Single crystal furnace vacuum pipeline ash removal device and single crystal furnace

Abstract

The utility model relates to the technical field of single crystal furnaces, and provides a single crystal furnace vacuum pipeline ash removal device and a single crystal furnace, and the ash removal device comprises a rotary connecting piece provided with a rotatable connecting end; at least one ash removal rod is arranged around the rotating axis of the connecting end; the ash removal rod comprises a main body part and a connecting part; the main body part is parallel to the rotating axis and deviates from the rotating axis by a preset distance; one end of the connecting part is connected with the end part of the main body part, and the other end is connected with the connecting end; and the rotary driving piece is connected with the ash removal rod through a rotary connecting piece. By means of the arrangement, the ash removal rod is not provided with a middle support on the whole and small in occupied space, when the ash removal rod rotates, the main body part forms a tubular structure matched with the section of a vacuum pipeline in shape, obstruction to airflow is reduced as much as possible, the ash removal rod can operate in the crystal pulling process, and the problem that cleaning time is limited is effectively solved; and the cleaned volatile matters can be directly pumped away by vacuum, so that the cleaning effect is better, and the subsequent manual dismounting and cleaning work is effectively avoided.

Description

Technical Field

[0001] This utility model relates to the technical field of single crystal furnaces, and in particular to a vacuum pipe cleaning device for a single crystal furnace and a single crystal furnace. Background Technology

[0002] Single crystal furnaces are crucial equipment for growing single crystals of semiconductor materials (such as silicon), and are widely used in solar panels, integrated circuits, and other fields. During the crystal pulling process, single crystal furnaces generate volatiles, which tend to accumulate in the vacuum pipes (with water-cooled sections). With prolonged operation, these volatiles gradually harden and clump together, accumulating larger and larger amounts. If not cleaned promptly, this can cause pipe blockage. Furthermore, the change in pipe cross-section can disrupt the airflow within the vacuum pipes, ultimately affecting the quality of the crystal pulling process.

[0003] In most related technologies, the volatiles on the inner wall of the vacuum pipe of the single crystal furnace are cleaned manually after the furnace is shut down. However, since the volatiles are harmful to the human body and flammable, this operation is labor-intensive and poses certain safety hazards.

[0004] A small number of automatic cleaning mechanisms, such as blade type, brush type, and scraper type, are used to clean the inner wall of the vacuum pipe. However, brushes, blades, and scrapers can affect the airflow and pressure inside the vacuum pipe, which is not conducive to the stability of crystal pulling. Therefore, they cannot be used during the crystal pulling process and can only be cleaned after the furnace is shut down, which limits the cleaning time. Utility Model Content

[0005] This utility model provides a vacuum pipe cleaning device for a single crystal furnace and a single crystal furnace, which solves the problem that the inner wall of the vacuum pipe of a single crystal furnace can only be cleaned when the furnace is stopped, and the cleaning time is limited. It has the advantages of having little impact on the airflow inside the vacuum pipe and being usable during the crystal pulling process.

[0006] This utility model provides a vacuum pipeline cleaning device for a single crystal furnace, comprising:

[0007] The rotating connector has a rotatable connecting end;

[0008] At least one cleaning rod is arranged around the rotation axis of the connecting end; the cleaning rod includes a main body and a connecting part, the main body is parallel to the rotation axis and offset from the rotation axis by a predetermined distance; one end of the connecting part is connected to the end of the main body, and the other end is connected to the connecting end;

[0009] A rotary drive component is connected to the cleaning rod via the rotary connector and is used to drive the cleaning rod to rotate.

[0010] According to the single crystal furnace vacuum pipe cleaning device provided by this utility model, the rotating connecting member includes:

[0011] The mounting bracket is used to connect with the ash removal port on the vacuum pipe of the single crystal furnace.

[0012] The rotating shaft is rotatably connected to the fixed base to form the connecting end.

[0013] According to the present invention, a vacuum pipe cleaning device for a single crystal furnace further includes a support ring, wherein the support ring is arranged coaxially with the rotating shaft.

[0014] The main body of each of the multiple cleaning rods is fixedly connected to the outer side of the support ring; at least one support ring is arranged along the axial direction of the rotating shaft.

