Automatic grinding fluid recovery device

Abstract

The utility model discloses an automatic grinding fluid recovery device which comprises a fluid supply module, the fluid supply module is provided with a fluid supply device, and a first water outlet end of the fluid supply device is communicated with a second water inlet end of the fluid supply device through a circulating pipe. A first liquid supply pump and a process module are sequentially arranged on the circulating pipe along a flowing path of liquid in the circulating pipe; the process module is provided with a liquid distribution device, the liquid distribution device is communicated with the machine table device through a conveying pipe, a filtering assembly and a recycling device are sequentially arranged on the conveying pipe along a flowing path of liquid in the conveying pipe, and one end of the recycling device is communicated with the circulating pipe. By means of the mode, when the machine table device stops liquid supply, grinding liquid in the liquid distribution device can enter an original circulation pipeline through the backflow pipe in the recovery device before reaching the machine table end, circulation of the grinding liquid in the whole working system is achieved, and crystallization and sedimentation of the grinding liquid at the machine table end are avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor chemical mechanical grinding liquid supply system technical field, especially, relate to a kind of automatic recovery device of grinding fluid. BACKGROUND

[0002] Grinding fluid (Slurry) is the mixture of polishing material and chemical additive in wafer surface planarization process, mainly by abrasive (Abrasive), surfactant, PH buffer glue, oxidant and preservative etc. Component is composed, is one of key elements of CMP process, its performance directly influences the quality of wafer after polishing surface.

[0003] Because grinding fluid is in static state, crystallization is easy to produce pipe blockage, pump damage, therefore, when CMP machine platform end does not need grinding fluid, need to ensure that the entire pipeline is in circulation state.In existing pipeline design, the pipeline of grinding fluid from liquid distribution device to filter device to reach CMP machine platform is one-way, in order to prevent the crystallization of grinding fluid in the pipeline for a long time, when CMP machine platform is static for a long time, need to open the liquid supply pipeline every 2 hours, make grinding fluid flow 500ml in the air on the machine. This way, on the one hand, it causes waste of grinding fluid, on the other hand, it also has negative effects such as corrosion or particle contamination on the polishing pad. SUMMARY

[0004] To solve the above technical problems, the utility model provides a kind of automatic recovery device of grinding fluid, comprising:

[0005] Liquid supply module is provided with liquid supply device, the first water outlet of the liquid supply device is connected with the second water inlet of the liquid supply device through circulation pipe, first liquid supply pump and process module are sequentially arranged on the flow path of liquid in the circulation pipe.The grinding fluid in the liquid supply module is supplied to the process module by the first liquid supply pump, part of it directly flows to the machine platform in the process module, and part of it only flows back to the liquid supply module along the circulation pipe through the process module, so that the grinding fluid in the circulation pipe is always in a flowing state to prevent the pipe from being blocked due to crystallization caused by long-term static state.

[0006] The process module is provided with a liquid distribution device, and the liquid distribution device is connected with the machine device through a conveying pipe, a filter assembly and a recovery device are sequentially arranged on the flow path of liquid in the conveying pipe, and one end of the recovery device is communicated with the circulation pipe.

[0007] The recovery device comprises a control assembly and a reflux pipe, and the control assembly is communicated with the circulation pipe through the reflux pipe.

[0008] The control component includes a three-way valve and a solenoid valve, liquid flowing through the filter component sequentially passes through the A end and B end of the three-way valve, the solenoid valve and the machine device, and the C end of the three-way valve is communicated with the circulation pipe through the return pipe. By setting the recovery device on the conveying pipe between the filter component and the machine device, when the machine end sends a signal to require liquid, the solenoid valve is opened, the abrasive liquid in the liquid distribution device flows through the A end and the B end of the three-way valve, and the abrasive liquid is normally supplied to the machine end. When the liquid requirement is stopped, the solenoid valve is closed, the abrasive liquid flows through the A end and the C end of the three-way valve, and flows back to the liquid distribution device through the return pipe, enters the original circulation pipe and finally flows back to the liquid supply device, so that the abrasive liquid on the conveying pipe between the liquid distribution device and the machine device is always in a flowing state, so that the abrasive liquid in the pipe is prevented from being crystallized and blocked due to long-term static state. The setting of the recovery device no longer needs to open the liquid distribution device to flow 500ml of abrasive liquid on the machine every 2 hours, thereby reducing the waste of abrasive liquid and the wear of the polishing pad.

