Vacuum plasma equipment

Abstract

The utility model relates to the field of plasma cleaning equipment, and discloses vacuum plasma equipment. Vacuum plasma equipment comprises a cavity and a door, a cavity is formed in the cavity, a material inlet is formed in the cavity, the door is rotationally connected to the side wall of the cavity through a hinge, the door is used for closing or opening the material inlet, the hinge comprises a first connecting piece and a second connecting piece rotationally connected with the first connecting piece, the first connecting piece is fixedly connected to the door, and the second connecting piece is fixedly connected to the door. The second connecting piece is fixedly connected to the side wall of the cavity, and a bidirectional thrust ball bearing is arranged between the first connecting piece and the second connecting piece. In the vacuum plasma equipment provided by the utility model, the two-way thrust ball bearing can rotate along with the closing or opening of the door, the friction force generated by the two-way thrust ball bearing is smaller, and the door cannot fall down due to the deviation of the hinge in the long-term use of the vacuum plasma equipment, so that the sealing effect of the door on the material inlet can be ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to plasma cleaning equipment field especially relates to a vacuum plasma equipment. BACKGROUND

[0002] Vacuum plasma equipment is to generate electric field by electrode plate, and the gas in the vacuum plasma equipment is affected by electric field in the relative vacuum environment, which makes the electron in neutral gas atom obtain enough energy to overcome the attraction of atomic nucleus and become free electron, and the neutral atom or molecule becomes positive ion due to the loss of negative electron, thereby generating plasma.

[0003] The vacuum plasma equipment is provided with material port, and the material is placed in the vacuum plasma equipment through the material port for processing, in order to form a relatively closed vacuum environment, the vacuum plasma equipment is also provided with door, the door is rotatably connected to the material port through hinge, and the door is used for opening or closing the material port, the hinge used at present is generally composed of two rotatable rotating parts, in order to reduce the abrasion between the rotating parts, the gasket is arranged at the abutting portion of the rotating parts, but the structure is easy to cause the abrasion of the gasket and lead to the deviation of the hinge and the downward falling of the door during the use of the vacuum plasma equipment, so that the door cannot better seal the material port, and the vacuum environment in the equipment is affected.

[0004] Therefore, the vacuum plasma equipment is needed to solve the above technical problems. UTILITY MODEL CONTENTS

[0005] The utility model discloses a vacuum plasma equipment, which can solve the problem that the gasket arranged on the hinge is easy to be abraded and lead to the deviation of the hinge and the downward falling of the door during the use of the vacuum plasma equipment, so that the door cannot better seal the material port and affect the vacuum environment in the equipment.

[0006] To achieve the purpose, the utility model adopts the following technical scheme:

[0007] A vacuum plasma equipment, which comprises a cavity and a door, the cavity has a chamber inside, the cavity is provided with a material inlet, the door is rotatably connected to the side wall of the cavity through a hinge, the door is used for closing or opening the material inlet, the hinge comprises a first connecting piece and a second connecting piece rotatably connected with the first connecting piece, the first connecting piece is fixedly connected to the door, the second connecting piece is fixedly connected to the side wall of the cavity, and a bidirectional thrust ball bearing is arranged between the first connecting piece and the second connecting piece.

[0008] As an optional solution, the bidirectional thrust ball bearing comprises a first clamping part and a second clamping part, and a rolling device is arranged between the first clamping part and the second clamping part, the rolling device being defined in a space formed by the first clamping part and the second clamping part, and the first clamping part and the second clamping part are respectively provided with first through holes.

[0009] As an optional solution, the rolling device is spherical, and the first clamping part and the second clamping part are respectively provided with circular-arc-shaped grooves at corresponding positions, and the rolling device is defined in the circular-arc-shaped grooves.

[0010] As an optional solution, the first connecting piece is provided with a protruding part, the second connecting piece is provided with a receiving part, the protruding part can be at least accommodated in the receiving part, the protruding part is provided with a second through hole, the receiving part is provided with a third through hole, and the hinge further comprises a rotating shaft, the rotating shaft passes through the third through hole and the second through hole to rotationally connect the first connecting piece and the second connecting piece.