[0015] According to the present invention, a dust removal device for a vacuum pipeline of a single crystal furnace further includes a dust cover sleeved outside the rotating shaft. The end of the dust cover is fixedly connected to the fixed base, and the rotating shaft and the dust cover are rotatably sealed together.

[0016] According to the present invention, a vacuum pipe cleaning device for a single crystal furnace is provided, wherein a sealing ring is provided on the side of the fixed seat facing the cleaning rod, which is suitable for sealing the connection between the fixed seat and the cleaning port.

[0017] According to the present invention, a vacuum pipeline cleaning device for a single crystal furnace further includes a magnetic fluid seal, which is fixedly connected to the other side of the fixed base opposite to the cleaning rod, and the rotating shaft passes through the magnetic fluid seal.

[0018] According to the present invention, a vacuum pipe cleaning device for a single crystal furnace is provided, wherein the rotary drive component can be driven periodically within a preset angle.

[0019] According to the present invention, a vacuum pipeline cleaning device for a single crystal furnace is provided, wherein the rotary drive component includes a rotary cylinder.

[0020] According to the present invention, a vacuum pipeline cleaning device for a single crystal furnace is provided, wherein the output end of the rotary cylinder is fixedly connected to an adapter plate, and the rotating shaft is keyed to the adapter plate.

[0021] According to the present invention, a vacuum pipe cleaning device for a single crystal furnace is provided, wherein a connector is fixedly connected to the rotating shaft, and the end of the connector facing the cleaning rod is configured as a connecting end, the diameter of the connecting end being larger than the diameter of the rotating shaft;

[0022] The end of the connecting part away from the main body is fixedly connected to a mating part, and the mating part is attached to the connecting end of the connector and fixedly connected by screws.

[0023] According to the present invention, a single crystal furnace vacuum pipe cleaning device is provided, wherein two cleaning rods are provided, and the two cleaning rods are arranged symmetrically with the axis of the rotating shaft as the center.

[0024] According to the present invention, a vacuum pipe cleaning device for a single crystal furnace is provided, wherein the rotary drive component includes a motor and a reducer; the output shaft of the motor is connected to the reducer, and the output shaft of the reducer is connected to the rotating shaft.

[0025] This utility model also provides a single crystal furnace, including a furnace base, a vacuum pipe installed below the furnace base, a straight arm section provided near the furnace base, and a ash removal port provided directly below the straight arm section.

[0026] It also includes the single crystal furnace vacuum pipeline cleaning device described above, which is fixedly connected to the cleaning port.

[0027] The single-crystal furnace vacuum pipe cleaning device and single-crystal furnace provided by this utility model fix a rotating connector to the cleaning port of the single-crystal furnace vacuum pipe, thereby realizing the connection of the cleaning device on the single-crystal furnace vacuum pipe. The cleaning rod extends into the vacuum pipe, and the main body of the cleaning rod is close to or abuts the inner wall of the vacuum pipe. The connecting end of the rotating connector can be driven to rotate by a rotating drive, thereby driving the cleaning rod to rotate. During the rotation, the main body of the cleaning rod scrapes off the volatiles deposited on the inner wall of the vacuum pipe. Because the main body is arranged at a preset distance off the rotation axis, and the connecting part is... One end is connected to the end of the main body, and the other end is connected to the end of the rotating shaft, so that the cleaning rod has no central support and occupies very little space inside the vacuum pipe. When the cleaning rod rotates, the main body forms a tubular structure that matches the cross-sectional shape of the vacuum pipe, thereby minimizing the obstruction to the airflow. This allows the cleaning device to operate during the crystal pulling process, effectively solving the problem of cleaning time limitation. Moreover, the volatiles after cleaning can be directly vacuumed away, reducing the problem of volatile deposition after cleaning, resulting in better cleaning effect and effectively avoiding subsequent manual dismantling and cleaning work. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0029] Figure 1 This is one of the structural schematic diagrams of the single crystal furnace vacuum pipeline cleaning device and vacuum pipeline provided in this embodiment of the utility model.

[0030] Figure 2 This is the second schematic diagram of the structure of the single crystal furnace vacuum pipeline cleaning device and the vacuum pipeline provided in this embodiment of the utility model.

