Shielding mechanism and coating equipment with same

Abstract

The utility model provides a shielding mechanism and coating equipment with the shielding mechanism, the shielding mechanism comprises a shielding main body used for shielding steam generated by the coating equipment, the shielding mechanism also comprises a ventilation assembly connected with the shielding main body, the ventilation assembly is provided with an air inlet used for air inlet and an air outlet used for air outlet, and the air outlet is arranged towards the coating position of the coating equipment. The shielding mechanism provided by the utility model solves the problem that the base film is subjected to thermal damage due to the temperature rise of the base film caused by phase change heat released in the film forming process in the prior art.

Description

Technical Field

[0001] This utility model relates to the field of coating technology, and more specifically, to a shielding mechanism and a coating device having the same. Background Technology

[0002] Composite current collectors are composite materials made from PET (polyethylene terephthalate) or similar raw material films as a base film, which are then coated with copper / aluminum molecules on both sides through processes such as vacuum deposition. Employing a three-layer composite structure of "metal-polymer material-metal," nanoscale metals are formed on the surface of the polymer PET / PP (polypropylene) film using methods such as vacuum evaporation and magnetron sputtering. The film formation process utilizes wire-feed evaporation to deposit the metal wire onto the polymer material surface. During evaporation, the metal wire is heated and vaporized in an evaporation boat, then sublimates on the substrate surface to form a dense film layer.

[0003] Currently, film formation mainly relies on the bonding of the base film and the main roller for heat exchange in order to achieve no heat damage.

[0004] However, evaporation is carried out under vacuum conditions. During the sublimation process of the metal wire, a large amount of heat is released. The heat exchange between the base film and the main roller is poor. The phase change heat released during the film formation process causes the base film temperature to rise, resulting in thermal damage to the base film. In addition, during the transport of the base film in the winding system, it passes through the flattening roller and enters the main roller. The flattening roller exerts a force on the base film in the width direction. If this force is not completely released, the adhesion between the base film and the main roller will be poor, affecting heat exchange and causing thermal damage. Utility Model Content

[0005] The main objective of this invention is to provide a shielding mechanism and a coating device having the same, so as to solve the problem in the prior art where the phase change heat released during the film formation process causes the base film temperature to rise, resulting in thermal damage to the base film.

[0006] To achieve the above objectives, according to one aspect of the present invention, a shielding mechanism is provided, including a shielding body for shielding vapor generated by a coating equipment. The shielding mechanism further includes a venting component connected to the shielding body. The venting component has an air inlet for inletting air and an air outlet for outletting air, the air outlet being positioned toward the coating position of the coating equipment.

[0007] Furthermore, the ventilation assembly includes multiple ventilation sections, each of which has a ventilation channel and an air outlet connected to the ventilation channel. The multiple ventilation sections are arranged to correspond one-to-one with multiple areas of the coating position, and the air outlet of each ventilation section is arranged to face the corresponding area.

[0008] Furthermore, each ventilation section is equipped with multiple air outlets, which are spaced apart from each other.

[0009] Furthermore, multiple ventilation sections are arranged sequentially along a preset direction, and multiple air outlets on each ventilation section are arranged at intervals along the preset direction.

[0010] Furthermore, the ventilation assembly includes a first pipe and a plurality of baffles disposed on the first pipe. The plurality of baffles are spaced apart along a first axial direction of the first pipe to divide the first pipe into a plurality of ventilation sections; wherein the first axial direction is a preset direction.

[0011] Furthermore, the ventilation assembly has multiple air inlets, each corresponding to a ventilation section, and each air inlet is connected to the ventilation channel of the corresponding ventilation section; the ventilation assembly also includes multiple adjusting components, each corresponding to a multiple air inlet, and each adjusting component is used to adjust the air intake of the corresponding air inlet.

[0012] Furthermore, the ventilation assembly includes multiple air inlet pipes, each corresponding to a multiple ventilation section, and each air inlet pipe is connected to a corresponding ventilation section; the multiple air inlet pipes are also corresponding to multiple air inlets, and each air inlet pipe has a corresponding air inlet.

