Graphite thermal field splicing type gas retaining ring

Abstract

The utility model discloses a graphite thermal field splicing type gas retaining ring, which relates to the technical field of graphite thermal fields and comprises a gas retaining ring body, the gas retaining ring body further comprises a plurality of identical splicing units and a fixing ring, the fixing ring is clamped on the splicing units, one side of each splicing unit is provided with an inserting groove, and the splicing units are inserted into the inserting grooves. Inserting grooves are formed in the splicing units, inserting plates are arranged on the sides, away from the inserting grooves, of the splicing units, the inserting plates on one splicing unit are connected with the inserting grooves of the other splicing unit in an inserting mode, the splicing units and the fixing rings are arranged, and the splicing units and the other splicing unit are spliced with each other, so that the splicing effect is improved, and the splicing efficiency is improved. When the last splicing unit is spliced to form a closed loop, the splicing units are clamped and fixed through the fixing rings, the strength and firmness of the spliced gas retaining ring are guaranteed, meanwhile, when the gas retaining ring is locally broken, only the locally broken part of the gas retaining ring needs to be replaced, and compared with a traditional gas retaining ring needing to be replaced, cost is saved.

Description

TECHNICAL FIELD

[0001] The utility model relates to graphite heat field technical field especially relates to a graphite heat field spliced air baffle ring. BACKGROUND

[0002] Single crystal silicon usually refers to the substance formed by one arrangement form of silicon atom. Silicon is the most common and widely used semiconductor material, when the molten single silicon solidifies, the silicon atom arranges the crystal nucleus in the diamond lattice, the crystal nucleus grows into the crystal grain with the same crystal face orientation, forms the single crystal silicon. Single crystal silicon as a kind of more active non-metallic element crystal is the important component of crystal material, is in the front of new material development, single crystal silicon needs to use graphite heat field when producing, graphite heat field simply is the whole graphite heating system used to pull single crystal silicon. The main equipment in single crystal silicon growth furnace is graphite heat field, graphite heat field is mainly composed of crucible, graphite heat field is needed to melt single crystal silicon during the production and manufacture of single crystal silicon, the function of graphite heat field system is to melt silicon material, and the whole system is kept at a certain temperature during single crystal growth.

[0003] At present, when the graphite heat field works, the air outside often flows into the graphite crucible through the heat screen, and the air baffle ring often breaks due to the impact of the heat screen. Since the broken part is usually only a small part of the air baffle ring, if the entire air baffle ring is replaced, it will inevitably cause waste, so a graphite heat field air baffle ring is needed to solve the above problems. UTILITY MODEL CONTENTS

[0004] The utility model provides a graphite heat field spliced air baffle ring, solves the technical problem that the current air baffle ring breaks and needs to be replaced as a whole.

[0005] To solve the above technical problems, the utility model provides a graphite heat field spliced air baffle ring, which comprises an air baffle ring body, the air baffle ring body further comprises a plurality of identical splicing units and a fixing ring, the fixing ring is connected to the plurality of splicing units, one side of the splicing unit is provided with a plug-in groove, the side of the splicing unit away from the plug-in groove is provided with a plug-in plate, and the plug-in plate on one of the splicing units is plugged into the plug-in groove of another splicing unit.

[0006] Preferably, the splicing unit is provided with at least three.

[0007] The above technical scheme is adopted: the splicing unit is provided with at least three.

[0008] Preferably, the plug-in groove is provided with a limiting block.

[0009] The technical scheme is as follows: the limiting block is clamped in the insertion slot, so that when the two adjacent splicing units are spliced, the two adjacent splicing units will not slide to the center of the baffle body, ensuring the accuracy of splicing, and when the last splicing unit is spliced to form a closed loop, the limiting block of the last splicing unit can be disassembled at this moment, and when the last splicing unit is spliced, the limiting block is inserted into the insertion slot of the last splicing unit.

[0010] Preferably, the top inner wall and / or the bottom inner wall of the insertion slot is provided with an anti-disengagement plate, and the top and / or the bottom of the insertion plate is provided with an anti-disengagement groove.

[0011] The technical scheme is as follows: the top inner wall and / or the bottom inner wall of the insertion slot is provided with an anti-disengagement plate, and the top and / or the bottom of the insertion plate is provided with an anti-disengagement groove, the anti-disengagement plate is clamped in the anti-disengagement groove, preventing the two adjacent splicing units from disengaging in the horizontal direction during splicing. Of course, the anti-disengagement plate can be arranged in various ways in the insertion slot, that is, it can be arranged on the top inner wall of the insertion slot, or on the bottom inner wall of the insertion slot, or on both the top inner wall and the bottom inner wall of the insertion slot. Similarly, the anti-disengagement groove on the insertion plate is distributed in the same way as the anti-disengagement plate in the insertion slot.

[0012] Preferably, the size of the insertion plate is matched with the size of the insertion slot, the length of the anti-disengagement plate is matched with the length of the anti-disengagement groove, and the size of the anti-disengagement plate is matched with the size of the anti-disengagement groove.

