Exposure machine platform surface detection mechanism and exposure machine

Abstract

The utility model relates to the field of exposure machines, in particular to an exposure machine platform surface detection mechanism and an exposure machine. The exposure machine platform surface detection mechanism comprises four detection assemblies; wherein when the carrying table is in a zero position, the four detection assemblies are distributed above four corners of the carrying table of the exposure machine; the detection assembly is used for scanning and detecting the surface of the carrying table in the moving process of the carrying table; the scanning coverage areas of the four detection assemblies completely cover the carrying table after being spliced. According to the utility model, the detection areas of the four detection assemblies are spliced, so that comprehensive and automatic detection of the carrying platform is realized, errors and uncertainty caused by manual detection are avoided, and meanwhile, the dust pollution risk is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of exposure machine, concretely relates to an exposure machine carrier table surface detection mechanism and exposure machine. BACKGROUND

[0002] In the exposure machine of semiconductor and panel industry, the carrier table surface is intact, directly influences the accuracy and consistency of the photoetching process, and is important to the high precision and stability in the chip production, liquid crystal display and OLED panel manufacturing process.

[0003] Therefore, the carrier table needs to be checked regularly, and manual checking will bring errors and uncertainty, and the checking efficiency is low, and there is a risk of contaminating the carrier table.

[0004] In order to solve the problems brought by manual checking, the inventor of the patent tries to use an automatic detection mechanism, but the automatic detection device is configured with a moving mechanism, the moving mechanism needs to realize three-dimensional movement, so the precision of the moving mechanism is required to be high, which undoubtedly leads to the increase of equipment cost, and occupies a large space, resulting in a large implementation cost.

[0005] The inventor of the patent also considers that the carrier table of the exposure machine itself can move with high precision, and tries to detect through the movement of the carrier table itself and the automatic detection mechanism in the fixed position, but the stroke of the carrier table itself cannot meet the demand of comprehensive detection. SUMMARY

[0006] The technical problem to be solved by the utility model is to overcome the defects of the prior art, and provide an exposure machine carrier table surface detection mechanism, which realizes comprehensive and automatic detection of the carrier table through the splicing of the detection areas of four detection components, avoids errors and uncertainty caused by manual detection, and reduces the risk of dust pollution.

[0007] In order to solve the above technical problems, the technical scheme of the utility model is as follows: an exposure machine carrier table surface detection mechanism, comprising four detection components; wherein,

[0008] When the carrier table is in zero position, the four detection components are distributed above the four corner parts of the carrier table of the exposure machine;

[0009] The detection component is used for scanning and detecting the carrier table surface in the process of moving the carrier table;

[0010] The scanning coverage areas of the four detection components are completely covered after splicing.

[0011] Further, the detection component comprises a mounting frame, a camera and at least one illumination light source; wherein,

[0012] The mounting frame is fixedly installed on the rack of the exposure machine;

[0013] The camera and the illumination light source are respectively installed on the mounting frame;

[0014] The camera is used for photographing the carrier during the movement of the carrier;

[0015] The illumination light source is used for illuminating the camera.

[0016] Further to ensure the stability of the camera and the uniformity of the illumination of the illumination light source, the mounting frame comprises a square frame and a camera frame; wherein,

[0017] A crossbeam is fixedly installed at the middle position of one side surface of the square frame, the camera frame is installed on the crossbeam, and the camera is installed on the camera frame and located at the middle position of the square frame;

[0018] The square frame is installed on the rack, the illumination light source has a plurality of illumination light sources, is installed on the square frame, and is arranged along the circumference of the square frame.

[0019] Further to adjust the height of the camera, the camera is adjustably installed on the camera frame through a mounting seat.

[0020] Further to better ensure the uniformity of the illumination, the illumination light source has four illumination light sources, and each illumination light source is a strip-shaped light source and extends along the length direction of one horizontal rod on the circumference of the square frame.

[0021] Further to adapt to exposure machines of different heights, the detection assembly further comprises a Z-direction movement module, and the mounting frame is installed on the Z-direction movement module to move along the Z direction under the driving of the Z-direction movement module.

[0022] Further to adapt to exposure machines of different lengths, the detection assembly further comprises an X-direction movement module, and the Z-direction movement module is installed on the X-direction movement module to move along the X direction under the driving of the X-direction movement module.

[0023] The utility model also relates to an exposure machine which comprises an exposure machine carrier surface detection mechanism.

[0024] After the above technical scheme is adopted, the utility model has the following beneficial effects:

[0025] 1. The utility model discloses a detection assembly arranged at each of the four corners of the carrier, and the carrier of the exposure machine has a transplanting function.