[0013] Furthermore, the shielding mechanism also includes a cooling section having a cooling cavity for containing a cooling medium, at least a portion of the surface of the cooling section being in contact with the shielding body.

[0014] Furthermore, the cooling section is a second pipe fitting, which has a first end and a second end arranged sequentially along its second axial direction. The first end has an inlet for the cooling medium to flow in, and the second end has an outlet for the cooling medium to flow out. Both the inlet and the outlet are connected to the cooling cavity.

[0015] According to another aspect of the present invention, a coating apparatus is provided, including a shielding mechanism and a main roller, wherein the shielding mechanism is disposed below the main roller and is the shielding mechanism described above.

[0016] The present invention utilizes a venting component of the shielding mechanism connected to the shielding body. The venting component has an inlet for air intake and an outlet for air exhaust, with the outlet facing the coating position of the coating equipment. During film formation, inert gas enters the venting component through the inlet, then flows out through the outlet and diffuses to the coating position of the coating equipment, i.e., the surface of the base film. The inert gas acts as a heat transfer medium, effectively transferring the heat generated during sublimation, minimizing thermal damage to the base film. This solves the problem in existing technologies where phase change heat released during film formation causes a temperature rise in the base film, resulting in thermal damage. Attached Figure Description

[0017] The accompanying drawings, which form part of this application, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an undue limitation of the present invention. In the drawings:

[0018] Figure 1 A schematic diagram from a first perspective of an embodiment of the shielding mechanism according to the present invention is shown;

[0019] Figure 2 A schematic diagram from a second perspective of an embodiment of the shielding mechanism according to the present invention is shown.

[0020] The above figures include the following reference numerals:

[0021] 10. Main shield; 21. Air inlet; 22. Air outlet; 23. Ventilation section; 24. First pipe fitting; 25. Air inlet pipe; 30. Cooling section; 31. Inlet; 32. Outlet. Detailed Implementation

[0022] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0023] It should be noted that the following detailed descriptions are exemplary and intended to provide further explanation of this application. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0024] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0025] This utility model provides a shielding mechanism; please refer to [reference needed]. Figure 1 and Figure 2 The shielding mechanism includes a shielding body 10 for shielding the vapor generated by the coating equipment. The shielding mechanism also includes a ventilation component connected to the shielding body 10. The ventilation component has an air inlet 21 for air intake and an air outlet 22 for air exhaust. The air outlet 22 is positioned toward the coating position of the coating equipment.

[0026] The venting component of the shielding mechanism of this utility model is connected to the shielding body 10. The venting component has an air inlet 21 for air intake and an air outlet 22 for air exhaust. The air outlet 22 is positioned facing the coating position of the coating equipment. During the film formation process, inert gas enters the venting component through the air inlet 21, then flows out through the air outlet 22 and diffuses to the coating position of the coating equipment, i.e., the surface of the base film. The inert gas acts as a heat conduction medium, effectively transferring the heat generated during the sublimation process, reducing thermal damage to the base film, and solving the problem in the prior art where the phase change heat released during the film formation process causes the base film temperature to rise, resulting in thermal damage to the base film.

[0027] In practice, inert gas should be introduced evenly and in small amounts.

[0028] Specifically, the ventilation assembly includes multiple ventilation sections 23, each with a ventilation channel and an outlet 22 connected to the ventilation channel. The multiple ventilation sections 23 are arranged one-to-one with multiple areas of the coating location, and the outlet 22 of each ventilation section 23 is oriented towards the corresponding area. This arrangement allows inert gas to diffuse from the outlet to the periphery of the main roller, enabling sufficient heat dissipation from multiple areas of the coating location and further reducing the possibility of thermal damage to the base film.

[0029] In order to further uniformly introduce inert gas into the coating position and achieve effective heat transfer in each area, each ventilation section 23 is provided with multiple air outlets 22, and the multiple air outlets 22 on each ventilation section 23 are arranged at intervals.

[0030] Optionally, multiple venting sections 23 are arranged sequentially along a preset direction, and multiple air outlets 22 on each venting section 23 are spaced apart along the preset direction. This arrangement ensures that inert gas diffuses to multiple areas of the coating location.

