Control circuit of pulse power supply

Abstract

The utility model relates to the technical field of pulse power supplies, and discloses a control circuit of a pulse power supply, which comprises a pre-stage power supply, a positive pulse module, a negative pulse module and a pulse power supply control board, and is characterized in that the pre-stage power supply is respectively connected with a power supply input end of the positive pulse module and a power supply input end of the negative pulse module; the pulse power supply control board is respectively connected with the control end of the positive pulse module and the control end of the negative pulse module; the pulse power supply output end of the positive pulse module and the pulse power supply output end of the negative pulse module are connected in parallel with the two ends of a load. By controlling different on-off states of the positive pulse module and the negative pulse module, the high-precision high-speed pulse power supply can work in multiple modes of direct current, single pulse and positive and negative double pulses.

Description

TECHNICAL FIELD

[0001] The utility model relates to pulse power supply technical field, concretely relates to a control circuit of pulse power supply. BACKGROUND

[0002] Due to the requirement of wafer pulse plating process, TGV copper plating process and laboratory pulse process research and development industry to pulse power supply is higher, for example, pulse power supply can realize direct current, single pulse and positive and negative double pulse multiple mode work. However, the conventional pulse power supply does not have the above-mentioned multiple mode work, and it is difficult to meet the market demand. INVENTION CONTENTS

[0003] Therefore, the utility model provides a control circuit of pulse power supply to solve the problem that the conventional pulse power supply does not have multiple mode work.

[0004] The utility model provides a control circuit of pulse power supply, the control circuit includes: front stage power supply, positive direction pulse module, negative direction pulse module and pulse power supply control board, wherein,

[0005] The front stage power supply is connected with the power input end of the positive direction pulse module and the power input end of the negative direction pulse module respectively;

[0006] The pulse power supply control board is connected with the control end of the positive direction pulse module and the control end of the negative direction pulse module respectively;

[0007] The pulse power supply output end of the positive direction pulse module and the pulse power supply output end of the negative direction pulse module are all connected in parallel at both ends of the load.

[0008] The utility model provides a control circuit of pulse power supply, through the control different switch state of positive direction pulse module, negative direction pulse module, high precision high speed pulse power supply can realize direct current, single pulse and positive and negative double pulse multiple mode work.

[0009] In an alternative embodiment, the positive direction pulse module includes: positive direction buck circuit and positive direction commutation circuit, wherein,

[0010] The first input end of the positive direction buck circuit is connected with the positive pole of the front stage power supply, the second input end of the positive direction buck circuit is connected with the negative pole of the front stage power supply, the first output end of the positive direction buck circuit is connected with the first end of the positive direction commutation circuit, the second end of the positive direction commutation circuit is connected with the first end of the load, the second output end of the positive direction buck circuit is connected with the second end of the load, the control end of the positive direction buck circuit and the control end of the positive direction commutation circuit are connected with the pulse power supply control board.

[0011] In an alternative embodiment, the positive pulse module further comprises a positive regulating circuit, a first end of the positive regulating circuit is connected with the second output end of the positive buck circuit, a second end of the positive regulating circuit is connected with the second end of the load, and a control end of the positive regulating circuit is connected with the pulse power supply control board.

[0012] In an alternative embodiment, the positive pulse module further comprises a positive sampling circuit, a first end of the positive sampling circuit is connected with the second end of the positive regulating circuit, and a second end of the positive sampling circuit is connected with the second end of the load.

[0013] In an alternative embodiment, the positive buck circuit comprises a first transistor and a second transistor, wherein,

[0014] a first end of the first transistor is connected with the positive pole of the front-stage power supply, a second end of the first transistor is connected with the first end of the second transistor and the first end of the positive commutation circuit respectively, and a control end of the first transistor is connected with the pulse power supply control board;

[0015] a second end of the second transistor is connected with the negative pole of the front-stage power supply and the first end of the positive regulating circuit respectively, and a control end of the second transistor is connected with the pulse power supply control board.

[0016] In an alternative embodiment, the negative pulse module comprises a negative buck circuit and a negative commutation circuit, wherein,

[0017] a first input end of the negative buck circuit is connected with the positive pole of the front-stage power supply, a second input end of the negative buck circuit is connected with the negative pole of the front-stage power supply, a first output end of the negative buck circuit is connected with the first end of the negative commutation circuit, a second end of the negative commutation circuit is connected with the second end of the load, a second output end of the negative buck circuit is connected with the first end of the load, and a control end of the negative buck circuit and a control end of the negative commutation circuit are both connected with the pulse power supply control board.

