Detection device

Abstract

The utility model discloses a detection device, and relates to the field of semiconductors. A detection device is applied to a process chamber, the process chamber comprises a cavity, a bearing device and a flow equalizing plate, the bearing device and the flow equalizing plate are arranged in the cavity, the bottom end face of the flow equalizing plate and the bearing face of the bearing device are oppositely arranged, and the annular side wall face and the bottom end face of the flow equalizing plate are in transition connection through an inclined connecting face; the detection device comprises a mounting assembly and at least three sets of distance measuring assemblies, the mounting assembly is used for being placed on the bearing surface, and the at least three sets of distance measuring assemblies are arranged on the mounting assembly; each distance measuring assembly comprises a first distance measuring element and a second distance measuring element, the first distance measuring element is arranged opposite to the bottom end face, the second distance measuring element is arranged opposite to the inclined connecting face, and the first distance measuring element and the second distance measuring element are used for measuring the distance to the flow uniformizing plate. The problem that the horizontal deviation between the uniform flow plate and the base cannot be directly measured at present can be solved at least.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of semiconductor, and particularly relates to a detection device. BACKGROUND

[0002] Atomic Layer Deposition (ALD) equipment and Chemical Vapor Deposition (CVD) equipment are widely used in today's integrated circuit semiconductor manufacturing processes. Process gas reaches the substrate surface after mixing through the showerhead, and reacts on the wafer surface to form a film. The relative level between the showerhead and the substrate will directly affect the uniformity and quality of the film, so it is necessary to ensure the relative level of the showerhead and the substrate during the process. Because of assembly, processing errors, the substrate needs to be manually adjusted and checked each time it is assembled to make the substrate and the showerhead relatively level. Because the showerhead is on the chamber cover and the substrate is in the chamber, the level of the two is usually measured by measuring the level of the substrate relative to the upper surface of the chamber, and the deviation between the showerhead and the substrate cannot be directly measured, so the measurement often has errors. UTILITY MODEL CONTENT

[0003] The purpose of the embodiment of the present application is to provide a detection device which can solve the problem that the horizontal deviation between the showerhead and the substrate cannot be directly measured at present.

[0004] In order to solve the above technical problems, the present application is implemented as follows:

[0005] The embodiment of the present application provides a detection device applied to a process chamber, wherein the process chamber comprises a cavity, a bearing device and a showerhead arranged in the cavity, the bottom end surface of the showerhead is arranged opposite to the bearing surface of the bearing device, and the annular side wall surface of the showerhead is transitionally connected with the bottom end surface through an inclined connecting surface.

[0006] The detection device comprises a mounting assembly and at least three groups of distance measuring assemblies, the mounting assembly is used for being placed on the bearing surface, and the at least three groups of distance measuring assemblies are arranged on the mounting assembly.

[0007] Each group of distance measuring assemblies comprises a first distance measuring element and a second distance measuring element arranged in the radial direction from the center of the bearing device, wherein the first distance measuring element is arranged opposite to the bottom end surface of the showerhead, the second distance measuring element is arranged opposite to the inclined connecting surface of the showerhead, and the first distance measuring element and the second distance measuring element are respectively used for measuring the distance to the showerhead.