[0011] As an optional solution, the rotating shaft at least partially extends out of the third through hole, and the rotating shaft is respectively provided with a fixing part at two ends.

[0012] As an optional solution, the side wall of the receiving part is provided with an elastic device perpendicular to the rotating shaft, and the elastic device abuts against the rotating shaft.

[0013] As an optional solution, the side wall of the receiving part is provided with a mounting hole perpendicular to the rotating shaft, and the elastic device is arranged in the mounting hole.

[0014] As an optional solution, the door is provided with an observation port, and the observation port is provided with glass through a flange.

[0015] As an optional solution, the door is provided with an observation port, and the observation port is provided with glass through a flange.

[0016] As an optional solution, the door is provided with an observation port, and the observation port is provided with glass through a flange.

[0017] The utility model discloses at least has following beneficial effects: the clearance between the first connecting piece and the second connecting piece of hinge in the application is equipped with bidirectional thrust ball bearing, the bidirectional thrust ball bearing is equipped with on rotation, bidirectional thrust ball bearing can rotate along with door closing or opening, because the friction of bidirectional thrust ball bearing is less, therefore, the vacuum plasma equipment also can not cause the hinge to deviate and make the door to fall down in long -term use, thereby can guarantee the sealing effect of door to material import. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical scheme in the embodiment of the utility model, the following will be to the embodiment of the utility model described in the use of the drawing briefly introduced.

[0019] Figure 1 The structure diagram of the vacuum plasma equipment provided by the embodiment of the utility model is shown in the drawing.

[0020] Figure 2 The structure diagram of the hinge provided by the embodiment of the utility model is shown in the drawing.

[0021] Figure 3 The structure diagram of the bidirectional thrust ball bearing provided by the embodiment of the utility model is shown in the drawing.

[0022] Figure 4 The view of another angle of the bidirectional thrust ball bearing provided by the embodiment of the utility model is shown in the drawing.

[0023] Reference signs:

[0024] 1, cavity;2, hinge;21, first connecting piece;211, protruding part;22, second connecting piece;221, containing portion;222, mounting hole;23, bidirectional thrust ball bearing;231, first clamping portion;232, second clamping portion;233, rolling device;234, first through hole;235, circular recess;24, fixed part;3, door;31, flange;32, glass;4, lock catch structure;41, first fixed part;42, second fixed part;43, clamping portion;44, handle;45, card slot. DETAILED DESCRIPTION

[0025] In order to more clearly understand the technical means of the utility model, and can be implemented according to the content of the specification, the following combining the drawing and embodiment, the embodiment of the utility model is further detailedly described, the following embodiment is used to illustrate the utility model, but not to limit the scope of the utility model.

[0026] In existing technology, vacuum plasma equipment has a material inlet through which materials are placed inside the equipment for processing. To create a relatively sealed space, the vacuum plasma equipment also has a door, which is hinged to the material inlet. The door is used to open or close the material inlet. Currently used hinges generally consist of two rotating parts that can rotate relative to each other. To reduce wear between the rotating parts, a gasket is placed at the junction of the rotating parts. However, during the use of the vacuum plasma equipment, the gasket on the hinge is prone to wear, causing the hinge to shift and the door to drop downwards. This prevents the door from sealing the material inlet properly and affects the vacuum environment inside the equipment.

[0027] Therefore, such as Figures 1 to 4 As shown, an embodiment of this utility model provides a vacuum plasma device to solve the above-mentioned technical problems.