[0018] In an alternative embodiment, the negative pulse module further comprises a negative regulating circuit, a first end of the negative regulating circuit is connected with the second output end of the negative buck circuit, a second end of the negative regulating circuit is connected with the first end of the load, and a control end of the negative regulating circuit is connected with the pulse power supply control board.

[0019] In an alternative embodiment, the negative pulse module further comprises a negative sampling circuit, a first end of the negative sampling circuit being connected with a second end of the negative adjusting circuit, and a second end of the negative sampling circuit being connected with a first end of a load.

[0020] In an alternative embodiment, the negative buck circuit comprises a third transistor and a fourth transistor, wherein,

[0021] A first end of the third transistor is connected with a positive pole of the front-stage power supply, a second end of the third transistor is connected with a first end of the fourth transistor and a first end of the negative commutation circuit respectively, and a control end of the third transistor is connected with the pulse power supply control board;

[0022] A second end of the fourth transistor is connected with a negative pole of the front-stage power supply and a first end of the negative adjusting circuit respectively, and a control end of the fourth transistor is connected with the pulse power supply control board. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or prior art description. Obviously, the drawings described below are some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0024] Figure 1 is a principle block diagram of a control circuit of a pulse power supply according to an embodiment of the present application;

[0025] Figure 2 is a principle block diagram of a control circuit of another pulse power supply according to an embodiment of the present application;

[0026] Figure 3 is a principle block diagram of a control circuit of still another pulse power supply according to an embodiment of the present application;

[0027] Figure 4 is a schematic diagram of a control circuit of a pulse power supply according to an embodiment of the present application;

[0028] Figure 5 is a principle block diagram of a control circuit of still another pulse power supply according to an embodiment of the present application. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described in combination with the drawings in the embodiments of the utility model below. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without creative labor belong to the protection scope of the utility model.

[0030] In the description of the utility model, it needs to be explained that the orientation or position relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like is the orientation or position relationship based on the drawings shown, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as limiting the utility model. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0031] In the description of the utility model, it needs to be explained that, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrally connected; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, or the communication between two elements inside, it can be wireless connection, or wired connection. For the person skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0032] In addition, the technical features involved in the different embodiments of the utility model described below can be combined with each other as long as there is no conflict between them.

[0033] The utility model provides a kind of control circuit of pulse power supply, as shown in Figure 1 It includes: front stage power supply, positive pulse module, negative pulse module and pulse power supply control panel. Wherein, front stage power supply is connected with the power input end of positive pulse module, the power input end of negative pulse module respectively. Pulse power supply control panel is connected with the control end of positive pulse module, the control end of negative pulse module respectively. The pulse power output end of positive pulse module, the pulse power output end of negative pulse module are all shunt in load both ends. Load is not shown in Figure 1 .

[0034] Specifically, the front-stage power supply outputs as a constant voltage source. The forward pulse module and the negative pulse module independently work and can output direct current, single pulse and positive and negative double pulses. For example, when the pulse power supply control board controls the forward pulse module to be turned on and the negative pulse module to be turned off, the front-stage power supply realizes forward direct current output and forward single pulse output after being processed by the forward pulse module. When the pulse power supply control board controls the negative pulse module to be turned on and the forward pulse module to be turned off, the front-stage power supply realizes negative direct current output and negative single pulse output after being processed by the negative pulse module. When the pulse power supply control board controls the forward pulse module and the negative pulse module to be turned on alternately, the front-stage power supply realizes positive and negative double pulse output after being processed by the forward pulse module and the negative pulse module. The pulse power supply control board adopts a high-performance MCU, the current response speed is fast, and the switching time of the forward pulse module and the negative pulse module is short.

[0035] The utility model provides a kind of control circuit of pulse power supply, comprising: front-stage power supply, forward pulse module, negative pulse module and pulse power supply control board, wherein, front-stage power supply is connected with the power input end of forward pulse module, the power input end of negative pulse module respectively;Pulse power supply control board is connected with the control end of forward pulse module, the control end of negative pulse module respectively;The pulse power output end of forward pulse module, the pulse power output end of negative pulse module are all shunt in load both ends.