[0008] In the embodiment of the present application, the distance from the first distance measuring element to the bottom end surface is measured by the first distance measuring element in each of the at least three distance measuring assemblies, and the distance from the second distance measuring element to the inclined connecting surface is measured by the second distance measuring element in each of the at least three distance measuring assemblies. In this way, the distance from each of the first distance measuring element and the second distance measuring element in each distance measuring assembly to the flow uniformizing plate can be obtained, so as to lay a foundation for obtaining the horizontal deviation angle and the centering eccentric distance. Compared with the related art, the embodiment of the present application can directly measure the distance from each first distance measuring element in the detection device to the bottom end surface of the flow uniformizing plate, thereby providing accurate data for calculating the levelness of the flow uniformizing plate relative to the bearing surface, and can also directly measure the distance from each second distance measuring element in the detection device to the inclined connecting surface of the flow uniformizing plate, thereby providing accurate data for calculating the concentricity of the flow uniformizing plate relative to the bearing surface. Therefore, the error caused by measuring the intermediate reference object is effectively avoided, the measurement accuracy is improved to a certain extent, and the levelness and the concentricity between the flow uniformizing plate and the bearing surface can be obtained more accurately, so as to ensure the uniformity and the film forming quality of the process film forming. Moreover, the operation is optimized, which is conducive to improving the efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0009] Figure 1 A cross-sectional view of a distance measuring device installed in a process chamber in the related art

[0010] Figure 2 A cross-sectional view of a detection device disclosed in the embodiment of the present application;

[0011] Figure 3 A top view of a detection device disclosed in the embodiment of the present application;

[0012] Figure 4 A first structural schematic view of a mounting assembly disclosed in the embodiment of the present application;

[0013] Figure 5 A second structural schematic view of a mounting assembly disclosed in the embodiment of the present application;

[0014] Figure 6 A cross-sectional view of a detection device installed in a process chamber in the embodiment of the present application;

[0015] Figure 7 A top view of a detection device installed in a process chamber in the embodiment of the present application;

[0016] Figure 8 A first structural schematic view of a detection device with numbering disclosed in the embodiment of the present application;

[0017] Figure 9 A second structural schematic view of a detection device with numbering disclosed in the embodiment of the present application;

[0018] Figure 10 The structural schematic diagram of the mounting assembly and the base disclosed in the embodiments of the present application.

[0019] Explanation of reference signs:

[0020] 01-process chamber; 02-uniform flow member; 03-base; 04-distance measuring tool;

[0021] 100-detection device;

[0022] 110-mounting assembly; 111-bottom plate; 1111-first centering structure; 112-bracket; 1121-first cross beam; 1122-second cross beam; 1123-longitudinal beam; 1124-first mounting hole; 1125-second mounting hole;

[0023] 120-distance measuring assembly; 121-first distance measuring element; 122-second distance measuring element;

[0024] 200-cavity; 210-cover;

[0025] 300-carrier device; 310-carrier surface; 320-second centering structure;

[0026] 400-uniform flow plate; 410-bottom end surface; 420-annular side wall surface; 430-inclined connecting surface;

[0027] P-first circumference; Q-second circumference. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are some of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work are within the scope of protection of the present application.

[0029] The terms “first”, “second”, etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be exchanged under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than that illustrated or described herein, and the objects distinguished by “first”, “second”, etc. are generally of a kind and do not limit the number of objects, for example, the first object can be one or more. In addition, “and / or” in the specification and claims indicates at least one of the connected objects, and the character “ / ” generally indicates that the front and rear associated objects are in an “or” relationship.

[0030] The embodiments of the present application will be described in detail below with specific examples and application scenarios thereof in conjunction with the accompanying drawings.

[0031] Reference Figure 1 In the related art, a process chamber 01 is provided with a flow uniformizing member 02 at the top thereof, a susceptor 03 is arranged in the process chamber 01, and a distance measuring tool 04 is arranged on the upper surface of the process chamber 01. In the distance measuring process, the susceptor 03 is raised to a certain height, and when the susceptor 03 contacts the distance measuring tool 04, the relative levelness between the susceptor 03 and the upper surface of the process chamber 01 is evaluated by the readings displayed by the distance measuring tools 04 at different positions. Generally, the difference between the readings of any two distance measuring tools 04 is required to be less than 0.26 mm to meet the requirement.

[0032] The measurement of the concentricity of the susceptor 03 is obtained by measuring the gap width between the susceptor 03 and other components in the process chamber 01 by means of a feeler gauge. Generally, the difference between the gap widths measured at different positions is required to be less than 0.5 mm to be qualified.