[0031] Figure 3 This is one of the structural schematic diagrams of the single crystal furnace vacuum pipeline ash removal device provided in this embodiment of the utility model.

[0032] Figure 4 This is the second schematic diagram of the structure of the vacuum pipeline cleaning device for a single crystal furnace provided in this embodiment of the utility model.

[0033] Figure label:

[0034] 10. Fixed base; 100. Sealing ring; 11. Rotating shaft; 110. Connector; 111. Locking screw; 12. Ash removal rod; 120. Main body; 121. Connecting part; 122. Butt joint; 13. Rotary drive component; 130. Adapter plate; 14. Support ring; 15. Dust cover; 16. Magnetohydrodynamic seal; 17. Mounting base; 20. Furnace bottom plate; 21. Vacuum pipe; 210. Straight arm section. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0036] To facilitate understanding of the single crystal furnace vacuum pipe cleaning device and single crystal furnace provided by this utility model, its application background is introduced first. During the crystal pulling process, the single crystal furnace will generate volatiles. These volatiles are easy to accumulate in the vacuum pipe (with water cooling section). If they are not cleaned in time, they will cause pipe blockage or turbulent airflow inside the vacuum pipe, affecting the quality of crystal pulling.

[0037] In most related technologies, the volatiles on the inner wall of the vacuum pipe of the single crystal furnace are cleaned manually after the furnace is shut down. However, since the volatiles are harmful to the human body and flammable, this operation is labor-intensive and poses certain safety hazards.

[0038] A small number of automatic cleaning mechanisms, such as blade type, brush type, and scraper type, are used to clean the inner wall of vacuum pipes. However, mechanical mechanisms such as brushes, blades, and scrapers occupy a large space inside the vacuum pipe, affecting the airflow and pressure inside the vacuum pipe, which is not conducive to the stability of crystal pulling. Therefore, the above-mentioned cleaning mechanisms cannot be used during the crystal pulling process and can only be cleaned after the furnace is shut down. The cleaning time is limited, and the volatiles after cleaning are easy to deposit on the cleaning mechanism or at the cleaning port, which often requires manual removal and cleaning.

[0039] To address the aforementioned issues, this invention provides a vacuum pipe cleaning device for a single crystal furnace and a single crystal furnace. It has the advantages of minimal impact on the airflow inside the vacuum pipe and can be used during crystal pulling. Thus, the cleaning work is not limited by cleaning time, and the volatiles after cleaning can be directly vacuumed away, reducing the problem of volatile deposition after cleaning, resulting in better cleaning effect and effectively avoiding subsequent manual dismantling and cleaning work.

[0040] The following is combined Figures 1-4 This invention describes a vacuum pipe cleaning device for a single crystal furnace and a single crystal furnace.

[0041] Reference Figure 1 and Figure 2 The single crystal furnace includes a furnace base 20, with a vacuum pipe 21 installed below the furnace base 20. A straight arm section 210 is located near the furnace base 20 in the vacuum pipe 21, and this straight arm section 210 has a water-cooling channel. High-temperature gas from the furnace chamber enters the vacuum pipe 21 through the furnace base 20. Due to the large temperature difference in the water-cooling section, volatiles easily precipitate in the straight arm section 210. If not cleaned for a long time, the deposits will accumulate, eventually clogging the vacuum pipe 21 and severely affecting the quality of crystal pulling. A cleaning port is located directly below the straight arm section 210 of the vacuum pipe 21 to clean impurities deposited within it. The single crystal furnace vacuum pipe cleaning device is installed on this cleaning port.

[0042] Reference Figure 3 and Figure 4 A dust removal device for a vacuum pipe of a single crystal furnace is disclosed, suitable for installation on the dust removal port of a vacuum pipe 21 of a single crystal furnace. The dust removal device includes a rotating connector, a dust removal rod 12, and a rotating drive 13. The rotating connector has a rotatable connecting end. At least one dust removal rod 12 is arranged around the rotation axis of the connecting end. The dust removal rod 12 includes a main body 120 and a connecting part 121. The main body 120 is parallel to the rotating shaft 11 and offset from the rotating shaft by a predetermined distance. One end of the connecting part 121 is connected to the end of the main body 120, and the other end is connected to the connecting end. The rotating drive 13 is connected to the dust removal rod 12 through the rotating connector and is used to drive the dust removal rod 12 to rotate.

