Cleaning equipment

Abstract

The utility model discloses cleaning equipment, which comprises a pickling device, a cleaning device, a cleaning device, a cleaning device, a cleaning device and a cleaning device, wherein the pickling device is used for placing pickling solution and materials to be cleaned; the filtering device comprises a filtering cavity, a partition plate is arranged in the filtering cavity, and a first cavity communicated with an outlet of the pickling device and a second cavity used for being communicated with the pumping device are formed; a plurality of filter cartridges are arranged on the partition plate to communicate the first cavity with the second cavity; the filtering cavity is provided with a liquid inlet device communicated with the first cavity so as to receive substances discharged from the pickling device, a liquid pumping device communicated with the pumping device and the second cavity so as to convey the substances discharged from the second cavity to the pumping device, and a liquid discharging device communicated with the second cavity; and the pumping device communicates with the pickling device through the liquid inlet and communicates with the second cavity through the liquid pumping device, so that the pickling liquid in the second cavity is transferred to the pickling device. According to the utility model, the utilization rate of the pickling solution can be improved, and the problem that the pumping device is damaged due to the fact that material slag enters the pumping device along with the pickling solution is reduced or avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor processing equipment technical field especially relates to a kind of cleaning equipment. BACKGROUND

[0002] In semiconductor manufacturing, pickling equipment is usually used to remove the semiconductor material layer needed to be removed on the material to be cleaned, such as polysilicon wafer and quartz tube. For example, the mixed acid solution of hydrofluoric acid (HF) and nitric acid (HNO3) can effectively remove the impurities such as oxides on the silicon wafer.

[0003] In the prior art, the pickling tank (HF and HNO3 mixed acid solution) of the cleaning equipment, such as pickling equipment, is used to clean polysilicon wafer, quartz tube and other materials. Some residues are not completely decomposed in the pickling tank and are discharged into the pump with the pickling solution, which causes damage to the pump impeller and results in a large amount of waste of pickling solution.

[0004] Therefore, it is necessary to provide a new cleaning equipment to solve the above problems existing in the prior art. INVENTION CONTENTS

[0005] The utility model aims at providing a kind of cleaning equipment, can improve pickling solution utilization rate, reduce or avoid the problem that residue enters into pumping device with pickling solution and causes pumping device damage.

[0006] To achieve the above purpose, the technical scheme of the utility model is as follows:

[0007] A kind of cleaning equipment, comprising:

[0008] Pickling device for placing pickling solution and material to be cleaned, comprising liquid inlet;

[0009] Filtering device, comprising filter cavity, the filter cavity is provided with partition to form first cavity communicated with the outlet of the pickling device and second cavity for communicating with pumping device; The partition is provided with a plurality of filter cartridges to communicate the first cavity and the second cavity, for intercepting solid material entering the first cavity;

[0010] The filter cavity is provided with liquid inlet device communicated with the first cavity to receive discharged material from the pickling device, liquid pumping device communicated with the pumping device and the second cavity to transport discharged material from the second cavity to the pumping device, and liquid discharge device communicated with the second cavity;

[0011] The pumping device is communicated with the pickling device through the liquid inlet, and is communicated with the second cavity through the liquid pumping device, so as to transfer the pickling solution in the second cavity to the pickling device.

[0012] By adopting the technical scheme, the filtering device including the filtering cavity is arranged between the pickling device and the pumping device, the partition plate is arranged in the filtering cavity to form the first cavity communicated with the pickling device and the second cavity communicated with the pumping device, the filter cartridge is arranged on the partition plate to communicate the first cavity and the second cavity, the solid-state substance entering the first cavity can be intercepted through the filter cartridge, and the acid liquor entering the filtering cavity from the pickling device and the solid-state substance intercepted in the filter cartridge in the first cavity can be fully decomposed through the control of the liquid inlet device and the liquid pumping device, so that the problem that the pumping device is damaged due to the slag entering the pumping device along with the pickling liquor can be avoided; the pumping device is communicated with the pickling device through the liquid inlet port of the pickling device and is communicated with the second cavity through the liquid pumping device of the filtering cavity, the pickling liquor in the second cavity can be transferred to the pickling device, so that the recycling of the pickling liquor is realized and the utilization rate of the pickling liquor is improved.

[0013] Optionally, the partition plate is provided with a plurality of partition plates and is sequentially connected, and the horizontal heights of at least two partition plates are different; at least one filter cartridge is arranged on each partition plate.

[0014] Optionally, the partition plate is provided with a plurality of partition plates and is sequentially arranged along the axial direction of the filtering cavity to separate the second cavity into a plurality of sub-cavities, and at least one filter cartridge is arranged on each partition plate.

[0015] Optionally, the cooling device is further arranged between the pickling device and the pumping device and is communicated with the liquid inlet port and the pumping device respectively, so that the acid liquor conveyed by the pumping device is cooled and then returned to the pickling device through the liquid inlet port.

[0016] Optionally, the inner side wall of the pickling device is movably provided with the anti-corrosion isolation device to close or open the liquid inlet port, and the anti-corrosion isolation device comprises:

[0017] The door body is movably arranged on the inner wall of the pickling device.