[0033] The above-mentioned measurement of the levelness and the concentricity requires the opening of the upper cover of the process chamber 01, and the measurement of the levelness and the concentricity is realized by the distance measuring tool 04 respectively. However, this kind of measurement method is relatively complex in operation and tedious in steps. Moreover, the above-mentioned process cannot directly measure the distance between the flow uniformizing member 02 and the susceptor 03, resulting in a large measurement error.

[0034] Based on the above-mentioned situation, the embodiments of the present application disclose a detection device 100 which is applied to a process chamber and can directly measure the distance between the surface of a flow uniformizing plate 400 and the bearing surface 310 of a bearing device 300 in the process chamber.

[0035] Reference Figures 2 to 10 The process chamber can include a cavity 200, a bearing device 300, and a flow uniformizing plate 400. The cavity 200 can provide a process environment for a wafer, the bearing device 300 is used for bearing the wafer, and the flow uniformizing plate 400 is used for introducing a process gas into the cavity 200. In some embodiments, the bearing device 300 can be arranged in the cavity 200, and the flow uniformizing plate 400 can be arranged at the top of the cavity 200 and above the bearing device 300, and is used for introducing a process gas to the surface of the wafer borne by the bearing device 300.

[0036] As Figure 6As shown, the uniform flow plate 400 can include a bottom end surface 410, an annular side wall surface 420, and an inclined connecting surface 430. Among them, the bottom end surface 410 of the uniform flow plate 400 is arranged opposite to the bearing surface 310 of the bearing device 300 for bearing the wafer, and the annular side wall surface 420 and the bottom end surface 410 are transitionally connected through the inclined connecting surface 430. In some more specific embodiments, the longitudinal section (i.e. the vertical section) of the uniform flow plate 400 is similar to an inverted trapezoid.

[0037] Reference Figures 2 to 6 The detection device 100 includes a mounting assembly 110 and at least three groups of distance measuring assemblies 120. Among them, the mounting assembly 110 is used to be placed on the bearing surface 310, and the at least three groups of distance measuring assemblies 120 are arranged on the mounting assembly 110. In this way, the bearing and installation of the at least three groups of distance measuring assemblies 120 can be realized through the mounting assembly 110, and the stability of the distance measuring assemblies 120 can be ensured. Optionally, the distance measuring assemblies 120 can be three groups, four groups, five groups, six groups, etc. The specific number can be selected according to the actual working conditions.

[0038] In addition, the at least three groups of distance measuring assemblies 120 can be distributed at different positions of the mounting assembly 110, so as to measure the distances from the different positions of the uniform flow plate 400 to the bearing surface 310.

[0039] Each group of distance measuring assemblies 120 includes a first distance measuring element 121 and a second distance measuring element 122, which are arranged in the radial direction from the center of the bearing device 300. Among them, the first distance measuring element 121 is arranged opposite to the bottom end surface 410 of the uniform flow plate 400, and the second distance measuring element 122 is arranged opposite to the inclined connecting surface 430 of the uniform flow plate 400. The first distance measuring element 121 and the second distance measuring element 122 are respectively used to measure the distances to the uniform flow plate 400.

[0040] It should be noted here that the transmission direction of the signals emitted by the first distance measuring element 121 and the second distance measuring element 122 is perpendicular to the bearing surface 310. The first distance measuring element 121 is directly opposite to the bottom end surface 410 of the uniform flow plate 400, that is, the signal emitted by the first distance measuring element 121 can be vertically hit on the bottom end surface 410. The second distance measuring element 122 is obliquely opposite to the inclined connecting surface 430 of the uniform flow plate 400, that is, the signal emitted by the second distance measuring element 122 can be obliquely hit on the inclined connecting surface 430.

