Stainless steel heater

Abstract

The utility model discloses a stainless steel heater which comprises a heating disc, a heating pipe is installed on one side wall of the heating disc, an installation groove is formed in the side wall, where the heating pipe is installed, of the heating disc, and the heating pipe is installed on the side wall of the heating disc in an embedded mode through the installation groove. A lower cover plate is installed on the side wall, away from the heating disc, of the heating pipe in an embedded mode, a graphite plate is installed on the side wall, away from the heating pipe, of the heating disc, and an upper cover plate is installed on the side wall, away from the heating disc, of the graphite plate in an embedded mode. According to the utility model, the heating wire is mounted on the heating disc in an embedded manner, the uniformity of the heating disc is improved by arranging the graphite plate and increasing the heat transfer area of the heating wire, and meanwhile, all parts of the heater are connected in an embedded manner and in a welding manner, so that the heating efficiency is improved. The installation process of the heating disc is simple, and the installation cost is reduced.

Description

Technical Field

[0001] This utility model belongs to the field of wafer processing technology, and specifically relates to a stainless steel heater. Background Technology

[0002] A wafer is a silicon wafer used to make silicon semiconductor circuits. Its raw material is silicon. High-purity polycrystalline silicon is dissolved and mixed with silicon crystal seed crystals, and then slowly pulled out to form cylindrical single-crystal silicon. After grinding, polishing and slicing, the silicon crystal rod is formed into a silicon wafer, which is a wafer.

[0003] Stainless steel heaters are required devices in wafer processing. However, existing stainless steel heaters suffer from poor temperature uniformity due to the size limitations of the heating plate and the low thermal conductivity of the material. Furthermore, the installation process of heating plates is complicated and costly because processes such as brazing and friction welding are used to embed the heating tubes inside the metal.

[0004] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0005] The purpose of this invention is to provide a stainless steel heater that can solve the problems of poor temperature uniformity on the heating plate and the complex and costly installation of the heating plate.

[0006] To achieve the above objectives, the technical solution provided by a specific embodiment of this utility model is as follows:

[0007] A stainless steel heater includes a heating plate. A heating tube is mounted on one side wall of the heating plate. The heating plate is used to mount the heating tube, which is an armored heating tube and is the heating component used by the heater during operation. An mounting groove is formed on the side wall of the heating plate where the heating tube is mounted. The heating tube is embedded into the side wall of the heating plate through the mounting groove. To facilitate the installation of the heating tube and ensure a close fit between the heating tube and the heating plate, thereby improving heat transfer, the mounting groove on the side wall of the heating plate matches the heating tube, allowing for better installation. The embedded method of mounting the heating tube to the heating plate also ensures convenient installation and good stability after installation. A lower cover plate is embedded into the side wall of the heating tube away from the heating plate, ensuring the stability of the heating tube within the heating plate. A graphite plate is installed on the side wall of the heating plate away from the heating tube. Due to the excellent heat transfer properties of the graphite plate, the heat generated by the heating tube can be effectively transferred through the graphite plate. Simultaneously, the graphite plate makes the heat transfer on the heating plate more uniform, thereby improving the temperature uniformity of the heating plate. A top cover plate is embedded into the side wall of the graphite plate away from the heating plate, ensuring the stability of the graphite plate after installation.

[0008] In one or more embodiments of this utility model, the heating tube is composed of multiple irregular rings, and the shape of the mounting groove matches the shape of the heating plate. The shape of the heating tube increases the heat dissipation area, thereby increasing the heat transfer area on the heating plate and improving the uniformity of heat transfer on the heating tube.

[0009] In one or more embodiments of this utility model, an electrode mounting port is provided on the side wall of the heating plate with the mounting groove, and an electrode is installed at the end of the heating tube. Electrical energy is supplied to the heating tube through the electrode so that the heating tube generates heat. The electrode is installed in the electrode mounting port, which facilitates the extension of the electrode mounting port.

[0010] In one or more embodiments of this utility model, a heating tube cover plate is pressed onto the side wall of the heating tube away from the heating plate. The heating tube cover plate is installed in the mounting groove in an embedded manner. The heating tube cover plate makes the heating tube stable when it is installed on the heating plate, and at the same time makes the heating tube and the heating plate fit tightly, thereby improving the efficiency of heat transfer between the heating tube and the heating plate.

[0011] In one or more embodiments of this utility model, a plurality of mounting bosses are fixedly connected to the side wall of the graphite plate mounted on the heating plate. The plurality of mounting bosses are evenly arranged on the side wall of the heating plate. The mounting bosses can not only increase the heat transfer area on the heating plate, but also facilitate the installation of components.