[0043] In a specific application scenario, the rotating connector is fixedly connected to the cleaning port of the vacuum pipe 21, thereby connecting the cleaning device to the vacuum pipe 21. The cleaning rod 12 extends into the vacuum pipe 21, with its main body 120 close to or against the inner wall of the vacuum pipe 21. The rotating drive 13 drives the connecting end of the rotating connector to rotate, thereby rotating the cleaning rod 12. During the rotation, the main body 120 of the cleaning rod 12 scrapes off the volatiles deposited on the inner wall of the vacuum pipe 21. Because the main body 120 is offset from the rotation axis by a preset distance, and one end of the connecting part 121 is... One end of the main body 120 is connected to the other end of the rotating shaft 11, so that the cleaning rod 12 has no central support and occupies very little space inside the vacuum pipe 21. When the cleaning rod 12 rotates, the main body 120 forms a tubular structure that matches the cross-sectional shape of the vacuum pipe 21, thereby minimizing the obstruction to the airflow. This allows the cleaning device to operate during the crystal pulling process, effectively solving the problem of cleaning time limitation. Furthermore, the volatiles after cleaning can be directly vacuumed away, reducing the problem of volatile deposition after cleaning, resulting in better cleaning effect and effectively avoiding subsequent manual dismantling and cleaning work.

[0044] Understandably, depending on different practical needs, rotating connectors can be configured with different structures or forms.

[0045] In one embodiment of the present invention, the rotating connector includes a fixed base 10 and a rotating shaft 11; wherein, the fixed base 10 is used to connect with the dust removal port on the vacuum pipe 21; the rotating shaft 11 is rotatably connected to the fixed base 10, forming the connecting end of the rotating connector.

[0046] The cross-sectional shape, material, number, and specific arrangement of the dust removal rods 12 can be configured according to actual needs.

[0047] In one embodiment of this utility model, the cleaning rod 12 is made of a metal round bar with a mirror-polished surface. This improves the smoothness of the cleaning rod 12, effectively prevents the deposition of volatiles on the cleaning rod 12, and extends the service life of the cleaning rod 12. To ensure the structural strength of the cleaning rod 12, the main body 120 and the connecting part 121 are integrally formed. The connecting part 121 is first bent along the radial direction of the main body 120 to form a first part, and then bent along the axial direction of the main body 120 and in a direction away from the main body 120 to form a second part. The axis of the second part is parallel to the axis of the rotating shaft 11 to facilitate connection with the rotating shaft 11.

[0048] A single cleaning rod 12 can be arranged, and the inner wall of the vacuum pipe 21 can be cleaned by rotating the single cleaning rod 12 through the rotating shaft 11. The single cleaning rod 12 can further reduce the space occupation and help maintain the stability of the airflow in the vacuum pipe 21. However, the cleaning effect of a single cleaning rod 12 is inevitably limited. Therefore, in order to ensure the cleaning effect, multiple cleaning rods 12 can also be arranged, such as two or three. The rotating shaft 11 can drive multiple cleaning rods 12 to rotate, which can achieve efficient cleaning of the inner wall of the vacuum pipe 21.

[0049] In this embodiment, two cleaning rods 12 are provided, and the two cleaning rods 12 are arranged symmetrically with the axis of the rotating shaft 11 as the center.

[0050] It is understood that the cleaning rods 12 include, but are not limited to, the shapes, quantities and arrangements listed above, and other shapes, quantities and arrangements of cleaning rods 12 are also applicable.

[0051] In one embodiment of the present invention, in order to improve the structural strength of the cleaning rod 12, the cleaning device further includes a support ring 14. The support ring 14 is coaxial with the rotating shaft 11 and arranged between the main body portions 120 of the multiple cleaning rods 12. Furthermore, the main body portions 120 of the multiple cleaning rods 12 are all fixedly connected to the outer side of the support ring 14.