[0018] The driving mechanism is arranged on the inner wall of the pickling device and is located above the door body to provide power.

[0019] The guide rail assembly is arranged on the opposite sides of the liquid inlet port, and the door body is slidably arranged on the guide rail assembly to close or open the liquid inlet port.

[0020] The transmission member is connected to the driving mechanism and the door body respectively, so that the driving mechanism drives the door body to move along the extension direction of the guide rail assembly through the transmission member.

[0021] Optionally, the anti-corrosion isolation device further comprises:

[0022] The protection box is arranged on the inner wall of the pickling device.

[0023] The driving mechanism is arranged in the protection box.

[0024] The transmission member is arranged in the protection box in a dynamic sealing manner and is connected with the door body.

[0025] Optionally, an air inlet pipe is arranged on the protection box and is communicated with the inside of the protection box to provide a channel for the flowing gas.

[0026] An air pipe is arranged on the protection box and is communicated with the inside of the protection box to provide air or inert gas into the protection box to isolate the acid gas from entering the protection box.

[0027] Optionally, the driving mechanism is further electrically connected with a driving circuit, and an air pipe is arranged on the protection box, and the driving circuit is electrically connected with the driving mechanism through the air pipe.

[0028] Optionally, the cleaning device further comprises a heating and water washing device.

[0029] The heating and water washing device comprises:

[0030] a water tank body for washing the material to be cleaned;

[0031] a heating device arranged in the water tank body to heat the liquid in the water tank body;

[0032] a water inlet pipe communicated with the water tank body to provide washing water for the water tank body;

[0033] a circulating assembly comprising a hot water outlet pipe communicated with the water tank body and a liquid supply pump having two ends communicated with the hot water outlet pipe and the water tank body.

[0034] Optionally, a leakage receiving box is arranged at the bottom of the water tank body, and a liquid leakage pipe is arranged on the water tank body, one end of the liquid leakage pipe is communicated with the inside of the water tank body, and the other end of the liquid leakage pipe is communicated with the leakage receiving box, so that the liquid in the water tank body is transferred to the leakage receiving box in the form of overflow. BRIEF DESCRIPTION OF DRAWINGS

[0035] Figure 1 a connection mode diagram of the cleaning device according to an embodiment of the present application;

[0036] Figure 2 a structure diagram of the filter device with a single partition plate according to an embodiment of the present application;

[0037] Figure 3 a structure diagram of the filter device with multiple partition plates according to an embodiment of the present application;

[0038] Figure 4Structure schematic view of the filtering device with multiple partitions according to another embodiment of the present utility model;

[0039] Figure 5 Structure schematic view of the filtering device with multiple partitions according to another embodiment of the present utility model;

[0040] Figure 6 Structure sectional view of the anti-corrosion isolation device according to an embodiment of the present utility model;

[0041] Figure 7 Structure schematic view of the anti-corrosion isolation device according to an embodiment of the present utility model;

[0042] Figure 8 Structure schematic view of the heating and water washing device according to an embodiment of the present utility model.

[0043] Reference signs:

[0044] 100, pickling device; 110, pickling cavity; 111, liquid inlet; 112, liquid outlet; 200, pumping device; 300, filtering device; 310, filtering cavity; 311, first cavity; 312, second cavity; 313, liquid inlet device; 314, liquid extraction device; 315, liquid outlet device; 320, exhaust device; 330, partition; 340, filter cartridge; 400, anti-corrosion isolation device; 410, door body; 420, driving mechanism; 430, transmission member; 431, connecting plate; 432, guide rod; 440, protection box; 441, air inlet pipe; 442, wiring pipe; 450, guide rail assembly; 451, guide rail; 500, cooling device; 600, heating and water washing device; 610, water tank main body; 620, leakage receiving box; 630, liquid leakage pipe; 640, water inlet pipe; 650, hot water outlet pipe; 660, waste water discharge pipe; 670, liquid supply pump; 680, heating plate. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical scheme and advantages of the embodiments of the present utility model clearer, the technical scheme in the embodiments of the present utility model will be described clearly and completely below. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as the usual meaning by those skilled in the art to which the present utility model belongs. The similar words such as "comprise" used herein mean that the elements or objects before the words cover the elements or objects listed after the words and their equivalents, without excluding other elements or objects.

[0046] The specific embodiments of the utility model will be further described in detail below with reference to the drawings.

[0047] The embodiment of the utility model provides a kind of cleaning equipment, for the field of semiconductor processing, to polycrystalline silicon wafer, quartz tube and other materials are cleaned.

[0048] Refer to Figure 1 The cleaning equipment includes pickling device 100, for placing pickling liquid and to be cleaned material.In some embodiments, pickling device 100 has a cavity, defined as pickling cavity 110, for placing pickling liquid in pickling cavity 110, during the cleaning process of material, material is pickled in pickling cavity 110 of pickling device 100.

[0049] In some more specific embodiments, pickling device 100 includes liquid inlet 111, and liquid inlet 111 is communicated with pumping device 200.