[0013] The technical scheme is as follows: the size of the insertion plate is matched with the size of the insertion slot, the length of the anti-disengagement plate is matched with the length of the anti-disengagement groove, and the size of the anti-disengagement plate is matched with the size of the anti-disengagement groove, so that the two adjacent splicing units are more suitable and close during splicing.

[0014] Preferably, the bottom of the splicing unit is provided with a clamping groove, and the fixing ring is clamped on the clamping groove.

[0015] The technical scheme is as follows: the bottom of the splicing unit is provided with a clamping groove, and the fixing ring is clamped on the clamping groove, so that the fixing ring fixes the spliced splicing unit, ensuring that the spliced baffle is more firm and preventing the spliced baffle from being scattered.

[0016] Preferably, the clamping groove is provided with a fixing pin hole, and the fixing ring is fixed with a fixing column, and the fixing column is inserted into the fixing pin hole.

[0017] The technical scheme is as follows: the clamping groove is provided with a fixing pin hole, and the fixing ring is fixed with a fixing column, and the fixing column is inserted into the fixing pin hole. As a further embodiment, the cooperation of the fixing column and the fixing pin hole further improves the firmness of the spliced baffle.

[0018] Preferably, the fixing column is provided with a plurality of anti-falling protrusions.

[0019] By means of the above technical scheme: the fixing column is provided with a plurality of anti-falling protrusions, so that the clamping between the baffle ring and the splicing unit is more firm, thereby improving the firmness of the spliced baffle ring, and preventing the splicing unit from being scattered.

[0020] Compared with the related art, the utility model has the advantages of:

[0021] 1. Compared with the traditional baffle ring, the utility model is provided with a plurality of same splicing units and fixing rings, the splicing unit is provided with a plug-in slot on one side, the splicing unit is provided with a plug-in plate on the side away from the plug-in slot, a limiting block is arranged in the plug-in slot, the plug-in plate on one splicing unit is plugged into the plug-in slot of another splicing unit, the splicing units are mutually spliced, when the last splicing unit is spliced to form a closed loop, the splicing units are clamped and fixed by the fixing ring, the strength and firmness of the spliced baffle ring are ensured, and when the baffle ring is locally cracked, only the locally cracked part of the baffle ring needs to be replaced, compared with the traditional baffle ring that needs to be replaced as a whole, cost is saved. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is a structure schematic view of a graphite thermal field splicing type baffle ring.

[0023] Figure 2 It is a structure schematic view of a graphite thermal field splicing type baffle ring.

[0024] Figure 3 It is a structure schematic view of a graphite thermal field splicing type baffle ring.

[0025] Figure 4 It is a structure schematic view of a graphite thermal field splicing type baffle ring.

[0026] Figure 5 It is a structure schematic view of a graphite thermal field splicing type baffle ring.

[0027] Figure 6 It is a structure schematic view of a graphite thermal field splicing type baffle ring.

[0028] Figure 7 It is a structure schematic view of a graphite thermal field splicing type baffle ring.

[0029] Figure 8 It is a structure schematic view of a graphite thermal field splicing type baffle ring.

[0030] Figure 9 This is a structural diagram of a fixed ring in a graphite thermal field splicing type baffle ring.

[0031] The following are the labels in the diagram: 1. Air baffle ring body; 2. Splicing unit; 21. Insert plate; 22. Anti-detachment groove; 23. Insert groove; 24. Anti-detachment plate; 25. Snap-fit ​​groove; 26. Fixing pin hole; 3. Fixing ring; 31. Fixing post; 32. Anti-detachment protrusion; 5. Limiting block. Detailed Implementation

[0032] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0033] Example 1

[0034] like Figures 1-9 As shown, a graphite thermal field splicing type baffle ring includes a baffle ring body 1, which also includes several identical splicing units 2 and a fixing ring 3. The fixing ring 3 is snapped onto several splicing units 2. A plug-in groove 23 is provided on one side of the splicing unit 2, and a plug-in plate 21 is provided on the side of the splicing unit 2 away from the plug-in groove 23. A limit stop 5 is provided in the plug-in groove 23. The plug-in plate 21 on one splicing unit 2 is plugged into the plug-in groove 23 of another splicing unit 2.

[0035] Several identical splicing units 2 and fixing rings 3 are provided. One side of the splicing unit 2 is provided with an insertion slot 23, and the side of the splicing unit 2 away from the insertion slot 23 is provided with an insertion plate 21. The insertion plate 21 on one splicing unit 2 is inserted into the insertion slot 23 of another splicing unit 2. By splicing one splicing unit 2 to another splicing unit 2, when the last splicing unit 2 is spliced ​​to form a closed loop, the splicing unit 2 is then fixed by the fixing ring 3. This ensures the strength and firmness of the air baffle ring after splicing. At the same time, when the air baffle ring is partially broken, only the broken part of the air baffle ring needs to be replaced. Compared with the traditional method of replacing the entire air baffle ring, this saves costs.