[0009] The filter component includes a plurality of adjacent multi-stage filters. The multi-stage filter is used to filter impurities and fine particles in the abrasive liquid, thereby improving the processing quality.

[0010] The liquid distribution device is connected to two machine devices, the first conveying end of the liquid distribution device is connected to the filter component, the recovery device and the machine device in sequence through the conveying pipe, and the second conveying end of the liquid distribution device is connected to another filter component, another recovery device and another machine device in sequence through another conveying pipe. Through two independent conveying pipes, the abrasive liquid flows out of the liquid supply device and is supplied to two machine devices through the liquid distribution device.

[0011] The machine device is one or more of a CMP device or a SPARE device.

[0012] The process module includes a plurality of liquid distribution devices.

[0013] The liquid supply device is provided with a stirring device, the stirring device includes a stirring rod driven by a motor and a blade arranged at the end of the stirring rod. The stirring device drives the abrasive liquid in the liquid supply device to flow and stir, which can effectively prevent the abrasive liquid from crystallizing and precipitating into large particles.

[0014] The liquid supply module further includes a raw liquid device and a mixed liquid device, the liquid in the raw liquid device is supplied to the mixed liquid device through a second liquid supply pump, and the outlet of the mixed liquid device is communicated with the first inlet of the liquid supply device.

[0015] The pressure valve is arranged on the circulation pipe between the liquid distribution device and the liquid supply device near the second water inlet side of the liquid supply device.

[0016] The beneficial effect of the present application is that when the process machine end sends a signal for liquid, the grinding liquid in the liquid distribution device flows through the recovery device to normally supply the machine end, and when the signal for liquid is stopped, the grinding liquid in the liquid distribution device flows back to the liquid distribution device through the backflow pipe in the recovery device before reaching the machine end, enters the original circulation pipeline, realizes the circulation of the grinding liquid in the whole working system, and avoids the crystallization and precipitation of the grinding liquid at the machine end. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 is a structural schematic view of a grinding liquid automatic recovery device according to an embodiment of the present application;

[0018] Figure 2 is a structural schematic view of a process module according to an embodiment of the present application.

[0019] BRIEF DESCRIPTION OF DRAWINGS

[0020] 1, liquid supply module; 11, liquid supply device; 111, stirring device; 12, circulation pipe; 13, first liquid supply pump; 14, original liquid device; 15, mixed liquid device; 16, second liquid supply pump;

[0021] 2, process module; 21, liquid distribution device; 22, conveying pipe; 23, filter assembly; 24, machine device;

[0022] 3, recovery device; 31, control assembly; 32, backflow pipe; 311, three-way valve; 312, electromagnetic valve;

[0023] 4, pressure valve. DETAILED DESCRIPTION

[0024] The preferred embodiments of the present application are described in detail below with reference to the accompanying drawings, so that the advantages and features of the present application can be more easily understood by those skilled in the art, and the protection scope of the present application is more clearly defined.

[0025] Embodiment 1

[0026] Please refer to Figure 1 and Figure 2 The grinding liquid automatic recovery device provided by the embodiment of the present application comprises:

[0027] The liquid supply module 1 is provided with a raw liquid device 14, a mixing device 15 and a liquid supply device 11, the liquid in the raw liquid device 14 is supplied to the mixing device 15 through a second liquid supply pump 16, and the outlet end of the mixing device 15 is communicated with the first water inlet end of the liquid supply device 11.