[0050] In some embodiments, pickling cavity 110 side wall has liquid inlet 111 and liquid outlet 112, and liquid outlet 112 is used to discharge pickling liquid in pickling cavity 110, and liquid inlet 111 is used to pass into pickling liquid in pickling cavity 110.

[0051] In some embodiments, liquid inlet 111 and liquid outlet 112 are located at the same horizontal height.

[0052] In some embodiments, the horizontal height of liquid inlet 111 is higher than the horizontal height of liquid outlet 112.

[0053] In some embodiments, the horizontal height of liquid inlet 111 is lower than the horizontal height of liquid outlet 112.

[0054] Specific to the embodiment, the horizontal height of liquid inlet 111 is preferably lower than the horizontal height of liquid outlet 112;That is, in the process of pickling liquid circulation, it can be understood that the discharge of pickling liquid is discharged through the principle of overflow, that is, when pickling liquid rises to the height of liquid outlet 112 in pickling cavity 110, it is discharged through liquid outlet 112, and such arrangement can make pickling liquid more fully used in pickling cavity 110.

[0055] The cleaning equipment further includes pumping device 200, which is communicated with pickling device 100 to circulate pickling liquid.In some embodiments, pumping device 200 is a circulating pump;One end of pumping device 200 is communicated with liquid inlet 111, and the other end is communicated with liquid outlet 112, so that pumping device 200 can circulate pickling liquid in pickling cavity 110.

[0056] In some more specific embodiments, the pumping device 200 is in communication with the liquid inlet 111 and the liquid outlet 112 through pipes, which are preferably screwed to the pumping device 200 and to the liquid inlet 111 and the liquid outlet 112; in addition, other ways can be selected, which are not limited here, and the pipes should not leak the pickling liquid. In addition, the pipes can be made of flexible material or rigid material, which is not limited here, and the pickling liquid should not corrode the pipes or corrode the pipes as little as possible.

[0057] The cleaning device further comprises a filtering device 300, which is described with reference to Figure 1 and Figure 2 The filtering device 300 comprises a filtering cavity 310, in which a partition plate 330 is arranged to form a first cavity 311 in communication with the outlet of the pickling device 100 and a second cavity 312 for communication with the pumping device 200; a plurality of filter cartridges 340 are arranged on the partition plate 330 to communicate the first cavity 311 and the second cavity 312, for intercepting solid substances entering the first cavity 311.

[0058] In some embodiments, the filtering device 300 comprises a filtering cavity 310, which is arranged in a hollow manner, and the filtering cavity 310 is in communication with the pickling device 100 and the pumping device 200, respectively. More specifically, the filtering cavity 310 is arranged on the pipe between the pumping device 200 and the liquid outlet 112, and is in communication with the pipe, so that the pickling liquid in the pickling cavity 110 enters the pumping device 200 after passing through the filtering cavity 310.

[0059] In some embodiments, the filtering cavity 310 is provided with a partition plate 330, which can be arranged by welding, one-piece molding or other fixing methods, and is mainly sealed and connected to the inner wall of the filtering cavity 310. More specifically, the partition plate 330 divides the filtering cavity 310 into a first cavity 311 and a second cavity 312, wherein the first cavity 311 and the second cavity 312 are not in communication; at the same time, the first cavity 311 is in communication with the filtering device 300, and the second cavity 312 is in communication with the pumping device 200; that is, the pickling liquid in the filtering cavity 310 can enter the first cavity 311, and the pickling liquid in the second cavity 312 can enter the pumping device 200.

[0060] The filtering cavity 310 is provided with a liquid inlet device 313 in communication with the first cavity 311 to receive the discharged substances from the pickling device 100, a liquid pumping device 314 in communication with the pumping device 200 and the second cavity 312 to transport the discharged substances from the second cavity 312 to the pumping device 200, and a liquid outlet device 315 in communication with the second cavity 312.

[0061] In some embodiments, the first chamber 311 is provided with a liquid inlet device 313, wherein the liquid inlet device 313 is in communication with a pipe, thereby in communication with the pickling device 100, so that the pickling solution in the pickling device 100 can enter the first chamber 311 through the liquid inlet device 313. In some specific embodiments, the liquid inlet device 313 comprises a liquid inlet pipe and a valve arranged on the liquid inlet pipe, by controlling the valve, the substance (pickling solution and solid substance of certain particle size entrained) in the pickling device can enter the first chamber 311. During the process of liquid inlet, the liquid outlet device 313 arranged on the second chamber 312 is controlled to be closed until the pickling solution fills the second chamber 312, and fills part of the first chamber 311 or fills the first chamber 311, and the solid substance entrained is intercepted by the filter cartridge 340 arranged on the partition plate 330. The time of closing the liquid outlet device 313 depends on the time of the solid substance being completely decomposed in the filter chamber 310, or the time of the particles formed by the decomposition not affecting the service life of the pumping device 200.

[0062] In some embodiments, the second chamber 312 is provided with a liquid outlet device 314, wherein the liquid outlet device 314 is in communication with a pipe, thereby in communication with the pumping device 200, so that the pickling solution in the second chamber 312 can enter the pumping device 200 through the liquid outlet device 314. In some specific embodiments, the liquid outlet device 314 comprises a liquid outlet pipe and a valve arranged on the liquid outlet pipe, by controlling the valve to be opened and controlling the pumping device 200 to be started, the liquid substance in the filter chamber 310 can be discharged from the filter chamber 310.