[0052] The support ring 14 can provide radial support for the main body 120 of the multiple cleaning rods 12, thereby effectively avoiding the problem of deformation of the cleaning rods 12 after being subjected to radial force. In addition, the annular support ring 14 will not occupy the central space of the vacuum pipe 21, and therefore will not obstruct the airflow in the vacuum pipe 21.

[0053] The support ring 14 and the cleaning rod 12 can be fixed by welding or integral molding, depending on the actual needs.

[0054] To facilitate the connection between the rotating shaft 11 and the cleaning rod 12, in one embodiment of this utility model, a connector 110 is fixedly connected to the end of the rotating shaft 11. The end of the connector 110 facing the cleaning rod 12 is set as the connecting end, and the diameter of the connecting end is larger than the diameter of the rotating shaft 11. A disc-shaped docking part 122 is fixedly connected to the end of the connecting part 121 away from the main body part 120. The docking part 122 is attached to the connecting end and fixedly connected by a locking screw 111.

[0055] Specifically, connector 110 is coaxially fixedly connected to rotating shaft 11 by welding; mating part 122 provides an installation base for cleaning rod 12, and is fixedly connected to connecting part 121 of cleaning rod 12 by welding. It can be understood that when multiple cleaning rods 12 are arranged, the connecting parts 121 of multiple cleaning rods 12 are all welded to mating part 122. After mating part 122 is fitted with the connecting end of connector 110, it is locked using locking screw 111. To ensure the stability of the connection between cleaning rod 12 and rotating shaft 11, at least two locking screws 111 are evenly arranged around the axis of rotating shaft 11.

[0056] One end of the rotating shaft 11 is connected to the cleaning rod 12 via the connector 110, and the other end passes through the fixed seat 10 and is connected to the rotary drive component 13 for transmission. The rotating shaft 11 and the fixed seat 10 are rotatably engaged. The side of the fixed seat 10 facing the cleaning rod 12 is the mounting surface, which is used to engage with the cleaning port of the vacuum pipeline 21. In order to ensure the sealing performance and prevent the vacuum pipeline 21 from leaking, a sealing ring 100 is provided on the mounting surface of the fixed seat 10. The sealing ring 100 is used to seal the connection between the fixed seat 10 and the cleaning port, thereby achieving a seal between the cleaning device and the vacuum pipeline 21.

[0057] To prevent volatiles from falling into the gap between the rotating shaft 11 and the fixed seat 10 during the dust removal process of the dust removal rod 12, the dust removal device also includes a dust cover 15 sleeved on the outside of the rotating shaft 11. The end of the dust cover 15 is fixedly connected to the fixed seat 10, and the rotating shaft 11 and the dust cover 15 are in a rotating sealing fit.

[0058] In one embodiment of this utility model, one end of the dust cover 15 is fixedly connected to the fixed base 10, and the other end is provided with a rotating hole for the rotating shaft 11 to pass through. The diameter of the rotating hole is adapted to the diameter of the rotating shaft 11, so that the rotating hole and the rotating shaft 11 form a rotating sealing fit.

[0059] In another embodiment of this utility model, one end of the dust cover 15 is fixedly connected to the fixed base 10, and the other end is provided with a rotating hole. The diameter of the rotating hole matches the diameter of the other end of the connector 110 relative to the connecting end. The other end of the connector 110 relative to the connecting end is embedded in the rotating hole, thereby forming a rotational seal between the rotating hole and the connector 110, and thus realizing the rotational sealing fit between the rotating shaft 11 and the dust cover 15.

[0060] The two connection methods of the dust cover 15 and the rotating shaft 11 can be selected according to actual needs. In this embodiment, the other end of the connector 110 relative to the connection end is set as a reduced diameter end. The diameter of the rotating hole matches the diameter of the reduced diameter end of the connector 110. The reduced diameter end of the connector 110 is embedded in the rotating hole, so that the rotating hole and the connector 110 form a rotation seal, thereby realizing the rotation seal cooperation between the rotating shaft 11 and the dust cover 15.

[0061] To prevent the deposition of volatiles on the dust cover 15, the end of the dust cover 15 away from the fixing base 10 is set as a slope, which facilitates the removal of volatiles deposited at the end of the dust cover 15.