[0012] In one or more embodiments of this utility model, the graphite plate is provided with a first matching groove that matches the mounting boss. The graphite plate is installed on the mounting boss in an embedded manner through the first matching groove, so that the graphite plate is installed on the heating plate through the mounting boss, so that the graphite plate and the heating plate fit together, improve the heat transfer efficiency, and make the heat distribution uniform.

[0013] In one or more embodiments of this utility model, the upper cover plate is provided with a second matching groove that matches the mounting boss. The upper cover plate is installed on the mounting boss by embedding through the second matching groove, so that the upper cover plate can be stably installed by the mounting boss.

[0014] In one or more embodiments of this utility model, the thickness of the graphite plate is set to ~ mm.

[0015] In one or more embodiments of this utility model, the upper cover plate and the lower cover plate are respectively connected to the heating plate by welding, so that the connection between the upper cover plate and the heating plate and the heating plate is firm. At the same time, in order to facilitate installation, the upper cover plate and the lower cover plate are pre-fixed by spot welding after being pressed together with the heating plate, ensuring that they remain in a pressed state after welding. Spot welding also helps to reduce welding deformation.

[0016] Compared with the prior art, this utility model installs the heating wire on the heating plate by fitting it together, and improves the uniformity of the heating plate by setting a graphite plate and increasing the heat transfer area of ​​the heating wire. At the same time, the various components of the heater are connected by fitting together and by welding, which simplifies the installation process of the heating plate and reduces the installation cost. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of a stainless steel heater according to one embodiment of the present invention;

[0019] Figure 2This is a perspective view of a stainless steel heater according to one embodiment of the present invention;

[0020] Figure 3 This is an exploded view of a stainless steel heater according to one embodiment of the present invention;

[0021] Figure 4 This is a schematic diagram of the heating plate in one embodiment of the present invention;

[0022] Figure 5 This is a schematic diagram of the cover plate in one embodiment of the present utility model;

[0023] Figure 6 This is a cross-sectional view of a stainless steel heater according to one embodiment of the present invention.

[0024] Explanation of key figure labels:

[0025] 1-Heating plate, 11-Mounting groove, 12-Mounting boss, 13-Electrode mounting port, 2-Heating tube, 21-Electrode, 3-Heating tube cover plate, 4-Graphite plate, 41-First connecting groove, 5-Upper cover plate, 51-Second connecting groove. Detailed Implementation

[0026] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0027] like Figures 1-3 As shown in the figure, a stainless steel heater in one embodiment of the present invention can solve the problems of poor temperature uniformity on the heating plate and the complex and costly installation of the heating plate.

[0028] like Figures 1-3As shown, the heater includes a heating plate 1, on which a heating tube 2 is mounted. The heating plate 1 is used to mount the heating tube 2, which is an armored heating tube and is the component used for heating during operation. An mounting groove 11 is provided on the side wall of the heating plate 1 where the heating tube 2 is mounted. The heating tube 2 is embedded into the side wall of the heating plate 1 through the mounting groove 11. To facilitate the installation of the heating tube 2 and ensure a close fit between the heating tube 2 and the heating plate 1, thereby improving heat transfer, the mounting groove 11 on the side wall of the heating plate 1 matches the heating tube 2, allowing for better installation. The embedded installation method of the heating tube 2 on the heating plate 1 also ensures convenient installation and good stability after installation.

[0029] Furthermore, such as Figures 1-3 As shown, a lower cover plate is embedded in the side wall of the heating tube 2 away from the heating plate 1, ensuring the stability of the heating tube 2 within the heating plate 1. A graphite plate 4 is installed on the side wall of the heating plate 1 away from the heating tube 2. Due to its excellent heat transfer properties, the heat generated by the heating tube 2 can be effectively transferred through the graphite plate 4. Simultaneously, the graphite plate 4 makes the heat transfer on the heating plate 1 more uniform, thereby improving the temperature uniformity of the heating plate 1. An upper cover plate 5 is embedded in the side wall of the graphite plate 4 away from the heating plate 1, ensuring the stability of the graphite plate 4 after installation.

[0030] It should be noted that the lower cover plate is not shown in the attached drawing.

[0031] like Figures 1-3 As shown, the heating tube 2 is composed of multiple irregular rings, and the shape of the mounting groove 11 matches the shape of the heating plate 1. The shape of the heating tube 2 increases the heat dissipation area of ​​the heating tube 2, thereby increasing the heat transfer area of ​​the heating tube 2 on the heating plate 1 and improving the uniformity of heat transfer on the heating tube 2.

[0032] like Figures 2-4 As shown, the heating plate 1 has an electrode mounting port 13 on the side wall of the mounting groove 11. An electrode 21 is installed at the end of the heating tube 2, and electrical energy is supplied to the heating tube 2 through the electrode 21 so that the heating tube 2 generates heat. The electrode 21 is installed in the electrode mounting port 13, which facilitates the lead-out of the electrode mounting port 13.

