PCW system integrated water supply valve group device for semiconductor production

Abstract

The utility model provides a PCW system integrated water supply valve group device for semiconductor production, which comprises a pipe joint, a movable joint A, a ball valve, a detection device, a pressure reducing valve and a movable joint D. The pipe joint is in threaded connection with the movable joint A through a joint nut A. The other end of the movable joint A is connected with the ball valve, and the other end of the ball valve is connected with the detection device. The other end of the detection device is connected with a movable joint B, the movable joint B is connected with a movable joint C I through a joint nut B, the other end of the movable joint C I is in threaded connection with a pressure reducing valve, the other end of the pressure reducing valve is in threaded connection with a movable joint C II, and the other end of the movable joint C II is in threaded connection with a movable joint D through a joint nut C. According to the utility model, the installation is rapid and convenient, the construction period is shortened, the fool-proof effect is better, all the components are connected in a threaded welding manner, the pipeline combination points are reduced, the hidden danger of pipeline leakage is greatly reduced, and the space use is reduced through the integrated modular design.

Description

TECHNICAL FIELD

[0001] The utility model relates to PCW system technical field, concretely is a kind of PCW system integrated water supply valve group device for semiconductor production. BACKGROUND

[0002] At present, semiconductor industry develops rapidly, and the upgrading of semiconductor process precision production equipment is also faster and faster, and the installation and reconstruction of corresponding semiconductor precision production equipment are also more and more.

[0003] And in the process of producing chip, PCW system plays a crucial role as cooling circulation system, and at present, various valve groups of PCW system of semiconductor factory are completed on site, and the progress plan is difficult to control, the installation and deployment period is long, the proportion of on-site construction in the whole project time is large, and there are more pipeline connection points, and the leakage risk is large. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of PCW system integrated water supply valve group device for semiconductor production to solve the problems in the above background.

[0005] The technical scheme of the utility model is realized as follows:

[0006] A kind of PCW system integrated water supply valve group device for semiconductor production, including pipe joint, live joint A, ball valve, detection device, pressure reducing valve and live joint D, the pipe joint is connected by joint nut A with live joint A by screw thread, the other end of live joint A is connected with ball valve, the other end of ball valve is connected with detection device, the other end of detection device is connected with live joint B, live joint B is connected with live joint C one by joint nut B, the other end of live joint C one is connected with pressure reducing valve by screw thread, the other end of pressure reducing valve is connected with live joint C two by screw thread, the other end of live joint C two is connected with live joint D by joint nut C by screw thread.

[0007] Further, the structure of the detection device is tee, the base is welded on the top channel of the detection device, the pressure and temperature double display table is connected with the base by screw thread, and anaerobic glue is applied when the base and the pressure and temperature double display table are connected by screw thread.

[0008] Further, the pressure table is connected with the pressure reducing valve by screw thread on the top of the pressure reducing valve, and anaerobic glue is applied when the pressure reducing valve and the pressure table are connected by screw thread.

[0009] Further, the ball valve is stainless steel three-piece ball valve.

[0010] Further, the connection mode of the detection device and the union joint B is socket welding.

[0011] Further, the connection mode of the detection device and the union joint B is socket welding.

[0012] Further, the union joint A and the union joint B are further provided with sealing rings A and B, and the union joint C and the union joint D are further provided with sealing rings C.

[0013] Further, the union joint C and the union joint D are further provided with sealing rings C.

[0014] The utility model discloses a ball valve, pressure reducing valve, detection device, pressure temperature double display table, pressure table carry out integrated modular design, when installing, connect with main pipeline through joint, and installation is quick and convenient, and the construction period is shortened, and the prevention is dull effectual, and the human installation failure rate is greatly reduced, and through the threaded welding mode, each component is connected, reduces the pipeline combination point, and the pipeline leakage hidden danger is greatly reduced, in addition, through integrated modular design, the space use is reduced.

[0015] The utility model discloses a ball valve, pressure reducing valve, detection device, pressure temperature double display table, pressure table carry out integrated modular design, when installing, connect with main pipeline through joint, and installation is quick and convenient, and the construction period is shortened, and the prevention is dull effectual, and the human installation failure rate is greatly reduced, and through the threaded welding mode, each component is connected, reduces the pipeline combination point, and the pipeline leakage hidden danger is greatly reduced, in addition, through integrated modular design, the space use is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0016] Fig. 1 It is structural schematic diagram of the utility model.

[0017] Fig. 2 It is structural schematic diagram of the utility model.

[0018] In the drawing, 1 is pipe joint, 2 is union joint A, 3 is ball valve, 4 is detection device, 401 is base, 5 is union joint B, 6 is union joint C, 7 is pressure reducing valve, 8 is union joint C, 9 is union joint D, 10 is pressure temperature double display table, 11 is pressure table, 12 is joint nut A, 13 is joint nut B, 14 is joint nut C, 15 is sealing ring A, 16 is sealing ring B, 17 is sealing ring C. DETAILED DESCRIPTION

[0019] The technical scheme of the utility model will be described below in conjunction with embodiments, and obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model.