[0062] In other embodiments of this utility model, a rotary sealing ring, such as an O-ring, can be provided between the dust cover 15 and the rotating shaft 11 or the connector 110 to further ensure the rotational sealing performance between the dust cover 15 and the rotating shaft 11 or the connector 110, and to ensure the dustproof effect of the dust cover 15.

[0063] To further ensure the sealing performance between the dust removal device and the vacuum pipeline 21, the dust removal device also includes a magnetic fluid seal 16, which is fixedly connected to the fixed base 10, and the rotating shaft 11 passes through the magnetic fluid seal 16. The magnetic fluid seal 16 can improve the rotational sealing performance between the rotating shaft 11 and the fixed base 10, effectively preventing gas leakage from the rotational fit gap between the rotating shaft 11 and the fixed base 10.

[0064] It should be noted that the magnetic fluid seal 16 is a commonly used seal that utilizes magnetic fluid material to form a sealing structure under the action of a magnetic field. Its specific structure and working principle can be referred to the prior art, and will not be described in detail in this embodiment of the utility model.

[0065] A mounting base 17 is fixedly connected to the bottom of the fixed base 10. The rotary drive component 13 is fixedly connected to the mounting base 17. One end of the rotating shaft 11 passes through the magnetic fluid seal 16 and is used for transmission connection with the rotary drive component 13. In one embodiment of this utility model, the rotary drive component 13 can periodically reciprocate within a preset angle, so that the cleaning rod 12 can swing back and forth within the preset angle to clean the inner wall of the vacuum pipe 21, which is beneficial to improving the cleaning effect.

[0066] The preset driving angle of the rotary drive component 13 can be selected according to actual needs, such as the number and arrangement of the cleaning rods 12. It is sufficient that the cleaning rods 12 can perform at least 360-degree comprehensive cleaning of the inner wall of the vacuum pipe 21 within one driving cycle of the rotary drive component 13. In this embodiment, since there are two cleaning rods 12 arranged symmetrically around the axis of the rotating shaft 11, the minimum preset driving angle of the rotary drive component 13 is 180 degrees.

[0067] Depending on different needs and application scenarios, the rotary drive component 13 can be in various forms, such as a rotary cylinder or a combination of a motor, reducer and coupling.

[0068] In this embodiment, the rotary drive component 13 is a rotary cylinder, and the drive end of the rotary cylinder is fixedly connected to an adapter plate 130. The rotating shaft 11 and the adapter plate 130 are keyed together. The rotary cylinder simplifies the transmission structure and makes control easier.

[0069] It is understood that, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of the different embodiments or examples.

[0070] The single crystal furnace provided by this utility model is described below. The single crystal furnace described below and the single crystal furnace vacuum pipeline cleaning device described above can be referred to in correspondence.

[0071] Reference Figures 1 to 4 A single crystal furnace includes a furnace base 20, a vacuum pipe 21 installed below the furnace base 20, a straight arm section 210 provided near the furnace base 20 of the vacuum pipe 21, and a dust removal port provided directly below the straight arm section 210; it also includes a single crystal furnace vacuum pipe dust removal device provided in any of the above embodiments, which is fixedly connected to the dust removal port.

[0072] Specifically, the mounting base 10 of the vacuum pipeline cleaning device is fixedly connected to the cleaning port to install the cleaning device onto the cleaning port, and the cleaning rod 12 is located inside the straight arm section 210 of the vacuum pipeline 21.

[0073] Specifically, the gap between the cleaning rod 12 and the pipe wall of the straight arm section 210 can be reserved, for example, a gap of 0.5mm can be reserved to avoid the cleaning rod 12 directly rubbing against the inner wall of the pipe, and at the same time, it can also avoid problems such as inability to install or interference caused by the dimensional accuracy of the parts.

[0074] Specifically, the vacuum pipe 21 is connected to the furnace bottom plate 20 through two branches, thus having two straight arm sections 210. Two sets of automatic ash removal devices are provided and are respectively connected to the ash removal ports of the two straight arm sections 210.