[0063] In some embodiments, the second chamber 312 is provided with a liquid outlet device 315, which is used to discharge the pickling solution in the second chamber 312, and since the second chamber 312 is at the bottom of the first chamber 311, when the liquid outlet device 315 discharges, it can simultaneously discharge the liquid in the second chamber 312 and the first chamber 311. More specifically, during the process of liquid inlet into the filter chamber 310 through the liquid inlet device 313 and liquid outlet from the filter chamber 310 through the liquid outlet device 314, the liquid outlet device 315 is in a normally closed state. When it is considered that the pickling solution entering the filter chamber 310 is not sufficient to effectively decompose the solid substance in the filter chamber 310, the liquid outlet device 315 is closed after the pickling solution in the filter chamber 310 is discharged through the liquid outlet device 315, and then the new pickling solution is provided into the filter chamber 310 through the liquid inlet device 313 of the pickling device 100.

[0064] In some more specific embodiments, a valve is arranged at the liquid outlet device 315 to maintain the normally closed state of the liquid outlet device 315.

[0065] In some embodiments, the partition plate 330 is provided with one, for example Figure 2 as shown.

[0066] In some more specific embodiments, the filter cartridge 340 is arranged on the partition plate 330. Specifically, the arrangement can be detachable connection or fixed connection; when the filter cartridge 340 is detachably connected with the partition plate 330, a mounting hole can be formed on the partition plate 330, and the filter cartridge 340 is clamped or bolted and fixed in the mounting hole; when the filter cartridge 340 is fixedly connected with the partition plate 330, preferably, the filter cartridge 340 can be filled with other filter materials for replacement of the filter materials.

[0067] Further, the filter cartridge 340 can be provided with one or more; when the filter cartridge 340 is provided with multiple, the multiple filter cartridges 340 are distributed at intervals on the partition plate 330. More specifically, the multiple filter cartridges 340 are uniformly distributed on the partition plate 330. In the present embodiment, the filter cartridge 340 is provided with at least two, and the filter cartridge 340 provided with two is taken as an example.

[0068] The filter cartridge 340 communicates the first cavity 311 and the second cavity 312, and the pickling solution in the first cavity 311 is filtered by the filter cartridge 340 when passing through the second cavity 312, and is fully contacted with the filter cartridge 340 and decomposed, thereby reducing the possibility of the material in the pickling solution entering the pumping device 200 and causing damage to the pumping device 200.

[0069] In some embodiments, the filter cartridge 340 is filled with filter materials.

[0070] In some embodiments, the filter cartridge 340 is provided with a filter screen.

[0071] In the present embodiment, the filter cartridge 340 is preferably provided with a filter screen. Further, the filter screen is preferably 20 mesh. In addition, the filter screen can be 10 mesh, 30 mesh or 40 mesh, etc., and the mesh number of the filter screen can be selected according to the actual situation in the use process, as necessary to intercept the solid substances entering the first cavity 310.

[0072] In a specific embodiment, the plate material and the pipe material in the filtering device 300 are acid-resistant materials. Specifically, the side wall of the filtering cavity 310 and the filter cartridge 340 are acid-resistant materials.

[0073] In a more specific embodiment, the acid-resistant material can be polytetrafluoroethylene (PTFE), polypropylene (PP), high-density polyethylene (HDPE), chlorinated polyvinyl chloride (CPVC) or polyvinylidene fluoride (PVDF), etc. In the present embodiment, the acid-resistant material is preferably polyvinylidene fluoride (PVDF).

[0074] In some embodiments, referring to Figure 3 , Figure 4 and Figure 5The plurality of baffle plates 330 are arranged in sequence along the axial direction of the filter cavity 310 to divide the second cavity 312 into a plurality of sub-cavities.

[0075] In some embodiments, the plurality of baffle plates 330 are arranged in sequence along the axial direction of the filter cavity 310 to divide the second cavity 312 into a plurality of sub-cavities.

[0076] In some more specific embodiments, referring to Figure 3 The plurality of baffle plates 330 are arranged in a stepped manner, with the baffle plate 330 at one edge facing the baffle plate 330 at the other edge, and the horizontal height rising or falling in sequence.

[0077] In some more specific embodiments, referring to Figure 4 The plurality of baffle plates 330 are arranged in a stepped manner, with the baffle plate 330 at one edge facing the baffle plate 330 at the other edge, and the horizontal height rising first and then falling, or falling first and then rising in sequence.

[0078] In some more specific embodiments, referring to Figure 5 The baffle plates 330 arranged in sequence have the same horizontal height.

[0079] In some embodiments, at least one filter cartridge 340 is arranged on each baffle plate 330. One filter cartridge 340, or two filter cartridges 340, or more filter cartridges 340 can be arranged on each baffle plate 330. Specifically, the number of filter cartridges 340 on each baffle plate 330 can be the same or different, which is not limited herein.