[0036] Example 2

[0037] like Figures 1-3As shown, at least three splicing units 2 are provided. A limit block 5 is engaged in the insertion slot 23 to prevent two adjacent splicing units 2 from sliding toward the center of the air baffle ring body 1 during splicing, thus ensuring the accuracy of splicing. At the same time, the limit block 5 is engaged in the insertion slot 23. When the last splicing unit 2 is spliced ​​to form a closed loop, the limit block 5 of the last splicing unit 2 can be removed. After the last splicing unit 2 is spliced, the limit block 5 is then inserted into the insertion slot 23 of the last splicing unit 2.

[0038] like Figures 5-8 As shown, an anti-detachment plate 24 is provided on the top inner wall and / or bottom inner wall of the insertion slot 23, and an anti-detachment groove 22 is provided on the top and / or bottom of the insertion plate 21. The anti-detachment plate 24 is locked in the anti-detachment groove 22 to prevent two adjacent splicing units 2 from detaching horizontally during splicing. Of course, the arrangement of the anti-detachment plate 24 in the insertion slot 23 can be varied. It can be set on the top inner wall of the insertion slot 23, or on the bottom inner wall of the insertion slot 23, or distributed on both the top and bottom inner walls of the insertion slot 23. Similarly, the distribution of the anti-detachment groove 22 on the insertion plate 21 is the same as the distribution of the anti-detachment plate 24 in the insertion slot 23.

[0039] like Figure 5 As shown, by matching the size of the plug plate 21 with the size of the plug slot 23, the length of the anti-detachment plate 24 with the length of the anti-detachment slot 22, and the size of the anti-detachment plate 24 with the size of the anti-detachment slot 22, the two adjacent splicing units 2 can be spliced ​​more appropriately and tightly.

[0040] like Figures 2-4 As shown, a snap-fit ​​groove 25 is provided at the bottom of the splicing unit 2, and the fixing ring 3 is snapped into the snap-fit ​​groove 25. The fixing ring 3 fixes the splicing unit 2 after splicing, ensuring that the spliced ​​air baffle ring is more secure and preventing the spliced ​​air baffle ring from falling apart.

[0041] like Figure 4 , Figure 9 As shown, a fixing pin hole 26 is provided in the snap-fit ​​groove 25, and a fixing post 31 is fixed on the fixing ring 3. The fixing post 31 is inserted into the fixing pin hole 26. As a further implementation scheme, the cooperation between the fixing post 31 and the fixing pin hole 26 further improves the firmness of the spliced ​​air baffle ring. By providing several anti-detachment protrusions 32 on the fixing post 31, the snap-fit ​​between the air baffle ring and the splicing unit 2 is more secure, thereby improving the firmness of the spliced ​​air baffle ring and preventing the splicing unit 2 from falling apart.

[0042] Working principle: such as Figures 1-9As shown, by mutually splicing one splicing unit 2 with another splicing unit 2, when the last splicing unit 2 is spliced to form a closed loop, the splicing unit 2 is clamped and fixed by the fixing ring 3, which not only ensures the strength and firmness of the spliced air baffle ring, but also only needs to replace the locally cracked part of the air baffle ring when the air baffle ring locally cracks, compared with the traditional need to replace the entire air baffle ring, thereby saving costs.

[0043] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A graphite hot zone split baffle comprising a baffle body (1) characterized in that, The air baffle ring body (1) further comprises a plurality of identical splicing units (2) and a fixing ring (3), the fixing ring (3) is clamped on the plurality of splicing units (2), one side of the splicing unit (2) is provided with an insertion slot (23), the side of the splicing unit (2) away from the insertion slot (23) is provided with an insertion plate (21), and the insertion plate (21) on one of the splicing units (2) is inserted into the insertion slot (23) of another splicing unit (2).

2. A graphite thermal field split shield ring according to claim 1, wherein The splicing unit (2) is provided with at least three.

3. The graphite thermal field split gas ring of claim 1, wherein, The insertion slot (23) is clamped with a limiting block (5) inside.

4. The graphite thermal field split gas ring of claim 1, wherein, The top inner wall and / or the bottom inner wall of the insertion slot (23) is provided with an anti-disengagement plate (24), and the top and / or the bottom of the insertion plate (21) is provided with an anti-disengagement slot (22).

5. A graphite hot zone split retaining ring as in claim 4, wherein, The size of the insertion plate (21) is matched with the size of the insertion slot (23), the length of the anti-disengagement plate (24) is matched with the length of the anti-disengagement slot (22), and the size of the anti-disengagement plate (24) is matched with the size of the anti-disengagement slot (22).

6. A graphite thermal field split shield ring according to claim 1, wherein The bottom of the splicing unit (2) is provided with a clamping slot (25), and the fixing ring (3) is clamped on the clamping slot (25).

7. A graphite hot zone split retaining ring as in claim 6, wherein, The clamping slot (25) is provided with a fixing pin hole (26) inside, and a fixing column (31) is fixed on the fixing ring (3), and the fixing column (31) is inserted into the fixing pin hole (26).

8. A graphite hot zone split retaining ring as in claim 7, wherein, A plurality of anti-disengagement protrusions (32) are formed on the fixing column (31).

Images