[0075] The single crystal furnace vacuum pipe cleaning device and single crystal furnace provided by this utility model have the following advantages: the main body 120 is arranged at a preset distance away from the rotating shaft 11, and one end of the connecting part 121 is connected to the end of the main body 120 and the other end is connected to the end of the rotating shaft 11. This results in the cleaning rod 12 having no central support and occupying very little space inside the vacuum pipe 21. When the cleaning rod 12 rotates, the main body 120 forms a tubular structure that matches the cross-sectional shape of the vacuum pipe 21, thereby minimizing the obstruction to the airflow. This allows the cleaning device to operate during the crystal pulling process, effectively solving the problem of cleaning time limitation. Furthermore, the volatiles after cleaning can be directly vacuumed away, reducing the problem of volatile deposition after cleaning. The cleaning effect is better, effectively avoiding subsequent manual dismantling and cleaning work.

[0076] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A dust removal device for a vacuum pipeline of a single crystal furnace, characterized in that, include: The rotating connector has a rotatable connecting end; At least one cleaning rod (12) is arranged around the rotation axis of the connecting end; the cleaning rod (12) includes a main body (120) and a connecting part (121), the main body (120) is parallel to the rotation axis and offset from the rotation axis by a predetermined distance; one end of the connecting part (121) is connected to the end of the main body (120), and the other end is connected to the connecting end; The rotary drive (13) is connected to the cleaning rod (12) through the rotary connector and is used to drive the cleaning rod (12) to rotate.

2. The vacuum pipe cleaning device for a single crystal furnace according to claim 1, characterized in that, The rotating connector includes: The mounting base (10) is used to connect with the cleaning port on the vacuum pipe (21) of the single crystal furnace; The rotating shaft (11) is rotatably connected to the fixed base (10) to form the connecting end.

3. The vacuum pipe cleaning device for a single crystal furnace according to claim 2, characterized in that, It also includes a support ring (14), which is coaxially arranged with the rotating shaft (11); The main body (120) of each of the multiple cleaning rods (12) is fixedly connected to the outer side of the support ring (14); at least one support ring (14) is arranged along the axial direction of the rotating shaft (11).

4. The vacuum pipe cleaning device for a single crystal furnace according to claim 2, characterized in that, It also includes a dust cover (15) sleeved outside the rotating shaft (11), the end of the dust cover (15) being fixedly connected to the fixed seat (10), and the rotating shaft (11) and the dust cover (15) being rotatably sealed together.

5. The vacuum pipe cleaning device for a single crystal furnace according to claim 2, characterized in that, A sealing ring (100) is provided on the side of the fixing seat (10) facing the cleaning rod (12), which is suitable for sealing the connection between the fixing seat (10) and the cleaning port.

6. The vacuum pipe cleaning device for a single crystal furnace according to claim 2, characterized in that, It also includes a magnetic fluid seal (16), which is fixedly connected to the other side of the fixed base (10) opposite to the cleaning rod (12), and the rotating shaft (11) passes through the magnetic fluid seal (16).

7. The single crystal furnace vacuum pipe cleaning device according to any one of claims 2 to 6, characterized in that, The rotary drive (13) can periodically reciprocate within a preset angle.

8. The vacuum pipe cleaning device for a single crystal furnace according to claim 7, characterized in that, The rotary drive (13) includes a rotary cylinder; the output end of the rotary cylinder is fixedly connected to an adapter plate (130), and the rotating shaft (11) is keyed to the adapter plate (130).

9. The vacuum pipe cleaning device for a single crystal furnace according to claim 2, characterized in that, A connector (110) is fixedly connected to the rotating shaft (11). The end of the connector (110) facing the dust removal rod (12) is set as a connection end, and the diameter of the connection end is larger than the diameter of the rotating shaft (11). The connecting part (121) is fixedly connected to a mating part (122) at one end away from the main body part (120). The mating part (122) is attached to the connecting end of the connector (110) and fixedly connected by screws.

10. A single crystal furnace, characterized in that, It includes a furnace bottom plate (20), a vacuum pipe (21) is installed below the furnace bottom plate (20), a straight arm section (210) is provided near the furnace bottom plate (20) of the vacuum pipe (21), and a ash removal port is provided directly below the straight arm section (210); It also includes a single crystal furnace vacuum pipe cleaning device as described in any one of claims 1-9, which is fixedly connected to the cleaning port.

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