[0036] In an alternative embodiment, as shown in Figure 2 The forward pulse module includes a forward buck circuit and a forward commutation circuit. The first input end of the forward buck circuit is connected with the positive pole of the front-stage power supply, the second input end of the forward buck circuit is connected with the negative pole of the front-stage power supply, the first output end of the forward buck circuit is connected with the first end of the forward commutation circuit, the second end of the forward commutation circuit is connected with the first end of the load, the second output end of the forward buck circuit is connected with the second end of the load, and the control end of the forward buck circuit and the control end of the forward commutation circuit are connected with the pulse power supply control board. The connection relationship between the pulse power supply control board and the control end of the forward buck circuit and the control end of the forward commutation circuit is not shown in Figure 2 .

[0037] As shown in Figure 2As shown, the negative pulse module comprises a negative buck circuit and a negative commutation circuit. The first input end of the negative buck circuit is connected with the positive pole of the front-stage power supply, the second input end of the negative buck circuit is connected with the negative pole of the front-stage power supply, the first output end of the negative buck circuit is connected with the first end of the negative commutation circuit, the second end of the negative commutation circuit is connected with the second end of the load, the second output end of the negative buck circuit is connected with the first end of the load, and the control end of the negative buck circuit and the control end of the negative commutation circuit are connected with the pulse power supply control board. The connection relationship between the pulse power supply control board and the control end of the negative buck circuit and the control end of the negative commutation circuit is not shown in Figure 2 .

[0038] Specifically, when the pulse power supply control board only controls the positive buck circuit and the positive commutation circuit to be turned on, positive direct current output and positive single pulse output can be realized. When the pulse power supply control board only controls the negative buck circuit and the negative commutation circuit to be turned on, negative direct current output and negative single pulse output can be realized. When the pulse power supply control board controls the positive pulse module and the negative pulse module to be turned on alternately, positive and negative double pulse output can be realized.

[0039] In an alternative embodiment, as shown in Figure 3 , the positive pulse module further comprises a positive adjustment circuit, the first end of the positive adjustment circuit is connected with the second output end of the positive buck circuit, the second end of the positive adjustment circuit is connected with the second end of the load, and the control end of the positive adjustment circuit is connected with the pulse power supply control board. The connection relationship between the control end of the positive adjustment circuit and the pulse power supply control board is not shown in Figure 3 .

[0040] As shown in Figure 3 , the negative pulse module further comprises a negative adjustment circuit, the first end of the negative adjustment circuit is connected with the second output end of the negative buck circuit, the second end of the negative adjustment circuit is connected with the first end of the load, and the control end of the negative adjustment circuit is connected with the pulse power supply control board. The connection relationship between the control end of the negative adjustment circuit and the pulse power supply control board is not shown in Figure 3 .

[0041] Specifically, the pulse power supply control board monitors the voltages across Vout1+ and Vout1- in real time. Based on these voltages, it adjusts the duty cycle of the positive buck circuit, controlling the output voltages across VF+ and VF- of the positive buck circuit, thereby regulating the voltage drop across the positive regulating circuit. Similarly, the pulse power supply control board monitors the voltages across Vout2+ and Vout2- in real time, adjusting the duty cycle of the negative buck circuit based on these voltages, controlling the output voltages across VR+ and VR- of the negative buck circuit, thereby regulating the voltage drop across the negative regulating circuit.

[0042] In one alternative implementation, such as Figure 4 As shown, the forward buck circuit includes a first transistor Q1 and a second transistor Q2. The forward commutation circuit includes a fifth transistor Q5. The forward adjustment circuit includes a sixth transistor Q6. The first terminal of the first transistor Q1 is connected to the positive terminal VIN+ of the preceding power supply. The second terminal of the first transistor Q1 is connected to the first terminals of both the second transistor Q2 and the fifth transistor Q5. The control terminal of the first transistor Q1 is connected to the pulse power supply control board. The second terminal of the second transistor Q2 is connected to the negative terminal VIN- of the preceding power supply and the first terminal of the sixth transistor Q6. The control terminal of the second transistor Q2 is connected to the pulse power supply control board. The connection relationships between the pulse power supply control board and the control terminals of the first transistor Q1, the second transistor Q2, the fifth transistor Q5, and the sixth transistor Q6 are as follows: Figure 4 Not shown in the image.