[0080] The filter device 300 further comprises an exhaust device 320, referring to Figure 2 The exhaust device 320 is arranged in the filter cavity 310 and communicates the inside and outside of the filter cavity 310 to exhaust the gas in the filter cavity 310. In some embodiments, the exhaust device 320 comprises an exhaust pipe and a valve, wherein the exhaust pipe communicates with the filter cavity 310, and the valve is arranged in the exhaust pipe to control the opening and closing of the exhaust pipe. More specifically, the exhaust pipe is arranged at the top of the filter cavity 310 and will not carry out pickling liquid during the exhaust process.

[0081] Referring to Figure 1 , Figure 6 and Figure 7 The anticorrosion isolation device 400 is movably arranged on the inner wall of the pickling device 100 to close or open the liquid inlet 111. The anticorrosion isolation device 400 comprises a door body 410 movably arranged on the inner wall of the pickling device 100.

[0082] In some embodiments, the door body 410 moves along the direction parallel to the inner wall of the pickling cavity 110.

[0083] In the present embodiment, the door body 410 moves along the direction parallel to the inner wall of the pickling cavity 110; during the movement, the door body 410 opens or closes the liquid inlet 111 to enable the pickling liquid to enter the pickling cavity 110 or stop entering the pickling cavity 110.

[0084] The guide rail assembly 450 is arranged on the opposite sides of the liquid inlet 111, and the door body 410 is slidingly arranged on the guide rail assembly 450 to close or open the liquid inlet 111.

[0085] In some embodiments, the inner wall of the pickling cavity 110 is provided with the guide rail assembly 450, and the door body 410 is connected to the guide rail assembly 450 and can slide along the guide rail assembly 450.

[0086] In some more specific embodiments, the guide rail assembly 450 includes two guide rails 451, which constitute the guide rail assembly, and the two guide rails 451 are arranged on the opposite sides of the liquid inlet 111; and the arrangement mode can be clamping or bolt fixing, etc., and in the present embodiment, the bolt fixing mode of the guide rail 451 is preferentially selected to be fixedly arranged on the inner wall of the pickling cavity 110.

[0087] The anti-corrosion isolation device 400 further includes a driving mechanism 420 arranged on the inner wall of the pickling device 100 and located above the door body 410, for providing power. In some embodiments, the driving mechanism 420 is selected as a pneumatic cylinder; more specifically, the driving mechanism 420 is selected as a rodless pneumatic cylinder.

[0088] The anti-corrosion isolation device 400 further includes a transmission member 430 connected to the driving mechanism 420 and the door body 410, respectively, so that the driving mechanism 420 drives the door body 410 to move along the extension direction of the guide rail assembly 450 through the transmission member 430. In some embodiments, one end of the transmission member 430 is connected to the driving mechanism 420, and the other end is connected to the door body 410; when the driving mechanism 420 is started, the transmission member 430 is driven to move, and the door body 410 is driven to move by the transmission member 430, so that the door body 410 slides on the guide rail 451 to close or open the liquid inlet 111.

[0089] In some more specific embodiments, the transmission member 430 includes a connecting plate 431 and a guide rod 432, wherein the connecting plate 431 and the guide rod 432 are fixedly connected; the connecting plate 431 is fixedly connected to the driving mechanism 420, and the mode of the fixed connection is not limited herein, as long as the two connected parts do not shake; the guide rod 432 is fixedly connected to the door body 410, and the mode of the fixed connection is not limited herein, as long as the two connected parts do not shake.

[0090] In some embodiments, the guide rod 432 is provided with at least two, and here two guide rods 432 are taken as an example, the two guide rods 432 are parallel to each other, and both of the two guide rods 432 are fixedly connected to the door body 410 and the connecting plate 431. In the movement process of the door body 410, the driving mechanism 420 drives the connecting plate 431 to move, so as to drive the guide rod 432 to move, and drive the door body 410 to move.

[0091] In some embodiments, the connecting plate 431 is made of PVC material.

[0092] In some specific embodiments, the guide rod 432 is made of transparent PVC material.

[0093] In some specific embodiments, the door body 410 is made of PTFE material, and the guide rail is made of PTFE material.

[0094] The anti-corrosion isolation device 400 further comprises a protection box 440 arranged on the inner wall of the pickling device 100.

[0095] In some embodiments, the protection box 440 is arranged on the inner wall of the pickling cavity 110.

[0096] In some embodiments, the protection box 440 forms a space for placing devices inside, and the protection box 440 is fixedly arranged in the pickling cavity 110, and the fixing mode can be adhesion, welding or bolt fixing, etc., which is not limited here, and the protection box 440 is mainly prevented from being separated from the side wall of the pickling cavity 110.

[0097] In some embodiments, the end surface of the protection box 440 attached to the side wall of the pickling cavity 110 is arranged in an open manner, so that the protection box 440 and the side wall of the pickling cavity 110 form a space for placing devices inside, and the protection box 440 is fixedly arranged in the pickling cavity 110, and the fixing mode can be adhesion, welding or bolt fixing, etc., which is not limited here, and the protection box 440 is mainly prevented from being separated from the side wall of the pickling cavity 110.