[0028] Specifically, such as Figure 1 , Figure 2 As shown, a vacuum plasma device includes a cavity 1 and a door 3. The cavity 1 has a chamber inside and a material inlet. The door 3 is rotatably connected to the side wall of the cavity 1 via a hinge 2. The door 3 is used to close or open the material inlet. The hinge 2 includes a first connector 21 and a second connector 22 rotatably connected to the first connector 21. The first connector 21 is fixedly connected to the door 3, and the second connector 22 is fixedly connected to the side wall of the cavity 1. The first connector 21 and the second connector 22 are connected together by a rotating shaft. A bidirectional thrust ball bearing 23 is provided in the gap between the first connector 21 and the second connector 22. The bidirectional thrust ball bearing 23 is sleeved on the rotating shaft, thereby avoiding the need to place a gasket between the first connector 21 and the second connector 22. During the closing or opening of door 3, the bidirectional thrust ball bearing 23 can rotate as door 3 closes or opens. Since the friction generated by the bidirectional thrust ball bearing 23 is small, the hinge 2 will not shift and cause the door to fall down during long-term use of the vacuum plasma equipment, thus ensuring the sealing effect of door 3 on the material inlet.

[0029] like Figure 3 , Figure 4As shown, in some embodiments, the bidirectional thrust ball bearing 23 includes a first engaging portion 231 and a second engaging portion 232. A rolling device 233 is provided between the first engaging portion 231 and the second engaging portion 232. The first engaging portion 231 and the second engaging portion 232 are respectively provided with matching engaging structures. The first engaging portion 231 and the second engaging portion 232 are engaged together through the engaging structures, and the first engaging portion 231 and the second engaging portion 232 can rotate relative to each other. At the same time, a receiving space is formed between the first engaging portion 231 and the second engaging portion 232. The rolling device 233 is limited between the first engaging portion 231 and the second engaging portion 232. The space formed by 232 is accommodating the rolling device 233, which can accommodate the rolling within the space, thereby reducing the friction between the rolling device 233 and the first snap-fit ​​part 231 or the second snap-fit ​​part 232. In addition, the first snap-fit ​​part 231 and the second snap-fit ​​part 232 are respectively provided with a first through hole 234. The first through hole 234 is used for the bidirectional thrust ball bearing 23 to be sleeved on the rotating shaft connecting the first connecting member 21 and the second connecting member 22. This makes it easy to install the bidirectional thrust ball bearing 23 between the first connecting member 21 and the second connecting member 22, avoiding the first connecting member 21 and the second connecting member 22 from contacting each other and generating friction.

[0030] In some embodiments, since the spherical object experiences less friction during rolling, the rolling device 233 is configured as a spherical shape. The first locking part 231 and the corresponding positions of the first locking part 231 are respectively provided with arc-shaped grooves 235. The rolling device 233 is confined to the arc-shaped grooves 235 to roll, thereby ensuring the stability of the rolling device 233 during the rolling process.

[0031] like Figure 2 As shown, in some embodiments, in order to facilitate the connection between the first connector 21 and the second connector 22, the first connector 21 is provided with a protrusion 211, and the second connector 22 is provided with a receiving portion 221. The protrusion 211 can be at least accommodated in the receiving portion 221. The protrusion 211 is provided with a second through hole, and the receiving portion 221 is provided with a third through hole. The hinge 2 also includes a rotating shaft, which passes through the third through hole and the second through hole to rotatably connect the first connector 21 and the second connector 22 together.

[0032] like Figure 2 As shown, in some embodiments, the rotating shaft extends at least partially through a third through hole, and the two ends of the rotating shaft are respectively provided with fixing members 24. The rotating shaft is fixed to the second connecting member 22 by the fixing members 24. In this application, the two ends of the rotating shaft can be provided with threads, the fixing member 24 can be a nut, and a washer can be provided between the nut and the second connecting member 22.

[0033] In some embodiments, in order to firmly limit the rotation shaft from rotating, only the first connector 21 rotates around the rotation shaft during use. The side wall of the receiving part 221 is provided with an elastic device perpendicular to the rotation shaft. The elastic device abuts against the rotation shaft and can apply pressure to the rotation shaft, thereby limiting the rotation of the rotation shaft. The elastic device here can be a spring.

[0034] In some embodiments, in order to facilitate the installation of the elastic device, the side wall of the receiving portion 221 is provided with a mounting hole 222 perpendicular to the rotation axis, and the elastic device is disposed in the mounting hole 222.