[0041] In the embodiments of the present application, the distance from the first ranging element 121 to the bottom end surface 410 is measured by the first ranging element 121 in each of the at least three ranging assemblies 120, and the distance from the second ranging element 122 to the inclined connecting surface 430 is measured by the second ranging element 122 in each of the at least three ranging assemblies 120. In this way, the distance from each of the first ranging element 121 and the second ranging element 122 in each of the ranging assemblies 120 to the flow uniforming plate 400 can be obtained, so as to lay a foundation for obtaining the horizontal deviation angle and the centering eccentric distance.

[0042] Compared with the related art, in the embodiments of the present application, the distance from each of the first ranging elements 121 in the detection device 100 to the bottom end surface 410 of the flow uniforming plate 400 can be directly measured, so as to provide accurate data for calculating the levelness of the flow uniforming plate 400 relative to the bearing surface 310. In addition, the distance from each of the second ranging elements 122 in the detection device 100 to the inclined connecting surface 430 of the flow uniforming plate 400 can be directly measured, so as to provide accurate data for calculating the concentricity of the flow uniforming plate 400 relative to the bearing surface 310. Therefore, the error caused by measuring the intermediate reference object is effectively avoided, and the measurement accuracy is improved to a certain extent, so that more accurate levelness and concentricity between the flow uniforming plate 400 and the bearing surface 310 can be obtained, so as to ensure the uniformity and film forming quality of the process film forming. In addition, the operation is optimized, which is beneficial to improving the efficiency.

[0043] As shown in Figure 3 and Figure 4 In some more specific embodiments, the detection device 100 can include four ranging assemblies 120, and the four ranging assemblies 120 are uniformly arranged along the circumference of the bearing device 300. Specifically, the four first ranging elements 121 are uniformly arranged along the circumference of the bearing device 300, the four second ranging elements 122 are also uniformly arranged along the circumference of the bearing device 300, and each first ranging element 121 and the corresponding second ranging element 122 are arranged at a radial distance from the center of the bearing device 300.

[0044] Based on this arrangement, the distance from each of the first ranging elements 121 and the second ranging elements 122 in the four ranging assemblies 120 to the flow uniforming plate 400 can be measured, so that four sets of measurement data can be obtained, each set of measurement data including two distance values. In this way, the measurement error can be reduced, and the measurement accuracy can be improved.

[0045] As shown in Figure 3As shown, in some embodiments, the first distance measuring element 121 in the distance measuring assembly 120 of each group is located on a first circle P, and the diameter of the first circle P is smaller than the diameter of the bottom end surface 410. Based on this, it can be ensured that the first distance measuring element 121 in the distance measuring assembly 120 of each group can emit a signal to the bottom end surface 410 to measure the distance between the first distance measuring element 121 and the bottom end surface 410.

[0046] In some more specific embodiments, the diameter of the first circle P can be equal to half of the diameter of the bottom end surface 410.

[0047] In addition, the second distance measuring element 122 in the distance measuring assembly 120 of each group is located on a second circle Q, and the second circle Q is located in the projection of the inclined connecting surface 430 on the bearing surface 310. Based on this, it can be ensured that the second distance measuring element 122 in the distance measuring assembly 120 of each group can emit a signal to the inclined connecting surface 430 to measure the distance between the second distance measuring element 122 and the inclined connecting surface 430.

[0048] Optionally, the first distance measuring element 121 and the second distance measuring element 122 can each be a laser distance sensor. Through the first distance measuring element 121, laser can be emitted to the bottom end surface 410 of the flow uniforming plate 400, and the returned laser can be received to measure the distance between the first distance measuring element 121 and the bottom end surface 410. Through the second distance measuring element 122, laser can be emitted to the inclined connecting surface 430 of the flow uniforming plate 400, and the returned laser can be received to measure the distance between the second distance measuring element 122 and the inclined connecting surface 430. Of course, the first distance measuring element 121 and the second distance measuring element 122 can each also be other distance measuring members, which are not limited here.