[0043] like Figure 4 As shown, the negative buck circuit includes a third transistor Q3 and a fourth transistor Q4. The negative commutation circuit includes a seventh transistor Q7. The negative adjustment circuit includes an eighth transistor Q8. The first terminal of the third transistor Q3 is connected to the positive terminal of the preceding power supply. The second terminal of the third transistor Q3 is connected to the first terminals of both the fourth and seventh transistors Q4 and Q7. The control terminal of the third transistor Q3 is connected to the pulse power supply control board. The second terminal of the fourth transistor Q4 is connected to the negative terminal of the preceding power supply and the first terminal of the eighth transistor Q8. The control terminal of the fourth transistor Q4 is connected to the pulse power supply control board. The connection relationships between the pulse power supply control board and the control terminals of the third, fourth, seventh, and eighth transistors Q8 are as follows: Figure 4 Not shown in the image.

[0044] Specifically, when the pulse power control board controls the first transistor Q1, the second transistor Q2, the fifth transistor Q5, and the sixth transistor Q6 to be turned on, and the third transistor Q3, the fourth transistor Q4, the seventh transistor Q7, and the eighth transistor Q8 to be turned off, positive direct current output and positive single pulse output can be realized. When the pulse power control board controls the third transistor Q3, the fourth transistor Q4, the seventh transistor Q7, and the eighth transistor Q8 to be turned on, and the first transistor Q1, the second transistor Q2, the fifth transistor Q5, and the sixth transistor Q6 to be turned off, negative direct current output and negative single pulse output can be realized. When the pulse power control board controls the first transistor Q1, the second transistor Q2, the fifth transistor Q5, the sixth transistor Q6, the third transistor Q3, the fourth transistor Q4, the seventh transistor Q7, and the eighth transistor Q8 to be turned on alternately, positive and negative double pulse output can be realized. The pulse power control board adjusts the output pulse current by controlling the sixth transistor Q6 and the eighth transistor Q8.

[0045] In the embodiment, the first transistor Q1, the second transistor Q2, the third transistor Q3, the fourth transistor Q4, the fifth transistor Q5, and the seventh transistor Q7 are MOS tubes. The sixth transistor Q6 and the eighth transistor Q8 are triodes. The switching frequency of the first transistor Q1, the second transistor Q2, the third transistor Q3, and the fourth transistor Q4 is 100 KHZ. By controlling the duty cycle of the first transistor Q1 and the second transistor Q2 in the positive buck circuit, the voltage drop of the subsequent linear regulator Q6 can be quickly adjusted. Similarly, by controlling the duty cycle of the third transistor Q3 and the fourth transistor Q4 in the negative buck circuit, the voltage drop of the subsequent linear regulator Q8 can be quickly adjusted. When starting, the duty cycle of the first transistor Q1, the second transistor Q2, the third transistor Q3, and the fourth transistor Q4 is set to 100%, and the output voltage of the positive buck circuit and the negative buck circuit is equal to the input voltage of the previous stage, so that the pulse current response time can be quickly improved. After the pulse current is stabilized, the duty cycle of the positive buck circuit and the negative buck circuit is dynamically adjusted to adjust the voltage drop of the subsequent linear regulator, thereby reducing the loss of the linear regulator.

[0046] The pulse power control board drives the commutating MOS tubes Q5 and Q7 to work, and the positive and negative commutation time is shortened to 1 us by the high-performance MCU. The linear regulators Q6 and Q8 are triodes, and the pulse power is connected in series with the linear regulators Q6 and Q8, so that the current ripple can be effectively reduced after linear regulation.

[0047] In an alternative embodiment, as Figure 5As shown in the figure, the positive pulse module further comprises a positive sampling circuit, a first end of the positive sampling circuit is connected with the second end of the positive adjusting circuit, and a second end of the positive sampling circuit is connected with the second end of the load.

[0048] Specifically, as shown in the figure, the positive sampling circuit comprises a high-precision resistor R1, and the negative sampling circuit comprises a high-precision resistor R2. Figure 4 As shown in the figure, the positive sampling circuit comprises a high-precision resistor R1, and the negative sampling circuit comprises a high-precision resistor R2.