[0035] In some embodiments, the door 3 is provided with an observation port, and the observation port is fitted with glass 32 through a flange 31, so that the processing status of the materials inside the equipment can be observed in a timely manner through the observation port.

[0036] like Figure 1 As shown, in some embodiments, in order to facilitate fixing and opening the door, this application also includes a latching structure 4. The latching structure 4 includes a first fixing part 41, a second fixing part 42, and a holding part 43 fixedly connected to the first fixing part 41. The second fixing part 42 is fixed on the side wall of the cavity 1, and the first fixing part 41 is fixed on the door 3. The first fixing part 41 is provided with a slot 45, and at least part of the holding part 43 can be engaged in the slot 45. The holding part 43 is provided with a handle 44.

[0037] In some embodiments, the chamber is connected to a vacuum pump, which provides power to create a vacuum within the chamber.

[0038] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A vacuum plasma device, characterized by The utility model provides a door hinge, including cavity (1) and door (3), the cavity (1) inside has chamber, the cavity (1) is provided with material inlet, the door (3) is rotatably connected on the lateral wall of cavity (1) through hinge (2), the door (3) is used to close or open the material inlet, the hinge (2) includes first connecting piece (21) and the second connecting piece (22) rotatably connected with first connecting piece, first connecting piece (21) is fixedly connected on the door (3), the second connecting piece (22) is fixedly connected on the lateral wall of cavity (1), and the first connecting piece (21) is equipped with bidirectional thrust ball bearing (23) between the second connecting piece (22).

2. The vacuum plasma apparatus of claim 1, wherein, The bidirectional thrust ball bearing (23) includes a first clamping portion (231) and a second clamping portion (232), and a rolling device (233) is arranged between the first clamping portion (231) and the second clamping portion (232). The rolling device (233) is defined in a space formed by the first clamping portion (231) and the second clamping portion (232).

3. The vacuum plasma apparatus of claim 2, wherein, The rolling device (233) is spherical, and the first clamping portion (231) and the second clamping portion (231) are respectively provided with circular-arc grooves (235) at corresponding positions. The rolling device (233) is defined to roll in the circular-arc grooves (235).

4. The vacuum plasma apparatus of claim 1, wherein, The first connecting piece (21) is provided with a protruding portion (211), the second connecting piece (22) is provided with a receiving portion (221), the protruding portion (211) can be at least received in the receiving portion (221), the protruding portion (211) is provided with a second through hole, the receiving portion (221) is provided with a third through hole, and the hinge (2) further comprises a rotating shaft. The rotating shaft passes through the third through hole and the second through hole to rotatably connect the first connecting piece (21) and the second connecting piece (22).

5. The vacuum plasma apparatus of claim 4, wherein, The rotating shaft at least partially extends out of the third through hole, and the rotating shaft is respectively provided with a fixing member (24) at both ends.

6. The vacuum plasma apparatus of claim 4, wherein, The side wall of the receiving portion (221) is provided with an elastic device perpendicular to the rotating shaft, and the elastic device abuts against the rotating shaft.

7. The vacuum plasma apparatus of claim 6, wherein, The side wall of the receiving portion (221) is provided with a mounting hole (222) perpendicular to the rotating shaft, and the elastic device is arranged in the mounting hole (222).

8. The vacuum plasma apparatus of claim 1, wherein, The door (3) is provided with an observation port, and the observation port is provided with a glass (32).

9. The vacuum plasma device of any of claims 1-8, wherein, The utility model further comprises a lock catch structure (4), which comprises a first fixing portion (41), a second fixing portion (42), and a clamping portion (43) fixedly connected with the first fixing portion (41). The second fixing portion (42) is fixed on the side wall of the cavity (1), and the first fixing portion (41) is fixed on the door (3). The first fixing portion (41) is provided with a clamping groove (45), the clamping portion (43) can be at least clamped in the clamping groove (45), and the clamping portion (43) is provided with a handle (44).

10. The vacuum plasma device of any of claims 1-8, wherein, The chamber is connected with a vacuum pump.

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