[0031] Optionally, the number of ventilation sections 23 is 3-8.

[0032] Specifically, such as Figure 1 As shown, the ventilation assembly includes a first pipe 24 and multiple baffles disposed on the first pipe 24. The multiple baffles are spaced apart along a first axial direction of the first pipe 24 to divide the first pipe 24 into multiple ventilation sections 23; wherein the first axial direction is a preset direction. Each ventilation section 23 independently receives and exits air, and only locally exits air. Inert gas can be locally output according to the location of thermal damage to the base film, thereby changing the local heat conduction effect and minimizing the impact on the vacuum level.

[0033] Specifically, the ventilation assembly has multiple air inlets 21, each corresponding to a different ventilation section 23, and each air inlet 21 is connected to the ventilation channel of the corresponding ventilation section 23. The ventilation assembly also includes multiple adjusting components, each corresponding to a different air inlet 21, and each adjusting component is used to adjust the air intake of the corresponding air inlet 21. This arrangement allows for the selective opening or closing of different ventilation sections 23, or the adjustment of the air intake of any ventilation section 23, to control the gas distribution around the shielding body 10. This enables the targeted diffusion of inert gas to a specific area during evaporation, achieving effective heat dissipation in that area. Alternatively, different amounts of inert gas can be introduced to address film-forming burns, increasing heat conduction and reducing burns.

[0034] In practice, the edge heating of the shielding body 10 is controlled by adjusting the gas flow rate, and inert gas is released at the edge to effectively transfer away the heat generated by the deposition during the base film formation process.

[0035] Optionally, the regulating element is a gas flow meter.

[0036] Specifically, such as Figure 1 and Figure 2 As shown, the ventilation assembly includes multiple air inlet pipes 25, which are arranged one-to-one with multiple ventilation sections 23, and each air inlet pipe 25 is connected to the corresponding ventilation section 23; the multiple air inlet pipes 25 are arranged one-to-one with multiple air inlets 21, and each air inlet pipe 25 has a corresponding air inlet 21.

[0037] In this embodiment, the shielding mechanism further includes a cooling section 30, which has a cooling cavity for containing a cooling medium. At least a portion of the surface of the cooling section 30 is in contact with the shielding body 10. This arrangement allows the heat generated by evaporation to be conducted away through the cooling medium. Furthermore, the cooling effect of the cooling section 30 can also radiate to the edges of the shielding body 10, improving thermal damage.

[0038] Optionally, the cooling medium is water.

[0039] Specifically, such as Figure 1 and Figure 2 As shown, the cooling section 30 is a second pipe fitting, which has a first end and a second end arranged sequentially along its second axial direction. The first end has an inlet 31 for the cooling medium to flow in, and the second end has an outlet 32 ​​for the cooling medium to flow out. Both the inlet 31 and the outlet 32 ​​are connected to the cooling cavity. This arrangement enables cooling and heat dissipation of the shielding body 10 throughout the second axial direction.

[0040] Optionally, the shielding mechanism includes a plurality of cooling sections 30, which are spaced apart in a direction perpendicular to the second axial direction. This arrangement can enhance the cooling effect of the cooling sections 30 on the shielding body 10.

[0041] Specifically, the second axial direction is parallel to the first axial direction.

[0042] This utility model also provides a coating device, including a shielding mechanism and a main roller. The shielding mechanism is disposed below the main roller, wherein the shielding mechanism is the shielding mechanism of the above embodiment.

[0043] In practice, the shielding mechanism is installed below the main roller to shield the vapor during the evaporation process and prevent metal vapor from being deposited onto other structures.

[0044] Specifically, the air outlet 22 is positioned toward the main roller of the coating equipment.

[0045] This shielding mechanism can improve the surface burn of the base film, increase the effective width of the product, and improve product yield. Gas diffuses around the base film, increasing the local gas volume in the vacuum chamber, enhancing heat conduction, and allowing heat from the base film to be transferred and diffused through the gas medium, reducing thermal shrinkage of the base film. During the evaporation coating process, the base film contacts the main roller under tension and bias. The main roller operates at low temperature, conducting away the heat generated by the deposition of metal materials on the base film.