[0049] Although the embodiments of the present application are described in conjunction with the drawings, various modifications and changes can be made by those skilled in the art without departing from the spirit and scope of the present application, and such modifications and changes fall within the scope defined by the appended claims.

Claims

1. A control circuit for a pulse power supply, characterized in that, The control circuit includes: a pre-stage power supply, a positive pulse module, a negative pulse module, and a pulse power control board, wherein... The pre-amplifier is connected to the power input terminal of the positive pulse module and the power input terminal of the negative pulse module, respectively. The pulse power control board is connected to the control terminal of the positive pulse module and the control terminal of the negative pulse module, respectively. The pulse power output terminals of the positive pulse module and the negative pulse module are both connected in parallel across the load.

2. The control circuit for the pulse power supply according to claim 1, characterized in that, The positive pulse module includes: a positive buck circuit and a positive commutation circuit, wherein... The first input terminal of the forward buck circuit is connected to the positive terminal of the pre-amplifier power supply, the second input terminal of the forward buck circuit is connected to the negative terminal of the pre-amplifier power supply, the first output terminal of the forward buck circuit is connected to the first terminal of the forward commutation circuit, the second terminal of the forward commutation circuit is connected to the first terminal of the load, the second output terminal of the forward buck circuit is connected to the second terminal of the load, and the control terminals of the forward buck circuit and the forward commutation circuit are both connected to the pulse power supply control board.

3. The control circuit for the pulse power supply according to claim 2, characterized in that, The positive pulse module further includes a positive adjustment circuit, the first end of which is connected to the second output end of the positive buck circuit, the second end of which is connected to the second end of the load, and the control end of which is connected to the pulse power control board.

4. The control circuit for the pulse power supply according to claim 3, characterized in that, The positive pulse module further includes a positive sampling circuit, wherein a first terminal of the positive sampling circuit is connected to a second terminal of the positive adjustment circuit, and a second terminal of the positive sampling circuit is connected to a second terminal of the load.

5. The control circuit for the pulse power supply according to claim 3, characterized in that, The forward buck circuit includes: a first transistor and a second transistor, wherein, The first terminal of the first transistor is connected to the positive terminal of the pre-stage power supply, the second terminal of the first transistor is connected to the first terminal of the second transistor and the first terminal of the forward commutation circuit, and the control terminal of the first transistor is connected to the pulse power supply control board. The second terminal of the second transistor is connected to the negative terminal of the pre-stage power supply and the first terminal of the positive adjustment circuit, respectively, and the control terminal of the second transistor is connected to the pulse power supply control board.

6. The control circuit for the pulse power supply according to claim 1, characterized in that, The negative pulse module includes: a negative buck circuit and a negative commutation circuit, wherein... The first input terminal of the negative buck circuit is connected to the positive terminal of the pre-amplifier power supply, the second input terminal of the negative buck circuit is connected to the negative terminal of the pre-amplifier power supply, the first output terminal of the negative buck circuit is connected to the first terminal of the negative commutation circuit, the second terminal of the negative commutation circuit is connected to the second terminal of the load, the second output terminal of the negative buck circuit is connected to the first terminal of the load, and the control terminals of the negative buck circuit and the negative commutation circuit are both connected to the pulse power supply control board.

7. The control circuit for the pulse power supply according to claim 6, characterized in that, The negative pulse module further includes a negative adjustment circuit, the first end of which is connected to the second output end of the negative buck circuit, the second end of which is connected to the first end of the load, and the control end of which is connected to the pulse power control board.

8. The control circuit for the pulse power supply according to claim 7, characterized in that, The negative pulse module further includes a negative sampling circuit, the first end of which is connected to the second end of the negative adjustment circuit, and the second end of which is connected to the first end of the load.

9. The control circuit for the pulse power supply according to claim 7, characterized in that, The negative buck circuit includes: a third transistor and a fourth transistor, wherein, The first terminal of the third transistor is connected to the positive terminal of the pre-amplifier power supply, the second terminal of the third transistor is connected to the first terminal of the fourth transistor and the first terminal of the negative commutation circuit, and the control terminal of the third transistor is connected to the pulse power supply control board. The second terminal of the fourth transistor is connected to the negative terminal of the pre-stage power supply and the first terminal of the negative adjustment circuit, respectively, and the control terminal of the fourth transistor is connected to the pulse power supply control board.

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