[0098] In some embodiments, the driving mechanism 420 is arranged inside the protection box 440, so that the pickling liquid does not contact the driving mechanism 420, thereby reducing the corrosion of the pickling liquid to the driving mechanism 420.

[0099] In some embodiments, the transmission member 430 is arranged in a dynamic sealing manner in the protection box 440 and is connected with the door body 410. Specifically, a part of the transmission member 430 is arranged inside the protection box 440 and connected with the driving mechanism 420 inside the protection box 440, and the other part is arranged outside the protection box 440 and connected with the door body 410; so that the connection part of the protection box 440 and the transmission member 430 is sealed during the movement of the transmission member 430, so that the pickling liquid cannot enter the inside of the protection box 440.

[0100] In some more specific embodiments, the guide rod 432 and the protection box 440 are connected in a dynamic sealing manner. Specifically, the connecting plate 431 is arranged inside the protection box 440, one end of the guide rod 432 is connected with the connecting plate 431 inside the protection box 440, and the other end is connected with the door body 410 outside the protection box 440, so that the connection between the guide rod 432 and the transmission member 430 is kept sealed to prevent the pickling liquid from entering the inside of the protection box 440.

[0101] The protection box 440 is provided with an air inlet pipe 441 which is communicated with the inside of the protection box 440 to provide air or inert gas into the protection box 440 to isolate the acid gas from entering the protection box 440. In some embodiments, one end of the air inlet pipe 441 is fixedly arranged on the side wall of the protection box 440 and is communicated with the inside of the protection box 440, and the other end is used to be connected with a gas supply device which is used to provide air or inert gas into the air inlet pipe 441 so that the air or inert gas enters the protection box 440 through the air inlet pipe 441 to isolate the acid gas from entering the protection box 440.

[0102] The driving mechanism 420 is also electrically connected with a driving circuit, and the protection box 440 is provided with a wiring pipe 442 through which the driving circuit is electrically connected with the driving mechanism 420. In some embodiments, one end of the wiring pipe 442 is fixedly arranged on the side wall of the protection box 440 and is communicated with the inside of the protection box 440, and the wiring pipe 442 is used to pass the driving circuit, one end of the driving circuit is connected with the driving mechanism 420 inside the protection box 440 through the wiring pipe 442 to facilitate the starting of the driving mechanism 420, and the other end of the driving circuit is used to be connected with a power supply device which is used to supply power to provide electric energy for the driving mechanism 420.

[0103] Since the reaction of the pickling liquid with the solid substances in the filtering device 300 releases heat, the discharged pickling liquid also has a certain temperature. If this part of the pickling liquid is directly returned to the pickling device 100 when the temperature is too high to act on the materials which have not been completely cleaned, such as silicon wafers or quartz pieces, it will intensify the intensity of the pickling decomposition reaction and is not conducive to safety. In some embodiments, the cleaning device further comprises a cooling device 500, which is described with reference to Figure 1 The cooling device 500 is arranged between the pickling device 100 and the pumping device 200 and is respectively communicated with the liquid inlet 111 and the pumping device 200 to cool the pickling liquid transported by the pumping device 200 and then return it to the pickling device 100 through the liquid inlet 111.

[0104] In some embodiments, the cooling device 500 comprises a cooling tank which is filled with a cooling liquid. The cooling liquid can be water or other liquids, which are not limited herein, and the temperature of the cooling liquid is lower than that of the pickling liquid in the pipeline, so that the pickling liquid in the pipeline can be cooled.

[0105] In some embodiments, the pipe between the pumping device 200 and the liquid inlet 111 passes through the cooling device 500. Specifically, the pipe between the pumping device 200 and the liquid inlet 111 passes through the cooling tank to complete the cooling.

[0106] The cleaning device further comprises a heated water washing device 600; the heated water washing device 600 comprises a water tank body 610 to wash the materials to be cleaned. In some embodiments, the water tank body 610 is connected to the pickling device 100 to wash the materials before entering the pickling device 100. In some specific embodiments, the water tank body 610 is filled with water, and the materials are washed before entering the pickling device 100. In some more specific embodiments, the material of the water tank body 610 is a corrosion-resistant material.

[0107] In some embodiments, a protective shell is arranged outside the water tank body 610 for heat insulation and excess water vapor isolation. Specifically, the protective shell is made of a corrosion-resistant material.

[0108] In some embodiments, a temperature control probe and a floating ball are arranged in the water tank body 610. Specifically, the material of the temperature control probe and the floating ball contacting the pure water is also PVDF and PFA, both of which are thermoplastic resins, which can ensure that there is no metal ion pollution to the pure water, and the PVDF body can ensure that the heating water tank body 610 does not deform under long-term 80℃ working conditions.

[0109] A heating device is arranged in the water tank body 610 to heat the liquid in the water tank body 610. In some embodiments, the heating device is a heating plate 680, which is arranged below the water tank body 610, and the heating plate 680 is wrapped with a protective shell to meet the process cleaning requirements.