[0046] As can be seen from the above description, the embodiments of this utility model achieve the following technical effects:

[0047] The venting component of the shielding mechanism of this utility model is connected to the shielding body 10. The venting component has an air inlet 21 for air intake and an air outlet 22 for air exhaust. The air outlet 22 is positioned facing the coating position of the coating equipment. During the film formation process, inert gas enters the venting component through the air inlet 21, then flows out through the air outlet 22 and diffuses to the coating position of the coating equipment, i.e., the surface of the base film. The inert gas acts as a heat conduction medium, effectively transferring the heat generated during the sublimation process, reducing thermal damage to the base film, and solving the problem in the prior art where the phase change heat released during the film formation process causes the base film temperature to rise, resulting in thermal damage to the base film.

[0048] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented, for example, in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0049] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0050] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A shielding mechanism, comprising a shielding body (10) for shielding vapors generated by a coating equipment, characterized in that, The shielding mechanism also includes: A ventilation assembly is connected to the shielding body (10). The ventilation assembly has an air inlet (21) for air intake and an air outlet (22) for air exhaust. The air outlet (22) is positioned toward the coating position of the coating equipment.

2. The shielding mechanism according to claim 1, characterized in that, The ventilation assembly includes multiple ventilation sections (23), each ventilation section (23) having a ventilation channel and an air outlet (22) connected to the ventilation channel. The multiple ventilation sections (23) are arranged one-to-one with multiple areas of the coating position, and the air outlet (22) of each ventilation section (23) is arranged facing the corresponding area.

3. The shielding mechanism according to claim 2, characterized in that, Each of the ventilation sections (23) is provided with a plurality of air outlets (22), and the plurality of air outlets (22) on each of the ventilation sections (23) are arranged at intervals.

4. The shielding mechanism according to claim 3, characterized in that, Multiple ventilation sections (23) are arranged sequentially along a preset direction, and multiple air outlets (22) on each ventilation section (23) are arranged at intervals along the preset direction.

5. The shielding mechanism according to claim 4, characterized in that, The ventilation assembly includes a first pipe (24) and a plurality of partitions disposed on the first pipe (24). The plurality of partitions are spaced apart along a first axial direction of the first pipe (24) to divide the first pipe (24) into a plurality of ventilation sections (23); wherein the first axial direction is the preset direction.

6. The shielding mechanism according to claim 2, characterized in that, The ventilation assembly has a plurality of air inlets (21), and the plurality of air inlets (21) are provided in a one-to-one correspondence with the plurality of ventilation sections (23). Each air inlet (21) is connected to the ventilation channel of the corresponding ventilation section (23). The ventilation assembly also includes multiple adjusting components, each of which is configured in correspondence with one of the multiple air inlets (21), and each adjusting component is used to adjust the air intake of the corresponding air inlet (21).

7. The shielding mechanism according to claim 6, characterized in that, The ventilation assembly includes multiple air inlet pipes (25), each of which is correspondingly provided with a plurality of ventilation sections (23), and each air inlet pipe (25) is connected to a corresponding ventilation section (23); each of the multiple air inlet pipes (25) is correspondingly provided with a plurality of air inlets (21), and each air inlet pipe (25) has a corresponding air inlet (21).

8. The shielding mechanism according to any one of claims 1 to 7, characterized in that, The shielding mechanism also includes: The cooling section (30) has a cooling cavity for containing a cooling medium, and at least a portion of the surface of the cooling section (30) is in contact with the shielding body (10).

9. The shielding mechanism according to claim 8, characterized in that, The cooling section (30) is a second pipe fitting. The second pipe fitting has a first end and a second end arranged sequentially along its second axial direction. The first end has an inlet (31) for the cooling medium to flow into it, and the second end has an outlet (32) for the cooling medium to flow out. Both the inlet (31) and the outlet (32) are connected to the cooling cavity.

10. A coating apparatus, comprising a shielding mechanism and a main roller, wherein the shielding mechanism is disposed below the main roller, characterized in that, The shielding mechanism is the shielding mechanism according to any one of claims 1 to 9.

Images