[0020] As Figs. 1-2As shown, a PCW system integrated water supply valve group device for semiconductor production includes a pipe joint 1, a union joint A 2, a ball valve 3, a detection device 4, a pressure reducing valve 7 and a union joint D 9, the pipe joint 1 is threadedly connected with the union joint A 2 through a joint nut A 12, the other end of the union joint A 2 is connected with the ball valve 3, the other end of the ball valve 3 is connected with the detection device 4, the other end of the detection device 4 is connected with a union joint B 5, the union joint B 5 is connected with a union joint C one 6 through a joint nut B 13, the other end of the union joint C one 6 is threadedly connected with the pressure reducing valve 7, the other end of the pressure reducing valve 7 is threadedly connected with a union joint C two 8, and the other end of the union joint C two 8 is threadedly connected with the union joint D 9 through a joint nut C 14.

[0021] The detection device 4 is a tee, a base 401 is welded on the top channel of the detection device 4, and a pressure and temperature double display meter 10 is threadedly connected with the base 401, and anaerobic glue is applied when the base 401 is threadedly connected with the pressure and temperature double display meter 10.

[0022] A pressure gauge 11 is threadedly connected with the top of the pressure reducing valve 7, and anaerobic glue is applied when the pressure reducing valve 7 is threadedly connected with the pressure gauge 11.

[0023] The ball valve 3 is a stainless steel three-piece ball valve.

[0024] The connection modes of the union joint A 2, the detection device 4 and the ball valve 3 are all welding after thread locking.

[0025] The connection mode of the detection device 4 and the union joint B 5 is socket welding.

[0026] Sealing rings A 15 are further installed between the pipe joint 1 and the union joint A 2, sealing rings B 16 are further installed between the union joint B 5 and the union joint C one 6, and sealing rings C 17 are further installed between the union joint C two 8 and the union joint D 9.

[0027] Anaerobic glue is applied when the union joint C one 6 and the union joint C two 8 are threadedly connected with the pressure reducing valve 7.

[0028] When the utility model is connected with a main pipe, the pipe joint 1, the union joint D 9 and the main pipe are quickly connected, installation is convenient, the construction period can be shortened, the integrated modular design is good in fool-proof effect, greatly reduces the human installation failure rate, and space use is reduced, each component is connected in a threaded welding mode, the pipeline combination point is reduced, and pipeline leakage hidden dangers are greatly reduced.

[0029] The above only describes preferred embodiments of the utility model, and is not used to limit the utility model, and any modification, equivalent replacement, improvement, etc. within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. An integrated water supply valve assembly for a PCW system used in semiconductor manufacturing, comprising a pipe fitting, a union A, a ball valve, a detection device, a pressure reducing valve, and a union D, characterized in that, The pipe fitting and union A are threadedly connected by union nut A. The other end of union A is connected to a ball valve. The other end of the ball valve is connected to a detection device. The other end of the detection device is connected to union B. Union B is connected to union C1 by union nut B. The other end of union C1 is threadedly connected to a pressure reducing valve. The other end of the pressure reducing valve is threadedly connected to union C2. The other end of union C2 is threadedly connected to union D by union nut C.

2. The PCW system integrated water supply valve assembly device for semiconductor production according to claim 1, characterized in that, The detection device has a three-way structure. A base is welded to the top channel of the detection device. A pressure and temperature dual display meter is connected to the base by threads. Anaerobic adhesive is applied when the base and the pressure and temperature dual display meter are threaded together.

3. The PCW system integrated water supply valve assembly device for semiconductor production according to claim 1, characterized in that, A pressure gauge is threadedly connected to the top of the pressure reducing valve, and anaerobic adhesive is applied when the pressure reducing valve and the pressure gauge are threadedly connected.

4. The PCW system integrated water supply valve assembly device for semiconductor production according to claim 1, characterized in that, The ball valve is a stainless steel three-piece ball valve.

5. The PCW system integrated water supply valve assembly device for semiconductor production according to claim 1, characterized in that, The connection method of the live joint A, the detection device and the ball valve is to fix them by thread locking and then welding.

6. The PCW system integrated water supply valve assembly device for semiconductor manufacturing according to claim 1, characterized in that, The detection device is connected to the live joint B by socket welding.

7. The PCW system integrated water supply valve assembly device for semiconductor production according to claim 1, characterized in that, A sealing ring A is also installed between the pipe fitting and the union A, a sealing ring B is also installed between the union B and the union C1, and a sealing ring C is also installed between the union C2 and the union D.

8. The PCW system integrated water supply valve assembly device for semiconductor production according to claim 1, characterized in that, Anaerobic adhesive is applied when the union C1 and union C2 are threaded into the pressure reducing valve.

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