device is used to capture an object and prevents contaminants from contacting the object. The object capturing device includes: A workbench has a platform and a support connected to the platform, and the platform is used to support the object; A first clean unit, comprising: A housing, connected to the bracket; A rotating head module is connected to the housing and faces the stage; wherein the rotating head module includes: A rotating member, which together with the housing forms a configuration chamber, and the rotating member is rotatable along a rotational direction; and Multiple acquisition heads are arranged at intervals along the rotation direction and connected to the rotating member, with portions of the acquisition heads located within the configuration chamber; wherein the multiple acquisition heads are capable of reciprocating along a height direction perpendicular to the rotation direction to acquire the object; and a negative pressure unit and an exhaust pipe, the negative pressure unit being connected to the housing and the configuration chamber via the exhaust pipe, for generating an adsorption force in the configuration chamber to allow contaminants falling into the configuration chamber to be discharged from the configuration chamber via the exhaust pipe; and A second clean unit is disposed on one side of the first clean unit, and the second clean unit is capable of generating a clean laminar flow toward the first clean unit.

2. The object capturing device according to claim 1, characterized in that, The rotating component is connected to one side of the housing; the rotating component has a gear-shaped shape and has a plurality of protrusions arranged at intervals along the rotation direction, and each of the protrusions covers one of the acquisition heads.

3. The object capturing device according to claim 2, characterized in that, The first clean unit further includes a camera disposed on the housing, and the position of the camera corresponds to between two adjacent protrusions of the rotating member.

4. The object capturing device according to claim 3, characterized in that, Each of the protrusions of the rotating member has a first air gap between it and the corresponding acquisition head, and each first air gap is connected to the configuration chamber so that contaminants adjacent to each first air gap are drawn into the configuration chamber by the adsorption force.

5. The object capturing device according to claim 4, characterized in that, A second air gap is provided between the housing and the rotating component, and the second air gap communicates with the configuration chamber, so that pollutants adjacent to the second air gap are drawn into the configuration chamber by the adsorption force.

6. The object capturing device according to claim 5, characterized in that, The gap of the first air gap is between 0.2 mm and 0.5 mm, and the gap of the second air gap is between 0.2 mm and 0.5 mm.

7. The object capturing device according to claim 1, characterized in that, The rotating component surrounds the outer side of the housing and has a disc-shaped shape; wherein the rotating component further has a plurality of windows, and each of the acquisition heads is located between two adjacent windows.

8. The object capturing device according to claim 7, characterized in that, The first clean unit further includes a camera disposed on the housing, and the position of the camera corresponds to one of the windows.

9. The object capturing device according to claim 1, characterized in that, The worktable further has a plurality of air extraction holes formed on the carrier; The second clean unit further includes: A filtration module is disposed on one side of the first clean unit. The filtration module includes a pressure equalization chamber, an air supply channel connected to one side of the pressure equalization chamber, and a filter membrane disposed at the bottom of the pressure equalization chamber. The air supply channel is used to introduce an external airflow into the pressure equalization chamber so that the external airflow passes through the filter membrane to form the clean laminar flow. The platform can draw in the clean laminar flow through multiple air extraction holes, so that the clean laminar flow can flow through the first clean unit.

10. A cleanroom unit, characterized in that, The clean unit includes: A shell; A rotating head module is connected to the housing; wherein the rotating head module includes: A rotating member, which together with the housing forms a configuration chamber, and the rotating member is rotatable along a rotational direction; and A plurality of acquisition heads are arranged at intervals along the rotation direction and connected to the rotating member, with portions of the plurality of acquisition heads located within the configuration chamber; wherein the plurality of acquisition heads are capable of reciprocating along a height direction perpendicular to the rotation direction to acquire an object; and A negative pressure unit and an exhaust pipe are provided. The negative pressure unit is connected to the housing through the exhaust pipe and is also connected to the configuration chamber. The negative pressure unit is used to generate an adsorption force in the configuration chamber so that pollutants falling into the configuration chamber are discharged from the configuration chamber through the exhaust pipe.

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