[0026] 2, the utility model discloses can realize the comprehensive automatic detection to the platform, avoid the error and uncertainty that the artificial detection brings;

[0027] 3, the utility model discloses can be carried out in closed or control environment, prevent dust and other pollutants influence detection, reduce dust pollution risk;

[0028] 4, the utility model discloses the movable characteristic of platform, need not additionally configure high-precision moving mechanism also, reduced the space requirement to the area where the exposure machine is, easy to implement. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 It is the structure diagram of exposure machine platform surface detection mechanism of the utility model;

[0030] Figure 2 It is the structure diagram of detection assembly of the utility model;

[0031] Figure 3 It is Figure 2 the top view;

[0032] In the drawing, 100, detection assembly;200, platform;1, mounting frame;11, square frame;12, camera holder;13, crossbeam;2, camera;3, illumination light source;4, mounting seat;5, Z direction movement module;6, X direction movement module. DETAILED DESCRIPTION

[0033] In order to make the content of the utility model more easily be clearly understood, the following according to specific embodiment and combining with the drawings, the utility model is further detailed.

[0034] As Figure 1 , Figure 2 and Figure 3 Indicated, a kind of exposure machine platform surface detection mechanism, including four detection assemblies 100;Wherein,

[0035] When platform 200 is in zero, four detection assemblies 100 are distributed above the four corner parts of the platform 200 of exposure machine;

[0036] Detection assembly 100 is used to scan and detect platform 200 surface in the process of platform 200 movement;

[0037] The scanning coverage area of four detection assemblies 100 is completely covered after splicing.

[0038] Specifically, a detection component 100 is set at each of the four corners of the stage 200. The stage 200 of the exposure machine itself has a transfer function. Through the movement of the stage 200, each detection component 100 inspects approximately one-quarter of the stage 200, compensating for the problem that the stage 200 cannot be completely traversed and inspected by a single detection component 100 due to the limitation of its travel distance. This enables comprehensive automatic inspection of the stage 200, avoiding errors and uncertainties caused by manual inspection. Simultaneously, it can be carried out in a closed or controlled environment to prevent dust and other contaminants from affecting the inspection, reducing the risk of dust contamination. Furthermore, the mechanism can perform real-time monitoring and timely feedback on wear status, thereby helping the maintenance team make quick decisions, improving production efficiency, reducing downtime, and improving the overall operating efficiency of the equipment.

[0039] by Figure 1 For example, the detection component 100 in the upper left corner traverses the upper left part of the detection stage 200, the detection component 100 in the upper right corner traverses the upper right part of the detection stage 200, the detection component 100 in the lower left corner traverses the lower left part of the detection stage 200, and the detection component 100 in the lower right corner traverses the lower right part of the detection stage 200. After the detectable ranges of the four detection components 100 are spliced ​​together, they completely cover the surface of the stage 100.

[0040] In one embodiment, such as Figure 1 , Figure 2 and Figure 3 As shown, the detection component 100 includes a mounting bracket 1, a camera 2, and at least one illumination source 3; wherein,

[0041] Mounting bracket 1 is fixedly installed on the frame of the exposure machine;

[0042] Camera 2 and illumination source 3 are respectively mounted on mounting bracket 1;

[0043] Camera 2 is used to take pictures of the stage 200 during the movement of the stage 200;

[0044] Light source 3 is used to illuminate camera 2.

[0045] Specifically, the mounting bracket 1 provides a carrier for the camera 2 and the illumination source 3. Illumination by the illumination source 3 ensures that the surface of the stage 200 has appropriate brightness during shooting, thereby improving image clarity. The camera 2 uses a high-precision camera to capture high-resolution images. These images can clearly show minor imperfections and wear on the surface of the stage 200. The captured images can be compared with standard images by the camera 2's own processor, or the images can be transmitted to an external processor. The external processor can then compare the images with standard images to identify defects such as wear, scratches, and protrusions.

[0046] In the embodiment, the mounting rack 1 can be made of aluminum profile, but is not limited thereto.

[0047] In one embodiment, as shown in Figure 1 , Figure 2 and Figure 3 , the mounting rack 1 comprises a square frame 11 and a camera rack 12; wherein,

[0048] A crossbeam 13 is fixedly installed at the middle position of one side surface of the square frame 11, the camera rack 12 is installed on the crossbeam 13, and the camera 2 is installed on the camera rack 12 and located at the middle position of the square frame 11.

[0049] The square frame 11 is installed on a rack, and the illumination light source 3 has a plurality of illumination light sources installed on the square frame 11 and arranged along the circumference of the square frame 11.

[0050] Specifically, the mounting rack 1 with such a structure can be conveniently installed on the rack of an exposure machine, and the stability of the camera 2 can be maintained, thereby ensuring the shooting accuracy.

[0051] In one embodiment, as shown in Figure 1 , Figure 2 and Figure 3 , the camera 2 is installed on the camera rack 12 in a height-adjustable manner through a mounting seat 4.