[0049] Continuing to refer to Figure 3 In some embodiments, the mounting assembly 110 can include a base plate 111 and a support 112. The base plate 111 is used to be placed on the bearing surface 310 to bear the base plate 111 through the bearing surface 310 and ensure the stability of the base plate 111. The support 112 is arranged on the base plate 111 to support and fix the support 112 through the base plate 111 to ensure the stability of the support 112. At least three distance measuring assemblies 120 are arranged on the support 112 to bear and mount the at least three distance measuring assemblies 120 through the support 112 to ensure the stability of the at least three distance measuring assemblies 120. Optionally, the side of the base plate 111 away from the support 112 can be a plane to ensure parallelism with the support 112 through machining accuracy.

[0050] Optionally, the support 112 and the base plate 111 can be fixedly connected, such as welding, bonding, riveting, etc., and can also be detachably connected, such as screwing, clamping, inserting, etc. Of course, the support 112 and the base plate 111 can also be an integral structure.

[0051] In other embodiments, the mounting assembly 110 can also be an integral mounting rack or mounting base, as long as it can stably support at least three ranging assemblies 120, and the specific form is not limited.

[0052] To ensure the positional accuracy between the detection device 100 and the bearing device 300, in the embodiment of the application, a first centering structure 1111 can be arranged on the side of the chassis 111 away from the support 112, as shown in Figure 5 , wherein the first centering structure 1111 can be arranged at the center position of the side of the chassis 111 facing the bearing surface 310; correspondingly, the bearing surface 310 can be provided with a second centering structure 320, as shown in Figure 6 , wherein the second centering structure 320 can be arranged at the center position of the bearing surface 310; and the first centering structure 1111 is used for cooperating with the second centering structure 320. Based on this arrangement, the cooperation of the first centering structure 1111 and the second centering structure 320 can ensure the centering arrangement of the detection device 100 and the bearing device 300, preventing eccentricity between the detection device 100 and the bearing device 300 from affecting the subsequent measurement accuracy.

[0053] In some embodiments, one of the first centering structure 1111 and the second centering structure 320 can be a protrusion, and the other can be a groove, so that the centering arrangement of the detection device 100 and the bearing device 300 is realized through the cooperation of the protrusion and the groove, to ensure that the two will not be eccentric.

[0054] Alternatively, the side of the chassis 111 away from the support 112 can be provided with a protrusion, and correspondingly, the bearing surface 310 can be provided with a groove; of course, the side of the chassis 111 away from the support 112 can also be provided with a groove, and correspondingly, the bearing surface 310 can be provided with a protrusion.

[0055] In other embodiments, one of the first centering structure 1111 and the second centering structure 320 can be a positioning pin, and the other can be a positioning hole or a positioning slot, so that the centering arrangement of the detection device 100 and the bearing device 300 is realized through the cooperation of the positioning pin and the positioning hole or the positioning slot, to ensure that the two will not be eccentric.

[0056] Alternatively, the side of the chassis 111 away from the support 112 can be provided with a positioning pin, and correspondingly, the bearing surface 310 can be provided with a positioning hole or a positioning slot; of course, the side of the chassis 111 away from the support 112 can also be provided with a positioning hole or a positioning slot, and correspondingly, the bearing surface 310 can be provided with a positioning pin.

[0057] Reference is made to Figure 4 and Figure 5In some embodiments, the bracket 112 can include a first cross beam 1121, a second cross beam 1122, and a plurality of longitudinal beams 1123. The first cross beam 1121 and the second cross beam 1122 extend along the diameter direction of the bearing device 300 respectively and are arranged in a cross shape. The first cross beam 1121 and the chassis 111 are connected by the longitudinal beams 1123, and the second cross beam 1122 and the chassis 111 are also connected by the longitudinal beams 1123.

[0058] Further, the first distance measuring element 121 and the second distance measuring element 122 can be arranged on the first cross beam 1121 or the second cross beam 1122, so as to be respectively carried and installed by the first cross beam 1121 and the second cross beam 1122, and the stability of the first distance measuring element 121 and the second distance measuring element 122 is ensured.