[0028] The first water outlet end of the liquid supply device 11 is communicated with the second water inlet end of the liquid supply device 11 through a circulating pipe 12, and the first liquid supply pump 13 and the process module 2 are arranged in sequence along the flow path of the liquid in the circulating pipe 12. The grinding liquid flows out of the liquid supply module 1, is supplied to the process module 2 through the first liquid supply pump 13, and part of it directly flows to the machine device 24 in the process module 2, and part of it only flows back to the liquid supply module 1 through the process module 2 along the circulating pipe 12, so that the grinding liquid in the circulating pipe 12 is always in a flowing state to prevent the grinding liquid from being blocked by crystallization due to long-term static state. At the same time, the liquid supply device 11 is provided with a stirring device 111, which drives the stirring rod to drive the blades at the end of the stirring rod to work, so as to drive the grinding liquid in the liquid supply device 11 to flow and stir, which can effectively prevent the grinding liquid from being crystallized and precipitated into large particles in the liquid supply device.

[0029] The process module 2 is provided with a liquid distribution device 21, which is communicated with the machine device 24 through a conveying pipe 22, and the conveying pipe 22 is sequentially provided with a filter assembly 23 and a recovery device 3 along the flow path of the liquid in the conveying pipe 22, and one end of the recovery device 3 is communicated with the circulating pipe 12. The recovery device 3 includes a control assembly 31 and a backflow pipe 32, and the control assembly 31 is communicated with the circulating pipe 12 through the backflow pipe 32. The control assembly 31 includes a three-way valve 311 and an electromagnetic valve 312, and the liquid flowing through the filter assembly 23 flows to the machine device 24 through the A end and the B end of the three-way valve 31, the electromagnetic valve 32 in sequence, and the C end of the three-way valve 31 is communicated with the circulating pipe 12 through the backflow pipe 4. The liquid distribution device 21 controls the conveying pipe 22 through a switch valve.

[0030] The recovery device 3 is arranged on the conveying pipe 22 between the filtering assembly 23 and the machine device 24. When the machine device 24 sends a signal for liquid, the electromagnetic valve 32 is opened, the abrasive liquid in the liquid distribution device 21 flows through the A end and the B end of the three-way valve 311, and is normally supplied to the machine device 24. When the supply of liquid is stopped, the electromagnetic valve 312 is closed, the abrasive liquid flows through the A end and the C end of the three-way valve 311, and flows back to the liquid distribution device 21 through the backflow pipe 32, enters the original circulating pipe 12, and finally flows back to the liquid supply device 11, so that the abrasive liquid in the conveying pipe between the liquid distribution device 21 and the machine device 24 is always in a flowing state, so that the abrasive liquid in the pipe does not crystallize and block due to long-term static state. The setting of the recovery device 3 eliminates the need to open the liquid distribution device to flow 500 ml of abrasive liquid on the machine every 2 hours, reducing the waste of abrasive liquid and the wear of the polishing pad.

[0031] The filtering assembly 23 comprises a plurality of adjacent filtering assemblies. The multi-stage filter is used to filter impurities and fine particles in the abrasive liquid, and improve the processing quality.

[0032] The liquid distribution device 21 near the second water inlet side of the liquid supply device 11 and the circulating pipe 12 of the liquid supply device 11 are provided with a pressure valve 4. The pressure valve is used to stabilize the backflow pressure of the circulating pipe 12, and ensure the circulation of the abrasive liquid in the circulating pipe 12.

[0033] Embodiment 2

[0034] The basic structure of the abrasive liquid automatic recovery device provided in this embodiment is similar to that of embodiment 1, and the difference is that the liquid distribution device 21 is connected to two machine devices 24, and the abrasive liquid in the liquid distribution device 21 is supplied to different machine devices 24 through a plurality of conveying pipes 22. The two machine devices 24 can both be CMP devices or both be SPARE devices, or one can be a CMP device and the other can be a SPARE device.

[0035] In this embodiment, one of the machine devices 24 is a CMP device and the other is a SPARE device. The liquid distribution device 21 is connected to the CMP device and the SPARE device through two independent conveying pipes 22, and each conveying pipe 22 is provided with a filtering assembly 23 and a recovery device 3. Specifically, the first conveying end of the liquid distribution device 21 is connected to the filtering assembly 23, the recovery device 3 and the CMP device in sequence through the conveying pipe 22, and the second conveying end of the liquid distribution device 21 is connected to another filtering assembly 23, another recovery device 3 and the SPARE device in sequence through another conveying pipe 22.

