Laser tool setting structure for slit coating instrument

Abstract

The laser tool setting structure for the slit coating instrument comprises a working table (3) used for bearing a semiconductor substrate, a laser displacement sensor (2) is arranged on the lower side of the working table (3), a tool setting block (1) is attached to the working table (3) and then extends out of the working table (3), and the laser displacement sensor (2) is arranged on the lower side of the working table (3). The part, extending out of the workbench face (3), of the tool setting block (1) is located above the laser displacement sensor (2), and the slit coating tool bit (4) is located above the laser displacement sensor (2) after the tool setting block (1) is moved out and is driven by a servo motor (5) to ascend and descend. According to the laser tool setting structure for the slit coating instrument, the tool setting operation of the slit coating tool bit (4) can be accurately realized, and the distance between the slit coating tool bit (4) and the working table (3) can be randomly adjusted.

Description

TECHNICAL FIELD

[0001] The utility model relates to a laser tool setting structure, especially to a tool setting structure based on laser displacement sensor for slit coating equipment, belongs to semiconductor equipment technical field. BACKGROUND

[0002] At present, the slit coating equipment needs to consider the accurate control of the slit coating tool head when designing, so that the slit coating tool head edge face and the workbench face exist a certain interval and keep horizontal, but the conventional slit coating equipment fixes the slit coating tool head after the tool setting operation is completed, and cannot adjust it. SUMMARY

[0003] The utility model aims at overcoming the above-mentioned difficulty, provides a kind of laser tool setting structure that can accurately slit coating instrument's slit coating tool head is carried out tool setting operation, and can realize the interval between slit coating tool head and workbench face is adjusted at will.

[0004] The utility model aims at overcoming the above-mentioned difficulty, provides a kind of laser tool setting structure that can accurately slit coating instrument's slit coating tool head is carried out tool setting operation, and can realize the interval between slit coating tool head and workbench face is adjusted at will.

[0005] A kind of laser tool setting structure for slit coating instrument, include the workbench face for bearing semiconductor substrate, workbench face side below is provided with laser displacement sensor, tool setting block is attached the workbench face and extends to workbench face outside, and the part of tool setting block extending to workbench face outside is located above laser displacement sensor, after moving out tool setting block, slit coating tool head is located above laser displacement sensor, and slit coating tool head is driven by servo motor and is lifted up and down.

[0006] Preferably, the laser displacement sensor is provided with two, and the two laser displacement sensors are respectively opposite to the two ends of the slit coating tool head.

[0007] Preferably, the tool setting block is provided with one or two, when being provided with one, the tool setting block is in strip structure, and the laser displacement sensor is opposite to the two ends of the bottom surface of the tool setting block, when the tool setting block is provided with two, the two tool setting blocks are respectively located at the two ends of the workbench face, and the two laser displacement sensors are respectively opposite to the two tool setting blocks.

[0008] Preferably, the servo motor realizes the lifting drive of the slit coating tool head by driving screw rod lifting structure.

[0009] Compared with the prior art, the utility model has the beneficial effects that:

[0010] The utility model is combined by laser displacement sensor and servo motor, and the tool setting operation of slit coating tool head is conveniently realized, and automatic tool setting operation can be realized in cooperation with processing equipment. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 Figure 1 is a schematic view of the zeroing step of the tool block and the laser displacement sensor in the laser tool setting structure for the slit coating instrument (front view).

[0012] Figure 2 Figure 2 is a side view of the laser tool setting structure. Figure 1

[0013] Figure 3 Figure 3 is a schematic view of the automatic tool setting step of the slit coating tool head in the laser tool setting structure for the slit coating instrument (front view).

[0014] Figure 4 Figure 4 is a side view of the laser tool setting structure. Figure 3 Figure 5 is a schematic view of the laser tool setting structure.

[0015] Figure 6 is a schematic view of the laser tool setting structure.

[0016] The tool block 1, the laser displacement sensor 2, the workbench surface 3, the slit coating tool head 4, and the servo motor 5. DETAILED DESCRIPTION

[0017] Referring to Figure 1, the laser tool setting structure for the slit coating instrument of the present application comprises two tool blocks 1, two laser displacement sensors 2, a workbench surface 3, a slit coating tool head 4, and two servo motors 5. Figures 1-4 Subsequently, after the distance is measured, the laser data is adjusted to zero.

[0018] Then, after the two tool blocks 1 are moved away, the slit coating tool head 4 is placed above the laser displacement sensor 2, and the servo motor 5 is controlled to slowly descend and approach the lower laser displacement sensor 2. When the slit coating tool head 4 reaches the range of the laser displacement sensor 2 and approaches the predetermined tool position, the two laser displacement sensors 2 display different non-zero values. The values represent the distance between the two ends of the slit coating tool head 4 and the workbench surface 3. The two servo motors 5 are adjusted to move the two ends of the slit coating tool head 4 up and down according to the values measured by the two laser displacement sensors 2. After repeating the measurement, calculation, and lifting cycle, the laser displacement sensor 2 displays zero, indicating that the tool setting is complete. The entire process can be manually controlled or automatically controlled by a microprocessor or industrial computer (i.e., the data of the laser displacement sensor 2 is imported into the processing device, and the lifting of the servo motor 5 is controlled by the processing device until the feedback of the two laser displacement sensors 2 is substantially 0, indicating that the tool setting is complete). At this time, the slit coating tool head 4 is completely coincident with the workbench surface 3. Then, the two servo motors 5 are synchronously lifted to maintain a certain distance between the slit coating tool head 4 and the workbench surface 3.​

Claims

1. A laser tool setting structure for a slit coating machine, comprising a worktable (3) for carrying a semiconductor substrate, characterized in that: a laser displacement sensor (2) is arranged below the side of the worktable (3), the tool setting block (1) extends to the outside of the worktable (3) after being attached to the table surface of the worktable (3), and the part of the tool setting block (1) extending to the outside of the worktable (3) is located above the laser displacement sensor (2), the slit coating tool head (4) is located above the laser displacement sensor (2) after the tool setting block (1) is moved out, and the slit coating tool head (4) is driven to move up and down by a servo motor (5). The laser displacement sensor (2) is provided with two, and the two laser displacement sensors (2) are respectively opposite to the two ends of the slit coating tool head (4).

2. The laser tool alignment structure for a slot die coater of claim 1, wherein: The tool setting block (1) is provided with one or two, when provided with one, the tool setting block (1) is in a strip structure, and the laser displacement sensor (2) is opposite to the two ends of the bottom surface of the tool setting block (1); when the tool setting block (1) is provided with two, the two tool setting blocks (1) are respectively located at the two ends of the worktable (3), and the two laser displacement sensors (2) are respectively opposite to the two tool setting blocks (1).

3. The laser tool alignment structure for a slot die coater of claim 2, wherein: The servo motor (5) realizes the lifting drive of the slit coating tool head (4) through a driving screw rod lifting structure.

4. The laser tool alignment structure for a slot die coater of claim 1, wherein: ​

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