[0033] like Figures 1-3 , Figure 6As shown, a heating tube cover plate 3 is pressed onto the side wall of the heating tube 2 away from the heating plate 1. The heating tube cover plate 3 is installed in the mounting groove 11 in an embedded manner. The heating tube cover plate 3 makes the heating tube 2 stable when it is installed on the heating plate 1, and at the same time makes the heating tube 2 and the heating plate 1 fit tightly, thereby improving the efficiency of heat transfer between the heating tube 2 and the heating plate 1.

[0034] like Figure 2 and Figure 5 As shown, multiple mounting bosses 12 are fixedly connected to the side wall of the heating plate 1 where the graphite plate 4 is mounted. The multiple mounting bosses 12 are evenly arranged on the side wall of the heating plate 1. The mounting bosses 12 can not only increase the heat transfer area on the heating plate 1, but also facilitate the installation of components.

[0035] like Figure 3 As shown, the graphite plate 4 has a first set of grooves 41 that match the mounting boss 12. The graphite plate 4 is installed on the mounting boss 12 by embedding through the first set of grooves 41, so that the graphite plate 4 is installed on the heating plate 1 through the mounting boss 12, so that the graphite plate 4 and the heating plate 1 fit together, improve the heat transfer efficiency, and make the heat distribution uniform.

[0036] like Figure 3 As shown, the upper cover plate 5 has a second set of grooves 51 that match the mounting boss 12. The upper cover plate 5 is installed on the mounting boss 12 by embedding through the second set of grooves 51, so that the upper cover plate 5 can be stably installed by the mounting boss 12.

[0037] Preferably, the thickness of the graphite plate 4 is set to 2 to 2.5 mm.

[0038] Preferably, the upper cover plate 5 and the lower cover plate are connected to the heating plate 1 by welding, so that the connection between the upper cover plate 5 and the lower cover plate and the heating plate 1 is firm. At the same time, in order to facilitate installation, the upper cover plate 5 and the lower cover plate are pre-fixed by spot welding after being pressed together with the heating plate 1, ensuring that they remain in a pressed state after welding. Spot welding also helps to reduce welding deformation.

[0039] Working principle: The high thermal conductivity of graphite plate 4 is used to dissipate heat from heating tube 2 and achieve secondary heat uniformity, thereby improving the temperature uniformity of the working surface of heating plate 1. In terms of heater structure, the design of upper cover plate 5 and lower cover plate ensures a tight connection between heating tube 2, graphite plate 4 and heating plate 1, which can guarantee good thermal conductivity and heat uniformity. In terms of installation, the upper cover plate 5 and lower cover plate are pre-tightened and pre-fixed with heating plate 1 before welding, and spot welding is used to fix them during welding, which can reduce welding deformation and maintain the tight fit of the two cover plates.

[0040] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0041] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A stainless steel heater, comprising a heating plate, characterized in that, A heating tube is installed on one side wall of the heating plate. An installation groove is provided on the side wall of the heating plate where the heating tube is installed. The heating tube is installed on the side wall of the heating plate by embedding through the installation groove. A lower cover plate is installed on the side wall of the heating plate away from the heating tube by embedding. A graphite plate is installed on the side wall of the heating plate away from the heating tube. An upper cover plate is installed on the side wall of the graphite plate away from the heating plate by embedding.

2. A stainless steel heater according to claim 1, characterized in that, The heating element is composed of multiple irregular rings, and the shape of the mounting groove matches the shape of the heating plate.

3. A stainless steel heater according to claim 2, characterized in that, The heating plate has an electrode mounting port on its side wall with an opening for the mounting groove. An electrode is installed at the end of the heating tube and is installed in the electrode mounting port.

4. A stainless steel heater according to claim 1, characterized in that, A heating tube cover plate is pressed onto the side wall of the heating tube away from the heating plate, and the heating tube cover plate is installed in the mounting groove in an embedded manner.

5. A stainless steel heater according to claim 1, characterized in that, Multiple mounting bosses are fixedly connected to the side wall of the heating plate where the graphite plate is mounted, and the multiple mounting bosses are evenly arranged on the side wall of the heating plate.

6. A stainless steel heater according to claim 5, characterized in that, The graphite plate has a first set of grooves that match the mounting boss, and the graphite plate is installed on the mounting boss by embedding through the first set of grooves.

7. A stainless steel heater according to claim 6, characterized in that, The upper cover plate is provided with a second matching groove that matches the mounting boss. The upper cover plate is installed on the mounting boss by embedding through the second matching groove.

8. A stainless steel heater according to claim 1, characterized in that, The thickness of the graphite plate is set to 2 to 2.5 mm.

9. A stainless steel heater according to claim 1, characterized in that, The upper cover plate and the lower cover plate are connected to the heating plate by welding.

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