[0036] Embodiment 3

[0037] The automatic grinding liquid recycling device provided in the embodiment has a basic structure similar to that of the embodiment 2, and the difference is that the process module comprises a plurality of liquid distribution devices, the plurality of liquid distribution devices are connected with a plurality of machine table devices, and a filtering assembly and a recycling device are arranged on the pipeline between each liquid distribution device and the machine table device.

[0038] The automatic grinding liquid recycling device has the beneficial effects that when the process machine table end sends a signal for liquid, the grinding liquid in the liquid distribution device flows through the recycling device and is normally supplied to the machine table end, and when the liquid supply is stopped, the grinding liquid in the liquid distribution device flows back to the liquid distribution device through the backflow pipe in the recycling device before reaching the machine table end, enters the original circulating pipeline, realizes the circulation and flow of the grinding liquid in the whole working system, and avoids the crystallization and precipitation of the grinding liquid at the machine table end.

[0039] The above is only an embodiment of the utility model, and does not limit the patent range of the utility model, and any equivalent structure or equivalent process transformation obtained by using the content of the utility model specification and drawings, or direct or indirect application in other related technical fields, is also included in the patent protection range of the utility model.

Claims

1. An automatic polishing liquid recovery device characterized by comprising: The application relates to a liquid supply module (1) provided with a liquid supply device (11), a first water outlet end of the liquid supply device (11) being connected to a second water inlet end of the liquid supply device (11) through a circulating pipe (12), a first liquid supply pump (13) and a process module (2) being arranged in sequence along a liquid flow path in the circulating pipe (12). The process module (2) is provided with a liquid distribution device (21), the liquid distribution device (21) being connected to a machine device (24) through a conveying pipe (22), a filter assembly (23) and a recovery device (3) being arranged in sequence along a liquid flow path in the conveying pipe (22), one end of the recovery device (3) being connected to the circulating pipe (12). The recovery device (3) comprises a control assembly (31) and a backflow pipe (32), the control assembly (31) being connected to the circulating pipe (12) through the backflow pipe (32). The control assembly (31) comprises a three-way valve (311) and a solenoid valve (312), liquid flowing through the filter assembly (23) flows to the machine device (24) through the A end and the B end of the three-way valve (311) and the solenoid valve (312) in sequence, and the C end of the three-way valve (311) is connected to the circulating pipe (12) through the backflow pipe (32). The filter assembly (23) comprises multiple-stage filters arranged adjacently.

2. The automatic polishing slurry recovery device according to claim 1, wherein: The liquid distribution device (21) is connected to two machine devices (24), a first conveying end of the liquid distribution device (21) is connected to the filter assembly (23), the recovery device (3) and the machine device (24) in sequence through the conveying pipe (22), and a second conveying end of the liquid distribution device (21) is connected to another filter assembly (23), another recovery device (3) and another machine device (24) in sequence through another conveying pipe (22).

3. The automatic polishing slurry recovery device according to claim 1, wherein: The machine device (24) is one or more of a CMP device or a SPARE device.

4. The automatic polishing slurry recovery device according to claim 3, wherein: The process module (2) comprises multiple liquid distribution devices (21).

5. The automatic polishing liquid recovery device according to claim 1 or 3 or 4, characterized in that: The liquid supply device (11) is provided with a stirring device (111), the stirring device (111) comprises a stirring rod driven by a motor and blades arranged at the end of the stirring rod.

6. The automatic polishing slurry recovery device of claim 1, wherein: The liquid supply module (1) further comprises a raw liquid device (14) and a mixed liquid device (15), liquid in the raw liquid device (14) is supplied to the mixed liquid device (15) through a second liquid supply pump (16), and a water outlet end of the mixed liquid device (15) is connected to a first water inlet end of the liquid supply device (11).

7. The automatic polishing slurry recovery device of claim 1, wherein: A pressure valve (4) is arranged on the circulating pipe (12) between the liquid distribution device (21) and the liquid supply device (11) close to the second water inlet end of the liquid supply device (11).

8. The automatic polishing slurry recovery device of claim 1, wherein: ​

Images