[0052] In this way, the height of the camera 2 can be adjusted as needed to adjust to the optimal shooting height and ensure the shooting quality.

[0053] In the embodiment, the camera rack 12 has a vertical sliding rail, the mounting seat 4 has a sliding groove, and the mounting seat 4 is slidably installed on the vertical sliding rail through the sliding groove. A locking mechanism is arranged on the mounting seat 4. When the locking mechanism is loosened, the mounting seat 4 can be slid along the vertical sliding rail. After the mounting seat 4 is slid to the appropriate height, the locking mechanism is tightened to lock the mounting seat 4.

[0054] In one embodiment, as shown in Figure 1 , Figure 2 and Figure 3 , the illumination light source 3 has four illumination light sources, and each of the four illumination light sources is a strip-shaped light source extending along the length direction of one horizontal rod on the circumference of the square frame 11.

[0055] In this way, the strip-shaped light sources surround the camera 2, which can better ensure the uniformity of illumination and the definition of the photographed image.

[0056] In one embodiment, as shown in Figure 1 , Figure 2 and Figure 3As shown, the detection component 100 also includes a Z-axis moving module 5, and the mounting bracket 1 is mounted on the Z-axis moving module 5 to move along the Z-axis under the drive of the Z-axis moving module 5.

[0057] In this way, the positions of the mounting bracket 1, camera 2 and illumination source 3 in the Z direction can be adjusted, so that the entire detection assembly 100 can be adapted to exposure machines of different heights, thus improving versatility.

[0058] In one embodiment, such as Figure 1 , Figure 2 and Figure 3 As shown, the detection component 100 also includes an X-axis moving module 6, and a Z-axis moving module 5 is mounted on the X-axis moving module 6 to move along the X-axis under the drive of the X-axis moving module 6.

[0059] In this way, the positions of the mounting bracket 1, camera 2, and illumination source 3 in the X-axis can be adjusted as needed to adapt to exposure machines of different lengths. Even if the stage 200 is very long, the mounting bracket 1, camera 2, and illumination source 3 can be driven to move in the X-axis via the X-axis moving module 6, coordinating with the travel of the stage 200 in the X-axis to achieve detection.

[0060] In one embodiment, an exposure machine includes the exposure machine stage surface inspection mechanism described in any of the above embodiments.

[0061] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A surface inspection mechanism for an exposure stage, characterized in that, Includes four detection components (100); among which, When the stage (200) is in the zero position, the four detection components (100) are distributed above the four corners of the stage (200) of the exposure machine; The detection component (100) is used to scan and detect the surface of the stage (200) during the movement of the stage (200); The scanning coverage areas of the four detection components (100) are stitched together to completely cover the stage (200).

2. The surface inspection mechanism for the exposure stage according to claim 1, characterized in that, The detection component (100) includes a mounting bracket (1), a camera (2), and at least one illumination source (3); wherein, The mounting bracket (1) is fixedly installed on the frame of the exposure machine; The camera (2) and the lighting source (3) are respectively mounted on the mounting bracket (1); The camera (2) is used to take pictures of the platform (200) during the movement of the platform (200); The lighting source (3) is used to illuminate the camera (2).

3. The surface inspection mechanism for the exposure stage according to claim 2, characterized in that, The mounting bracket (1) includes a square frame (11) and a camera holder (12); wherein, A crossbeam (13) is fixedly installed at the middle position of one side of the square frame (11), the camera mount (12) is installed on the crossbeam (13), and the camera (2) is installed on the camera mount (12) and located at the middle position of the square frame (11). The square frame (11) is mounted on the rack, and there are several lighting sources (3) mounted on the square frame (11) and arranged around the square frame (11).

4. The surface inspection mechanism for the exposure stage according to claim 3, characterized in that, The camera (2) is mounted on the camera mount (12) with adjustable height via the mounting base (4).

5. The surface inspection mechanism for the exposure stage according to claim 3, characterized in that, The lighting source (3) has four, all of which are strip light sources, each extending along the length of a horizontal bar on the circumference of the square frame (11).

6. The surface inspection mechanism for the exposure stage according to claim 2, characterized in that, The detection component (100) further includes a Z-axis moving module (5), and the mounting bracket (1) is mounted on the Z-axis moving module (5) to move along the Z-axis under the drive of the Z-axis moving module (5).

7. The surface inspection mechanism for the exposure stage according to claim 6, characterized in that, The detection component (100) further includes an X-axis moving module (6), and a Z-axis moving module (5) is mounted on the X-axis moving module (6) to move along the X-axis under the drive of the X-axis moving module (6).

8. An exposure machine, characterized in that, Includes the exposure stage surface inspection mechanism as described in any one of claims 1-7.

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