[0110] In some embodiments, the corrosion-resistant material can be selected from polytetrafluoroethylene (PTFE), polypropylene (PP), high-density polyethylene (HDPE), chlorinated polyvinyl chloride (CPVC), or polyvinylidene fluoride (PVDF), etc.

[0111] In some embodiments, the water tank body 610 is made of PVDF material.

[0112] In some embodiments, the protective shell is made of PTFE material.

[0113] In some more specific embodiments, a suitable plate-type heating plate 680 is selected according to the installation space, and the heating wire inside the heating plate 680 needs to be wrapped with a PFA tube.

[0114] More specifically, the power of the heating plate 680 is 12KW, which can meet the requirement of heating 50L of pure water in the tank from 20℃ to 60℃ within 10 minutes.

[0115] In one embodiment, the RCA device is used to manufacture the water tank body 610 made of PVDF material, and the heating plate 680 is elevated and placed.

[0116] The bottom of the water tank body 610 is provided with a leakage receiving box 620. The water tank body 610 is provided with a liquid leakage pipe 630, one end of which is communicated with the inside of the water tank body 610, and the other end is communicated with the leakage receiving box 620, so that the liquid in the water tank body 610 is transferred to the leakage receiving box 620 in the form of overflow.

[0117] In some embodiments, the liquid leakage pipe 630 is vertically arranged and penetrates the bottom wall of the water tank body 610. The connection between the liquid leakage pipe 630 and the bottom wall of the water tank body 610 is sealed, so that the connection will not leak liquid. Specifically, the top of the liquid leakage pipe 630 is located inside the water tank body 610, and the top of the liquid leakage pipe 630 is the highest point of the water level in the water tank body 610; the bottom of the liquid leakage pipe 630 is located outside the water tank body 610 and is communicated with the leakage receiving box 620. When the liquid in the water tank body 610 reaches the highest position, that is, the top of the liquid leakage pipe 630, it enters the liquid leakage pipe 630 and enters the leakage receiving box 620 through the liquid leakage pipe 630, that is, it is transferred to the leakage receiving box 620 in the form of overflow.

[0118] In one embodiment, referring to Figure 8 In one embodiment, the RCA device is used to manufacture the PP base of the water tank body 610 and the leakage receiving box 620. Excess pure water in the water tank body 610 can be discharged through the liquid leakage pipe 630 to the leakage receiving box 620. At the same time, the protective shell is made of transparent PVC material and is sleeved on the outside of the water tank body 610 for heat insulation and moisture isolation.

[0119] In some embodiments, the water washing device 600 further comprises a water inlet pipe 640 and a circulating assembly, the circulating assembly comprising a hot water outlet pipe 650 communicated with the water tank body 610, and a liquid supply pump 670 having two ends communicated with the hot water outlet pipe 650 and the water tank body 610, respectively.

[0120] In some embodiments, the water inlet pipe 640 is communicated with the water tank body 610 for providing washing water to the water tank body 610.

[0121] In some embodiments, the water inlet pipe 640, the hot water outlet pipe 650 and the waste water discharge pipe 660 are arranged at the bottom of the water tank body 610. Specifically, according to the actual use, the water inlet pipe 640, the hot water outlet pipe 650 and the waste water discharge pipe 660 arranged at the bottom of the water tank body 610 are all communicated with the inside of the water tank body 610, and corresponding valves are arranged on the water inlet pipe 640, the hot water outlet pipe 650 and the waste water discharge pipe 660 to control the opening or closing of the corresponding pipes.

[0122] In some embodiments, the pipeline of the liquid supply pump 670 is in communication with the hot water outlet pipe 650, which can accelerate the discharge of liquid; in this process, cold water or normal temperature water enters the water tank body 610, is heated by the heating plate 680, and is discharged through the hot water outlet pipe 650, at the same time, the water tank body 610 is continuously pumped back by the liquid supply pump 670, and is continuously heated by the heating plate 680, so as to form a cycle, until the water temperature in the water tank body 610 reaches the required temperature; compared with the prior art of uniformly heating the water in the water tank to a fixed temperature after injecting cold water, the time is saved, the heating efficiency is high, and it is suitable for large flow of hot water. In addition, such arrangement can also periodically heat a small amount of hot water, thereby improving the heating efficiency.

[0123] In some embodiments, the liquid supply pump 670 is sleeved with the hot water outlet pipe 650 to pressurize the hot water.

[0124] In some embodiments, the liquid supply pump 670 is a PVDF diaphragm pump, and the diaphragm part is PTFE.

[0125] In some embodiments, the water inlet pipe 640 needs to be PVDF at the welded part with the water tank body 610, and the remaining pipeline can use clean PVC.

[0126] In some more specific embodiments, a cleaning device without the filter device 300 is used as a control group, wherein the same type of circulating pump is used for water circulation in the same machine, and the filter cartridge 340 is not arranged, and only a filter screen is arranged in the water tank. Every 1-2 months of continuous operation, the pump head of the PVDF circulating pump is damaged to different degrees, and the circulating pump needs to be replaced. However, through the filter device 300 in the present application, the circulating pump can continuously work for 6 months without damage.