[0059] Optionally, the first cross beam 1121 can be provided with a first mounting hole 1124 and a second mounting hole 1125. The first distance measuring element 121 is installed in the first mounting hole 1124, and the second distance measuring element 122 is installed in the second mounting hole 1125.

[0060] Similarly, the second cross beam 1122 can be provided with a first mounting hole 1124 and a second mounting hole 1125. The first distance measuring element 121 is installed in the first mounting hole 1124, and the second distance measuring element 122 is installed in the second mounting hole 1125.

[0061] In other embodiments, the bracket 112 can further include a third cross beam, a fourth cross beam, a fifth cross beam, etc. Each cross beam extends along the diameter direction of the bearing device 300, and adjacent two cross beams are arranged at an included angle. Each cross beam is connected with the chassis 111 by the longitudinal beams 1123, and each cross beam can carry the first distance measuring element 121 and the second distance measuring element 122.

[0062] In some more specific embodiments, the first cross beam 1121 is sequentially arranged with the second distance measuring element 122, the first distance measuring element 121, the first distance measuring element 121, and the second distance measuring element 122, and two second distance measuring elements 122 are symmetrically arranged, and two first distance measuring elements 121 are symmetrically arranged. The second cross beam 1122 is sequentially arranged with the second distance measuring element 122, the first distance measuring element 121, the first distance measuring element 121, and the second distance measuring element 122, and two second distance measuring elements 122 are symmetrically arranged, and two first distance measuring elements 121 are symmetrically arranged.

[0063] In addition, as shown in FIG. 2, the first distance measuring element 121 and the second distance measuring element 122 can be arranged on the first cross beam 1121 or the second cross beam 1122, so as to be respectively carried and installed by the first cross beam 1121 and the second cross beam 1122, and the stability of the first distance measuring element 121 and the second distance measuring element 122 is ensured. Figure 3As shown, the two end regions of the first cross beam 1121 can also be provided with characters, i.e., +X and -X, for marking the X-axis direction; the two end regions of the second cross beam 1122 can also be provided with characters, i.e., +Y and -Y, for marking the Y-axis direction.

[0064] In the embodiments of the present application, taking four groups of distance measuring assemblies 120 as an example, the measurement process of the detection device 100 is as follows:

[0065] Open the cover 210 of the cavity 200, place the detection device 100 on the bearing surface 310, and cooperate the first centering structure 1111 with the second centering structure 320 to ensure the concentricity of the detection device 100 and the bearing device 300; close the cover 210 of the cavity 200, open the first distance measuring element 121 and the second distance measuring element 122 in each group of distance measuring assemblies 120, and record the values of each distance measuring element.

[0066] As shown in Figures 7 to 9 the numbers of the first distance measuring element 121 and the second distance measuring element 122 in each group of distance measuring assemblies 120 are defined as A1, A2, A3, A4, B1, B2, B3, B4, and the measured distance values are LA1, LA2, LA3, LA4, LB1, LB2, LB3, LB4, respectively; the diameter of the first circle P is Da, the diameter of the second circle Q is Db, and the included angle between the inclined connecting surface 430 of the uniform flow plate 400 and the bottom end surface 410 is β.

[0067] Therefore, the horizontal deviation angle of the Y-axis direction can be calculated as Y =arctan[(LA2-LA4) / Da];

[0068] The centering eccentric distance of the Y-axis direction is S Y =(LB2-LB4) / tanβ.

[0069] Similarly, the horizontal deviation angle of the X-axis direction can be calculated as X =arctan[(LA1-LA3) / Da];

[0070] The centering eccentric distance of the X-axis direction is S X =(LB1-LB3) / tanβ.