[0127] The implementation principle of the cleaning device of the present application is to arrange the filter device 300 on the pipeline between the pickling device 100 and the pumping device 200, so as to filter the pickling liquid in the pickling device 100, so that the pickling liquid entering the pumping device 200 is filtered pickling liquid. In this process, the material slag entering the filter device 300 with the cleaning liquid can be intercepted and reacted, no gas is mixed in the pumping device 200 during the operation of the pumping device 200, long-term use is ensured, and the possibility of damage to the impeller of the circulating pump caused by the small particle size of the material slag entering the circulating pump with the pickling liquid is reduced.

[0128] Although the embodiments of the present application have been described in detail in the above, it is obvious for those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes all belong to the scope and spirit of the present application described in the claims. Moreover, the present application described herein can have other embodiments, and can be implemented or realized in various ways.

Claims

1. A cleaning apparatus, characterized by, The application relates to an acid pickling device and a pickling method. The acid pickling device comprises an acid pickling device (100) for placing acid pickling liquid and material to be cleaned, a filtering device (300) and a pumping device (200). The filtering device (300) comprises a filtering cavity (310) provided with a partition plate (330) to form a first cavity (311) communicated with the outlet of the acid pickling device (100) and a second cavity (312) communicated with the pumping device (200). The partition plate (330) is provided with a plurality of filter cartridges (340) communicated with the first cavity (311) and the second cavity (312) to intercept solid substances entering the first cavity (311). The filtering cavity (310) is provided with a liquid inlet device (313) communicated with the first cavity (311) to receive substances discharged from the acid pickling device (100), a liquid pumping device (314) communicated with the pumping device (200) and the second cavity (312) to transport substances discharged from the second cavity (312) to the pumping device (200), and a liquid outlet device (315) communicated with the second cavity (312).

2. The cleaning apparatus according to claim 1, characterized in that The pumping device (200) is communicated with the acid pickling device (100) through the liquid inlet (111) and communicated with the second cavity (312) through the liquid pumping device (314) to transfer the acid pickling liquid in the second cavity (312) to the acid pickling device (100).

3. The cleaning apparatus according to claim 1, wherein The partition plate (330) is provided with a plurality of partition plates (330) connected in sequence, and at least two of the partition plates (330) have different horizontal heights.

4. The cleaning apparatus according to claim 1, wherein The partition plate (330) is provided with a plurality of partition plates (330) arranged in sequence along the axial direction of the filtering cavity (310) to divide the second cavity (312) into a plurality of sub-cavities, and at least one filter cartridge (340) is arranged on each partition plate (330).

5. The cleaning apparatus according to claim 1, wherein The acid pickling device (100) is provided with an anticorrosion isolation device (400) movably arranged on the inner side wall to close or open the liquid inlet (111). The anticorrosion isolation device (400) comprises a door body (410) movably arranged on the inner wall of the acid pickling device (100), a driving mechanism (420) arranged on the inner wall of the acid pickling device (100) above the door body (410) to provide power, and a guide rail assembly (450) arranged on the opposite sides of the liquid inlet (111), wherein the door body (410) is slidably arranged on the guide rail assembly (450) to close or open the liquid inlet (111). ​ ​ A transmission member (430) is connected to the driving mechanism (420) and the door body (410) respectively, so that the driving mechanism (420) drives the door body (410) to move along the extension direction of the guide rail assembly (450) through the transmission member (430).

6. The cleaning apparatus of claim 5, wherein The anticorrosion isolation device (400) further comprises: A protection box (440) is arranged on the inner wall of the pickling device (100); The driving mechanism (420) is arranged in the protection box (440); The transmission member (430) is arranged in the protection box (440) in a dynamic sealing manner and is connected to the door body (410).

7. The cleaning apparatus of claim 6, wherein An air inlet pipe (441) is arranged on the protection box (440) and is communicated with the inside of the protection box (440) to provide air or inert gas into the protection box (440) to isolate the acid gas from entering the protection box (440).

8. The cleaning apparatus of claim 6, wherein The driving mechanism (420) is further electrically connected with a driving circuit, and a wiring pipe (442) is arranged on the protection box (440), and the driving circuit is electrically connected to the driving mechanism (420) through the wiring pipe (442).

9. The cleaning apparatus of claim 8, wherein, Further comprising a heated water washing device (600); The heated water washing device (600) comprises: A water tank body (610) is arranged to wash the material to be cleaned; A heating device is arranged in the water tank body (610) to heat the liquid in the water tank body (610); A water inlet pipe (640) is communicated with the water tank body (610) to provide cleaning water to the water tank body (610); A circulating assembly comprises a hot water outlet pipe (650) communicated with the water tank body (610), and a liquid supply pump (670) having two ends communicated with the hot water outlet pipe (650) and the water tank body (610) respectively.

10. The cleaning apparatus of claim 9, wherein, A leakage receiving box (620) is arranged at the bottom of the water tank body (610); a liquid leakage pipe (630) is arranged on the water tank body (610), one end of the liquid leakage pipe (630) is communicated with the inside of the water tank body (610), and the other end is communicated with the leakage receiving box (620), so that the liquid in the water tank body (610) is transferred to the leakage receiving box (620) in the form of overflow.

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