[0071] Based on the above process, the levelness and concentricity of the uniform flow plate 400 relative to the bearing surface can be obtained, effectively avoiding the error caused by measuring the intermediate reference; and the same detection device 100 can be used to realize the measurement of the levelness and the measurement of the concentricity, simplifying the measurement operation and improving the measurement efficiency.

[0072] The embodiments of the present application are described above with reference to the accompanying drawings, but the present application is not limited to the specific embodiments described above, and the specific embodiments described above are merely illustrative, but not restrictive, and a person of ordinary skill in the art can make many forms under the inspiration of the present application without departing from the purpose of the present application and the scope protected by the claims.

Claims

1. A detection device applied to a process chamber, the process chamber comprising a cavity (200), a carrier device (300) and a uniform flow plate (400) arranged in the cavity (200), a bottom end surface (410) of the uniform flow plate (400) is arranged opposite to a carrier surface (310) of the carrier device (300), and an annular side wall surface (420) of the uniform flow plate (400) and the bottom end surface (410) are connected by a transition connection surface (430); characterized in that, The detection device (100) comprises a mounting assembly (110) and at least three groups of distance measuring assemblies (120), the mounting assembly (110) is used for being placed on the bearing surface (310), and the at least three groups of distance measuring assemblies (120) are arranged on the mounting assembly (110); Each group of distance measuring assemblies (120) comprises a first distance measuring element (121) and a second distance measuring element (122) arranged in a radial direction from the center of the bearing device (300) in sequence; wherein the first distance measuring element (121) is arranged opposite to the bottom end surface (410) of the flow uniformizing plate (400), the second distance measuring element (122) is arranged opposite to the inclined connecting surface (430) of the flow uniformizing plate (400), and the first distance measuring element (121) and the second distance measuring element (122) are respectively used for measuring the distance to the flow uniformizing plate (400).

2. The detection device of claim 1, wherein, The detection device (100) comprises four groups of distance measuring assemblies (120), and the four groups of distance measuring assemblies (120) are arranged uniformly along the circumference of the bearing device (300).

3. The detection device of claim 1, wherein, The first distance measuring elements (121) in all groups of distance measuring assemblies (120) are located on a first circumference (P), and the diameter of the first circumference (P) is smaller than the diameter of the bottom end surface (410).

4. The detection device of claim 3, wherein, The diameter of the first circumference (P) is equal to half of the diameter of the bottom end surface (410).

5. The detection device of claim 1, wherein, The second distance measuring elements (122) in all groups of distance measuring assemblies (120) are located on a second circumference (Q), and the second circumference (Q) is located in the projection of the inclined connecting surface (430) on the bearing surface (310).

6. The detection device of claim 1, wherein, The first distance measuring element (121) and the second distance measuring element (122) are both laser distance sensors.

7. The detection device according to any one of claims 1 to 6, characterized in that The mounting assembly (110) comprises a base plate (111) and a support (112); The base plate (111) is used for being placed on the bearing surface (310); The support (112) is arranged on the base plate (111); The at least three groups of distance measuring assemblies (120) are respectively arranged on the support (112).

8. The detection device of claim 7, wherein, A first centering structure (1111) is arranged on the side of the base plate (111) away from the support (112), and the first centering structure (1111) is used for being connected with a second centering structure (320) arranged on the bearing surface (310).

9. The detection device of claim 8, wherein, One of the first centering structure (1111) and the second centering structure (320) is a protrusion, and the other is a groove, and the protrusion is connected with the groove; The second centering structure (320) is located at the center of the bearing surface (310).

10. The detection device of claim 7, wherein, The support (112) comprises a first cross beam (1121), a second cross beam (1122) and a plurality of longitudinal beams (1123); The first cross beam (1121) and the second cross beam (1122) respectively extend along the diameter direction of the bearing device (300) and are arranged in a cross shape; The first cross beam (1121) and the second cross beam (1122) are respectively connected with the base plate (111) through the longitudinal beams (1123).

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